• Journal of the Microelectronics and Packaging Society
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• v.8 no.2
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• pp.15-18
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• 2001

The Mo/si multilayer for EUV lithography was deposited using magnetron sputtering system. The multilayers were characterized using the cross-sectional transmission electron microscope (TEM) and low/high angle X-ray diffraction (XRD). The microstructure of Mo and Si was highly textured structure and amorphous, respectively. The well-defined low angle XRD peaks implies a well-defined multilayer structure. The interfacial layer of Mo-on-Si was thicker than Si-on-Mo interfacial layer.

• 유체기계공업학회:학술대회논문집
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• 2004.12a
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• pp.567-571
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• 2004

The 2-dimensional unsteady flows on and around the cambered airfoils were computed by applying LES with the deductive dynamic SGS model. The unsteady flow field were used as inputs to compute the far-field sounds and directivity patterns from rotating blades by a hybrid approach that exploits Farassat's formula. The BEM (Boundary Element Method) was applied to predict the frequency characteristics from the rotating blades for the cases of even- and uneven-pitched fans. The BEM results suggested that the unevenly pitched fan have less pronounced discrete peaks at BEF frequencies, which was confirmed by the experiment.

• The Bulletin of The Korean Astronomical Society
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• v.44 no.1
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• pp.49.3-49.3
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• 2019

햇무리(halo) 모양 코로나질량방출(coroanl mass ejection) 현상은 1970년대 후반 처음 발견된 이후, 그 물리적 본질에 대해 많은 논쟁이 있었다. 우주 망원경 SOHO LASCO의 고분해능 관측이후, 햇무리 모양은 시선방향에 나란한 방향으로 팽창하며 진행하는 고깔모양의 자기 구조(cone-shaped magnetic flux rope)가 2차원 관측이미지에 투영된 것으로 해석하는 것이 정설이다. 우리는 이러한 해석이 사실인지 관측을 이용해 검증하고, 타당한 물리적 해석을 찾는다. 이를 위해 STEREO 우주선이 SOHO에서 관측한 태양의 측면을 관측했던 2010년부터 2012년 관측자료를 사용하고, SOHO에서 관측한 햇무리 모양의 코로나질량방출 현상의 측면 모습이 예전의 해석대로 고깔모양을 보여주는지 STEREO 우주선의 관측자료와 비교한다. 우리는 햇무리 모양이 시선방향에 상관없는 이 현상 고유의 모양임을 확인 했으며 극자외선 관측결과와 수치계산 결과와 비교하여 이 햇무리 모양은 파동 현상의 결과임을 알았다. 이는 코로나질량방출 현상과 관련한 해석에 많은 변화가 필요함을 의미한다.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.34-42
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• 2021

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.

• Journal of the Korean Chemical Society
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• v.55 no.3
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• pp.472-477
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• 2011

The concentration of selenium in grain samples was determined using isotope dilution method in ORC-ICPMS. The experimental conditions were optimized to $H_2$ mode and the flow rate was $4.0\;mL\;min^{-1}$. ORC in $H_2$ mode proved to eliminate most of polyatomic interferences except $BrH^+$ when Br is present in sample matrix. Chemical removal of Br was very difficult and the mathematical correction was successfully employed. The fraction of $BrH^+$ generated from Br at the current experimental condition was 14.1%. The signal on m/z 82 was corrected and calculated for isotope dilution. The analytical reliability of the propose method was successfully evaluated by analyzing the certified standard reference material NIST SRM 1566 and 1567. The method was applied to real samples and the results are $0.034{\pm}0.001\;{\mu}g\;g^{-1}$ for white rice, $0.059{\pm}0.002_5\;{\mu}g\;g^{-1}$ for brown rice, $0.029{\pm}0.001_4\;{\mu}g\;g^{-1}$ for black rice, and $0.034{\pm}0.002\;{\mu}g \;g^{-1}$ for barley. The detection limits ($3\sigma$) for Se was $0.012\;ng\;g^{-1}$.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.41 no.2
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• pp.87-94
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• 2017

Because the cavitation flow driven by an underwater propeller corrodes the materials around it and generates a high level of noise, it has become an important topic in engineering research. In this study, computational fluid dynamics techniques are applied to simulate cavitation flow, and the noise in the flow is predicted by applying the acoustic analogy to the predicted flow. The predicted results are compared with measurement results and other predictions in terms of surface pressure distribution and the temporal variation in liquid volume fraction. The predicted results are found to be in good agreement with the measured results. The source of the noise attributed to the time rate of change in the liquid volume fraction around the hydrofoil is modeled as a monopole source, and the source of the noise due to unsteady pressure perturbations on the hydrofoil surface is modeled as a dipole source. Then the predicted noise results are analyzed in terms of directivity and SPL spectrum. The noise caused by unsteady pressure perturbations was dominant in the entire frequency range considered in the study.

• Journal of the Korean Magnetics Society
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• v.22 no.1
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• pp.15-18
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• 2012

The olivine structured $LiFe_{0.9}Mn_{0.1}PO_4$ material was prepared by solid state method, and was analyzed by x-ray diffractometer (XRD), superconducting quantum interference devices (SQUID) and Mossbauer spectroscopy. The crystal structure of $LiFe_{0.9}Mn_{0.1}PO_4$ was determined to be orthorhombic (space group: Pnma) by Rietveld refinement method. The value of N$\acute{e}$el temperature ($T_N$) for $LiFe_{0.9}Mn_{0.1}PO_4$ was determined 50 K. The temperature dependence of the magnetization curves showed magnetic phase transition from paramagnetic to antiferromagnetic at $T_N$ by SQUID measurement. M$\ddot{o}$ssbauer spectra of $LiFe_{0.9}Mn_{0.1}PO_4$ showed 2 absorption lines at temperatures above $T_N$ and showed asymmetric 8 absorption lines at temperatures below $T_N$. These spectra occurred due to the magnetic dipole and electric quardrupole interaction caused by strong crystalline field at asymmetric $FeO_6$ octahedral sites.

• Journal of the Korean Vacuum Society
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• v.15 no.6
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• pp.581-586
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• 2006

We have generated the argon plasma in the diode chamber based on the established coaxial electrode type and investigated the emitted visible light for emission spectroscopy. We applied various voltages $2\sim3.5kV$ to the device by 0.5kV, and obtained the emission spectrum data for the focused plasma in the diode chamber on the argon pressure of 330 mTorr. The Ar I and Ar II emission line are observed. The electron temperature and ion density have been measured by the Boltzmann plot and Saha equation from assumption of local thermodynamic equilibrium (LTE) The Ar I and Ar II ion densities have been calculated to be $\sim10^{15}/cc\;and\;~10^{13}/cc$, respectively, from Saha equation.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.2
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• pp.125.2-125.2
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• 2012

최근 아태지역 국제민간항공기구는 GPS의 항공이행을 위한 전리층 연구 태스크포스(Ionospheric Study Task Force, ISTF)를 결성하였다. 안전한 GPS 항공이행을 위해서는 지역적 그리고 전지구적 전리층 특성을 파악한 후 이를 기반으로 실시간 전리층 모델이 필요하다. 한국천문연구원은 ISTF의 전리층 변화 특성 분석에 관한 기술분과를 담당하고 있으며 GPS 항공이행 실시간 전리층 모델개발을 위한 아태지역 전리층 분석방법 및 표준규범을 수립하고 있다. 아태지역 전리층 연구에 앞서 우리나라 전리층 특성을 파악하고자 한국천문연구원이 1998년부터 운영 중에 있는 대전 국제 GPS 기준점으로부터 관측된 자료를 이용하여 태양 11년 주기에 해당하는 GPS TEC를 분석하였다. 또한, 해당 기간 동안 우리나라 양/음 전리층 폭풍 발생 빈도에 관한 통계분석을 실시하였다. 본 발표에서는 GPS TEC의 태양 극자외선 플럭스와 10.7 cm 태양전파와의 상관관계 차이점, 연변화 및 계절적 변화 그리고 이에 대한 시간 변화에 대해 보고한다. 또한 GPS TEC의 27일 주기 변화에 특성에 대해 토의하며, 우리나라 상공 전리층 폭풍의 계절적 분포에 대해 논의할 것이다. 끝으로 최근 한국천문연구원 GPS TEC 상시 관측자료에 나타난 태양 및 지자기 폭풍에 따른 전리층 폭풍 사례에 대해 고찰하고 이를 바탕으로 고층대기 연구가 GPS로 대표되는 현업에 적용되는 최근 현황을 소개할 것이다.

• Journal of the Korean Chemical Society
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• v.44 no.5
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• pp.453-459
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• 2000

FED has deserved an intensive attentioD as a new flat panel display. The present investigationaims at undemtanding the photoluminescence and cathodoluminescent properties of hGaO$_3$: $Eu^{3+}$ phosphor bytaking into account the possibility that this phosphor could be applied for FED. In onler to investigate on.sucha detailed behavior; 8everM experimental skil18 Je conducted to the LaGaO$_3$:$Eu^{3+}$ phosphoL The excimtion srectrum artd emission spectmn were rnezsured in the UV range and then decay curve of $^5D_0$+$^7F_j$transitions\vas examined. The decay behavior of $^5D_0$ emission was anMyzed by a newly Iuoposed cross-relaxation mech-ani8In in asswiation with inteFwnter di1ffision (or migration). The cross-mlaxation from $^5D_0$ to CTB (Cha'geTransfer Band) wuld be a quite retsonable by considering the excitation spectrum. It could be also found thatthe quenching type was changed from ditfrsion controlled process to the direct quenching process -s inJeasing $Eu^{3+}$ oncntration.