Analysis of Material Deformation Behavior in Nanoindentation Process by using 3D Finite Element Analysis and its Experimental Verification

3차원 유한요소해석을 이용한 나노인덴테이션 공정에서의 소재거동해석 및 실험적 검증

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic recover and pile-up was proposed. The indenter was modeled a 3D rigid surface. Minimum mesh sizes of specimens are 1-10nm. Comparison between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.