• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.108-108
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• 2016

마그네트론 스퍼터링은 박막의 증착에 널리 사용되는 기술로 음극의 설계가 핵심적이다. 영구 자석과 전자석을 겸용하는 경우도 있고 고주파 코일을 추가하여 2차 플라즈마 발생을 유도하여 공정의 유연성을 한층 높인 방법도 오랫동안 사용되어 왔다. 전자의 자기장 하에서의 운동은 Lorentz force를 적분하여 예측할 수 있으며 가장 중요한 전자 - 중성간의 충돌 과정인 탄성 충돌, 여기 충돌, 이온화 충돌을 고려하면 보다 실질적인 마그네트론 플라즈마의 거동을 이해하고 그 결과를 기반으로 자석 배치를 설계할 수 있다. PIC (particle-in-cell) code를 이용하면 플라즈마 내의 전자기장 효과를 상세히 검증해볼 수 있지만 계산 시간의 부담 때문에 고성능 병렬 컴퓨터를 사용하여야 한다. 그 이유는 하전입자(전자, 이온)의 공간적인 분포에 변화가 발생하면 전위가 영향을 받고 전자의 가속이 발생하는 쉬스(sheath)의 두께가 따라서 변화하기 때문이다. 여기서 계산 시간의 단축을 위한 가정, 즉, 쉬스의 두께가 일정하다는 사실을 적용하면 계산시간을 획기적으로 단축 시킬 수 있으며 병렬 계산의 효율성도 향상시킬 수 있다. 본 연구에서는 이와 같은 원리에 입각한 코드를 개발하고 평판 디스플레이용 사각형 음극에 대해서 적용했던 경험을 바탕으로 원형의 스캔형 마그네트론 음극 구조의 이해와 설계에 적용하고자 코드를 개발하였다.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.2
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• pp.65-65
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• 2012

인류의 역사는 태풍, 지진, 해일, 홍수 그리고 가뭄 등과 같은 자연재해와의 끊임없는 투쟁으로 점철되어왔다. 최근 들어 지구 온난화는 인류의 생존에 커다란 위협으로 대두되었다. 우주시대에 접어들면서 인간의 활동은 지구 대기권 밖으로까지 확대되면서 인간의 사회 경제적인 활동이 인공위성을 위시하여 매우 정밀한 기기에 의존하게 되었다. 그러나 인공위성과 더불어 현대사회를 지탱하는 전력, 통신, 운송 등과 같은 사회기반시설들은 태양활동에 매우 취약하다는 점이 확인되었다. 태양에서 플레어나 CME가 발생하면 X-선 복사와 더불어 고에너지 하전입자가 방출되면서 지구주변 우주환경에 급격한 변화가 일어난다. 이 기간 동안 인공위성, 전력, 통신, 항법 등이 영향을 받아 다양한 사회 경제적인 손실이 유발된다. 따라서 태양활동으로 인한 이들 시설의 붕괴 내지는 기능 저하는 현대사회의 근간을 훼손하는 이제까지 경험하지 못했던 새로운 형태의 자연재해가 될 것이다. 이 논문에서는 역사적으로 우주환경의 급격한 변화가 야기한 문제점들을 살펴보고 태양활동이 장래에 인류의 삶에 어떠한 영향을 미칠지를 전망하고자 한다.

• Electrical & Electronic Materials
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• v.5 no.1
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• pp.99-110
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• 1992

본 논문은 고정된 바늘모양의 공기물에 의하여 형성된 불평등전계중에서 뇌임펄스전압에 대한 SF$_{6}$가스의 절연특성과 전구방전진전에 관한 것이다. 하전입자의 이동에 의하여 외부회로에 흐르는 전도전류의 측정방법에 대하여 기술하고 0.05~0.3[MPa]의 압력범위에서 섬락전압-압력특성을 측정하였으며 분류기와 광전자증배관을 사용하여 전구방전의 순시적 진전과정을 관측하였다. 전구방전은 돌기물의 선단에서 발생한 초기스트리머에 의하여 발단되며 정극성의 경우 섬락전압은 국부고전계에 매우 민감하며 리이더메카니즘으로 진전됨이 확인되었다. 전구방전현상의 극성의존성은 공간전하의 영향이 지배적이었다. 더불어 본 연구에서 제안된 전구전류의 측정기법은 불평등전계중에서의 전자사태전류, 코로나방전과 공극내에서의 부분방전의 측정에 매우 유용하게 적용될 것이다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.495-496
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• 2006

Electrowetting phenomenon is applied in the various field of technology. One of that is electrowetting display as a paper like electronic paper. Fast response and easy to express a color is goodness. In spite of that, the oil movement of the electrowetting display is irregular. So it doesn't look like uniform. Because of above reason, electrowetting display using patterned electrode is made and the characteristic of oil movement is observed. Electrode and polymer wall is patterned by photo-lithography. We analyze the oil movement according to the variation of size and the position of etched electrode area.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.436-436
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• 2010

국내 반도체 시장은 세계 1위의 시장점유율을 가지고 있지만 핵심장비의 경우 국내 장비 기술의 낙후로 인해 대부분을 선진국에 의존하는 실정이다. 따라서 국내 장비 기술의 발전 요구에 따라 연구가 진행되었으며 기존 PE-CVD (Plasma Enhanced Chemical Vapor Deposition) 장비에서의 하전입자에 의한 기판 손상 가능을 제거하고 개개의 반응 원소의 에너지와 플럭스를 조절하여 다양한 공정온도에서 증착을 구현할 수 있는 HNB-CVD(Hyperthermal Neutral Beam Chemical Vapor Deposition) 장비를 개발하였다. 고밀도 플라즈마 생성을 위한 마이크로웨이브 SLAN(Slot Antenna) 소스를 사용하였으며 대면적 공정에 적합하도록 설계하였다. 최적의 설계와 진단을 위한 마이크로웨이브 SLAN 소스내의 E-field 분포 시뮬레이션과 Langmuir Probe 진단이 이루어졌다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.21 no.5
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• pp.40-45
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• 2022

In recent years, indoor air pollution has become a crucial environmental problem. Hence, the purification of indoor air is an important issue. Typical physical filters show relatively high dust collection efficiency at a dust particle size of more than 5.0 ㎛ but extremely low efficiency at an ultrafine size of less than 2.5 ㎛. In this study, an electric field filter was proposed to capture ultrafine dust with a size of less than 5.0 ㎛. Simulation results showed that the electric field filter effectively removed ultrafine dust. In addition, sufficient dust collection efficiency was obtained even with a simple plate-shaped filter without bending the Chevron filter.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.2
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• pp.432-445
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• 1994

From a theoretical analysis point of view, the 2-stage precipitator is decomposed into two units: charging cell and collecting cell. Collection efficiency predictions of the two-stage parallel-plate electrostatic precipitator have been performed theoretically incorporating with the charging and the collecting cells. Particle trajectorise passing the charging cell have been modeled as a simple one. Particle charge distribution at the outlet of the charging cell is calculated through integration of the present unipolar combined charging rate along the entire particle trajectory, and average charge of particles at the outlet of the charging cell is obtained from the particle charge distribution. As for the collecting cell, the diminution of particle concentration along the longitudinal direction of the collecting cell is investigated considering the conventional Deutsch's theory and the laminar theory. One should note that the collection efficiency formula derived is based on monodisperse aerosols. It has been confirmed through the analysis that predictions of particle charge by applying White's unipolar diffusion charging theory overpredict actual cases in the continuum regime, while predictions by Fuch's unipolar diffusion charging theory indicate the reasonable result in the same regime. Theoretical predictions of collection efficiency are also compared with the available experimental results. Comparisons show that the experimental results are consistently located in the collection efficiency region bounded by the two limits, the Deutsch and the laminar collection efficiencies. Finally design parameters of the 2-stage electrostatic precipitator have been investigated systematically through the one-variable-at-a-time method in terms of collection efficiency. Applied voltages on the corona wire of the charging cell and the plate of the collecting cell, and the average air velocity have been selected as the design parameters.

• Particle and aerosol research
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• v.19 no.2
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• pp.31-42
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• 2023

The charge and magnetic characteristics of LM (Low-metallic) and NAO (Non-asbestos-organic) brake wear particles were analyzed. The ratio of charged particles from total particles is about 86% of the LM pad and about 92% of the NAO pad. Number of charge per particle from the NAO pad is also higher than that of the LM pad. The ratio of magnetic particles from total particles increases with the particle size. The ratio of magnetic particles from the LM pad is about 15% for the particles with the size of 1 ㎛, and about 74% for ones with 5 ㎛. The ratio from the NAO pad is about 5% for the particles with the size from 0.5 ㎛ to 2 ㎛, and about 80% for the particles with 5 ㎛. Through the analysis of the components of the two pads with SEM-EDS (Scanning Electron Microscopy - Energy Dispersive X-ray Spectroscopy), it was found that the LM pad was occupied with more iron fraction than the NAO pad and that PM_2.5-10 was occupied with more iron fraction than PM_2.5. The particles smaller than 10 ㎛ (i.e. PM₁₀) from the LM pad contained about 83% of charged particles, about 43% of magnetic particles, and about 93% of charged or magnetic particles. PM₁₀ from the NAO pad contained about 88% of charged particles, about 15% of magnetic particles, and about 89% of charged or magnetic particles.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.45 no.9
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• pp.746-756
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• 2017

An algorithm is developed to generate measurement data of deep space network for Korea Pathfinder Lunar Orbiter (KPLO) mission. The algorithm can provide corrected measurement data for the Orbit Determination (OD) module in deep space. This study describes how to generate the computed data such as range, Doppler, azimuth angle and elevation angle. The geometric data were obtained by General Mission Analysis Tool (GMAT) simulation and the corrected data were calculated with measurement models. Therefore, the result of total delay includes effects of tropospheric delay, ionospheric delay, charged particle delay, antenna offset delay, and tropospheric refraction delay. The computed measurement data were validated by comparison with the results from Orbit Determination ToolBoX (ODTBX).

• Resources Recycling
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• v.13 no.2
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• pp.39-46
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• 2004

The amount of electric furnace dust has been steadily increasing due to the increase of iron scraps which are usually recycled by electric furnace melting process. To date, this electric furnace dust has usually been treated by landfilling, however, because of shortage of landfill sites and heavy metal leaching more desirable treatment schemes are urgently needed. Among several possible schemes for the proper treatment of electric furnace dust, its recycling can be said to be most desirable. In present study, the triboelectrostatic separation of zinc and zinc-containing components from electric furnace dust was attempted based on its physicochemical properties such as particle shape, size distribution, and chemical assay. The dust was found to be mixed with spherical and non-spherical shaped particles and its major component materials were $ZnFe_2$$O_4$, ZnO, Fe, Zn, and FeO. The content of zinc-containing components in the entire dust was observed to be in the range of 15～30 wt%, which reasonably justified that zinc is recyclable. The triboelectrostatic characteristic of each component material was found to be different each other since their work functions were different, and based on this characteristic zinc and zinc-containing component could be flirty separated from the dust. After selecting a proper tribo-elec-trification material, the separation features of zinc and zinc-containing component were examined by taking the distance of electrodes, electric field strength, and scavenging as the experimental variables. The highest zinc-content obtained under the optimal separating condition was found to be up to 50wt%.