• Title/Summary/Keyword: 2D position error

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The Analysis of Motion Error in Scanning Type XY Stage (스캐닝 방식 XY 스테이지의 운동오차 분석)

  • 황주호;박천홍;이찬홍;김동익;김승우
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.1380-1383
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    • 2004
  • The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

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The evaluation of aerostatic guide-ways for planar XY stage (평면 XY 스테이지용 공기베어링 안내면 오차 평가)

  • Hwang J.H.;Park C.H.;Kim S.W.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.141-142
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    • 2006
  • This paper describes estimation method for 2D position error of planar XY stage from measured profiles of guide-ways. The XY stage usually moves along its guide ways. The motion error of each stage has effect on 2D position errors of XY stages and affected mainly by profiles of guide-ways. To estimate 2D position error and flatness of stages, the profiles of guide-ways were measured and used in motion error estimation.

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A Study on the Position Compensation of a Mobile Robot Using 2D Position Sensitive Detector (2차원 PSD 를 이용한 이동로보트의 위치 보정에 관한 연구)

  • Ro, Young-Shick;Lee, Ki-Hyun
    • Proceedings of the KIEE Conference
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    • 1995.07b
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    • pp.833-836
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    • 1995
  • The Position Sensitive Detector(PSD) is an useful which can be used to measurement the position of an incidence light in detail and in real-time. In this paper, light sources, to be predefinded positions, are used as landmarks and the 2-D PSD signals are used to compensate the position of a running mobile robot. To induce the position compensation algorithm, first, we inspect the error factor, make the error model, and evaluate the error covariance matrix between the real position and estimated position in dead reckoning system. Next we obtain an optimal position compensation algorithm to update the estimated position using extended Kalman filler by the relation of the external light position and it's PSD signal. Through the simulation of navigating a robot the effectiveness of the proposed method is confirmed.

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Analysis of Quantization Error in Stereo Vision (스테레오 비젼의 양자화 오차분석)

  • 김동현;박래홍
    • Journal of the Korean Institute of Telematics and Electronics B
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    • v.30B no.9
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    • pp.54-63
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    • 1993
  • Quantization error, generated by the quantization process of an image, is inherent in computer vision. Because, especially in stereo vision, the quantization error in a 2-D image results in position errors in the reconstructed 3-D scene, it is necessary to analyze it mathematically. In this paper, the analysis of the probability density function (pdf) of quantization error for a line-based stereo matching scheme is presented. We show that the theoretical pdf of quantization error in the reconstructed 3-D position information has more general form than the conventional analysis for pixel-based stereo matching schemes. Computer simulation is observed to surpport the theoretical distribution.

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Estimation of 2D Position and Flatness Errors for a Planar XY Stage Based on Measured Guideway Profiles

  • Hwang, Joo-Ho;Park, Chun-Hong;Kim, Seung-Woo
    • International Journal of Precision Engineering and Manufacturing
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    • v.8 no.2
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    • pp.64-69
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    • 2007
  • Aerostatic planar XY stages are frequently used as the main frames of precision positioning systems. The machining and assembly process of the rails and bed of the stage is one of first processes performed when the system is built. When the system is complete, the 2D position, motion, and stage flatness errors are measured in tests. If the stage errors exceed the application requirements, the stage must be remachined and the assembly process must be repeated. This is difficult and time-consuming work. In this paper, a method for estimating the errors of a planar XY stage is proposed that can be applied when the rails and bed of the stage are evaluated. Profile measurements, estimates of the motion error, and 2D position estimation models were considered. A comparison of experimental results and our estimates indicated that the estimated errors were within $1{\mu}m$ of their true values. Thus, the proposed estimation method for 2D position and flatness errors of an aerostatic planar XY stage is expected to be a useful tool during the assembly process of guideways.

Preliminary Analysis of Precise Point Positioning Performance Using Correction of Tropospheric Delay Gradient

  • Bu-Gyeom Kim;Changdon kee
    • Journal of Positioning, Navigation, and Timing
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    • v.12 no.2
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    • pp.141-148
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    • 2023
  • In this paper, impacts of tropospheric delay gradient correction on PPP positioning performance were analyzed. A correction for tropospheric delay error due to the gradient was created and applied using external data, and reference station data were collected on a sunny day and a rainy day to analyze the GPS only dual-frequency PPP positioning results. As a result, on the sunny day, the convergence time was about 35 minutes and the final 3D position error was 10 cm, regardless of whether the correction for the tropospheric delay error by the gradient was applied. On the other hand, on the rainy day, the 3D position error converges only when the correction was applied, and the convergence time was about 34 minutes. Furthermore, the final 3D position error was improved from 30 cm to 10 cm. In addition, the analysis of the PPP by reference station location on the rainy day showed that the PPP positioning performance was improved when the correction was applied to a user located in an area where the weather changes.

Evaluation of Target Position's Accuracy in 2D-3D Matching using Rando Phantom (인체팬톰을 이용한 2D-3D 정합시 타켓위치의 정확성 평가)

  • Jang, Eun-Sung;Kang, Soo-Man;Lee, Chul-Soo
    • The Journal of Korean Society for Radiation Therapy
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    • v.21 no.1
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    • pp.33-39
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    • 2009
  • Purpose: The aim of this study is to compare patient's body posture and its position at the time of simulation with one at the treatment room using On-board Imaging (OBI) and CT (CBCT). The detected offsets are compared with position errors of Rando Phantom that are practically applied. After that, Rando Phantom's position is selected by moving couch based on detected deviations. In addition, the errors between real measured values of Rando Phantom position and theoretical ones is compared. And we will evaluate target position's accuracy of KV X-ray imaging's 2D and CBCT's 3D one. Materials and Methods: Using the Rando Phantom (Alderson Research Laboratories Inc. Stanford. CT, USA) which simulated human body's internal structure, we will set up Rando Phantom on the treatment couch after implementing simulation and RTP according to the same ways as the real radioactive treatment. We tested Rando Phantom that are assumed to have accurate position with different 3 methods. We measured setup errors on the axis of X, Y and Z, and got mean standard deviation errors by repeating tests 10 times on each tests. Results: The difference between mean detection error and standard deviation are as follows; lateral 0.4+/-0.3 mm, longitudinal 0.6+/-0.5 mm, vertical 0.4+/-0.2 mm which all within 0~10 mm. The couch shift variable after positioning that are comparable to residual errors are 0.3+/-0.1, 0.5+/-0.1, and 0.3+/-0.1 mm. The mean detection errors by longitudinal shift between 20~40 mm are 0.4+/-0.3 in lateral, 0.6+/-0.5 in longitudinal, 0.5+/-0.3 in vertical direction. The detection errors are all within range of 0.3~0.5 mm. Residual errors are within 0.2~0.5 mm. Each values are mean values based on 3 tests. Conclusion: Phantom is based on treatment couch shift and error within the average 5mm can be gained by the diminution detected by image registration based on OBI and CBCT. Therefore, the selection of target position which depends on OBI and CBCT could be considered as useful.

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An In-situ Correction Method of Position Error for an Autonomous Underwater Vehicle Surveying the Sea Floor

  • Lee, Pan-Mook;Jun, Bong-Huan;Park, Jin-Yeong;Shim, Hyung-Won;Kim, Jae-Soo;Jung, Hun-Sang;Yoon, Ji-Young
    • International Journal of Ocean System Engineering
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    • v.1 no.2
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    • pp.60-67
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    • 2011
  • This paper presents an in-situ correction method to compensate for the position error of an autonomous underwater vehicle (AUV) near the sea floor. AUVs generally have an inertial navigation system assisted with auxiliary navigational sensors. Since the inertial navigation system shows drift in position without the bottom reflection of a Doppler velocity log, external acoustic positioning systems, such as an ultra short baseline (USBL), are needed to set the position without surfacing the AUV. The main concept of the correction method is as follows: when the AUV arrives near the sea floor, the vehicle moves around horizontally in a circular mode, while the USBL transceiver installed on a surface vessel measures the AUV's position. After acquiring one data set, a least-square curve fitting method is adopted to find the center of the AUV's circular motion, which is transferred to the AUV via an acoustic telemetry modem (ATM). The proposed method is robust for the outlier of USBL, and it is independent of the time delay for the data transfer of the USBL position with the ATM. The proposed method also reduces the intrinsic position error of the USBL, and is applicable to the in-situ calibration as well as the initialization of the AUVs' position. Monte Carlo simulation was conducted to verify the effectiveness of the method.

Sensorless Control of Non-salient Permanent Magnet Synchronous Motor Drives using Rotor Position Tracking PI Controller

  • Lee Jong-Kun;Seok Jul-Ki
    • KIEE International Transaction on Electrical Machinery and Energy Conversion Systems
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    • v.5B no.2
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    • pp.189-195
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    • 2005
  • This paper presents a new velocity estimation strategy for a non-salient permanent magnet synchronous motor drive without high frequency signal injection or special PWM pattern. This approach is based on the d-axis current regulator output voltage of the drive system, which contains the rotor position error information. The rotor velocity can be estimated through a rotor position tracking PI controller that controls the position error at zero. For zero and low speed operation, the PI gain of the rotor position tracking controller has a variable structure according to the estimated rotor velocity. Then, at zero speed, the rotor position and velocity have sluggish dynamics because the varying gains are very low in this region. In order to boost the bandwidth of the PI controller during zero speed, the loop recovery technique is applied to the control system. The PI tuning formulas are also derived by analyzing this control system by frequency domain specifications such as phase margin and bandwidth assignment.

A Study on the Position Error of the Aids to Navigation as a Safety Factor at Sea (선박 안전항행을 위한 항로표지의 위치오차 분석)

  • Kwon, Hyuk-Dong;Kim, Woong-Gyu;Lee, Joo-Hyung;Park, Gyei-Kark
    • Journal of Advanced Navigation Technology
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    • v.10 no.3
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    • pp.226-234
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    • 2006
  • Aids to Navigation is one of the most important facility for safety at sea. However, in terms of position there always exists discrepancy in inventory by media and/or organizational body who maintains the facility which may result in incredibility for navigator's position fixing or hazard avoidance. This paper suggests two major factors as the causes of the position error when they design, install and survey the aids to navigation. One is the function of direction of tide and water depth which makes swinging circle. The other is a variable value by time resulting from multiple coordination of satellites in contact. This paper aims to minimize inaccuracy by verifying its reason through numerical analysis over inherent position error.

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