• Title/Summary/Keyword: 3-axis Actuator

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Development of a 3-axis fine positioning stage : Part 1. Design and Fabrication (초정밀 3축 이송 스테이지의 개발 : 1. 설계 및 제작)

  • Kang, Joong-Ok;Seo, Mun-Hoon;Baek, Seok;Han, Chang-Soo;Hong, Sung-Wook
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.648-651
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    • 2003
  • This paper presents a 3-axis fine positioning stage. All the procedure concerning the design and fabrication of the stae are described. The stage considered here is composed of flexure hinges, piezoelectric actuators and their peripherals. A special flexure hinge is adopted to be able to actuate the single stage in three axes at the same time. A ball contact mechanism is introduced into the piezoelectric actuator to avoid the cross talk among the axes. The final design is obtained with the theoretical analysis on the stage. An actual fine stage is developed and the design specifications are verified through an experiment.

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The Study of Dynamic Safety Using M&S for Integrated Electro-mechanical Actuator Installed on Aircraft (M&S를 이용한 항공기용 통합형 전기식 구동장치의 동적 안전성 연구)

  • Lee, Sock-Kyu;Lee, Byoung-Ho;Lee, Jeung;Kang, Dong-Seok;Choi, Kwan-Ho
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.25 no.2
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    • pp.108-115
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    • 2015
  • Electro-mechanical actuator installed on aircraft consists of a decelerator which magnifies the torque in order to rotate an axis connected with aircraft control surface, a control section which controls the motor assembly through receiving orders from cockpit and a motor assembly which rotates the decelerator. Electro-mechanical actuator controls aircraft altitude, position, landing, takeoff, etc. It is an important part of a aircraft. Aircraft maneuvering causes vibrations to electro-mechanical actuator. Vibrations may result in structural fatigue. For that reason, it is necessary to analyze the system structural safety. In order to analyze the system structural safety. It is needed reasonable finite element model and structural response stress closed to real value. In this paper, analytic model is derived by using the simplified finite element model, and damping ratio which is closely related to response stress is derived by using modal test. So, we developed analytic model in less than 10 % error rate, compared with modal test. Vibration response stress close to real value was estimated from analytic model modified with modal experimental damping ratio. Estimation method for damping ratio with empirical formula was suggested partly. Finally, It was proved that electro-mechanical actuator had reasonable structure margin of safety at environmental random $3{\sigma}$ stress during life cycle.

Development of Multi-axis Nano Positioning Stage for Optical Alignment (광소자 정렬용 극초정밀 다축 위치 제어장치 개발)

  • 정상화;이경형;차경래;김현욱;최석봉;김광호;박준호
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.304-307
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    • 2004
  • As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

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Development of Multi-Axis Ultra Precision Stage for Optical Alignment (광소자 정렬용 초정밀 다축 스테이지 개발)

  • 정상화;이경형;김광호;차경래;김현욱;최석봉;박준호
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2004.10a
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    • pp.213-218
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    • 2004
  • As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

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Development Plan for the First GMT ASM Reference Body

  • Yang, Ho-Soon;Oh, Chang-Jin;Biasi, Roberto;Gallieni, Daniele
    • The Bulletin of The Korean Astronomical Society
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    • v.46 no.2
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    • pp.76.3-77
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    • 2021
  • GMT secondary mirror system consists of 7 segmented adaptive mirrors. Each segment consists of a thin shell mirror, actuators and a reference body. The thin shell has a few millimeters of thickness so that it can be easily bent by push and pull force of actuators to compensate the wavefront disturbance of light due to air turbulence. The one end of actuator is supported by the reference body and the other end is adapted to this thin shell. One of critical role of the reference body is to provide the reference surface for the thin shell actuators. Therefore, the reference body is one of key components to succeed in development of GMT ASM. Recently, Korea Research Institute of Standards and Science (KRISS) and University of Arizona (UA) has signed a contract that they will cooperate to develop the first set of off-axis reference body for GMT ASM. This project started August 2021 and will be finished in Dec. 2022. The reference body has total 675 holes to accommodate actuators and 144 pockets for lightweighting. The rear surface has a curved rib shape with radius of curvature of 4387 mm with offset of 128.32mm. Since this reference body is placed just above the thin shell so that the front surface shape needs to be close to that of thin shell. The front surface has a concave off-axis asphere, of which radius of curvature is 4165.99 mm and off-axis distance is about 1088 mm. The material is Zerodur CTE class 1 (CTE=0.05 ppm/oC) from SCHOTT. All the actuator holes and pockets are machined normal to the front surface. It is a very complex challenging optical elements that involves sophisticated machining process as well as accurate metrology. After finishing the fabrication of reference body in KRISS, it will be shipped to UA for final touches and finally sent to Adoptica in Italy, in early 2023. This paper presets the development plan for the GMT ASM Reference Body and relevant fabrication and metrology plans.

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A Flexure Guided Planar Scanner for Scanning Probe Microscope ; Part 1 : Design and Analysis of Static and Dynamic Properties (주사 현미경용 평면 스캐너 Part 1 :설계 및 정 · 동특성 해석)

  • Lee, Dong-Yeon;Lee, Moo-Yeon
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.15 no.6 s.99
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    • pp.667-673
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    • 2005
  • This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program.

The study of dynamic safety using M&S for Integrated Electro-Mechanical Actuator installed on aircraft (M&S를 이용한 항공기용 통합형 전기식 구동장치의 동적 안전성 연구)

  • Lee, Sock-Kyu;Lee, Byoung-Ho;Lee, Jeung;Kang, Dong-Seok;Choi, Kwan-ho
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2014.10a
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    • pp.36-41
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    • 2014
  • Electro-Mechanical Actuator installed on aircraft consists of a decelerator which magnifies the torque to rotate an axis connected with aircraft control surface, a control section which controls the motor assembly through receiving orders from cockpit and a motor assembly which rotates the decelerator. EMA controls aircraft attitued, position, landing, takeoff, etc. It is important part of a aircraft. Aircraft maneuvering make vibration of EMA. Vibration may cause the vibration fatigue. For that reason, it is necessary to analyze the system safety. In this paper, first EMA is modeled in finite element method and analyzed the response from input vibration. second EMA is tested and analyzed from modal experimental data. third EMA Fe model is updated and re analyzed. and EMA is verified safety with $3{\sigma}$ stress and S/N curves.

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초정밀 스테이지 설계 및 제작

  • 강중옥;한창수;홍성욱
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2003.12a
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    • pp.177-181
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    • 2003
  • This paper presents a 3-axis fine positioning stage. All the procedure concerning the design and fabrication of the stage are described. The stage considered here is composed of flexure hinges, piezoelectric actuators and their peripherals. A special flexure hinge is adopted to be able to actuate the single stage in three axes at the same time. A ball contact mechanism is introduced into the piezoelectric actuator to avoid the cross talk among the axes. The final design is obtained with the theoretical analysis on the stage. An actual fine stage is developed and the design specifications are verified through an experiment.

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SWM Utilized Cable Drive System (SWM을 이용한 케이블 드라이브 시스템)

  • Lee, Bum-Joo;Kim, Kab Il
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.63 no.2
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    • pp.272-276
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    • 2014
  • In this paper, cable drive mechanism is proposed to implement high reduction gear ratio. Cable drive mechanism has great advantages such as light weight, high degree of freedom about design aspect and zero backlashes. However, it is restrictively utilized for robotic applications because it is difficult to implement high reduction gear ratio more than 10 to 1. Proposed mechanism enables multi-level reductions by adopting seamless winding method (SWM) which links the previous output axis and the next input axis. Consequently, this reduces the mechanical complexity significantly and enables high reduction with only one single wire cable. 3D CAD design was provided and prototype was manufactured.

Distributed Control of a Two Axis Convey Table Using Real-time Micro-Kernel (마이크로 커널을 이용한 2축 반송 테이블의 분산제어)

  • 이건영
    • The Transactions of the Korean Institute of Electrical Engineers D
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    • v.53 no.3
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    • pp.182-187
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    • 2004
  • In this paper, we propose a PC based distributed controller for a two axis convey table using real-time micro-kernel. PC, Windows program, gives an easy way to implement wealthy GUI and micro-kernel, ${\mu}$C/OS-II, provides a real-time capability to control devices. We built a real-time distributed control system using ${\mu}$C/OS-II kernel which needs to process the tasks for two motors within the desired time to synchronize the motion. We used both semaphore and message mail box for synchronization. Unlike the previous study where we used step motors for the actuator of two axes convey table, we rebuilt the convey table with DC motors and the dedicated position servo which had built in out lab, and then we implemented a realtime distributed control system by putting the micro-kernel into between PC and position servo. Moreover we developed the PC based graphic user interfaces for generating planar drawing image control. Experimental results also presented to show the Proposed control system is useful.