Development of V-SAM Process and Surface Characterization for Anti-contamination of CMP Conditioner (CMP Conditioner의 오염방지를 위한 V-SAM 공정개발과 박막특성 분석)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2009.06a
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- pp.56-56
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- 2009