Analysis of Material Deformation Behavior in Nanoindentation Process by using 3D Finite Element Analysis and its Experimental Verification (3차원 유한요소해석을 이용한 나노인덴테이션 공정에서의 소재거동해석 및 실험적 검증)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2003.06a
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- pp.1174-1177
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- 2003