• Title/Summary/Keyword: 2극자

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Analysis of multi-layered Surface with Glow Discharge-Mass Spectrometry (글로우방전 질량분석법을 이용한 다층박막의 표면 분석)

  • Pak, Yong-Nam;Lee, Gae-Ho;Kim, Hyo Jin
    • Analytical Science and Technology
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    • v.10 no.5
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    • pp.357-361
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    • 1997
  • A Griemm type Glow Discharge cell is attached to a commercial quadrapole based ICP-MS and used for the analysis of surface analysis. By employing 2.0mm diameter, mode and proper experimental conditions, several layers of few ${\mu}m$ thickness are analysed within 30 minutes. Multi-layers of Cu-Ni, Fe-Ni are analyzed with the resolution of 10nm by GDMS. Proper experimental conditions make a flat bottom crater shape and good resolution for multi-layer depth profile study.

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Computational Study of the Shr oud Shape & the ProBeller Fan (Shroud 형상에 대한 해석적 연구 및 '프로벨러 홴' 소개)

  • Han, Jae-Oh;Yu, Seung-Hun;Mo, Jin-Yong
    • 한국전산유체공학회:학술대회논문집
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    • 2008.03b
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    • pp.638-641
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    • 2008
  • Computational investigation was conducted to study the effects of the shape parameter of shroud on the performance of the outdoor unit of an air-conditioners. For this study the Design of Experiment(4-factor 3-level) was created and the an automatic program was composed using VBA to reduce the load of pre-process for CFD. The estimated mathematical equation was produced from this analysis and it was found that the gap between fan and shroud affects more heavily than the other parameters. As a result, the composition of the best parameters was verified that its flow rate was increased by 10 percents and sound pressure level was reduced by 1.2 dBA compare with the worst. And finally, a kind of Propeller fan with blades which were attached to the shroud, so-called 'ProBeller Fan' was introduced in this study.

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Development and characteristics investigation of new soft plasma ionization(SPI) source (새로운 소프트 플라스마 이온화(SPI) 장치의 개발 및 특성관찰)

  • Lee, Hiwwon;Park, Hyunkook;Lee, Sang Chun
    • Analytical Science and Technology
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    • v.22 no.2
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    • pp.152-158
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    • 2009
  • In this study, we made a new discharge source improving previous SPI source to ionize softly organic compounds. The new SPI source consists of two electrodes as a hollow mesh cathode of half cylindrical shape and a hollow anode. We optimized the geometrical parameter of the SPI source by investigating the I-V curves at the various distance between the cathode and the anode. As the results, we found stable conditions of the soft plasma on broad range of the current and the voltage. The new SPI source attached to quadrupole mass spectrometer (QMS), and we obtained the mass spectra of dichloromethane (DCM). The fragment patterns of DCM appeared similarly with the pattern of electron ionization (EI).

Experimental comparison on the noise characteristics of free and impinging jets (자유분류와 충돌분류의 소음특성에 관한 실험적 비교)

  • 이동훈
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.5 no.2
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    • pp.83-89
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    • 1996
  • The objective of this study is to find experimentally the characteristics of the noise generated by the impinging jet on the normal plate, and also to compare the noise characteristics of the impinging jet with those of the free jet. The experiment is performed for the measurement of the noise specturm, the noise power, and the directivity for the free and impinging jets. From the experiment. it is found that the power of noises generated by the free jet as well as the impinging jet is proportional to the eighth power of the jet velocity through the circular converging nozzle, and that the noise power of the impinging jet is 15dB as high as one of the free jet when the plate distance is about within one to three times the nozzle diameter at the pressure ratio 1.39. The sound pressure level of the impinging jet depends upon the jet pressure and the plate distance. The plate distance with the maximum overall sound pressure level is increased with the jet pressure. The directivities with 1/3 octave band frequency for both the free jet and the impinging jet are greatly influenced by the convection effect.

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optical Simulation on EUV Reflectivity of Mo/Si Multilayer Structure (Mo/Si 다층박막의 극자외선 반사도에 대한 전산모사)

  • 이영태;강인용;정용재;이승윤;허성민
    • Journal of the Microelectronics and Packaging Society
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    • v.8 no.2
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    • pp.19-24
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    • 2001
  • The effect of thickness variation and inter-diffusion layer on the reflectivity of Mo/Si multilayer has been investigated. The reflectivity of the imperfect Mo/Si multilayer with thickness variation of 28% was found to be lowered by 10.8% compared to that of ideal Mo/Si multilayers with 40-periods. When the inter-diffusion layer is taken into account, the reflectivity is decreased by 4.7% additionally. We also fecund that the reflectivity continued to increase until the 25th-layer but it showed irregular tendencies about increment and decrement from the 26th-layer of Mo/Si multilayer structures.

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Improved Margin of Absorber Pattern Sidewall Angle Using Phase Shifting Extreme Ultraviolet Mask (위상변위 극자외선 마스크의 흡수체 패턴의 기울기에 대한 오차허용도 향상)

  • Jang, Yong Ju;Kim, Jung Sik;Hong, Seongchul;Ahn, Jinho
    • Journal of the Semiconductor & Display Technology
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    • v.15 no.2
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    • pp.32-37
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    • 2016
  • Sidewall angle (SWA) of an absorber stack in extreme ultraviolet lithography mask is considered to be $90^{\circ}$ ideally, however, it is difficult to obtain $90^{\circ}$ SWA because absorber profile is changed by complicated etching process. As the imaging performance of the mask can be varied with this SWA of the absorber stack, more complicated optical proximity correction is required to compensate for the variation of imaging performance. In this study, phase shift mask (PSM) is suggested to reduce the variation of imaging performance due to SWA change by modifying mask material and structure. Variations of imaging performance and lithography process margin depending on SWA were evaluated through aerial image and developed resist simulations to confirm the advantages of PSM over the binary intensity mask (BIM). The results show that the variations of normalized image log slope and critical dimension bias depending on SWA are reduced with PSM compared to BIM. Process margin for exposure dose and focus was also improved with PSM.

Dipole과 quadrupole 성분의 변화에 의한 SC 24/25 극소기의 태양 자기장의 예측

  • Kim, Bo-Gyeong;O, Su-Yeon;Lee, Yu
    • The Bulletin of The Korean Astronomical Society
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    • v.37 no.2
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    • pp.128.1-128.1
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    • 2012
  • 최근 태양주기 21, 22, 23을 지나 24주기로 감에 따라 태양활동의 지표인 태양상수, 행성간 자기장, 태양극자기장 등과 같은 여러 태양물리량들이 감소하여 태양 활동이 약화되었고 23/24주기의 극소기가 길어졌다. 태양 자기장의 극성은 대체로 Dipole의 형태로 근사하여 나타나지만 dipole 뿐만 아니라 Quadrupole 등과 같은 다중극의 합으로 나타난다. 본 연구에서는 Wilcox Solar Observatory (WSO)에서 제공하는 21주기부터 23주기 동안의 총 태양 자기장의 구조화 함수 coefficient의 세기, dipole 성분 및 Multipole 성분의 변화를 분석하였다. 분석 결과 최근 23 태양주기 시작 이후로 총 태양 자기장의 세기가 감소하는 추세를 보이며 21, 22주기에 비해 23주기에 multipole 성분 보다 dipole 성분이 더 큰 감소율을 보여 dipole이 약해지고 multipole이 강해진 것을 알 수 있었다. 그러므로 태양활동 변화에 Multipole 성분도 중요한 역할을 한다고 볼 수 있다. 전반적으로 태양활동 극대기에는 dipole의 세력이 약하고 극소기에는 dipole의 세력이 강하게 나타난다. 또한 태양주기 23/24의 극소기일 때, 다중극 성분 중 특히 Quadrupole 성분이 차지하는 비율이 두드러지게 증가하였다. 태양활동 극소기에 23/24주기처럼 태양활동이 더 저조해지면 상대적으로 quadrupole 성분이 증가하게 되는 것으로 여겨진다. 그러므로, 다음 태양주기 24/25의 극소기에는 태양활동이 더 약해져서 Quadrupole 성분이 더욱 두드러지게 증가하게 될 것으로 예측된다.

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Eu3+ Luminescence in Two-Dimensional Sr2-2xEuxKxSnO4 with K2NiF4 Structure (2차원적 K2NiF4형 구조의 Sr2-2xEuxKxSnO4에서 Eu3+ 이온의 Luminescence)

  • Yo, Chul-Hyun;Minh Chau, P.T.;Ryu, Kwang-Hyun;Kim, Anh-T.
    • Journal of the Korean Chemical Society
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    • v.41 no.4
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    • pp.175-179
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    • 1997
  • Luminescence of $Eu^{3+}$ has been studied in $Sr_{2-2x}Eu_xK_xSnO_4$ with two-dimensional $K_2NiF_4$ structure. The $^5D_o$$^7F_o$$Eu^{3+}$ ion represents the J=0 → J=0 transition which is forbidden by a Judd-Ofelt selection rule for electric dipole transition in 4f shell of $Eu^{3+}$ ions. However, the emission line of $^5D_o$$^7F_o$$Eu^{3+}$ emission spectra of Sr2-2xEuxKxSnO4$Sr_{2-2x}Eu_xK_xSnO_4$structure around $Eu^{3+}$ ions.

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The Hyperfine Interaction for the FeIn2S4 by Mössbauer Spectroscopy (뫼스바우어 효과를 통한 FeIn2S4에서의 Fe2+ 초미세 상호 작용 연구)

  • Son, Bae-Soon;Kim, Sam-Jin;Kim, Chul-Sung
    • Journal of the Korean Magnetics Society
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    • v.17 no.1
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    • pp.30-33
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    • 2007
  • The $FeIn_2S_4$ exhibits an inverse spinel which Fe ions are occupied to the octahedral(B) site, while In ions are occupied to both the tetrahedral(A) and the octahedral(B) site. The $N\'{e}el$ temperature($T_N$) is determined to be 13 K. The effective moment of $FeIn_2S_4$ found to be $5.094{\mu}_B$ from the fit of Curie-Weiss inverse susceptibility for the temperature range over $T_N$, implying angular momentum contribution. The angular momentum contribution is shown in $M\"{o}ssbauer$ spectra for the antiferromagnetic ordering region($T{\leq}\;13K$), too. A weak $Fe^{2+}(B)-S^2-Fe^{2+}(B)$ interaction is responsible for a low $N\'{e}el$ temperature($T_N$) in $FeIn_2S_4$ system. The temperature dependence of electric quadrupole interaction is explained by z-axial crystalline field energy.

A Study on the Magnetic Properties of Polycrystailine${(Fe,In,Eu)}_2O_3$ (다결정${(Fe,In,Eu)}_2O_3$계의 자기적 성질에 관한 연구)

  • 김정기;서정철;한은주;홍양기
    • Journal of the Korean Magnetics Society
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    • v.1 no.1
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    • pp.1-5
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    • 1991
  • The magnetic properties of the polycrystalline ${(Fe_{2}O_{3})}_{1-x-y}{(In_{2}O_{3})}_{x}{(Eu_{2}O_{3})}_{y}$(x=0.01, y=0.02과 x=0.02, y=0.03) have been studied by the methods of X-ray diffraction, $M\"{o}ssbauer$ effect, and magnetic hysteresis measurement. The X-ray diffraction patterns show that the samples have a same crystal structure as $\alpha-Fe_{2}O_{3}$. From the analysis of the temperature dependence of the quadrupole splitting and average half-width, it is found that the Morin transition occurs in the sample of x=0.01 and y=0.02 and the spin angle defined as the angle between the [111] crystal axis and antiferromagnetic vector, changes from about $35^{\circ}$ to the (111) plane as increasing the temperature in the sample of x=0.02 and y=O.03. The temperature dependence of magnetic hyperfine field is analyzed by using the spin-wave theory. The isomer shift values at room temperature are found to be given by about 0.35mm/s for the samples which means that the Fe ions belong to $3^{+}ion$. The temperature dependence of isomer shift was analyzed by using the Debye model.

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