• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.10
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• pp.1406-1418
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• 2002

The direct simulation Monte Carlo(DSMC) method is employed to calculate the etch rate on Al wafer. The etchant is assumed to be Cl$_2$. The etching process of an Al wafer in a helicon plasma etcher is examined by simulating molecular collisions of reactant and product. The flow field inside a plasma etch reactor is also simulated by the DSMC method fur a chlorine feed gas flow. The surface reaction on the Al wafer is simply modelled by one-step reaction: 3C1$_2$+2Allongrightarrow1 2AIC1$_3$. The gas flow inside the reactor is compared for six different nozzle locations. It is found that the flow field inside the reactor is affected by the nozzle locations. The Cl$_2$ number density on the wafer decreases as the nozzle location moves toward the side of the reactor. Also, the present numerical results show that the nozzle location 1, which is at the top of the reactor chamber, produces a higher etch rate.

• Journal of computational fluids engineering
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• v.19 no.2
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• pp.40-48
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• 2014

For rarefied gas flow regimes, physical phenomena such as velocity slip and temperature jump occur on the solid body surface. To predict these phenomena accurately, either the Navier-Stokes solver with a slip boundary condition or the direct simulation Monte Carlo method should be used. In the present study, flow simulations of a wedge were conducted in Mach-10 flow of argon gas for several different flow regimes using a two-dimensional Navier-Stokes solver with the Maxwell slip boundary condition. The results of the simulations were compared with those of the direct simulation Monte Carlo method to assess the present method. It was found that the values of the velocity slip and the temperature jump predicted increase as the Knudsen number increases. Also, the results are comparatively reasonable up to the Knudsen number of 0.05.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.625-630
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• 2000

Numerical and experimental investigations are peformed for the rarefied gas flows in pumping channels of a helical-type drag pump. Modern turbomolecular pumps include a drag stage in the discharge side, operating roughly in $10^{-2}{\sim}10Torr$. The flow occurring in the pumping channel develops from the molecular transition to slip flow traveling downstream. Two different numerical methods are used in this analysis: the first one is a continuum approach in solving the Navier-Stokes equations with slip boundary conditions, and the second one is a stochastic particle approach through the use of the direct simulation Monte Carlo(DSMC) method. The flow in a pumping channel is three-dimensional(3D), and the main difficulty in modeling a 3D case comes from the rotating frame of reference. Thus, trajectories of particles are no longer straight lines. In the Present DSMC method, trajectories of particles are calculated by integrating a system of differential equations including the Coriolis and centrifugal forces. Our study is the first instance to analyze the rarefied gas flows in rotating frame in the presence of noninertial effects.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 1998.04a
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• pp.9-9
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• 1998

가스터빈 연소기의 난류유동장을 구성하는 기본적인 유동형태는 크게 밀폐관내의 돌연 확대를 가지는 동축제트, 선회유동, 그리고 연소공기공 및 회석공기공을 통해 연소실에 수직방향으로 유입되는 제트유동 등으로 분류할 수 있다. 실제 가스터빈 연소기내의 난류유동장을 수치해석하기 위해서는 임의의 형상을 갖는 3차원 유동장을 모사할 수 있는 수치해석법과 고차정확도를 유지하면서도 수렴안정성을 만족시키는 대류항 처리기법 등과 같은 수치모델의 개발이 선행되어야 하며, 이와 함께 복잡한 난류연소유동장을 정확히 묘사할 수 있는 난류모델 및 난류연소모델의 개발 및 검증이 가장 중요한 요인이 된다. 또한 가스터빈 연소기의 최적 설계는 넓은 작동구간에서 높은 효율, NOx 및 CO 배기량의 저감, 희박연소 가연한계의 확장, 연소계통에서의 낮은 압력강하, 낮은 연소벽면온도와 온도구배를 유지시키기 위한 공기에 의한 충분한 냉각 같은 서로 상충되는 설계조건을 만족해야 한다. 그리고, 이러한 상충된 연소설계조건들을 충족시키는 최적 연소기의 설계를 위해서는 실험적인 연구뿐만 아니라 연소기내의 물리적인 현상을 잘 반영할 수 있는 물리적 모델을 바탕으로 한 연소유동의 해석적인 연구를 필요로 한다. 본 연구에서는 원통형 가스터빈 연소기의 등온 및 연소유동장, 그리고 연소기와 연결되는 Scroll 내부의 난류유동장에 대한 수치해석을 수행하여 수치 및 물리모델의 예측능력을 검증하였고, 가스터빈 연소유동장 해석에 관련된 중요 논점들에 대하여 심도있게 분석하였다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.33 no.11
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• pp.65-73
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• 2005

The compressible flow of reactive fluid is investigated by using the transonic small-disturbance (TSD) model and the one-step first-order Arrhenuis chemical reaction. The fluid flow is restricted to dilute premixed reactions with small heat release. The effects of channel shape and Mach number on transonic combustion are studied by numerical analysis. The results show that the channel divergence increases the chemical reaction within the given channel length whereas the channel convergence inhibits the chemical reaction near the outlet and that increasing the inlet flow Mach number at a fixed reaction rate causes the flow acceleration in a diverging channel and the appearance of weak shock waves which do not show in the inert flow case. It also helps to increase the pressure and temperature near the diverging channel outlet and to consume the reactant within the given channel length.

• Journal of Energy Engineering
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• v.9 no.4
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• pp.348-357
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• 2000

본 연구에서는 동해화력 순환유동층 보일러와 유사한 3개의 사이클론을 갖는 직사각형 구조의 순환유동층 반응기를 이용하여 동해화력 운전조건 -연소로 공기 속도, 일-이차 공기비, 전체 고체량(inventory), 입도 및 입도분포 등- 에 따른 축방향 고체 체류량 및 순환량 등의 수력학적 특성을 고찰하였다. 상승관에서의 공기유속(U$_{0}$)이 증가함에 따라, 또는 PA/[PA+SA]비가 증가함에 따라, 그리고 전체 고체량(inventory)이 증가함에 따라 고채 채류량 및 순환량은 증가하는 것으로 나타났다. 또한 넓은 입도 분포를 갖는 석탄 회재의 경우는 균일한 입도 분포의 입자들에 비해 입자 비산량 및 고체 순환량이 작을 것으로 나타났다. 한편, 층내에서의 고체 체루량 분포를 감소지수 a 및 K를 사용하여 나타낼 수 있었으며, a 및 K와 유속 및 입자간의 상관 특성치를 도출하여 유동 및 순환특성을 고찰하였다. 상기의 상관수는 균일한 입도의 모래에 비해 석탄회재가 비교적 큰 값을 나타내었으며, 상관수가 클수록 희박상 영역에서의 비산 및 고체 순환량이 작은 것으로 나타났다.다.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2000.11a
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• pp.35-35
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• 2000

추력 편향제어(Thrust Vector Control)는 위성 발사체나 대륙간 탄도 미사일과 같이 공기가 희박한 고 고도에서의 비행자세 제어와 궤도수정, 지대공이나 함대공 유도탄처럼 발사 직후 저속에서 임의의 방향으로 급선회해야 할 경우에 노즐의 배출가스 방향을 직접 조절하여 모멘트를 발생시키는 제어방식을 말한다. 이 방식 중 널리 사용되고 있는 제트 베인 추력 편향제어방식은 베인이 직접 고온, 고속의 가스 흐름내에서 작용하기 때문에 재료는 내열성과 제트 베인 주위에 형성되는 유동 특성, 그리고 베인간의 유동 간섭이 중요한 인자이다. 그러므로, 제트 베인의 실용화는 수치해석에 의존하던 개발 초기나 중기의 설계 단계에서 벗어나 실제 크기나 축소모델의 유동 모사 시험에 의해 성능이 검증되어야 한다.(중략)

• Transactions of the Korean Society of Automotive Engineers
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• v.6 no.3
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• pp.26-33
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• 1998

An experimental study has been conducted for the three-dimensional in-cylinder swirl flow under steady conditions. Velocity fields are measured by using an LDV at various valve lifts. Effects of geometry of inlet ports on swirl flows are investigated for standard and helical ports. Swirl distributions evaluated from velocity measurements are compared with those obtained from an impulse torque swirl meter. Results show that the helical port generates more intensive swirl than the standard one but it causes red- uction in air flow coefficient. At the lower valve lift, no significant difference is observ- ed in non-dimensional swirl values between two ports because of limited pre-swirl effect, while it becomes significant as the valve lift increases.

• Journal of computational fluids engineering
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• v.4 no.3
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• pp.63-70
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• 1999

A Direct simulation Monte-Carlo (DSMC) code is developed, which employs the Monte-Carlo statistical sampling technique to investigate hypersonic rarefied gas flows accompanying chemical reactions. The DSMC method is a numerical simulation technique for analyzing the Boltzmann equation by modeling a real gas flow using a representative set of molecules. Due to the limitations in computational requirements. the present method is applied to a flow around a simple two-dimensional object in exit velocity of 7.6 km/sec at an altitude of 90 km. For the calculation of chemical reactions an air model with five species (O₂, N₂, O, N, NO) and 19 chemical reactions is employed. The simulated result showed various rarefaction effects in the hypersonic flow with chemical reactions.

• Transactions of the Korean Society of Automotive Engineers
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• v.6 no.5
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• pp.37-44
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• 1998

Lean burn combustion is an important concept for improving the fuel consumption and exhaust emissions. However, the lean burning is associated with increased cycle-to-cycle combustion variations due to the ignition instabilities and redu- ced flame propagation rates. Engine stability under lean mixture conditions could be improved by increasing flame speed through enhanced flow characteristics and by securing ignitability with improvement of ignition systems. The effects of flow motion and ignition characteristics on the combustion performances were investigated in a 4-valve SI engine. Flow motions of tumble-swirl were varied with a swirl control valve attached at the inlet ports, while ignition energy and its distribution were controlled in a high -frequency ignition system by changing spark duration and spark frequency. The improvement of lean burn performance by the optimum flow motion and ignition characteristics is discussed.