• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.166-166
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• 1998

반도체 공정에서 기존보다 큰 30cm 웨이퍼훌 이용하기 위해서 기존의 ECR, Helicon, ICP, 등 공정용 고 밀도 플라즈마 원들의 대면적화에 대한 연구가 세계적으로 진행되고 있다 현 상황에서는 평판형 안테 나룰 이용한 TCP가 대면적용 폴라즈마 원의 가장 유력한 후보로 여겨지고 있다 TCP롤 대면적화 하는 데 있어서 중요한 문제점으로는 대면적에서의 큰 안테나 인되턴스로 인한 임피던스 정합과 대면적에서 의 유전울질의 기계적 강도이다. 앓은 유전물질올 사용힐 수 있도록 대면적 TCP 플라즈마 원올 실계 저l작하였고 이차원 가열이론올 이용한 TCPRP code 률 이용하여 안테나의 반경옳 결정하였디 안테나의 인덕턴스 값올 줄이기 위해서는 주m수는 13.56MHz 보다 낮은 4-5MHz 부근에서 작동하는 RF 파워룰 선택하였다 이 파워 서플라이는 보통 사용되는 50n 흩력 입묘$\mid$던스훌 갖는 형태가 Of니라 LC 공진현상 올 이용하여 부하에 파워률 전달하는 형태이다 .. TCP 장치에 사용할 수 있도록 파워 서플라이 흩력 단에 안테나와 직혈로 가변 콘덴서를 달아서 임11I던스 정합올 힐 수 있게 하였다 안테나에 직훌로 달Of줌으 로써 안테니의 인덕턴스훌 훌여주는 효과훌 얻올 수 있다 안테나에 흐르는 전류룰 측정하기 위해서 사 각형 루프로 전류 픽업 코일을 만들었고 진공상태에서 RF 파워률 인가하고 안테나의 전류와 전압을 측정하여 픽업 코일걸과훌 조정하였다. 발생기체로는 헬륨올 사용하였고 1-100mTorr 의 압력범위에서 실험을 하였다 플라즈마롤 빌샘시키고 파워를 증가 시킴에 따라 E-H mode transition 현상이 관찰되었고 그 때의 임계 전류 값을 측정하였다. 압력이 낮올수록 모드 변화가 일어나는 전류의 값이 작았다 임계 전류는 압력에 대해서 선형적인 특성을 보였다 이는 압력이 낮을수록 유도걸힘이 더 잘 된다는 것을 의미한다 1 1 mTorr에서는 H-mode에서 안테나의 전류가 파워훌 증가시킴에 따라 계속 증가하였으니, 압력이 올라 갈수록 조금씩 증가하는 정도가 줄어들고. 100mTorr에서는 포화된 값을 나타냈다 H-mode로 넘어간 후 에는 파워가 증가황에 따라 안테나의 임피던스 값이 모든 압력영역에서 줄어드는 경황을 보였고, 이는 플라즈마의 인덕턴스에 의해서 안테나의 인덕턴스 기 감소되기 때문이다, 파워가 증가할수록 안테U오} 플라즈마 루프사이의 상호걸합이 증가하는 걸로 해석힐 수 있다 안테나의 인되턴스 변화보다는 저항.성 분의 변화가 컸다 하지만 전체 임피던스로 볼 때 저항성분이 상대적으로 작기 때문에 인덕턴스의 감소 가 더 큰 영향을 미치는 걸로 볼 수 있다. 하지만 플라즈마로의 파워 전달에는 저항성분만이 영향올 미 치므로 저항성분의 큰 변화는 파워가 많이 전달될올 의미한다 피워전달 효율을 계산해 본 결과 수 r mTorr 부근이 80-90% 정도의 높은 효율올 보였고 5mTorr 일 때가 가장 좋았다.

• Applied Chemistry for Engineering
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• v.18 no.4
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• pp.337-343
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• 2007

The reforming catalyst and the electrodes in fuel cells can be poisoned by the organic sulfur compound which is added as an odorant for checking out the leakage of natural gas, and that makes a big problem of system degradation. In this study, various adsorbents, such as silica, ${\gamma}$-alumina, activated carbon, HZSM-5, Ultra-stable Y zeolite (USY), and beta zeolite (BEA), were utilized to remove tetra-hydrothiophene (THT) and tert-butylmercaptan (TBM), and to confirm the performance in the adsorption of those odorants by using a continuous adsorptive bed. The effects of Si/Al ratio of zeolites, adsorption temperature and the type of balance gas (methane or He) on the adsorption performance in the packed bed have been investigated. In addition, the competitive adsorption between TBM and THT on the adsorbents was also estimated. The result shows that H-type BEA zeolite exhibited the highest adsorption capacity for TBM and THT odorant, and the higher amount of THT was removed adsorptively on the same adsorbent than TBM. The physical and chemical adsorption of those compounds on acid sites of zeolite were confirmed by temperature programmed desorption (TPD) and infrared spectrum (IR) analyses.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.3 no.4
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• pp.301-307
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• 2005

The morphology of the high burnup $UO_2$ spent fuel, which was oxidized and annealed in a PIA (Post Irradiation Annealing) apparatus, has been observed. The high burnup fuel irradiated in Ulchin Unit 2, average rod burnup 57,000 MWd/tU, was transported to the KAERI's PIEF. The test specimen was used with about 200 mg of the spent $UO_2$ fuel fragment of the local burnup 65,000 MWd/tU. This specimen was annealed at $1400^{\circ}C$ for 4hrs after the oxidation for 3hrs to grain boundary using the PIA apparatus in a hot-cell. In order to oxidize the grain boundary, the oxidation temperature increased up to $500^{\circ}C$ and held for 3hrs in the mixed gas (60 ml He and 100 ml STD-air) atmosphere. The amount of 85Kr during the whole test process was measured to know the fission gas release behavior using the online system of a beta counter and a gamma counter. The detailed micro-structure was observed by a SEM to confirm the change of the fuel morphology after this test. As the annealing temperature increased, the fission products were observed to move to the grain surface and grain boundary of the $UO_2$ matrix. This specimen was re-structured through the reduction process, and the grain sizes were distributed from 5 to $10\;{\mu}m$.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.17 no.3 s.106
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• pp.239-248
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• 2006

In this paper, the cryogenically cooled low noise amplifier module for radio telescope receiver front-end using pHE-MT MMIC is designed and fabricated. In the selection of MMIC, the MMIC fabricated with the pHEMTS providing successful cryogenic operation are chosen. They are mounted in the housing using the thin film substrate. In the design of the housing, the absorber and the elimination of the gap between the carrier and the housing as well removed the unnecessary oscillations by its structure. The mismatch is improved by ribbon-tuning to provide the best performance at room temperature. The fabricated module shows the gain of $35dB{\pm}1dB$ and the noise figure of $2.37{\sim}2.57dB$ at room temperature over $21.5{\sim}23.5GHz$. In the cryogenic temperature of $15^{\circ}K$ cooled by He gas, the measured gain was above 35 dB and flatness ${\pm}2dB$ and the noise temperatures of $28{\sim}37^{\circ}K$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.05a
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• pp.11-11
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• 2009

종래의 산업폐수 처리기술로는 중금속 함유 폐수에 수용성의 금속염을 첨가하여 가성소다 혹은 소석회를 이용하여 pH를 조정하고 고분자 응집제를 첨가하여 금속의 수산화물을 생성시켜 이를 부상 혹은 침전시켜 Sludge화하여 제거하는 방법이 주로 사용되고 있다. 그 외 질소, 인, 유기물이 함유된 폐수의 경우에는 Biological Oxidation Techniques, 활성탄 흡착방식이 주로 채택되고 있다.[1-3] 이러한 폐수처리기술은 화학약품 사용량이 과다하고 이는 Sludge 생성량을 증대하고 2차 폐수처리가 필요로 하는 경우가 많고, 처리장이 면적이 넓어야 하고 대용량의 Sludge 제거창치가 필요하여 고비용의 처리공정으로 문제점을 가지고 있다.[2-3] 이에 본 연구에서는 이러한 기존 기술의 문제점을 보완할 수 있고 기존 기술로는 완벽하게 처리하기 곤란한 악성 폐수들에 대한 새로운 고도처리기술로 초전도 마그네트를 이용한 고구배 자기분리기술에 대한 기초연구를 하였다. 본 연구에서 사용한 고구배 자기분리 시스템은 무헬륨 전도냉각방식으로 자기분리를 위해 사용한 필터는 SUS 430 재질의 메쉬 형태로 제작하여 실험하였다. 또한, 자기분리 처리를 위한 전처리 공정으로는 응집제를 첨가하여 자기분리 효율을 높이고자 하였다. 자기분리 처리대상수로는 포항제철에 압연 강판에 사용되는 냉각수를 대상으로 자기분리 처리에 대한 효과를 실험하였다. 또한, 자기분리에 대한 특성을 평가하기 위해 강자성의 $Fe_3O_4$ 미세자성분말을 첨가하여 처리수내의 들어있는 유기물질에 대해 자기분리 자장 및 유속에 대한 처리효율을 미치는 영향을 조사하였다. 자기분리 처리는 1~6 Tesla에서 자기필터는 디스크 형태로 다층으로 연속적으로 적층하였으며, 처리유속은 1~4 l/min으로 하였다. 고농도인 처리폐수를 자가분리 인가 자장에 따라 처리하여 고농도에서는 70%, 저농도에서는 98 %까지 처리되었다. 또한, 자기분리용 필터는 SUS 430 재질의 mesh 망을 사용하였으며 인가자장 및 유속변화에 대한 실험 결과 탁도 및 농도는 필터 크기의 영향은 거의 차이가 없었으며 단지 인가자장 및 유속에 따라서 지수적으로 감소하였다. 자기분리된 용액 내 $Fe_3O_4$ 입도 분석 결과 자기분리 이전에 분포하던 $10\sim20\;{\mu}m$의 입자는 거의 제거되었으며 2 ${\mu}m$ 이하의 입자들은 실험 횟수에 따라 점점 직경이 작은 쪽으로 분포가 좁아졌으며, 마그네타이트의 자화율을 분석한 결과 약 0.8 Tesla에서 포화 되었으며 처리수의 탁도 및 농도가 자장에 따라 감소하는 것으 알 수 있었다.

• Journal of the Korean Society of Marine Environment & Safety
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• v.20 no.1
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• pp.96-103
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• 2014

A liquefied natural gas(LNG) in cryogenic liquid is converted back into gaseous form for distribution to residential and industrial consumers. In this re-gasification process, LNG supplies a plenty of cold thermal energy about $83.7{\times}10^4kJ/kg$. The LNG cold thermal energy is utilized for the re-liquefaction process of cryogenic fluids such as Nitrogen, Hydrogen and Helium, and ice manufacturing process and air-conditioning system in some advanced countries. Therefore, it is also necessary to establish the recovery systems of the LNG cold thermal energy around Incheon, Pyungtaek and Tongyung LNG import terminals in our country. Methane is used as working fluid in this paper, which is the major component of LNG over 85 % by volume, in order to investigate the flow behavior characteristics of LNG with phase change at low heat flux. This paper presents the effects of pipe diameters, pipe inclinations and saturation pressures on the flow boundaries of methane flowing in a cryogenic heat exchanger tube, together with those of nitrogen, propane, R11 and R134a. The outcomes obtained from this theoretical researches are also compared with previous experimental data. It was also found that the effect of pipe inclination on the methane flow boundaries was significant.

• Membrane Journal
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• v.12 no.2
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• pp.107-119
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• 2002

Carbon-silica ($C-SiO_2$) membranes can be easily prepared by the pyrolysis of two-phase copolymers containing an aromatic imide block and a siloxane block and remarkably high permselectivities of $He/N_2, O_2/N_2,$ and $CO_2/N_2$. The pyrolysis of the imide-siloxane block copolymers was carried out at different final temperatures, $600^{\circ}C, 800^{\circ}C,$ and $1000^{\circ}C$ under an inert atmosphere, and is the first reported case of the precursors being used for the preparation of carbon membrane. The polymeric precursors were synthesized in a wide range of siloxane content and different final morphology, and the pyrolozed membranes were tested with a high vacuum time-lag method at $25^{\circ}C$ and 76cmHg of feed pressure. In experiments with He, $CO_2, O_2 \;and \;N_2$, the membranes were found to have good $O_2/N_2$ selectivity up to 32.2 and $O_2$ permeability on the order of $10-8/cm^2(STP)cm/cm^2seccmHg.$.

• Food Science of Animal Resources
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• v.25 no.1
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• pp.78-83
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• 2005

Purge & Trap method was applied to perform more simple and rapid detection for analysis of volatile flavor compounds in milk. Maximal sampling of 30 mL milk for glass flask sparger was treated by He gas purging for 2 hours. Reported major volatile compounds were detected by GC-MS after 2 hours absorption and desorbed from Purge & Trap equipped with Tenax trap. Volatile flavor compounds were analyzed by Purge & Trap and GC-MS to investigate the changes of flavor components in milk between raw and deodorized milk. Fourteen volatile compounds including acetaldehyde, ethanol, 2-propanone, dimethyl sulfide, isobutanal, 3-methyl 2-butanone, 2-butanone, 3-methyl butanal, pentanal, 3-hydroxy-2-butanone, methyl disulfide, hexanal, and 2 others were detected. Six compounds such as ethanol, dimethyl sulfide, pentanal, 3-hydroxy-2-butanone, and methyl disulfide were completely eliminated after deodorization treatment. Four compounds such as 3-methyl 2-butanone, 2-butanone, 3-methyl butanal, and an unknown compound 81 (M/sup +/) were also decreased after raw milk was deodorized. The other four compounds such as acetaldehyde, 2-propanone, hexanal, and an unknown compound (M/sup +/) were not decreased.

• KSBB Journal
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• v.10 no.4
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• pp.449-454
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• 1995

The effects of metathesis for concentrating the tocopherols from soybean and rice-bran scum oils were studied by using the batch reactor under helium atmosphere. The contents of tocopherols in the scum oils decreased consticuously when heated under air atmosphere or when kept in hexane solution above 5 days even at room temperature. The sterols in the scum oils were removed by the mixed solvent method. Metathesis of the sterol-removed scum oils in hexane was performed over Re2O7/Al2O3 and WO3/Al2O3 catalysts, and the concentrate was obtained by distillation in vacuum at $190^{\circ}C$. The effect of metathesis was evaluated as relative ratio of ${\alpha}$-tocopherol in the concentrate to that in scum oil. The maximum ratio for both scum oils was obtained on 12.8%(w/w)$Re_2O_7/Al2O_3$ catalyst which formed effectively the active sites for metathesis by the reaction between the added tetramethyltin and $Re_2O_7$ on the surface of the catalyst. The optimum amount of the catalyst was 0.5g pre l0g scum oil, and the optimum reaction temperature was $25^{\circ}C$ for both scum oils. The metathesis was more effective in rice-bran scum oil than in soybean scum oil. These facts indicated that the tocopherols in the scum oils can be highly concentrated by applying metathesis.

• Korean Chemical Engineering Research
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• v.48 no.2
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• pp.244-252
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• 2010

The objective of this study is to assess feasibility of simultaneous analysis for trace multi-components odorous and volatile organic compounds using a Triple-bed adsorbent tube with a thermal desorber and GC-MS. Triple-bed adsorbent tube is 3 bed packed Tenax-TA with small amount of Carbopack B and Carbosieve SIII in order of adsorption strength in a tube. The operating conditions of GC-MS was possibly able to and effectively detect high volatile and low molecular weight compounds at the mass range of 20~350 m/z using a below impurity 1ppm of Helium carrier gas, of which quantitatively analyzed by target ion extracts. According to the experiment, $C_1{\sim}C_5$ of 14 components; sulfur containing compounds(2), ketones(2), alcohols(4) and aldehydes(6) were simultaneously analyzed with recoveries of 99%, and good repeatability and linearity. High volatile and low molecular weight compounds such as methyl alcohol and acetaldehyde can be safely quantified with high recovery at a condition of 50mL/min of flow rate, below 2L of adsorption volume, and 45% of relative humidity. Target ion extract can also simultaneously quantify multicomponents with odorous and volatile organic compounds in an occasion of piled up two peaks.