• Title/Summary/Keyword: 2자유도 진동시스템

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초고속 자기부상형 터보복합분자 펌프 기술 개발

  • Park, Yong-Tae;Nam, U-Ho;No, Seung-Guk;Kim, In-Chan;No, Gyeong-Tae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.19-19
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    • 2010
  • 복합분자펌프는 기존의 터보분자펌프 turbine blade에 spiral grooved를 추가하여 초고진공 ($10^{-8}Pa$)에서 저진공(330Pa)까지 넓은 압력범위에서 사용할 수 있고 이 펌프를 사용함으로서 완전 oil free한 진공시스템을 만들 수 있는 특징을 가지고 있다. 특히, 회전체를 비접촉으로 지지하는 자기베어링 방식을 적용함으로써, 진동은 극히 작고 베어링수명은 길면서 중저진공에 대한 배기속도가 크고 임의의 방향으로 접속이 가능하여 반도체 및 디스플레이 제조 공정과 같은 첨단산업의 다양한 분야에 쉽게 적용되고 있으며, 그 적용 분야와 시장은 계속 성장하고 있다. 고 진공과 배기 속도의 달성을 위해서, 고속으로 이동하는 격면과 기체분자를 충돌시켜, 기체 분자를 원하는 방향으로 유도하는 작동원리를 가지고 있다. 특히 공기분자의 밀도가 매우 낮은 희박가스 상태에서 고속 회전하는 blade로 공기분자를 쳐내면서 작동됨으로써 날개의 상하 압력차에 의한 공기력보다도 날개의 고속회전이 매우 중요시되고 압력으로는 $10^{-1}Pa$ 이하의 분자 영역에서 그 성능을 최고로 발휘할 수 있다. 이러한 복합 펌프의 주요 장점은 다음과 같다. 1. $10^{-8}\;Pa$($10^{-10}torr$)~10 Pa(1 torr) 까지 넓은 영역에서 배기가 가능하다. 2. 탄화수계의 대하여 높은 압축특성을 가지고 있고, 윤활유를 사용하지 않으므로 얻을 수 있는 진공상태가 고청정하다. (oil free) 3. 정밀 5축제어 자기베어링으로 완전히 부상하여 회전함으로서 마모가 없고 진동이 최소화 하였을 뿐 만 아니라, 또한 운전음도 거의 없다. 4. 설치조건에 제한이 없고 고장이 거의 없다. 본 논문에서는 이러한 복합분자펌프의 개발을 위하여, 상기 연구기관에서 수행된 내용을 소개하고 이으며, 진공펌프 블레이트 로터 회전체를 포함한 구조설계 및 해석결과와 5자유도 자기베어링 시스템을 이용한 기본 구동 결과를 나타내었다.

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Linear Stability Analysis of an Out-of-plan Motion of Vibration of a Two Degree-of-freedom with Contact Stiffness (마찰기인 접촉 강성을 가지는 2-자유도계 면외 방향 진동 시스템의 선형 안정성 해석)

  • Joe, Yong-goo;Shin, Ki-hong;Lee, Hyun-young;Oh, Jae-Eung;Lee, Su-Gab
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.15 no.3 s.96
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    • pp.259-265
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    • 2005
  • A two-degree-of-freedom out-of-plane model with contact stiffness is presented to describe dynamical interaction between the pad and disc of a disc brake system. It is assumed that the out-of-plane motion of the system depends on the friction force acting along the in-plane direction. Dynamic friction coefficient is modelled as a function of both in-plane relative velocity and out-of-plane normal force. When the friction coefficient depends only on the relative velocity, the contact stiffness has the role of negative stiffness. The results of stability analysis show that the stiffness of both pad and disc is equally important. Complex eigen value analysis is conducted for the case that the friction coefficient is also dependent on the normal force. The results further verify the importance of the stiffness. It has also been found that increasing the gradient of friction coefficient with respect to the normal force makes the system more unstable.

A Study on Movement of the Free Face During Bench Blasting (전방 자유면의 암반 이동에 관한 연구)

  • Lee, Ki-Keun;Kim, Gab-Soo;Yang, Kuk-Jung;Kang, Dae-Woo;Hur, Won-Ho
    • Explosives and Blasting
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    • v.30 no.2
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    • pp.29-42
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    • 2012
  • Variables influencing the free face movement due to rock blasting include the physical and mechanical properties, in particular the discontinuity characteristics, explosive type, charge weight, burden, blast-hole spacing, delay time between blast-holes or rows, stemming conditions. These variables also affects the blast vibration, air blast and size of fragmentation. For the design of surface blasting, the priority is given to the safety of nearby buildings. Therefore, blast vibration has to be controlled by analyzing the free face movement at the surface blasting sites and also blasting operation needs to be optimized to improve the fragmentation size. High-speed digital image analysis enables the analyses of the initial movement of free face of rock, stemming optimality, fragment trajectory, face movement direction and velocity as well as the optimal detonator initiation system. Even though The high-speed image analysis technique has been widely used in foreign countries, its applications can hardly be found in Korea. This thesis aims at carrying out a fundamental study for optimizing the blast design and evaluation using the high-speed digital image analysis. A series of experimentation were performed at two large surface blasting sites with the rock type of shale and granite, respectively. Emulsion and ANFO were the explosives used for the study. Based on the digital images analysis, displacement and velocity of the free face were scrutinized along with the analysis fragment size distribution. In addition, AUTODYN, 2-D FEM model, was applied to simulate detonation pressure, detonation velocity, response time for the initiation of the free face movement and face movement shape. The result show that regardless of the rock type, due to the displacement and the movement velocity have the maximum near the center of charged section the free face becomes curved like a bow. Compared with ANFO, the cases with Emulsion result in larger detonation pressure and velocity and faster reaction for the displacement initiation.

Numerical Prediction of Chamber Performance for OWC Wave Energy Converter (OWC 파력발전장치의 공기실 성능예측에 대한 수치적인 연구)

  • Jin, Ji-Yuan;Hyun, Beom-Soo;Liu, Zhen;Hong, Key-Yong
    • Journal of the Korean Society for Marine Environment & Energy
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    • v.13 no.2
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    • pp.91-98
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    • 2010
  • The water elevation inside the air chamber and bi-directional air flow in the duct of Oscillating Water Column wave energy converter is one of the most important factors to evaluate the operating performance. The numerical wave tank based on the commercial software Fluent 6.2 in the present paper is employed to generate the incident waves. The numerical wave tank consists of the continuity equations, the Reynolds-averaged Navier-Stokes equations and the two-phase VOF function. The oscillating amplitude of water column in the chamber and bi-directional air flow in the duct installed on the top of the chamber are calculated, and compared with experimental data to verify the validation of the present NWT. The nozzle effects of the chamber-duct system on the relative amplitudes of the inner free water surface and air flow rate in the duct are investigated.

The Optimum Design of Impact Absorbing System for Spreader in System Variations (스프레더용 충격흡수기의 시스템 변화에 따른 최적설계)

  • Hong, Do-Kwan;Kim, Dong-Young;Han, Dong-Seop;Ahn, Chan-Woo;Han, Geun-Jo
    • Journal of Navigation and Port Research
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    • v.26 no.3
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    • pp.311-316
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    • 2002
  • On this study, to develop the impact absorbing system for spreader, we operated the dynamic response for models of three types consisting of spring and oil damper by the finite element analysis. Also, in the three types of impact absorbing system, we set the restricted stroke of piston to the static variables and the optimum design was operated to have the minimum value of the reaction force for the impact. As the result, the direct model of two degree of freedom system has lowest value, the model of one degree of freedom system has higher value than that and the parallel model of two degree of freedom system has the highest value. And we studied the effect that the change of spring constant and damping coefficient affect to the reaction force and as the result of the optimum design, we found that reaction force has the lowest value in the each of models.

Extracting Modal Parameters of Railway Bridge under the Action of High-speed Train Using TDD Technique (TDD기법을 이용한 고속철도 교량의 동특성 추출)

  • Kim, Byeong Hwa
    • Journal of Korean Society of Steel Construction
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    • v.20 no.6
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    • pp.761-771
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    • 2008
  • When the crossing frequency of a train meets the natural frequency of a railway bridge, the bridge is bound to become resonant. There are few available time response samples involving a train that passes a bridge at high speed. Very effective modal-parameter extraction techniques for such special high-speed railway bridge conditions are introduced in this paper. Utilizing the cross-correlations of the free-vibration responses after the train passes, mode shapes and the temporal modal parameters (e.g., natural frequency and damping ratio) are extracted using the TDD and SI techniques, respectively. This approach has been applied to a two-span steel composite bridge in the Kyung-Bu high-speed railway system. The estimation results were compared with those obtained using the existing methods. The results fully coincide with those that were extracted using the existing aforementioned technique.

Speed Control Of The Magnet Gear-Based Speed Reducer For Non-contact Power Transmission (비접촉 동력 전달을 위한 마그네트 기어 기반 감속기의 속도 제어에 관한 연구)

  • Jung, Kwang Suk
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.7
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    • pp.380-388
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    • 2016
  • Using the magnet gear, it is possible to transmit power without mechanical contact. As the drive shaft in a magnet gear-based speed reducer system is isolated from the drive shaft, the system is a two-inertia resonance system that should cope with an external load with the limited air-gap stiffness. On the other hand, the drive shaft or low-speed side is controlled only by the torque of the drive shaft through an air-gap, and the excessive oscillation or the slip can then be generated because of an abrupt disturbance that is different from the general mechanical gear system. Therefore, the disturbance loaded at the low speed side should be measured or estimated, and considered in the control of the driving shaft. This paper proposes a novel full-state feedback controller with a reduced-order observer for the speed reducer system using a magnet gear with a unified harmonic modulator. The control method was verified by simulation and experiment. To estimate the load at the low speed side, a novel observer was designed, in which the new state variable is introduced and the new state equation is formulated. Using a full-state feedback controller including the observer, the test result against disturbance was compared with two D.O.F PI speed controllers. The pole slip was compensated within relatively a short time, and the simulation result about the estimated variable shows a similar tendency to the test result. The test results showed that the magnet gear-based reducer can be applied to an accurate servo system.

Experimental Investigation of Aerodynamic Force Coefficients and Flutter Derivatives of Bridge Girder Sections (교량단면의 공기력계수 및 플러터계수에 관한 실험적 연구)

  • Cho, Jae-Young;Lee, Hak-Eun;Kim, Young-Min
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.26 no.5A
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    • pp.887-899
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    • 2006
  • The aim of this study is to investigate a correlation between fundamental data on aerodynamic characteristics of bridge girder cross-sections, such as aerodynamic force coefficients and flutter derivatives, and their aerodynamic behaviour. The section model tests were carried out in three stages. In the first stage, seven deck configurations were studied, namely; Six 2-edge girders and one box girder. In this stage, changes in aerodynamic force coefficients due to geometrical shape of girders, incidence angle of flow, wind directions and turbulence intensities were studied by static section model tests. In the second stage, the dynamic section model tests were carried out to investigate the relativity of static coefficients to dynamic responses. And finally, the two-dimensional (lift-torsion) aerodynamic derivatives of three bridge deck configurations were investigated by dynamic section model tests. The aerodynamic derivatives can be best described as a representation of the aerodynamic damping and the aerodynamic stiffness provided by the wind for a given deck geometry. The method employed here to extract these unsteady aerodynamic properties is known as the initial displacement technique. It involves the measurement of the decay in amplitude with time of an initial displacement of the deck in heave and torsion, for various wind speeds, in smooth flow. It is suggested that the proposed aerodynamic force coefficients and flutter derivatives of bridge girder sections will be potentially useful for the aeroelastic analysis and buffeting analysis.

Numerical Study on Energy Absorption of a Floater for Design of Wave Energy Convertor in Ocean (해양 파력 발전 시스템 설계를 위한 부유체 에너지 흡수에 관한 기초연구)

  • Li, Kui Ming;Parthasarathy, Nanjundan;Choi, Yoon-Hwan;Lee, Yeon-Won
    • Journal of Advanced Marine Engineering and Technology
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    • v.36 no.5
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    • pp.635-644
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    • 2012
  • In order to design a wave energy generating system, a 6-DOF analysis technique is applied to the three-Dimensional CFD analysis on of a floating body and the behavior is interpreted according to the nature of the incoming wave. A wave period of 5.5s & amplitude of 0.57m from Marado is chosen. 12 case of natural pitching period from 1.25 to 2.8s has been modeled. The relation between tuning factor & pitch angle for the waves generated is compared to analyze the effects of energy absorption variables, namely mass moment of inertia, angular velocity and angular acceleration. From the results obtained, we conclude that model L is the maximum power absorbed, 6kW approximately. A maximum pitch angle of 1.91 degree was attained by Model F, and the maximum displacement of nearly 0.7m was attained by Model L among models D, F and L.

Failure analysis of a turbo molecular pump in semiconductor equipments (반도체 장비에서 터보 분자 펌프의 파손 사례 연구)

  • Jeong, Jin-Yong;Ju, Jeong-Hun;O, Sam-Gyun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.120-120
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    • 2018
  • 반도체 소자나 디스플레이 패널 제조 공정에 가장 많이 사용되는 진공 펌프인 터보 분자 펌프는 오일을 사용하지 않고, 설치 방향이 자유로우며 넓은 작동 압력 영역을 가지고 있어서 고가임에도 불구하고 점점 더 사용 영역을 넓혀 가고 있다. 상하의 두 곳에 회전축을 지지하는 베어링이 필요한데, 기계식 금속 베어링을 채용하는 경우에는 반드시 윤활유를 공급해 주어야 하고, 고온, 부식성 또는 산화성 가스의 배기 시에는 퍼지 가스로 비활성인 질소나 알곤등을 이용하여 보호를 해주어야 한다. 반면, 자기 베어링을 채택한 모델은 윤활의 걱정에서 자유로울 수 있기 때문에 채용이 늘어나고 있다. 동일극의 반발력이나 반대극의 인상력을 이용한 구조를 갖게 되는데 갑작스러운 입구 쪽 압력의 증가 시에는 자석 끼리 부딪치는 일이 발생하고 이로 인해서 로터 모듈 전체에 큰 손상을 갖게 되므로 한 곳 정도에 비상용 터치 다운 베어링을 기계식으로 윤활제 없이 설치하기도 한다. 기본적으로 자기 베어링 방식은 로터 모듈의 부상과 제어를 위해서 3축 또는 5축 제어를 하게 되는데 여기에는 전자석의 전류를 미세하게 조정하여 피드백 하는 시스템을 활용하기 때문에 외부에서의 자기장이 일정값 이상 침투하게 되면 제어 회로의 기능에 문제를 일으키게 된다. 또한 축 방향에 수직인 자기장의 강도가 높아지면 고속으로 회전하는 금속 블레이드가 자속을 자르게 되므로 표면에 와전류가 발생하여 문제가 된다. 터보 분자 펌프는 회전자와 고정자 간격이 1 mm 이내로 작아서 약간의 진동이라도 발생하면 회전자와 고정자 간에 충돌이 일어나고 이는 곧 파손으로 이어진다. 그림 1에는 파손 원인 분석을 위한 회전자 모듈의 수치 해석용 모델의 일부를 나타내었고, 그림 2에는 실제로 외부 자기장에 의한 파손이 발생한 사례의 자기 베어링 모듈의 사진을 나타내었다. 본 발표에서는 외부 자기장의 형태에 따라 제어 자기장에 미치는 영향을 CFD-ACE+(ESI corp)를 활용하여 해석하였다.

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