• Title/Summary/Keyword: 후충진

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The Film Property and Deposition Process of TSV Inside for 3D Interconnection (3D Interconnection을 위한 실리콘 관통 전극 내부의 절연막 증착 공정과 그 막의 특성에 관한 연구)

  • Seo, Sang-Woon;Kim, Gu-Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.15 no.3
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    • pp.47-52
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    • 2008
  • This investigation was performed in order to study the properties of deposition and layers by Silicon Dioxide, SiO2, as dielectric onto Via and Trench which have high Aspect Ratio (AR). Thus, in order to confirm these properties, three types of CVD, which were PECVD, PETEOS, and ALD, were selected. On the experiment each of the property sections was estimated that step overage of PECVD: <30%, PETEOS: 45%, ALD: 75% and the RSM of PECVD: 27.8 nm, PETEOS: 2.1 nm, ALD: <2.0 nm. As a result of this experiment for the property of electric film, ALD was valuated to be the most favorable outcome. However, ALD was valuated to have the least quality for the deposition rate. ALD deposition rate, $10\;\AA/min$ by $1\;\AA$/1cycle, was prominently lower than PETEOS, which had the deposition rate of $5000\;\AA$/min. Since electric film requires at least $1000\;\AA$ thicknesses, ALD was not suitable for the deposition rate. which is the most important component in a practical use. Therefore, in this particular study, PETEOS was evaluated to be the most suitable recipe.

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Synthesis of CaZrO3 : Eu3+ phosphor by skull melting method (스컬용융법에 의한 CaZrO3 : Eu3+ 형광체 합성)

  • Choi, Hyunmin;Kim, Youngchool;Seok, Jeongwon
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.30 no.4
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    • pp.131-135
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    • 2020
  • Single crystal phased CaZrO3 : Eu3+ phosphor have been synthesized by skull melting method. The crystal structure, morphology and optical properties of synthesized phosphor were investigated XRD (X-ray diffraction), SEM (scanning electron microscopy), UV (ultraviolet) fluorescence reaction and PL (photo luminescence). The starting materials having chemical composition of CaO: ZrO2 : Eu2O3= 0.962 : 1.013 : 0.025 mol% were charged into a cold crucible. The cold crucible was 120 mm in inner diameter and 150 mm in inner height, and 3 kg of mixed powder (CaO, ZrO2 and Eu2O3) was completely melted within 1 hour at an oscillation frequency of 3.4 MHz, maintained in the molten state for 2 hours, and finally air-cooled. The XRD results show that synthesized phosphor is stabilized in orthorhombic perovskite structure without any impurity phases. The synthesized phosphor could be excited by UV light (254 or 365 nm) and the emission spectra results indicated that bright red luminescence of CaZrO3 : Eu3+ due to magnetic dipole transition 5D07F2 at 615 nm was dominant.

A Preliminary Study of Rodent Burrows at Lake Hovsgol, Mongolia: Comparison with the Late Pleistocene Rodent Burrows of Korea (몽골 흡수굴 호수 지역의 설치류 서관 구조에 대한 예비 연구: 한국 플라이스토세 말기 서관 구조와의 비교 연구)

  • Lim, Hyoun Soo;Lee, Jae Il;Park, Sujeong;Jeong, Hoon Young;Hwang, Jinyeon;Kim, Jin-Seop;Son, Moon;Yoon, Ho Il
    • Journal of the Korean earth science society
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    • v.35 no.4
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    • pp.290-294
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    • 2014
  • In this study, we investigated the characteristics of rodent (mainly ground squirrel) burrows found near the Lake Hovsgol, Mongolia. Those burrows are straight to slightly curved and gently inclined in lateral view. Cross-sectional shapes are either circular or elliptical with diameters ranging from mostly 8-10 cm. Most abandoned burrows are passively filled with soils and/or pebbles. The size and architecture of these Mongolian burrows are remarkably similar to those of the previously reported Late Pleistocene burrows from Korea. Therefore, the rodent burrows found at Korean Palaeolithic sites are thought to have been formed by ground squirrels. However, the difference in burrow-fills suggests that the mean annual precipitation of the Korean Peninsula during the Late Pleistocene is much higher than that of Mongolia.

Relationship between NVOCs Concentration and Korean Red Pine (Pinus densiflora S. et Z.) Forest Environment in Spring Season (봄철 소나무숲의 NVOC 농도와 숲환경과의 상관관계)

  • Kim, GeonWoo;Kwon, ChiWon;Yeom, DongGeol;Joung, Dawou;Choi, Yoon Ho;Park, Bum-Jin
    • Journal of Korean Society of Forest Science
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    • v.103 no.3
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    • pp.483-489
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    • 2014
  • This study aimed at a scientific examination of the relationship between NVOCs concentration and the physical environment of red pine forest in spring season. Atmospheric NVOC samples in red pine forest was collected through five trials conducted from March to May 2013, using Tanax-Ta-charged disposable tubes and mini-pumps. At each trial, measurements were taken at three different points in daytime (sunrise, southing and sunset). For maximum accuracy, two tubes were used for each measurement at the same location, and the mean value was used for analysis. Compound analysis on the NVOC samples was done using the HS-SPME method and GC-MS. Analysis of the relationship between NVOC and the physical forest environment found higher concentrations of most substances, including ${\alpha}$-pinene and ${\beta}$-pinene, with higher temperature, dew point, and lower concentrations with higher wind velocity. The findings of this study offer scientific evidence which can inform the creation of 'healing forests' and 'recreational forests' as well as forest environment in general, helping to promote public health and recreational activities.

Preparation of Anion Exchange Membranes for Electrodialysis by Impregnating Porous Polyethylene Films with Crosslinked Poly(vinylbenzyl ammonium chloride)s (다공성 폴리에틸렌 필름에 가교된 poly(vinylbenzyl ammonium chloride)를 충진한 전기투석용 음이온 교환 복합막의 제조)

  • Kim, Jeong-Hoon;Lee, Jung-Soo;Yoo, Min-Chul;Chang, Bong-Jun;Kang, Ho;Lee, Soo-Bok
    • Membrane Journal
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    • v.18 no.2
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    • pp.138-145
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    • 2008
  • A series of anion exchange composite membranes were prepared and characterized for electro-dialysis process used in the removal of toxic anion and cation polutants in groundwater or wastewater. The membranes were prepared as follows; first, porous poly(ethylene) (PE) substrates were fully impregnated with monomer mixtures with various ratio of vinylbenzylchloride (VBC), divinylbenzene (DVB) and ${\alpha},\;{\alpha}$-azobis(isobutyronitrile) (AIBN). Second, they were thermally polymerized to yield crosslinked poly(VBC-DVB)/PE composite membranes. Finally, the membranes were treated in trimethylamine (TMA)/acetone to give $-N^+(CH_3)_3$-containing poly(VBC-DVB)/PE membranes. The basic membrane properties such as ion exchange capacity (IEC), electric resistance and water content of the resulting membranes were measured as a function of VBC/DVB and TMA/Acetone content. As a result, the composite membranes showed lower electric resistance, lower water content and higher IEC than commercial anion exchange membranes (AMX, Astom) due to thin PE substrates, indicating that the composite membranes could be successfully applied to the electrodialysis for water treatment.

Ettringite/Thaumasite Formation, Stability and Their Effect on Deterioration of Concrete (에트린자이트/사우마사이트의 형성 및 안정도와 콘크리트 성능저하에 미치는 영향)

  • 이효민;황진연
    • Journal of the Mineralogical Society of Korea
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    • v.16 no.1
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    • pp.75-90
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    • 2003
  • Ettringite and thaumasite were observed in some concrete. The morphology and occurrence of these minerals were closely examined by performing SEM/EDAX analyses. We also experimentally induced the concrete deterioration using $Na_2SO_4$ solution with application of various environmental conditions. The stability of these minerals and deterioration characteristics under applied experimental conditions were determined. Abundant ettringite formed by“through solution reaction”occurred in many open spaces, and some microscopic ettringite formed by "tophochemical replacement" of calcium aluminate also occurred in cement paste. Severe cracking of cement paste causing premature deterioration was often associated with ettringite location. Under specific condition, ettringite was transformed to thaumasite, tricthloroaluminate, or decomposed. Thaumasite occurred with association of ettrinsite in concrete containing carbonate aggregate being subject to dedolomitization or in some concrete being subject to carbonation. Thaumasite appears to be formed under the similar condition to the general ettringite forming condition, but it formed solid solution with ettringite by substituting pre-existing ettringite. Ettringite can also be transformed to trichloroaluminate in the presence of abundant chlorides, but trichloroaluminate changed back to ettringite in late sulfate attack. It is considered that the substitution reaction direction solely depend on the concentration of chloride and sulfate ion.

Efficiency of Apatite and Limestone in Removing Arsenic from Acid Rock Drainage at the Goro Abandoned Mine (인회석 및 석회석을 이용한 고로폐광산 ARD 내의 비소 저감효율 연구)

  • Park, Myung-Ho;Lee, Young-Woo;Hur, Yon-Kang;Park, Hae-Cheol;Sa, Sung-Oh;Choi, Jung-Chan
    • The Journal of Engineering Geology
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    • v.21 no.3
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    • pp.231-237
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    • 2011
  • An active apatite drainage system has been developed at the Goro abandoned mine, comprising a grit cell, a reaction cell, and a precipitation pond. Leachate from an abandoned adit and tailing ponds is collected in a pipeline and is transported to the apatite drainage system under the influence of the hydraulic gradient. The results of a laboratory experiment performed in 2004 indicate that the reaction cell requires 38.8 ton/year of apatite and that precipitate will have to be removed from the precipitation pond every 3 months. The purpose of this study is to evaluate a laboratory test on the efficiency of limestone and apatite in removing arsenic from ARD (acid rock drainage), and to evaluate the suitability of materials for use as a precipitant for the leachate treatment disposal system. The laboratory tests show that the arsenic removal ratios of limestone and apatite are 67.4%-98.3%, and the arsenic removal ratio of apatite is inversely proportional to its grain size. The arsenic compounds are assumed to be Johnbaumnite and Ca-arsenic hydrate. Therefore, apatite and phosphorous limestone can be used as a precipitant for the removal of arsenic, although it is difficult to remove arsenic from ARD when it occurs in low concentrations.

A Study on the Physical Properties and Permeability of Permaeable Poly Concrete (투수성 폴리머 콘크리트의 물성과 투수성능에 관한 연구)

  • 박응모;조영국;소양섭
    • Magazine of the Korea Concrete Institute
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    • v.10 no.6
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    • pp.213-222
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    • 1998
  • Covering polmer mortar as a filter for permeable polymer concrete on the base polymer concrete is nessary for good permeability from infiltration continuously. Therefore, three covering polymer mortars on the optimum base polymer concrete were cast immediatly following on the casting of the base polymer concrete. They are tested for compressive and flexural strengths, adhesion in tension, hardening shrinkage and permeability, and the effects of the mix proportioning factors on the properties of the permeable polymer concrete are discussed. From the test results, increase in the compressive strength and decrease in the coeffiecient of permeability of base polymer concrete are clearly obserbed with increasing filler-binder ratio. The base polymer concretes having a compressive strength of 9.4~28.3MPa and a coefficient of permeability of 0.12~1.93 cm/s can be produced in the consideration of the mix proportioning factors. Binder and filler contents in mix proportions had a great influence on the permeability of polymer concretes. The mechanical properties of permeable polymer concretes covered with polymer mortar using crushed stone are superior to other filters, and hardening shrinkage is the smallest in filters. It is apparent that adhesion between the base polymer concrete and polymer mortar is affected by the degree of hardening shrinkage. From this study, proper mix proportions can be recommended in the consideration of properties of the permeable polymer concrete.

Effect of Diluent Size on Aluminum Nitride Prepared by Using Self-Propagating High-Temperature Synthesis Process (희석제 입도가 고온자전연소법에 의한 질화알루미늄 합성에 미치는 영향)

  • Lee, Jae-Ryeong;Lee, Ik-Kyu;Shin, Hee-Young;Chung, Hun-Saeng
    • Journal of the Korean Ceramic Society
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    • v.42 no.1
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    • pp.69-75
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    • 2005
  • To investigate the morphological effect on synthesis of aluminum nitride by SHS Process, two type of Al Powder (granular and flacky shape) with the mean size of 34 $\mu$m and the diluent AIN powders of four different mean sizes.0.12, 9.7, 39.3, 50.5 $\mu$m, were used to prepare green compact. The packing density was fixed to $35 TD\%. The initial pressure of $N_{2}$ and diluent fraction was varied in the range of $1\~10 MPa,\;0.4\~0.7$, respectively. AlN with high purity of $98\% or over and large particle size of about several tens fm can be synthesized by SHS reaction as a consequence of adjusting particle size of AlN dilutent similarly to that of Al reactant. This may be caused by improvement of $N_{2}$ gas permeation to compact after passing the propagation wave. In the case of flaky-shape aluminum used as reactant, instead of granular Al-powder, unstable combustion would be occurred. As the result, irregular propagation of combustion wave and falling-off of maximum temperature would be observed during the reaction.

Physical property evolution along gas hydrate saturation for various grain size distribution (다양한 입도분포에서의 하이드레이트 함유량에 따른 물성 변화 양상 연구)

  • Jung, Jaewoong;Lee, Jaehyung;Lee, Joo Yong;Lee, Minhui;Lee, Donggun;Kim, Sejoon
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.05a
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    • pp.149-149
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    • 2011
  • 청정 에너지원으로 높은 잠재력을 가지고 있는 가스하이드레이트는 상업적 기술개발이 미확보된 상태임에도, 우리나라에서 부존이 직접적으로 확인되었기 때문에 에너지원으로서 그 중요성이 부각되고 있다. 현재 전세계적으로 가스하이드레이트 개발 및 생산에 관한 연구가 활발히 진행되고 있으며 이에 대한 기초자료로서 가스하이드레이트가 함유된 퇴적층의 물성자료가 필요하다. 이에 따라 본 연구에서는 입도 분포별 총 5가지의 미고결 시료를 대상으로 투과도, p파속도, 전기비저항 측정을 수행하였다. 연구에 사용된 미고결 시료는 Hama#5($774{\mu}m$), #6($485{\mu}m$), #7($258{\mu}m$), #8($106{\mu}m$) 4가지와 Hama#6과 Hama#7을 1:1($371{\mu}m$)로 혼합하여 사용하였다. 실험에 사용된 장비는 가스하이드레이트를 인공적으로 생성시키기 위해 퇴적층을 모사할 수 있는 고압셀과 자료획득장비, 유체 주입장비, 온도 유지장비이다. 또한 투과도 측정에는 차압계, 전기비저항 측정에 RLC meter, p파속도 측정에 음파 송수신장비를 사용하여 각각의 물성을 측정하였다. 실험과정을 단계별로 요약하면 먼저 시료를 고압셀에 충진한 뒤 주입된 물의 양으로부터 공극률을 측정하고, 절대 투수계수를 측정하였다. 그 후, 메탄가스를 주입하여 퇴적층 내 수포화도(water saturation)를 잔류상태(irreducible saturation)로 유지시키고 메탄가스를 추가적으로 주입하여 원하는 압력까지 가압한 뒤 온도를 $1^{\circ}C$로 낮추었다. 가스하이드레이트의 생성은 급격한 압력강하로부터 알 수 있다. 최종적으로 가스하이트레이트가 함유된 퇴적층의 상대 투수계수를 측정하기 위해 메탄가스를 주입하였고 각각의 측정장비를 통해 전기비저항 및 p파 속도를 측정하였다.$V_g$, $V_h$, $V_w$, $V_ss$는 각각 가스의 부피, 하이드레이트의 부피, 물의 부피, 모래의 부피이다. 또한 수포화도, $S_w=\frac{V_w}{V_v}$이며 하이드레이트 포화도, $S_h=\frac{V_w}{V_v}$, 가스 포화도, $S_g=\frac{V_g}{V_v}$로 정의된다. 본 실험의 결과 투과도는 가스의 부피비, $\frac{V_g}{V}=nS_g$에 민감한 반응을 보였으며, 비저항은 공극수의 부피비, $\frac{V_w}{V}=nS_w$에 민감한 반응을 보였다. 또한 p파 속도는 고체의 부피비, $\frac{V_s+V_h}{V}=n(1-S_h)$에 민감한 반응을 보였다. 이러한 실험의 결과는 가스하이드레이트 개발, 생산 연구에 있어 기초 물성자료로 활용되는데 도움을 줄 것이다.

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