• Polymer(Korea)
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• v.29 no.2
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• pp.146-150
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• 2005

A nano-stereolithouaphy (NSL) apparatus has been developed for fabrication of microstructures with the resolution of 150 nanometers. In the NSL process, a complicated 3D structure can be fabricated by building layer by layer, so it does not require any sacrificial layer or any supporting structure. A laminated layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) which was induced by a femtosecond laser. When the fabrication of a 3D laminated structure was finished, unsolidified liquid-stage resins were removed to develop the fabricated structure by dropping several droplets of solvent, then the polymerized structure was only left on the glass substrate. A microstructure is fabricated by vector scanning method to save the fabrication time. The shell thickness of a structure is very thin within 200 nm, when it is fabricated by a single contour scanning (SCS) path. So, a fabricated structure can be deformed easily in the developing process. In this work, a double contour scanning (DCS) method was proposed to reinforce the strength of a shell typed structure, and a microcup was fabricated to show the usefulness of the developed NSL system and the DCS method.

• Journal of the Microelectronics and Packaging Society
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• v.23 no.3
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• pp.21-29
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• 2016

In this paper, we developed a flexible transparent capacitive pressure sensor which can recognize X and Y coordinates and the size of force simultaneously by sensing a change in electrical capacitance. The flexible transparent capacitive pressure sensor was composed of 3 layers which were top electrode, pressure sensing layer, and bottom electrode. Silver nanowire(Ag NW)/poly(3,4-ethylenedioxythiophene): poly(styrenesulfonate) (PEDOT:PSS) hybrid film was used for top and bottom flexible transparent electrode. The fabricated capacitive pressure sensor had a total size of 5 inch, and was composed of 11 driving line and 19 sensing line channels. The electrical, optical properties of the Ag NW/PEDOT:PSS and capacitive pressure sensor were investigated respectively. The mechanical flexibility was also investigated by bending tests. Ag NW/PEDOT:PSS exhibited the sheet resistance of $44.1{\Omega}/square$, transmittance of 91.1%, and haze of 1.35%. Notably, the Ag NW/PEDOT:PSS hybrid electrode had a constant resistance change within a bending radius of 3 mm. The bending fatigue tests showed that the Ag NW/PEDOT:PSS could withstand 200,000 bending cycles which indicated the superior flexibility and durability of the hybrid electrode. The flexible transparent capacitive pressure sensor showed the transmittance of 84.1%, and haze of 3.56%. When the capacitive pressure sensor was pressed with the multiple 2 mm-diameter tips, it can well detect the force depending on the applied pressure. This indicated that the capacitive pressure sensor is a promising scheme for next generation flexible transparent touch screens which can provide multi-tasking capabilities through simultaneous multi-touch and multi-force sensing.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.462-462
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• 2011

그래핀은 탄소원자로 구성된 원자단위 두께의 매우 얇은 2차원의 나노재료로서 높은 투광도 뿐만 아니라 우수한 기계적, 전기적 특성을 지니며 구조적 화학적 으로도 매우 안정한 것으로 알려져 있다. 이러한 그래핀을 얻는 방법에는 물리·화학적 박리법, 탄화규소의 흑연화, 열화학기 상증착법(thermal chemical vapor deposition; TCVD)등 많은 방법들이 존재한다. 이중 TCVD방법이 대면적으로 두께균일도가 높은 그래핀을 얻는데 가장 적합한 방법으로 알려져 있다. 한편 그래핀은 우수한 특성들을 기반으로 센서나 메모리와 같은 기능성 소자로 응용이 가능할 뿐 아니라 투명고분자 기판으로 전사함으로서 유연성 투명전극을 제작 가능하여 기존의 인듐산화물(indium tin oxide; ITO) 투명전극을 대체하여 디스플레이, 터치스크린, 전·자기 차폐재 등의 다양한 분야로의 응용이 가능하다고 예측되고 있다. 본 연구에서는 TCVD법을 이용하여 대면적으로 두께균일도가 높은 그래핀을 합성하여 투명 고분자 기판(polyethylene terephthalate; PET) 위에 전사하여 투명전도막을 제작한 후, 압축변형률(compressive strain)의 변화에 따른 전기적 특성 변화를 측정하였다. 그래핀은 300 nm 두께의 니켈박막이 증착된 산화물 실리콘 기판위에 원료가스로 메탄(CH4)을 사용하여 합성하였다. 합성 결과 단층 그래핀의 면적은 약 80% 이상이었으며, 합성된 그래핀은 분석의 용이함 및 향후 다양한 응용을 위하여 식각공정을 통해 산화막 실리콘 기판과 PET기판으로 전사하였다. PET기판 위로 전사하여 제작한 그래핀 투명전도막의 strain 인가에 따른 전기적 특성을 관찰한 결과, 약 20%의 비교적 높은 strain하에서도 전기적특성이 크게 변화하지 않는 것을 확인하였다. 그래핀의 특성분석을 위해서는 광학현미경, 라만 분광기, 투과전자현미경, 자외 및 가시선 분광광도계, 4탐침측정기 등을 이용하였다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.12 no.5
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• pp.240-246
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• 2002

$TiO_2$ films on soda-lime-silica glasses were prepared by spin coating-pyrolysis process using titanium naphthenate as a starting material. As-deposited films were pyrolyzed at $500^{\circ}C$ for 10 min in air and annealed at 500, 550 and $600^{\circ}C$ for 30 min in air. Crystallinity of the film was investigated by X-ray diffraction analysis. A field emission-scanning electron microscope and an atomic force microscope were used for characterizing the surface morphology and the surface roughness of the film. After annealing at 550 and $600^{\circ}C$, the X-ray diffraction patterns consist of only anatase peak. Films annealed at 500 and $550^{\circ}C$ exhibited flat surfaces. While with the increase in annealing temperature to $600^{\circ}C$, the $TiO_2$ film showed abnormal growth of three-dimensional needle-shaped grains. For all samples, high transmittance, above 90 % at 500 nm, was obtained at visible range. To investigate photocatalytic properties, IR absorbance associated with the C-H stretching vibrations of a thin solution-cast film of stearic acid under 365 nm (2.4 mW/$\textrm{cm}^2$) UV irradiation was estimated.

• Journal of the Institute of Electronics and Information Engineers
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• v.49 no.12
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• pp.209-218
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• 2012

Recently, the Field Programmable Stateful Logic Array (FPSLA) was proposed as one of the most promising system integration technologies which will extend the life of the Moore's law. This work is the first proposal of the FPSLA design automation flow, and the approaches to logic synthesis, synchronization, physical mapping, and automatic placement of the FPSLA designs. The synchronization at each gate for pipelining determines the x-coordinates of cells, and reduces the placement to 1-dimensional problems. The objective function and its gradients for the non-linear optimization of the net length and placement density have been remodeled for the reduced global placement problem. Also, a recursive algorithm has been proposed to legalize the placement by relaxing the density overflow of bipartite bin groups in a top-down hierarchical fashion. The proposed model and algorithm are implemented, and validated by applying them to the ACM/SIGDA benchmark designs. The output state of a gate in an FPSLA needs to be duplicated so that each fanout gate can be connected to a dedicated copy. This property has been taken into account by merging the duplicated nets into a hyperedge, and then, splitting the hyperedge into edges as the optimization progresses. This yields additional 18.4% of the cell count reduction in the most dense logic stage. The practicality of the FPSLA can be further enhanced primarily by incorporating into the logic synthesis the constraint to avoid the concentrated fains of gates on some logic stages. In addition, an efficient algorithm needs to be devised for the routing problem which is based on a complicated graph. The graph models the nanowire crossbar which is trimmed to be embedded into the FPSLA fabric, and therefore, asymmetric. These CAD tools can be used to evaluate the fabric efficiency during the architecture enhancement as well as automate the design.

• Korean Chemical Engineering Research
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• v.57 no.4
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• pp.584-588
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• 2019

The catalytic combustion of particulate matter (PM) is one of the key technologies to meet emission standards of diesel engine system. Therefore, we herein suggest Ag loaded $La_{0.6}Sr_{0.4}Co_{0.2}Fe_{0.8}O_3$ perovskite web catalyst. They were produced by the electrospinning method. FE-SEM, EDS mapping, XRD, XPS were studied to investigate the crystal and morphological structures of loaded Ag particles and $La_{0.6}Sr_{0.4}Co_{0.2}Fe_{0.8}O_3$ perovskite web catalyst. Following the catalytic soot oxidation, we found that the Ag loaded $La_{0.6}Sr_{0.4}Co_{0.2}Fe_{0.8}O_3$ perovskiteweb catalyst showed the higher catalytic activities (e.g., $T_{50}=490^{\circ}C$) than the only $La_{0.6}Sr_{0.4}Co_{0.2}Fe_{0.8}O_3$ perovskite web catalyst (e.g., $T_{50}=586^{\circ}C$). Thus, this finding suggests that Ag loaded $La_{0.6}Sr_{0.4}Co_{0.2}Fe_{0.8}O_3$ perovskite web catalyst can be a promising candidate for enhancing the soot oxidation.