• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.77-77
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• 1998

Present silicon dioxide (SiOz) 떠m as intennetal dielectridIMD) layers will result in high parasitic c capacitance and crosstalk interference in 비gh density devices. Low dielectric materials such as f f1uorina뼈 silicon oxide(SiOF) and f1uoropolymer IMD layers have been tried to s이ve this problem. I In the SiOF ftlm, as fluorine concentration increases the dielectric constant of t뼈 film decreases but i it becomes unstable and wa않r absorptivity increases. The dielectric constant above 3.0 is obtain어 i in these ftlms. Fluoropolymers such as polyte$\sigma$따luoroethylene(PTFE) are known as low dielectric c constant (>2.0) materials. However, their $\alpha$)Or thermal stability and low adhesive fa$\pi$e have h hindered 야1리ru뚱 as IMD ma따"ials. 1 The concept of a plasma processing a찌Jaratus with 비gh density plasma at low pressure has r received much attention for deposition because films made in these plasma reactors have many a advantages such as go여 film quality and gap filling profile. High ion flux with low ion energy in m the high density plasma make the low contamination and go어 $\sigma$'Oss피lked ftlm. Especially the h helicon plasma reactor have attractive features for ftlm deposition 야~au똥 of i앙 high density plasma p production compared with other conventional type plasma soun:es. I In this pa야Jr, we present the results on the low dielectric constant fluorocarbonated-SiOF film d밑JOsited on p-Si(loo) 5 inch silicon substrates with 00% of 0dFTES gas mixture and 20% of Ar g gas in a helicon plasma reactor. High density 띠asma is generated in the conventional helicon p plasma soun:e with Nagoya type ill antenna, 5-15 MHz and 1 kW RF power, 700 Gauss of m magnetic field, and 1.5 mTorr of pressure. The electron density and temperature of the 0dFTES d discharge are measUI벼 by Langmuir probe. The relative density of radicals are measured by optic허 e emission spe따'Oscopy(OES). Chemical bonding structure 3I피 atomic concentration 따'C characterized u using fourier transform infrared(FTIR) s야3띠"Oscopy and X -ray photonelectron spl:’따'Oscopy (XPS). D Dielectric constant is measured using a metal insulator semiconductor (MIS;AVO.4 $\mu$ m thick f fIlmlp-SD s$\sigma$ucture. A chemical stoichiome$\sigma$y of 야Ie fluorocarbina$textsc{k}$영-SiOF film 따~si야영 at room temperature, which t the flow rate of Oz and FTES gas is Isccm and 6sccm, res야~tvely, is form려 야Ie SiouFo.36Co.14. A d dielec$\sigma$ic constant of this fIlm is 2.8, but the s$\alpha$'!Cimen at annealed 5OOt: is obtain려 3.24, and the s stepcoverage in the 0.4 $\mu$ m and 0.5 $\mu$ m pattern 킹'C above 92% and 91% without void, res야~tively. res야~tively.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.20 no.7
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• pp.6-13
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• 2006

Tin doped indium oxide(ITO) and Al doped zinc oxide(ZnO:Al) films, which are widely used as a transparent conductor in optoelectronic devices, were prepared by using the capacitively coupled DC magnetron sputtering method. ITO and ZnO:Al films with the optimum growth conditions showed each resistivity of $1.67{\times}10^{-3}[{\Omega}-cm],\;2.2{\times}10^{-3}[{\Omega}-cm]$ and transmittance of 89.61[%], 90.88[%] in the wavelength range of the visible spectrum. The two types of 5 inch-PDP cells with ZnO:Al and ITO transparent electrodes were made under the same manufacturing conditions. The PDP cell with ZnO:Al film was optimally operated in the mixing gas rate of Ne(base)-Xe(8[%]), and at gas pressure of 400[Torr]. It also shows the average measured brightness of $836[cd/m^2]$ at voltage range of $200{\sim}300$[V]. Luminous efficiency, one of the key parameter for high brightness and low power consumption, ranges from 1.2 to 1.6[lm/W] with increasing frequency of ac power supplier from 10 to 50[Khz]. The brightness and luminous efficiency are lower than those with ITO electrode by about 10[%]. However, these values are considered to be enough for the normal operation of PDP TV.

• Journal of Life Science
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• v.15 no.5 s.72
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• pp.790-795
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• 2005

The effects of liquid culture of Coriolus (C) versicolor on weight gain, food intakes, food efficiency ratios, serum and hepatic lipid concentrations were investigated in male rats fed the high cholesterol diets. Eight weeks old Sprague-Dawley rats were given three different types of diet for six weeks, respectively: a control diet ($ 20\% fat +0.5 \% $ cholesterol), two kinds of C versicolor diet (control diet + $ 30\% or 40\%$C. versicozor in water) according to the levels of C. versicolor supplementation. The body weight gains of the rats fed $ 30\% or 40\% $ C. versicolor diets were lower than those in the rats fed the control diet. The food intake, food efficiency ratios, and liver, kidney, epididymal fat pad weights of the rats fed $ 30\% or 40\%$ C. versicoEer diets were similar to those of the rats fed the control diet. The concentrations of hepatic cholesterol and triglyceride in the rats fed $ 30\% or 40\% $ C. versicolor diets were significantly lower than those in the rats fed the control diet. The concentrations in serum total cholesterol, LDL-cholesterol, and atherogenic index ratios were significantly lower in the rats fed $ 30\% or 40\%$ C. versicolor diets compared to those fed the control diet. The HDL-cholesterol/total-cholesterol ratios was significantly higher in the rats fed $ 30\% or 40\% $ C. versicolor diets compared to those fed the control diet. The fecal excretion of total lipid and triglyceride in the rats fed $ 40\% $ C. versicolor diet was significantly higher than that of the rats fed the control diet. There were no significant difference found in the serum trigly-ceride, phospholipid and HDL-cholesterol concentrations among the experimental groups. These results showed that the C. versicolor feeding decreased the hepatic cholesterol, triglyceride, and the serum total cholesterol, LDL-cholesterol and atherogenic index, and increased the serum HDL-cholesterol/ total-cholesterol ratio of the rats.

• Journal of Radiation Industry
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• v.9 no.2
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• pp.85-90
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• 2015

Purpose: Time of operation has been reduced and accuracy of operation has been improved since C-arm, which offer real-time image of patient, was introduced in operation room. However, because of the contamination of patient, C-arm could not be used more appropriately. Therefore, this study is to know factors of controlling exposure dose, image quality and the exposed dose of health professional in operation room. Materials and methods: Height of Wilson frame (bed for operation) was fixed at 130 cm. Then, Model 76-2 Phantom, which was set by assembling manual of Fluke Company, was set on the bed. Head/Spine Fluoroscopy AEC mode was set for exposure condition. According to detector size of C-arm, the absorbed dose per min was measured in the 7 steps OFD (cm) from 10 cm to 40 cm (10, 15, 20, 25, 30, 35, 40 cm). In each step of OFD, the absorbed dose per min of same diameter of collimation was measured. Moreover, using Nero MAX Model 8000, exposure dose per min was measured according to 3 step of distance from detector (20 cm, 60 cm, 100 cm). Finally, resolution was measured by CDRH Disc Phantom and magnification of each OFD was measured by aluminum stick bar. Result: According to detector size of C-arm, difference of absorbed dose shows that the dose of 20 cm OFD is 1.750 times higher than the dose of 40 cm OFD. It means that the C-arm, which has smaller size of detector, shows the bigger difference of absorbed dose per min (p<0.05). In the difference of absorbed dose in the same step of OFD (from 20 cm to 40 cm), the absorbed dose of 9 inch detect or C-arm was 1.370 times higher than 12 inch' s (p<0.05). When OFD was set to 20 cm OFD, the absorbed dose of non-collimation case was approximately 0.816 times lower than the absorbed dose of collimation cases (p<0.05). When the distance was 20 cm from detector, exposed does includes first-ray and scatter-ray. When the distance was 60 cm and 100 cm from detector, exposed does includes just scatter-ray. So, there was the 2.200 times difference of absorbed does. Finally, when OFD was increased, spatial resolution was 4 to 5 step was increased. However, low contrast resolution was not relative. Moreover, there was 1.363 times difference of magnification (p<0.05). Conclusion: When C-Arm is used, avoiding contamination of patient is more important factor than reducing exposed dose of health professional in operation room. Just controlling exposure time is just way to reduce the exposed does of workers. However, in the case, non-probability influence could be occurred. Therefore, this study proved that the exposed dose will be reduced if the factors such as using small detector size of C-arm, setting OFD from 20 cm to 25 cm and non-collimating. Moreover, dose management of C-arm in the non-interesting area will be considered additionally.

• Proceedings of the Korean Society of Dyers and Finishers Conference
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• 2012.03a
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• pp.108-108
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• 2012

이전의 연구에서 기존의 ATY 장치에 ITY 노즐을 접목하여 개조한 사가공기로 제조한 탄성복합사를 자동차 시트용 트리코트 원단으로 편직하여 일광견뢰도가 우수한 염료를 선정하고 $125^{\circ}C$에서 염색하여야 견뢰도와 spandex의 물성을 저해하지 않음을 알 수 있었다. 폴리에스테르 탄성복합사의 염색성 평가에 이어 본 연구에서는 나일론 필라멘트 (70/24, Full-dull, 2ply사와 40D spandex 1ply사 복합)와 레이온사(75D, 1ply)를 투입하여 직물 원단(중량 216g/yd, 밀도 경사 78, 위사 52본/inch)을 제직한 후 2욕에서의 염색공정을 거칠 경우, 탄성복합사의 견뢰도와 물성에 미치는 영향을 조사하였다. 나일론, 레이온, 폴리우레탄의 3종 원단을 염색성 평가를 위하여 반응성염료로 먼저 레이온 부분을 염색한 후 산성염료로 나일론 부분을 염색하였으며, 이 때 spandex가 미치는 영향을 비교하기 위하여 spandex가 함유되지 않은 나일론, 레이온 복합 제직원단도 함께 염색한 후 견뢰도를 평가하였다. 또한, 레이온 부분은 CPB염색법과 제트염색기로 나누어 염색하여 염색기에 따른 인장강도와 인열강도를 평가하였다. 레이온 염색에는 셀룰로오스용 2관능기 반응성염료 3원색을 이용하여 khaki color로 combination염색하였으며, 나일론 부분에는 입자크기가 커서 견뢰도가 우수한 산성염료를 선정하여 combination염색한 후 냉수세하였다. 견뢰도를 비교한 결과, spandex가 포함된 탄성복합사 원단과 나일론과 레이온 만으로 제직된 원단 모두 세탁, 마찰, 물, 땀, 일광 견뢰도 모두가 4~5급으로 우수하여 spandex에 이염된 염료가 견뢰도에 미치는 영향은 없음을 확인하였다. 또한, 레이온 부분의 반응성염료 염색 시 CPB와 제트염색법의 두 가지 종류에 대한 인장강도와 인열강도 평가결과는 CPB 염색물이 제트염색물보다 약간 높게 나타났지만 3% 이내의 차이로 거의 차이가 없음을 나타내었다. 일반적으로 제트염색 시 원단은 로프상으로 이동하고, CPB염법은 확포상태 그대로 염색되기 때문에 제트염색 시 강도가 낮아지는 것으로 알려져 있으나, 본 연구에서는 탄성복합사를 경사, 위사 모두 사용함으로써 spandex가 신장하는 특성 때문에 강도의 저하가 없는 것으로 사료된다.

• Journal of Korean Society of Environmental Engineers
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• v.39 no.5
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• pp.282-287
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• 2017

The purpose of this study was predicted the effects of mixing and diffusion due to the operation of the apparatus before the development of the mixed diffusion device for the decontamination absorbent to minimize the influence of contaminant inflow due to radiation accident. The tracer used for the flow characteristics was $^{68}Ga$, $^{99m}Tc$, which is a radioactive isotope, and 2 inch NaI radiation detector was used to detect it. The impeller of the decontamination mixed diffusion system applied to this study was made into three types and the mixing diffusion effect was compared. As a result of analyzing the flow characteristics of the radio-isotope with decontamination mixed diffusion device, mixing, diffusion and flow pattern were obtained. The radial mixing type impeller was able to diffuse to the water surface by the upflow flow, and the fin structure was adjusted for finding optimal conditions. The model 3 type consists of a fin guiding part and an auxiliary fin so that the diffusion speed is higher than that of other types of impellers. It also showed a short time to reach complete mixing.

• Journal of Astronomy and Space Sciences
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• v.21 no.4
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• pp.481-492
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• 2004

We report the successful fabrication and I-V curve superconductivity test results of the Nb/Al-based superconducting tunnel junctions. STJs with side-lengths of 20, 40, 60 and $80{\mu}m$ were fabricated by deposition of polycrystalline Nb/Al/AlOx/Al/Nb 5-layer thin films incorporated on a 3-inch Si wafer. STJ was designed by $Tanner^{TM}$ L-Edit 8.3 program, and fabricated in SQUID fabrication facility, KRISS. S-layer STJ thin-films were fabricated using UV photolithography, DC magnetron sputtering, Reactive ion etching, and CVD(Chemical Vapor Deposition) techniques. Superconducting state test for STJ was succeeded in 4K with liquid helium cooling system. Their performance indicators such ie energy gap, normal resistance, normal resistivity, dynamic resistance, dynamic resistivity, and quality factor were measured from I-V curve. Fabricated Nb/Al STJ shows $11\%$ higher FWHM energy resolution than genuine Nb STJ.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.162-162
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• 1999

초고주파 집적회로의 핵심소자로 각광을 받고 있는 GaAs MESFET(MEtal-emiconductor)은 게이트 형성 공정이 가장 중요하며, WNx 내화금속을 이용한 planar 게이트 구조의 경우 임계전압(Vth:threshold voltage)의 균일도가 우수할 뿐만 아니라 특히 Side-wall을 이용한 self-align 게이트는 소오스 저항을 줄일 수 있어 고성능의 소자 제작을 가능하게 한다.(1) 본 연구의 핵심이 되는 Side-wall을 형성하기 위하여 PECVD법에 의한 SiOx 박막을 증착하고, 건식식각법을 이용하여 SiOx side-wall을 형성하였다. 이 공정을 이용하여 소오스 저항이 낮고 임계전압의 균일도가 우수한 고성능의 self-aligned gate MESFET을 제작하였다. 3inch GaAs 기판상에 이온주입법에 의한 채널 형성, d.c. 스퍼터링법에 의한 WNx 증착, PECVD법에 의한 SiOx 증착, MERIE(Magnetic Enhanced Reactive Ion Etcing)에 의한 Side-wall 형성, LDD(Lightly Doped Drain)와 N+ 이온주입, 그리고 RTA(Rapid Thermal Annealing)를 사용하여 활성화 공정을 수행하였다. 채널은 40keV, 4312/cm2로, LDD는 50keV, 8e12/cm2로 이온주입하였고, 4000A의 SiOx를 증착한 후 2500A의 Side-wall을 형성하였다. 옴익 접촉은 AuGe/Ni/Au 합금을 이용하였고, 소자의 최종 Passivation은 SiNx 박막을 이용하였다. 제작된 소자의 전기적 특성은 hp4145B parameter analyzer를 이용한 전압-전류 측정을 통하여 평가하였다. Side-wall 형성은 0.3$\mu\textrm{m}$ 이상의 패턴크기에서 수직으로 잘 형성되었고, 본 연궁에서는 게이트 길이가 0.5$\mu\textrm{m}$인 MESFET을 제작하였다. d.c. 특성 측정 결과 Vds=2.0V에서 임계전압은 -0.78V, 트랜스컨덕턴스는 354mS/mm, 그리고 포화전류는 171mA/mm로 평가되었다. 특히 본 연구에서 개발된 트랜지스터의 게이트 전압 변화에 따른 균일한 트랜스 컨덕턴스의 특성은 RF 소자로 사용할 때 마이크로 웨이브의 왜곡특성을 없애주기 때문에 균일한 신호의 전달을 가능하게 한다. 0.5$\mu\textrm{m}$$\times$100$\mu\textrm{m}$ 게이트 MESFET을 이용한 S-parameter 측정과 Curve fitting 으로부터 차단주파수 fT는 40GHz 이상으로 평가되었고, 특히 균일한 트랜스컨덕턴스의 경향과 함께 차단주파수 역시 게이트 바이어스, 즉 소오스-드레스인 전류의 변화에 따라 균일한 값을 보였다. 본 연구에서 개발된 Side-wall 공정은 게이트 길이가 0.3$\mu\textrm{m}$까지 작은 경우에도 사용가능하며, WNx self-align gate MEESFET은 낮은 소오스저항, 균일한 임계전압 특성, 그리고 높고 균일한 트랜스 컨덕턴스 특성으로 HHP(Hend-Held Phone) 및 PCS(Personal communication System)와 같은 이동 통신용 단말기의 MMICs(Monolithic Microwave Integrates Circuits)의 제작에 활용될 것으로 기대된다.

• Restorative Dentistry and Endodontics
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• v.25 no.2
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• pp.243-253
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• 2000

The purpose of this in vitro study was to evaluate dentin bonding by two different dentin bonding systems(DBS) using acetone based primer or adhesive [All Bond 2(AB2), One Step(OS)] when they were applied by wet or dry bonding technique. Morphology of resin-dentin interface and hybrid layer thickness(HLT) were investigated using Confocal Laser Scanning Microscope(CLSM) and compared to shear bond strength(SBS). 72 extracted sound human molars were randomly divided into 4 groups of 18 teeth each - Group 1.(AW); AB2 by wet bonding. Group 2(AD); AB2 by dry bonding. Group 3.(OW); OS by wet bonding, Group 4.(OD); OS by dry bonding. In 6 teeth of each group, notch-shaped class V cavities(depth 2mm) were prepared on buccal and lingual surface at the cementoenamel juction(12 cavities per group). To obtain color contrast in CLSM observation, bonding resins of each DBS were mixed with rhodamine B and primer of AB2 was mixed with sodium fluorescein. Prepared teeth of each group were treated with AB2, OS, respectively according to the manufacturer's instructions except for dentin surface moisture treatment after acid etching. In group 1 and 3, after acid etching, excess water was removed with wet tissue(Kimwipes), leaving consistently shiny, visibly hydrated dentin surface. In group 2 and 4, dentin surface was dried for 10 seconds at 1 inch distance. The treated teeth were then packed with composite resin(${\AE}$litefil) and light-cured. 12 microscopic samples($60{\sim}80{\mu}m$ thickness) of each group were obtained after longitudinal section and grinding(Exakt cutting and grinding system). Morphological investigation of resin-dentin interface and HLT measurement using CLSM were done. For measurement of SBS, remaining 12 teeth of each group were flattened occlusally to remove all enamel and grinded to 500 grit SiC(Pedemet Specimen Preparation Equipment). After applying DBS on the exposed dentin surface, composite resin was applied in the shape of cylinder, which has 5mm diameter, 1.5mm thickness, and light cured. SBS was measured using Instron with a crosshead speed of 0.5mm/min. It was concluded as follows, 1. HLT of AW(mean: $2.59{\mu}m$) was thicker than any other group, and followed by AD, OW, OD in descending order(mean; 2.37, 2.28, $1.92{\mu}m$). Only OD had statistically significant differences(p<0.05) to AW and AD. 2. There were intimate contact of resin and dentin at the interface in wet bonding groups, but gaps or irregular interfaces were observed in dry bonding groups. 3. The length, diameter, density of resin tags were various even in the same group without significant differences between groups and lots of adhesive lateral branches were observed. 4. There were no statistically significant difference of SBS between AB2 and OS, but SBS of wet bonding groups were significantly higher(p<0.05) than dry bonding groups. 5. There were no consistent relationships between HLT and SBS.

• Journal of the Society of Disaster Information
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• v.18 no.3
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• pp.550-559
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• 2022

Purpose: Pipes are widely used as applied devices in many industrial fields such as machinery, electronics, electricity, and plants, and are also widely used in safety-related fields such as firefighting and chemistry. With the diversification of products, the importance of technology in the piping field is also increasing. In particular, when changing the existing copper pipe to stainless steel, it is necessary to evaluate safety and flow characteristics through structural analysis or flow analysis. Method: This study investigated the safety by flow analysis of the 6.35 inch socket model, which are integrated insert type connectors developed by a company, using CFD analysis technique. For CDF analysis, RAN model and LES model are used. Result: As results of the analysis, amplitude of the pressure fluctuation acting on the wall of the piping system is formed at a level of 3,780 Pa or less, which is a very small level of pressure compared with the operating pressure or design stress of the refrigerant piping. Conclusion: These results mean that the effect of vibration caused by turbulence on the structural safety of the pipe is negligible.