• Title/Summary/Keyword: 플라즈마 전처리

Search Result 117, Processing Time 0.026 seconds

A Study of Mo Back Electrode for CIGSe2 Thin Film Solar Cell (CIGSe2 박막태양전지용 Mo 하부전극의 물리·전기적 특성 연구)

  • Choi, Seung-Hoon;Park, Joong-Jin;Yun, Jeong-Oh;Hong, Young-Ho;Kim, In-Soo
    • Journal of the Korean Vacuum Society
    • /
    • v.21 no.3
    • /
    • pp.142-150
    • /
    • 2012
  • In this Study, Mo back electrode were deposited as the functions of various working pressure, deposition time and plasma per-treatment on sodalime glass (SLG) for application to CIGS thin film solar cell using by DC sputtering method, and were analyzed Mo change to $MoSe_2$ layer through selenization processes. And finally Mo back electrode characteristics were evaluated as application to CIGS device after Al/AZO/ZnO/CdS/CIGS/Mo/SLG fabrication. Mo films fabricated as a function of the working pressure from 1.3 to 4.9mTorr are that physical thickness changed to increase from 1.24 to 1.27 ${\mu}m$ and electrical characteristics of sheet resistance changed to increase from 0.195 to 0.242 ${\Omega}/sq$ as according to the higher working pressure. We could find out that Mo film have more dense in lower working pressure because positive Ar ions have higher energy in lower pressure when ions impact to Mo target, and have dominated (100) columnar structure without working pressure. Also Mo films fabricated as a function of the deposition time are that physical thickness changed to increase from 0.15 to 1.24 ${\mu}m$ and electrical characteristics of sheet resistance changed to decrease from 2.75 to 0.195 ${\Omega}/sq$ as according to the increasing of deposition time. This is reasonable because more thick metal film have better electrical characteristics. We investigated Mo change to $MoSe_2$ layer through selenization processes after Se/Mo/SLG fabrication as a function of the selenization time from 5 to 40 minutes. $MoSe_2$ thickness were changed to increase as according to the increasing of selenization time. We could find out that we have to control $MoSe_2$ thickness to get ohmic contact characteristics as controlling of proper selenization time. And we fabricated and evaluated CIGS thin film solar cell device as Al/AZO/ZnO/CdS/CIGS/Mo/SLG structures depend on Mo thickness 1.2 ${\mu}m$ and 0.6 ${\mu}m$. The efficiency of CIGS device with 0.6 ${\mu}m$ Mo thickness is batter as 9.46% because Na ion of SLG can move to CIGS layer more faster through thin Mo layer. The adhesion characteristics of Mo back electrode on SLG were improved better as plasma pre-treatment on SLG substrate before Mo deposition. And we could expect better efficiency of CIGS thin film solar cell as controlling of Mo thickness and $MoSe_2$ thickness depend on Na effect and selenization time.

Properties of ZnO:Ga Transparent Conducting Film Fabricated on O2 Plasma-Treated Polyethylene Naphthalate Substrate (산소플라즈마 전처리된 Polyethylene Naphthalate 기판 위에 증착된 ZnO:Ga 투명전도막의 특성)

  • Kim, Byeong-Guk;Kim, Jeong-Yeon;Oh, Byoung-Jin;Lim, Dong-Gun;Park, Jae-Hwan;Woo, Duck-Hyun;Kweon, Soon-Yong
    • Korean Journal of Materials Research
    • /
    • v.20 no.4
    • /
    • pp.175-180
    • /
    • 2010
  • Transparent conducting oxide (TCO) films are widely used for optoelectronic applications. Among TCO materials, zinc oxide (ZnO) has been studied extensively for its high optical transmission and electrical conduction. In this study, the effects of $O_2$ plasma pretreatment on the properties of Ga-doped ZnO films (GZO) on polyethylene naphthalate (PEN) substrate were studied. The $O_2$ plasma pretreatment process was used instead of conventional oxide buffer layers. The $O_2$ plasma treatment process has several merits compared with the oxide buffer layer treatment, especially on a mass production scale. In this process, an additional sputtering system for oxide composition is not needed and the plasma treatment process is easily adopted as an in-line process. GZO films were fabricated by RF magnetron sputtering process. To improve surface energy and adhesion between the PEN substrate and the GZO film, the $O_2$ plasma pre-treatment process was used prior to GZO sputtering. As the RF power and the treatment time increased, the contact angle decreased and the RMS surface roughness increased significantly. It is believed that the surface energy and adhesive force of the polymer surfaces increased with the $O_2$ plasma treatment and that the crystallinity and grain size of the GZO films increased. When the RF power was 100W and the treatment time was 120 sec in the $O_2$ plasma pretreatment process, the resistivity of the GZO films on the PEN substrate was $1.05\;{\times}\;10^{-3}{\Omega}-cm$, which is an appropriate range for most optoelectronic applications.

Preparation and Certification of Rice Flour Reference Materials for Trace Elements Analysis (미량원소분석을 위한 쌀분말 기준물질의 제조 및 검정)

  • Cho, Kyung-Haeng;Park, Chang-Joon;Woo, Jin-Choon;Suh, Jung-Ki;Han, Myung-Sub;Lee, Jong-Hae
    • Analytical Science and Technology
    • /
    • v.11 no.4
    • /
    • pp.271-280
    • /
    • 1998
  • Rice flour reference materials were prepared from the unpolished rice grown in Korea and certified for elemental composition. The reference materials consist of two samples containing normal and high level. The reference material at elevated level was prepared by spiking to the normal rice flour six toxic elements of As, Cd, Cu, Cr, Hg, Pb with $1.0{\mu}g/g$ on a dry weight basis. Homogeneity of the prepared materials was evaluated through the determination of Ca, Cu, Fe, Mn, Zn by instrumental neutron activation analysis (INAA) and atomic absorption spectrometry (AAS). Small variance of elemental composition among interbottled samples assured homogeneity of the prepared materials. The materials were decomposed by high pressure digestion and microwave digestion method. INAA, AAS, inductively coupled plasma-atomic absorption spectrometry (ICP-AES), ICP-mass spectrometry (MS) and vapour generation techniques were employed to analyze the reference materials. From this independent analytical results, the certified or reference values are determined for As, Ca, Cd, Cr, Cu, Fe, Hg, K, Mg, Mn, Mo, Na, P, Pb, Se, Zn.

  • PDF

아크 이온플레이팅법으로 증착된 CrN계 박막의 특성 및 내마모성에 대한 연구

  • 백운승;여현동;박신민;채병규;김규호;권식철
    • Proceedings of the Korean Institute of Surface Engineering Conference
    • /
    • 1999.10a
    • /
    • pp.37-37
    • /
    • 1999
  • Cr-N 계 박막은 경도가 높고 치밀한 층을 형성할 수 있으므로 현재 금형과 기계류 핵심부품의 내마모 및 내식성 향상을 위한 대표적인 물질로 많은 주목을 받고 있다. 본 연구에서는 아크 이온플레이팅 장비를 이용하여 질소분압, 바이어스 전원 등의 변화에 따른 Cr-N계 박막의 결정성 및 표면상태, 증착율, 그리고 내마모성을 조사하였다. Cr-N 계 박막을 증착하기 위해서 사용한 시편은 $20MM{\phi}{\times}4mmt$ 크기의 고속도 공구강 디스크이었으며, Trichloroethylene에서 5분간 초음파 세척을 한 후 건조하여 진공용기 내에 장착하였다. 박막을 증착하기전 시편의 표면을 깨끗하게 하기 위해서 Ar 이온 충격으로 플라즈마 전처리를 하였다. 증착된 Cr-N 계 박막의 두께는 CALOTEST와 XRF 두께 측정기를 이용하여 측정하였으며, 박막의 결정성과 내마모성은 X-선 회절분석기와 tribometer로 관찰하였다. 아크 전류를 변화시키면서 증착한 Cr-N 박막의 경우 층작율은 아크 전류가 50A에서 80A로 증가함에 따라 45nm/min에서 87nm/min으로 증가하였다. 그리고 바이어스 펄스의 duty-on 시간과 주파수가 증가할수도록 박막의 증착율은 감소함을 알 수 있었다. Duty-on 시간과 주파수의 증가는 기판에 오랫동안 이온의 충격을 가하므로서 상대적으로 가벼운 질소이온이 크롬과 결합하는 것을 방해하여 박막의 증착율이 감소할 것이다. 기판에 인가하는 바이어스 펄스의 duty-on 시간을 변화시키면서 증착한 Cr-N 박막에 대한 X-선 회절상을 조사한 결과 duty-on 시간이 20%인 경우에는 Crn(111), CrN(200)와 Crn(220) 피크 들만 나타나 입방정의 CrN 박막이 형성되었으며, duty-on 시간의 증가에 따라 $Cr_2N$ 상의 형성이 점점 많아져 80% duty-on 시간 경우에는 거의 CrN과 $Cr_2N$ 상이 공존하는 것으로 나타났다. 또한 duty-on 시간이 증가할수록 회절피크의 세기가 증가하여 결정화가 더 많이 진행되어짐을 알 수 있었다. 마찬가지로 바이어스 펄스이 주파수에 다른 결정성의 변화도 펄스의 주파수가 증가할수록 박막이 결정성이 좋아지고 $Cr_2N$ 상이 쉽게 형성되었다. 증착 진공도에 따른 결정성은 상대적으로 질소의 농도가 높은 낮은 진공도에서는 CrN 상이 주로 형성되었으며, 반대로 높은 진공도에서는 $Cr_2N$ 상이 많이 만들어졌다. 즉 $1.3{\times}10^{-2}Torr$의 증착 진공도에서는 CrN 상만이 보이는 반면 $9.0{\tiems}1-^{-2}Torr$ 진공도에서부터 $Cr_2N$ 상이 형성되기 시작하여 $5.0{\tiems}10^{-2}Torr$ 진공도에서는 두개의 상이 혼재되어 있음을 알 수 있었다. 박막의 내마모성을 조사한 결과 CrN 박막의 마찰 계수는 초기에 급격하게 증가한 후 0.5에서 0.6 사이의 값으로 큰 변화를 보이지 않았으며, $Cr_2N$ 박막도 비슷한 거동을 보였다.

  • PDF

Characteristic of Pd-Cu-Ni Alloy Hydrogen Membrane using the Cu Reflow (Cu Reflow를 이용한 Pd-Cu-Ni 합금 수소분리막 특성)

  • Kim, Dong-Won;Kim, Heung-Gu;Um, Ki-Youn;Kim, Sang-Ho;Lee, In-Seon;Park, Jong-Su;Ryi, Shin-Kun
    • Korean Chemical Engineering Research
    • /
    • v.44 no.2
    • /
    • pp.160-165
    • /
    • 2006
  • A Pd-Cu-Ni alloyed hydrogen membrane has fabricated on porous nickel support formed by nickel powder. Porous nickel support made by sintering shows a strong resistance to hydrogen embrittlement and thermal fatigue. Plasma surface modification treatment is introduced as pre-treatment process instead of conventional HCl wet activation. Nickel was electroplated to a thickness of $2{\mu}m$ in order in to fill micropores at the nickel support surface. Palladium and copper were deposited at thicknesses of $4{\mu}m$ and $0.5{\mu}m$, respectively, on the nickel coated support by DC sputtering process. Subsequently, copper reflow at $700^{\circ}C$ was performed for an hour in $H_2$ ambient. And, as a result PdCu-Ni composite membrane has a pinhole-free and extremely dense microstructure, having a good adhesion to the porous nickel support and infinite hydrogen selectivity in $H_2/N_2$ mixtures.

Rapid Detection of Radioactive Strontium in Water Samples Using Laser-Induced Breakdown Spectroscopy (LIBS) (Laser-Induced Breakdown Spectroscopy (LIBS)를 이용한 방사성 스트론튬 오염물질에 대한 신속한 모니터링 기술)

  • Park, Jin-young;Kim, Hyun-a;Park, Kihong;Kim, Kyoung-woong
    • Economic and Environmental Geology
    • /
    • v.50 no.5
    • /
    • pp.341-352
    • /
    • 2017
  • Along with Cs-137 (half-life: 30.17 years), Sr-90 (half-life: 28.8 years) is one of the most important environmental monitoring radioactive elements. Rapid and easy monitoring method for Sr-90 using Laser-Induced Breakdown Spectroscopy (LIBS) has been studied. Strontium belongs to a bivalent alkaline earth metal such as calcium and has similar electron arrangement and size. Due to these similar chemical properties, it can easily enter into the human body through the food chain via water, soil, and crops when leaked into the environment. In addition, it is immersed into the bone at the case of human influx and causes the toxicity for a long time (biological half-life: about 50 years). It is a very reductive and related with the specific reaction that makes wet analysis difficult. In particular, radioactive strontium should be monitored by nuclear power plants but it is very difficult to be analysed from high-cost problems as well as low accuracy of analysis due to complicated analysis procedures, expensive analysis equipment, and a pretreatment process of using massive chemicals. Therefore, we introduce the Laser-Induced Breakdown Spectroscopy (LIBS) analysis method that analyzes the elements in the sample using the inherent spectrum by generating plasma on the sample using pulse energy, and it can be analyzed in a few seconds without preprocessing. A variety of analytical plates for samples were developed to improve the analytical sensitivity by optimizing the laser, wavelength, and time resolution. This can be effectively applied to real-time monitoring of radioactive wastewater discharged from a nuclear power plant, and furthermore, it can be applied as an emergency monitoring means such as possible future accidents at a nuclear power plants.

The Content of Minerals and Vitamins in Commercial Beverages and Liquid Teas (유통음료 및 액상차 중의 비타민과 미네랄 함량)

  • Shin, Young;Kim, Sung-Dan;Kim, Bog-Soon;Yun, Eun-Sun;Chang, Min-Su;Jung, Sun-Ok;Lee, Yong-Cheol;Kim, Jung-Hun;Chae, Young-Zoo
    • Journal of Food Hygiene and Safety
    • /
    • v.26 no.4
    • /
    • pp.322-329
    • /
    • 2011
  • This study was done to analyze the contents of minerals and vitamins to compare the measured values of minerals, vitamins with labeled values of them in food labeling and to investigate the ratio of measured values to labeled values in 437 specimen with minerals and vitamins - fortified commercial beverages and liquid teas. Content of calcium and sodium in samples after microwave digestion was analyzed with an ICP-OES (Inductively Coupled Plasma Optical Emission Spectrometer) and vitamins were determined using by HPLC (High Performance Liquid Chromatography). The measured values of calcium were ranged 80.3~142.6% of the labeled values in 21 samples composed calcium - fortified commercial beverages and liquid teas. In case of sodium, measured values were investigated 33.9~48.5% of the labeled values in 21 sports beverages. The measured values of vitamin C, vitamin $B_2$ and niacin were ranged 99.7~2003.6, 81.1~336.7, 90.7~393.2% of the labeled values in vitamins - fortified commercial beverages and liquid teas, 57, 12, 11 samples. To support achievement of the accurate nutrition label, there must be program and initiatives for better understanding and guidances on food labelling and nutrition for food manufacture.