• Journal of the Korean Crystal Growth and Crystal Technology
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• v.8 no.2
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• pp.221-226
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• 1998

Amorphous (Ba, Sr)$TiO_3$[BST] layer(30, 70 nm) was introduced between crystalline BST and $RuO_2$electrode to realize double-layered BST structure in order to improve the properties of BST film. The structure and surface morphology of double-layered BST film were modified by the application of amorphous BST layer; that is, surface became smoother and grain size increased abruptly. Amorphous layer thicker than 30 nm was effective to hinder the influence of $RuO_2$surface on the structure of as-grown BST films by in-situ process. Dielectric constant of double-layered BST film was improved dramatically from 152 to 340 and leakage current was lowered from $1.25{\times}10^{-5}A/{\textrm}{cm}^2);to;6.85{\times}10^{-7}A/{\textrm}{cm}^2$, respectively.

• Korean Journal of Materials Research
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• v.20 no.5
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• pp.241-245
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• 2010

One of the weak points of the Cr-doped SZO is that until now, it has only been fabricated on perovskite substrates, whereas NiO-ReRAM devices have already been deposited on Si substrates. The fabrication of RAM devices on Si substrates is important for commercialization because conventional electronics are based mainly on silicon materials. Cr-doped ReRAM will find a wide range of applications in embedded systems or conventional memory device manufacturing processes if it can be fabricated on Si substrates. For application of the commercial memory device, Cr-doped $SrZrO_3$ perovskite thin films were deposited on a $SrRuO_3$ bottom electrode/Si(100)substrate using pulsed laser deposition. XRD peaks corresponding to the (112), (004) and (132) planes of both the SZO and SRO were observed with the highest intensity along the (112) direction. The positions of the SZO grains matched those of the SRO grains. A well-controlled interface between the $SrZrO_3$:Cr perovskite and the $SrRuO_3$ bottom electrode were fabricated, so that good resistive switching behavior was observed with an on/off ratio higher than $10^2$. A pulse test showed the switching behavior of the Pt/$SrZrO_3:Cr/SrRuO^3$ device under a pulse of 10 kHz for $10^4$ cycles. The resistive switching memory devices made of the Cr-doped $SrZrO_3$ thin films deposited on Si substrates are expected to be more compatible with conventional Si-based electronics.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.285-285
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• 2011

EUVL (Extreme Ultra Violet Lithography) is one of competitive lithographic technologies for sub-30nm fabrication of nano-scale Si devices that can possibly replace the conventional photolithography used to make today's microcircuits. Among the core EUVL technologies, mask fabrication is of considerable importance since the use of new reflective optics having a completely different configuration compared to those of conventional photolithography. Therefore new materials and new mask fabrication process are required for high performance EUVL mask fabrication. This study investigated the etching properties of SnO2 (Tin Oxide) as a new absorber material for EUVL binary mask. The EUVL mask structure used for etching is SnO2 (absorber layer) / Ru (capping / etch stop layer) / Mo-Si multilayer (reflective layer) / Si (substrate). Since the Ru etch stop layer should not be etched, infinitely high selectivity of SnO2 layer to Ru ESL is required. To obtain infinitely high etch selectivity and very low LER (line edge roughness) values, etch parameters of gas flow ratio, top electrode power, dc self - bias voltage (Vdc), and etch time were varied in inductively coupled Cl2/Ar plasmas. For certain process window, infinitely high etch selectivity of SnO2 to Ru ESL could be obtained by optimizing the process parameters. Etch characteristics were measured by on scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) analyses. Detailed mechanisms for ultra-high etch selectivity will be discussed.

• Clean Technology
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• v.22 no.1
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• pp.16-28
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• 2016

Textile industry is considered as one of the most polluting sectors in terms of effluent composition and volume of discharge. It is well known that the effluents from textile dying industry contain not only chromatic substances but also large amounts of organic compounds and insolubles. The azo dyes generate huge amount of pollutions among many types of pigments. In general, the electrochemical treatments, separating colors and organic materials by oxidation and reduction on electrode surfaces, are regarded as simpler and faster processes for removal of pollutants compared to other wastewater treatments. In this paper the electrochemical degradation characteristics of dye wastewater containing CI Direct Blue 15 were analyzed. The experiments were performed with various anode materials, such as RuO₂/Ti, PtO₂/Ti, IrO₂/Ti and graphite, with stainless steel for cathode. The optimal anode material was located by changing operating conditions like electrolyte concentration, current density, reaction temperature and initial pH. The degradation efficiency of dye wastewater increased in proportion to the electrolyte concentration and the current density for all anode materials, while the temperature effect was dependent on the kind. The performance orders of anode materials were RuO₂/Ti > PtO₂/Ti > IrO₂/Ti > graphite in acid condition and RuO₂/Ti > IrO₂/Ti > PtO₂/Ti > graphite in neutral and basic conditions. As a result, RuO₂/Ti demonstrated the best performance as an anode material for the electrochemical treatment of dye wastewater.

• Korean Chemical Engineering Research
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• v.53 no.5
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• pp.531-539
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• 2015

Chlor-alkali industry is one of the largest electrochemical processes which annually producing 70 million tons of sodium hydroxide and chlorine from sodium chloride solution. $DSA^{(R)}$ (Dimensionally Stable Anodes) electrodes such as $RuO_2$ and $IrO_2$, which is popular in chlor-alkali process, have been investigated to improve the chlorine generation efficiency. Although DSA electrode has been developed with various researches, understanding of the chlorine evolution mechanism is essential to the development of highly efficient DSA electrode. In this review paper, chlorine generation mechanisms are summarized and that of key factors are identified to systematically understand the chlorine generation mechanism. Rate determining step, effect of pH, reaction intermediate, and electrode crystal structure were intensively overviewed as key factors of the chlorine mechanism.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.296-296
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• 2013

Supercapacitor is a capacitor with extraordinarily high energy density, which basically consists of current collector, active material and electrolyte. Ruthenium oxide ($RuO_2$) is one of the most widely studied active materials due to its high specific capacitance and good electrical conductivity. In general, it is known that the coating of $RuO_2$ on nanoarchitectured current collector shows improved performance of energy storage device compared to the coating on the planar current collector. Especially, the surface structure with standing coaxial nanopillars are most desirable since it can provide direct paths for efficient charge transport along the axial paths of each nanopillars and the inter-nanopillar spacing allows easy access of electrolyte ions. However, well-known fabrication methods for metal or metal oxide nanopillars, such as the process using anodize aluminum oxide (AAO) templates, often require long and complicated nanoprocess.In this work, we developed relatively simple method fabricating indium tin oxide (ITO) nanopillars via sputtering. We also electrodeposited $RuO_2$ nanoparticles onto these ITO nanopillars and investigated its physical and electrochemical properties.

• Journal of Environmental Science International
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• v.18 no.11
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• pp.1235-1245
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• 2009

The purpose of this study is to investigate electro-generation of free Cl, $ClO_2$, $H_2O_2$ and $O_3$ and degradation of Rhodamine B in solution using Ru-Sn-Sb electrode. Electrolysis was performed in one-compartment reactor using a dimensionally stable anode(DSA) of Ru-Sn-Sb/Ti as the working electrode. The effect of applied current (0.5-3 A), electrolyte type (NaCl, KCl, HCl, $Na_2SO_4$ and $H_2SO_4$) and concentration (0.5-2.5 g/L), air flow rate (0-3 L/min) and solution pH (3-11) was evaluated. Experimental results showed that concentration of 4 oxidants was increased with increase of applied current, however optimum current for RhB degradation was 2 A. The generated oxidant concentration and RhB degradation of the of Cl type-electrolyte was higher than that of the sulfate type. The oxidant concentration was increased with increase of NaCl concentration and optimum NaCl dosage for RhB degradation was 1.75 g/L. Optimum air flow rate for the oxidants generation and RhB degradation was 2 L/min. $ClO_2$ and $H_2O_2$ generation was decreased with the increase of pH, whereas free Cl and $O_3$ was not affected by pH. RhB degradation was increase with the pH decrease.

• Korean Chemical Engineering Research
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• v.48 no.2
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• pp.275-282
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• 2010

A characteristic study of aqueous chlorine dioxide generation from sodium chlorite($NaClO_2$) by an undivided electrochemical cell with different anode materials were performed. $IrO_2$-coated Ti, $RuO_2$-coated Ti and DSA were used as anode materials and Pt-coated Ti electrode was used as cathode. Various electrochemical cell operating parameters such as cell residence time($t_R$), initial feed solution pH, sodium chlorite and sodium chloride(NaCl) concentration and applied current for the generation of chlorine dioxide in an un-divided cell were investigated and optimized. Estimated optimal cell residence times in $IrO_2$-coated Ti, $RuO_2$-coated Ti and DSA anode material systems were around 2.27, 1.52 and 1.52 sec, respectively. Observed optimum initial feed solution pH was around 2.3 in all anode material systems. Optimum sodium chlorite concentrations in $IrO_2$-coated Ti, $RuO_2$-coated Ti and DSA anode systems were around 0.43, 0.43 and 0.32 g/L, respectively. Optimum electrolyte concentration and applied current were around 5.85 g/L and 0.6 A in all anode systems. Current efficiencies of $IrO_2$-coated Ti, $RuO_2$-coated Ti and DSA anode systems under optimum conditions were 79.80, 114.70 and 70.99%, respectively. Obtained energy consumptions for the optimum generation of chlorine dioxide were 1.38, 1.03 and $1.61W{\cdot}hr/g-ClO_2$, respectively.

• Journal of the Korean Electrochemical Society
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• v.7 no.4
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• pp.206-210
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• 2004

All array of carbon paste-based electrodes was prepared by screen printing the carbon paste modified with metal oxides $(TiO_2,\;RuO_2,\;PbO_2,\;Ni(OH)_2)$ and Prussian blue (PB). An electronic tongue system was assembled with the carbon-paste electrode array, and applied to discriminate the tastes of various commercial beverages and foods by measuring the chronoamperometric responses to the samples diluted in 0.1M carbonate buffer (pH 9.6). The results were analyzed with principal component analysis(PCA) method and plotted on two dimensional PCA coordinate; it was apparent that the amperometric electronic tongue system could discriminate the types of various foods and beverages.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.28-28
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• 2018

수전해(electrochemical water splitting)는 연료전지의 가역적 역반응을 이용하여 물로부터 수소와 산소를 발생시키는 기술이다. 산소는 음극에서 발생하는데, 이 때 음극 표면은 고농도의 산소 음이온 및 라디칼에 장시간 노출된다. 때문에 기계적, 화학적 내구성이 우수한 전극재를 사용할 필요가 있다. 불용성 전극 (dimensionally stable anode, DSA)은 이러한 기술적 요구사항을 잘 만족하는 상용화 된 전극이다. 티타늄이나 티타늄 합금 표면에 촉매를 미량 반복 살포하여 산화물 형태의 매우 견고한 표면을 형성함으로서 내구성을 확보한다. 그러나, 보통 DSA 제조 기법의 특징에 따라 다공성 표면 구조를 사용하지는 않기 때문에 생산 과정이 복잡하고 비용이 많이 발생하는 문제를 여전히 나타내고 있다. 본 연구는 상기 문제를 개선하기 위한 수전해용 음극 제조 기술에 관한 연구이다. 티타늄과 티타늄 합금은 동일한 양극산화 기술 적용이 가능하다는 점을 이용하여 티타늄 기판으로부터 다공성 구조를 형성함으로써 바인더의 사용을 배제하였다. 단일공정양극산화기법 (single-step anodization)을 이용하여 $IrO_2$와 $RuO_2$를 도핑함으로써 TiO2에 촉매능을 부여하였다. 제조된 나노튜브들의 구조적 특징을 HR-TEM (High-resolution transmission electron microscope)과 FE-SEM (Field-emission scanning electron microscope)으로 분석하고 SAED (selective area electron diffraction) 패턴을 분석하여 전극재의 결정성을 확인하였다. 알칼라인 분위기에서 일으킨 산소발생반응 (oxygen evolution reaction, OER)의 LSV (linear sweep voltammetry) 결과를 XPS (X-ray photoelectron microscoscopy) 결과와 연관지어 촉매 표면 구조와 과전압의 관계를 해석하였다. LSV 결과로부터 Tafel 분석을 연달아 수행함으로써 전극의 속도결정단계를 정의하였다. 최종적으로 사이클 테스트 통하여 DSA로써의 성능을 평가하였다.