• Journal of the Korean Institute of Telematics and Electronics B
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• v.29B no.2
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• pp.27-39
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• 1992

3 Dimensional measurement system using camera and laser slit-ray is studied. Precise calibration technique in this system is suggested. Calibration is accomplished with calibration die, calibration block and robot. For obtaining calibration parameters, the equations are solved using least square error method from a great many calibration points to reduce measuring error. Continuous measurement is possible for the object which is larger than one frame of camera. The efficiency and usability are proved by applying to the tire profile measuring system which measures tire profile using robot and this system.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.5
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• pp.1202-1207
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• 1993

An optical method of slit beam scanning topography is presented for the 3-dimensional profile measurement of free-formed surfaces. A slit beam of laser is projected in a scanning mode and its illuminated trajectory on the object is captured by using a CCD camera. The 3-dimensional coordinates of the trajectory is then computed by using the given geometry between the slit beam and the camera, so that the whole surface profile of the object can be obtained in a successive manner. Detailed optical principles are described with special emphasis to lateral are discussed to demonstrate the measuring performances of the slit beam scanning topography proposed in this study.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.2
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• pp.407-415
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• 1993

This report presents an automatic measurement method of 3-dimensional profiles of free-formed surfaces, by using a touch a touch-trigger contact probe along with a conventional coordinate measuring machine. The method proceeds in three steps; The surface profile under consideration is traced by the probe in an automatic manner, and then its measured data is compensated by considering the actual probe radius. Finally the compensated data is rearranged in the form suitable for the further processings of CAD/CAM applications. Some experimental results are discussed to verify the validity of the method suggested in this study.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.8
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• pp.1530-1535
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• 1992

An optical method of phase shifting interferometry is presented for the 3-dimensional profile measurement of mirror surfaces with nanometer resolution. A series of optical interferometric fringes are generated by comparing the surface to be measured with a reference flat. The fringes are captured by a CCD camera and then analyzed to obtain actual surface profile. Detailed principles are described along with necessary image processing algorithms. finally, several measurement examples are discussed which were performed on lapped surfaces, hard discs, and semiconductor wafers.

• Current Optics and Photonics
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• v.2 no.6
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• pp.568-575
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• 2018

Various techniques to measure the three-dimensional (3D) surface profile of a 3D micro- or nanostructure have been proposed. However, it is difficult to apply such techniques directly to industrial uses because most of them are relatively slow, unreliable, and expensive. The HiLo optical imaging technique, which was recently introduced in the field of fluorescence imaging, is a promising wide-field imaging technique capable of high-speed imaging with a simple optical configuration. It has not been used in measuring a 3D surface profile although confocal microscopy originally developed for fluorescence imaging has been adapted to the field of 3D optical measurement for a long time. In this paper, to the best of our knowledge, the HiLo optical imaging technique for measuring a 3D surface profile is proposed for the first time. Its optical configuration and algorithm for a precisely detecting surface position are designed, optimized, and implemented. Optical performance for several 3D microscale structures is evaluated, and it is confirmed that the capability of measuring a 3D surface profile with HiLo optical imaging technique is comparable to that with confocal microscopy.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.3
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• pp.670-679
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• 1995

This paper presents the 3-D profile measurement system of live human faces, which was developed specially for 'KUMDORI sculptor robot' of the '93 Taejon Exposition. '93 Taejon EXPO. The basic principle for measurement adopts the slit beam projection which is a method of measuring 3-D surface profiles using geometric optics between the slit beam and the CCD camera. Since the slit beam projection consumes long measuring time, it is unfit to measure the 3-D profiles of living objects as human. Therefore, the projection type slit beam method which consumes short measuring time is newly suggested. And an algorithm to reconstruct the 3-D profile from the deformed images using finite approximated calibration is suggested and practically implemented. The projection type slit beam method was applied to spectators in a period of '93 Taejon EXPO. The measurement results show that the technique is suitable for 3-D face profile measurement on a living body.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.781-782
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• 2010

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.7 s.94
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• pp.1731-1739
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• 1993

An application of Scanning Tunneling Microscopy(STM) is investigated for the measurement of 3-dimensional profiles of the macro-machined patterns of which critical dimensions lie in the range of submicrometers. Special emphasis of this investigation is given to extending the measuring ranges of STM upto the order of several micrometers while maintaining superb nanometer measuring resolution. This is accomplished by correcting hysteresis effects of piezoelectric actuators by using non-linear compensation models. Detailed aspects of design and control of a prototype measurement system are described with some actual measuring examples in which fine It patterns can successfully be traced with a resolution of 1 nanometer over a surface range of $4{\times}2$ micrometers.

• 한국가시화정보학회:학술대회논문집
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• 2001.12a
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• pp.100-107
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• 2001

A simple new technique of particle depth position measurement, which can be applied for three-dimensional velocity measurement of fluid flows, is proposed. Two color illumination system that intensity is encoded as a function of z-coordinate is introduced. A calibration procedure is described and a profile of small sphere is detected by using the present method as preliminary test. Then, this method is applied to three-dimensional velocity field measurement of simple flow fields seeded with tracer particles. The motion of the particles is recorded by color 3CCD camera. The particle position in the image plane is read directly from the recorded image and the depth of each particle is measured by calculation of the intensity ratio of encoded two color illumination. Therefore three-dimensional velocity components are reconstructed. Although the result includes to some extent error, the feasibility of the present technique for three-dimensional velocity measurement was confirmed.

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.3
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• pp.225-235
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• 2010

There are many types of the geometric transitions such as dent, bulge, protrusion, expansion, etc, on the inner and outer surfaces of heat exchanger tubes, steam generator tubes, and condenser tubes of nuclear power plants. Such geometric transition causes a local residual stress in heat exchanger tubes and acts as a structural factor accelerating the evolution of defects, in particular stress corrosion cracks. In the conventional eddy current test methods, the bobbin coil profilometry can provide 2-dimensional geometric information on the variation of the average inner diameter along the tube length, but the 3-dimensional distribution and the quantitative size of a local geometric transition existing in the tube cannot be measured. In this paper, a new eddy current probe, developed for the 3-dimensional profile measurement, is introduced and its superior performance is compared with that from the conventional bobbin coil profilometry for the various types of geometric transition. Also, the accuracy of the probe for the quantitative profile measurement is verified by comparing the results with that from the laser profilometry. It is expected that the new eddy current probe and techniques can be effectively used for an optimization of the tube expansion process, and the management of tubes with geometric transitions in service.