• Title/Summary/Keyword: 2구면경계

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Three-Spherical-Mirror System Corrected for Three Kinds of Third Rrder Aberrations (3종의 3차수차가 보정된 3구면경계)

  • 오승경;이종웅;권우근;홍경희
    • Korean Journal of Optics and Photonics
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    • v.6 no.2
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    • pp.93-100
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    • 1995
  • 3구면경계에서 aplanat 조건을 해석적으로 유도하고 이를 바탕으로 3종의 3차수차가 보정된 3구면 경계의 형태 및 존재영역을 조사하였다. 실상을 맺으면서 aplanat 저건을 만족하는 3구면경계는 유효초점거리가 양수인 경우 PPN, NPP, PNP 형태의 해가 존재하였으며 N은 볼록 거울, P는 오목 거울을 나타낸다. 유효초점거리가 음수인 경우 NPN, NPP, PNP, NNP형의 4종류의 형태가 존재하였다. 3종의 3차수차가 보정된 3구면경계에서 astigmatic aplanat는 실상을 맺는 해가 존재하지 않았다. Flat field aplanat는 PPN, PNP, NPP형태의 해가 존재하였고 distortion free aplanat의 경우는 PPN, PNP, NPN, NPP, NNP형의 해가 존재하였다.

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Four Spherical Mirror Stepper Optics for Deep UV Micro-Lithography (Deep UV 마이크로 리소그라피용 Stepper를 위한 4구면 반사경계)

  • 조영민;이상수;박성찬
    • Korean Journal of Optics and Photonics
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    • v.2 no.4
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    • pp.186-192
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    • 1991
  • For the micro-lithography using a excimer laser beam $(\lambda\leq0.248$\mu\textrm{m})$. a mirror system consisting of four spherical surfaces with reductlon magnification 5X is designed. Initially the aplanat, flat field and the distortion free condition of the system are analytically investigated within Seidel 3rd order aberrations. And the computer-aided optimization technique has been employed for the further improved performance of the system. The final system has N.A. of 0.15 and image field diameter 3.3 mm, and has the diffraction-limited performance for KrF eximer laser beam.

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Design and Aberration Analysis of Four-Spherical Mirror System Corrected for 4 Aberrations (4개의 수차가 보정된 유한 물체점을 갖는 4-구면 반사경계의 설계 및 수차해석)

  • 김종태;공홍진;이상수
    • Korean Journal of Optics and Photonics
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    • v.2 no.3
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    • pp.127-132
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    • 1991
  • We have obtained the analytic solutions of the four spherical mirror system free from the Seidel third order aberratios which are spherical aberration, coma, astigmatism, and distortion, Vignetting. Petzval field curvature, and optical properties according to the design parameters are numerically investigated and optimized. The numerical aperture of this system is 0.2 and the half field angle is $1.5^{\circ}$.

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Optical Design of a High-numerical-aperture Objective with a Reflective Focal Reducer (반사형 Focal Reducer를 가지는 높은 개구수의 대물렌즈 설계)

  • Jong Ung Lee
    • Korean Journal of Optics and Photonics
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    • v.34 no.6
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    • pp.248-260
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    • 2023
  • A 0.5-numerical-aperture (NA) refractive-reflective objective, composed of a low-NA refractive and a reflective focal reducer, is designed. A 0.25-NA Lister objective is used for the refractive. A two-spherical-mirror system, corrected for spherical aberration, coma, and astigmatism is used for the reflective focal reducer. In spite of high NA, the refractive-reflective objective has an 18-mm working distance and improved imaging performance, compared to the 0.25-NA Lister objective.

Curvature Linear Equation of a Two-Mirror System with a Finite Object Distance (유한 물체 거리를 갖는 2 반사경계의 곡률 선형 방정식)

  • Lee, Jung-Gee;Rim, Cheon-Seog
    • Korean Journal of Optics and Photonics
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    • v.16 no.5
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    • pp.423-427
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    • 2005
  • In this paper, we propose easily tooling method for Seidel third order aberration, which are not well utilized in actual design process due to the complication of mathematical operation and the difficulty of understanding Seidel third order aberration theory, even though most insightful and systematic means in pre-designing for the initial data of optimization. First, using paraxial ray tracing and Seidel third order aberration theory, spherical aberration coefficient is derived for a two-mirror system with a finite object distance. The coefficient, which is expressed as a higher-order nonlinear equation, consists of design parameters(object distance, two curvatures, and inter-mirror distance) and effective focal length(EFL). Then, the expressed analytical equation is solved by using a computer with numerical analysis method. From the obtained numerical solutions satisfying the nearly zero coefficient condition($<10^{-6}$), linear fitting process offers a linear relationship called the curvature linear equation between two mirrors. Consequently, this linear equation has two worthy meanings: the equation gives a possibility to obtain initial design data for optimization easily. And the equation shows linear relationship to a two-mirror system with a finite object distance under the condition of corrected third order spherical aberration.

Optical design of three-mirror telescope system for infra-red and visible imaging (적외선 및 가시광선 결상용 3반사망원경계의 설계)

  • 이종웅;홍경희;권우근
    • Korean Journal of Optics and Photonics
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    • v.7 no.3
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    • pp.183-190
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    • 1996
  • To design three-mirror telescope system (F/8, 120 inch in focal length) for visible and infra-red band imaging, methods for power configuring and correction of the third order aberrations were studied. In the design of the telescope system, a three-mirror system corrected for spherical aberration, coma, and astigmatism was used for infra-red imaging, and the aberrations were corrected by using conic surfaces. For visible imaging, a singlet corrector lens was appended at the front of the focal plane to correct filed curvature. The telescope system has diffraction limited performance for 10 ${\mu}{\textrm}{m}$ in wavelength within 2.4$^{\circ}$ of field-of-view. In the visible band imaging, the rms spot size of the telescope system is less than 25 ${\mu}{\textrm}{m}$ within 3$^{\circ}$ of field-of-view for monochromatic light, and the telescope system satisfies flat field condition for CCD application.

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Flood Discharge Estimation of Watershed Considering Weather Radar (기상레이더와 연계한 유역에서의 홍수량 산정)

  • Han Kun Yeun;Kim Gwang Seob;Kim Kyung Eak;Choi Kyu Hyun
    • Proceedings of the Korea Water Resources Association Conference
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    • 2005.05b
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    • pp.900-903
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    • 2005
  • 본 연구에서는 기상레이더의 원시자료를 홍수해석분야에 적용하기 위해서 먼저 3차원 공간상에서 구면좌표계값을 가지는 레이더 자료를 직교 좌표계로 변환하기 위한 CAPPI 산출 프로그램을 개발하였다. 개발된 모형은 CAPPI 자료의 이용목적에 따라서 다양한 해상도 및 고도에 대한 자료가 필요할 수 있다는 생각하에 임의의 해상도 및 고도 등에 대한 옵션을 사용자가 임의로 지정함으로서 빠르고 효율적으로 계산할 수 있도록 구성하였다. 기상레이더와 연계한 개선된 강우량 자료를 산정하기 위해서 cokriging 기법을 적용하였는데, 강우의 공간적 분포양상 및 경계를 정확하게 묘사할 수 있는 레이더 자료와 한 지점에서 좋은 정확도를 가지는 강우량 자료를 조합한 2차원 정량강우량 산정을 위해서 지형통계학적 분석을 실시하였다. 2002년 태풍 루사에 대해서 본 기법을 적용하였으며, 산정된 2차원 정량강우량은 유역에서의 실시간 홍수량을 산정하기 위해서 이용되었다. 본 연구에서는 기상-강우-유역홍수량 산정에 이르는 통합홍수해석을 실시함으로서 유역 유출량 산정에 대한 새로운 개선된 방향을 제시하고자 한다.

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Paraboloidal 2-mirror Holosymmetric System with Unit Maginification for Soft X-ray Projection Lithography (연X-선 투사 리소그라피를 위한 등배율 포물면 2-반사경 Holosymmetric System)

  • 조영민;이상수
    • Korean Journal of Optics and Photonics
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    • v.6 no.3
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    • pp.188-200
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    • 1995
  • A design of unit magnification 2-mirror system with high resolution is presented. It is for soft X-ray(wavelength of 13 nm) projection imaging and suitable for preparation of high density semiconductor chip. In general, a holosymmetric system with unit magnification has the advantage that both coma and distortion are completely eliminated. In our holosymmetric 2-mirror system, spherical aberration is addtionally removed by using two identical paraboloidal mirror surfaces and field curvature aberration is also corrected by balancing Petzval sum and astigmatism which depends on the distance between two mirrors, so that the system is a aplanatic flat-field paraboloidal 2-mirror holosymmetric system. This 2-mirror system is small in size, and has a simple configuration with rotational symmetry about optical axis, and has also small central obscuration. Residual finite aberrations, spot diagrams, and diffraction-based MTF's are analyzed for the check of performances as soft X-ray lithography projection system. As a result, the image sizes for the resolutions of$0.25\mum$and $0.18\mum$are 4.0 mm, 2.5 mm respectively, and depths of focus for those are $2.5\mum$, $2.4\mum$respectively. This system should be useful in the fabrication of 256 Mega DRAM or 1 Giga DRAM. DRAM.

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The Under Water Ambient Noise at Voting-il Bay (영일만 부근에서의 수중소음)

  • HA Kang Lyeol;YOON Gab Dong
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.16 no.3
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    • pp.197-201
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    • 1983
  • Underwater ambient noise level was measured at two points near the Youngil Bay. The environmental characteristics depend upon oceanographic conditions of sound propagation ana its implication on the source of ambient noise. Some noise sources were estimated, and the effect of the oceanographic conditions on the noise level variation had been considered. The results were as follows : 1) At the nearshore station of Youngil Bay, the ambient noise level in the near bottom(45m) was lower than that of the near surface(10m) by 15dB. This difference was due to spherical spreading from the upper to the lower layer. 2) At the open sea station which is located outside of the thermal front existing near the Youngil Bay, the ambient noise level of the upper layer(20m) was higher than that of the lower layer (100m) by $8{\sim}12dB$ below 50Hz and $15{\sim}23dB$ above 50Hz. 3) Above 60Hz the ambient noise level at the nearshore station was higher than that of the open sea station, while below 60Hz, the result was reverse. It appears that a boundary layer existed between the two stations.

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A Study of CHAMP Satellite Magnetic Anomalies in East Asia (동아시아지역에서의 CHAMP 위성자료에서의 지각 자기이상의 연구)

  • Kim, Hyung Rae
    • Economic and Environmental Geology
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    • v.54 no.1
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    • pp.117-126
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    • 2021
  • Satellite magnetic observations reflect the magnetic properties of deep crust about the depth of Curie isotherm that is a boundary where the magnetic nature of the rocks is disappeared, showing long wavelength anomalies that are not easily detected in near-surface data from airborne and shipborne surveys. For this reason, they are important not only in the analyses on such as plate reconstruction of tectonic boundaries and deep crustal structures, but in the studies of geothermal distribution in Antarctic and Greenland crust, related to global warming issue. It is a conventional method to compute the spherical harmonic coefficients from global coverage of satellite magnetic observations but it should be noted that inclusion of erroneous data from the equator and the poles where magnetic observations are highly disturbed might mislead the global model of the coefficients. Otherwise, the reduced anomaly model can be obtained with less corruption by choosing the area of interest with proper data processing to the area. In this study, I produced a satellite crustal magnetic anomaly map over East Asia (20° ~ 55°N, 108° ~ 150°E) centered on Korean Peninsula, from CHAMP satellite magnetic measurements about mean altitude of 280 km during the last year of the mission, and compared with the one from global crustal magnetic model (MF7). Also, a comparison was made with long wavelength anomalies from EMAG2 model compiled from all near-surface data over the globe.