Emission spectroscopic diagnostics of argon arc Plasma in Plasma focus device for advanced lithography light source |
Hong, Y.J.
(Department of Electrophysics/PDP research center, Kwangwoon University)
Moon, M.W. (Department of Electrophysics/PDP research center, Kwangwoon University) Lee, S.B. (Department of Electrophysics/PDP research center, Kwangwoon University) Oh, P.Y. (Department of Electrophysics/PDP research center, Kwangwoon University) Song, K.B. (Department of Electrophysics/PDP research center, Kwangwoon University) Hong, B.H. (Department of Electrophysics/PDP research center, Kwangwoon University) Seo, Y.H. (Department of Electrophysics/PDP research center, Kwangwoon University) Yi, W.J. (Samsung SDI Central Research) Shin, H.M. (Department of Electrophysics/PDP research center, Kwangwoon University) Choi, E.H. (Department of Electrophysics/PDP research center, Kwangwoon University) |
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