• Title/Summary/Keyword: 표면평활도

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A Study on the Film-Formation Mechanism by Ionized Cluster Beam Deposition (이온화 클러스터 빔 증착의 박막 형성 기구에 관한 연구)

  • Shin, C.B.;Lee, K.H.;Hwang, G.S.;Moon, S.H.;Cho, W.I.;Yun, K.S.
    • Applied Chemistry for Engineering
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    • v.7 no.3
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    • pp.464-472
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    • 1996
  • The mechanism of thin-film formation by Ionized Cluster Beam Deposition(ICBD) was investigated. A simulation program based on the Monte-Carlo method was developed in order to investigate the effects of the acceleration voltage, substrate temperature, activation energy for the surface migration, and critical nuclei size on grain size and surface roughness. Studies of the effect of kinetic energy of clusters on the film formation processes revealed that high acceleration voltage enhanced the surface-migration of adatoms and made it easier for an epitaxial film to be formed. The relaxation time of kinetic energy of adatoms increased with the substrate temperature, which in turn increased the grain size of the crystalline film. This effect was more clearly distinguished when the critical nuclei size was large. The surface-migration activation energy was found to affect the interaction between the adatoms and the substrate and thus the relaxation time of kinetic energy. Investigations of the surface roughness revealed that the acceleration voltage, the substrate temperature, and the surface-migration activation energy exerted a collective effect on the morphology of the film surface.

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Post-Processing Technique on the Determination of Crack Tip Stress Intensity Factors (균열선단 응력확대계수 결정을 위한 후처리기법)

  • Jin, Chi Sub;Jang, Heui Suk
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.11 no.1
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    • pp.17-27
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    • 1991
  • The determination of the stress intensity factors is investigated by means of a surface integral defined around the crack tip of the structure. It has been shown in this work that this integral is derived from the standard path integral J. The use of the surface integral has also been extended to the case where body forces act. Computer program obtaining the stress intensity factors $K_I$ and $K_{II}$ is developed, which prepares input variables from the result of the conventional finite element analysis. This paper provides a parabolic smooth curve function. By the use of the function and conventional element meshes in which the aspect ratio (element length/crack length)is about 25 percent, relatively correct $K_I$ and $K_{II}$ values can be obtained for the exterior radius ranging from 1/3 to 1 of the crack length.

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Cracks Information Analysis of Concrete Slab Surface (콘크리트 슬래브 표면의 균열 정보 분석)

  • No, Dae-Kyeung;Kim, Kwang-Beak
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2008.10a
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    • pp.399-405
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    • 2008
  • 콘크리트 슬래브 표면의 영상처리 목적은 구조물의 균열발생을 최소화하고 발생한 균열에 대해서 지속적인 기록 관리로 균열의 진행 상태를 분석하여 보수시기 및 보수공법 적용의 합리적 운영체계를 수립하고자 하는 것이다. 일반적으로 콘크리트에서의 균열은 육안으로 분간할 수 있을 정도로 큰 반면 프리스트레스트 콘크리트의 균열은 기기를 사용하여야 측정, 분별할 수 있다. 본 논문에서는 균열의 명함도와 인접한 표면의 명함도 차이를 이용하여 균열과 잡음을 분리한다. 그리고 균열과 잡음 영역에서 형태학적인 정보를 이용하여 잡음 영역만을 제거한다. 잡음 영역이 제거된 균열 영역에서도 미세한 잡음이 존재하므로 균열 영역을 평활화를 한 후, 미세 잡음을 하나의 객체로 인식하여 제거하고 끊어진 영역의 균열을 미디언 필터를 이용하여 균열을 연결한다. 그리고 제안된 방법으로 추출된 균열을 원본 영상에 적용하여 최종적으로 균열만을 검출한다. 검출된 균열에서 균열의 특정부분을 선택하고 선택되어진 균열 영상을 대상으로 균열의 길이, 방향, 폭을 순차적으로 분석한다. 실제 균열 영상을 대상으로 실험한 결과, 균열이 비교적 정확히 검출되었고 균열 검사기가 한번에 측정할 때에 비해 비교적 빠르고 적은 노력으로 측정할 수 있는 것을 확인하였다.

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Preparation and characterization of AiN Thin Films by RF sputtering method (고주파 때려내기법에 의한 질화알루미늄 박막의 제작과 특성)

  • 정성훈;김영호;문동찬;김선태
    • Electrical & Electronic Materials
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    • v.10 no.7
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    • pp.706-712
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    • 1997
  • AlN(Aluminium Nitride) thin films were prepared using by RF sputtering method on the Si(100) and Si(111) substrates as the parameters of the substrate temperature, RF power, sputtering duration and the $N_2$/Ar ratio and investigated by X-ray diffraction, IR spectrometry, n&k analyzer. For the Si(100) substrate, the AlN thin films of (101) orientation were obtained under the conditions of room temperature and the nitrogen of 60 vol.%. For the Si(111) substrate, the (002) AlN thin films were obtained under the nitrogen of 100 vol.%. In case of the thin film prepared in the condition of above 60 vol.% of the nitrogen, the average value of the surface roughness of the film was 151$\AA$. From the changes of the half widths of E$_1$[TO] phonon bands at the wavenumber of 680$cm^{-1}$ /, it were compared of the crystallinities of the films which were grown under the different conditions. The thicknesses of AlN films were decreased dramatically in the region of the nitrogen of 40~60 vol.%. Its due to the nitridation of the Al target surface and getting low of the sputtering yield by the $N_2$/Ar ratio being increased.

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A Fracture Mechanic Study on Life Prediction of Surface Cracks at Elevated Temperature (고온화 표면균열의 수명예측에 관한 파괴역학적 연구)

  • Chang-Min,Suh;Young-Ho,Kim;Bung-Ho,Son;Sang-Yeub,Oh
    • Bulletin of the Society of Naval Architects of Korea
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    • v.27 no.3
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    • pp.100-106
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    • 1990
  • Microcracking of type 304 stainless steel at $593^{\circ}C(1,100^{\circ}F)$ has been studied, in particular, initiation, growth, and coalescence of fatigue and creep microcracks on smooth specimens and small notch specimens via surface replicas and photomicrographs. Quantitative information, such as, initiation period, growth, and coalescence behavior, statistical distributions of crack length, density of cracks, distribution patterns and crack growth properties, were obtained. From this study, the fracture process, fatigue life, and creep life prediction characterized by the growth of surface microcracks have been analysed by a new approach unifying the conventional approaches based on the final fracture of materials with the fracture mechanics approach. Knowledge of these parameters is critical for the application of fracture mechanics to fatigue and creep life assessment, and the damage evaluation of structures at elevated temperature.

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Study on the leaf morphology of Korean Aster L. and its allied taxa (한국산 개미취속 및 근연 분류군의 엽형태에 관한 연구)

  • 정규영;정형진
    • Korean Journal of Plant Resources
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    • v.12 no.1
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    • pp.50-61
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    • 1999
  • The leaf morphological and anatomical characters about 17 taxa of Aster and its allied taxa were investigated to estimate taxonomic values. Leaf shapes of the treated taxa were divided into five types; elliptic, spathulate, lanceolate, linear, ovatodeltoid. These types were fixed in same taxa, but variable among different taxa, therefore useful as taxonomic character. Leaf margins were divided into four types; entire, serrate, dentate, incised, these types were invariable in most taxa, but variable among individual in same taxa such as Kalimeris incise, Aster spathulifolius. The size and shape of leaf epidermal cell, the size and distributional numbers per 10$\textrm{mm}^2$ of stomata, deposit feature of cuticle were not distinguished clearly from treated taxa, but presence of stomata on adaxial surface, size and distributional numbers per 10$\textrm{mm}^2$ of stomata were useful taxonomic characters in some taxa such as Gymnaster koraiensis, Aster altaicus var. uchiyamae, Aster tripolium, Heteropappus arenarius. The leaf trichomes were divided into five types by basic form, sculpturing on their outer surface and cell arrangement; uniseriate granulate conical type, uniseriate psilate conical type, uniseriate psilate filiform type, globular type, biseriate vesicular capitate type. In spite of various habitat, basic morphology of trichomes were not changed, therefore, it was thought to be good taxonomic character.

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Pollen Morphology of the Woody Fabaceae in Korea (한국에서 생육하는 콩과 목본식물의 화분형태)

  • Song, Unsook
    • Korean Journal of Plant Taxonomy
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    • v.37 no.2
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    • pp.87-108
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    • 2007
  • The pollen morphology of 31 taxa, representing all woody species from 12 genera of Fabaceae in Korea, was examined by light microscope and scanning electron microscope. The pollen grains were monad and prolate spheroidal or rarely subprolate in equatorial view. The pollen grain aperture was trizonocolporate or rarely trizonooperculate, which does not occur in the other families of Fabales in Korea. The exine showed a great variety of sculpture pattern, i.e. psilate, microperforate, densely microperforate, perforate, polygonal perforate, macroperforate, macroperforate with granules in holes, polygonal macroperforate, verrucate with pitted perforate striae, verrucate-perforate, granulate, rugulate, reticulate or refined reticulate. The pollen morphological data supported the idea that the genera Echinosophora and Sophora were congeneric. Caragana (Galegeae) was quite close to the Sophora group (Maackia, Sophora and Echinosophora) of the Sophoreae in each measured pollen parameter and exine sculpture pattern. Eleven genera of Fabaceae were recognized based on differences in aperture type, pollen grain shape and exine pattern, and a generic pollen key of the woody Fabaceae in Korea was developed. A key to pollen types of Lespedeza was also suggested. The examined taxa of Coronilla and Wisteria were recognized by their exine patterns.

차세대 TCO 소재

  • Song, Pung-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.10-10
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    • 2010
  • 가시광역에서 80% 이상의 높은 투과율과 전기전도성을 동시에 갖는 투명전도성 산화물(TCO) 박막은 LCD, PDP, OLED, 태양전지 등의 다양한 분야에 투명전극재료로서 사용되고 있다. 이들 TCO 박막은 Magnetron sputtering, Chemical vapor deposition, Pulse laser deposition, Ink jet등과 같은 다양한 방법으로 증착할 수 있지만, 대면적의 기판에 균일한 박막형성 및 박막과 기판의 높은 부착력등 양산성의 관점에서 우월성을 가지고 있기 때문에 생산라인에서는 DC magnetron sputtering법이 주로 사용되고 있다. 이 경우, 산화물 박막의 미세구조, 내부응력, 광학적 및 전기적 특성은 스퍼터링 과정에서 발생하는 고에너지 입자들의 기판입사 충격에 크게 의존하기 때문에 고품질의 TCO박막을 제작하기 위해서는 증착공정인자들의 제어는 매우 중요한 것으로 알려져 있다. 대표적 TCO박막재료로서 $In_2O_3$계, ZnO계 및 $SnO_2$계를 들 수 있으며, 이들 중에서 Sn을 $In_2O_3$에 치환고용시킨 ITO박막의 경우, 전기적 및 광학적 특성이 상대적으로 우수하기 때문에 실용화 TCO박막으로서 가장 널리 사용되고 있다. 한편, Flexible display의 경우, 유연성의 폴리머기판위에 증착되는 TCO박막에 대하여 요구되는 특성으로는 높은 투과율 및 낮은 비저항은 물론, 박막표면의 평활도 (낮은 표면조도), bending에 대한 높은 기계적 특성 (낮은 내부응력), 수분침투에 대한 높은 barrier특성 및 저온공정 등을 들 수 있다. 그러나 높은 전기전도도를 가지는 ITO박막을 제작하기 위해서는 $200^{\circ}C$ 이상의 증착온도가 필요하며, 이때 얻어진 다결정의 ITO박막은 높은 표면조도 및 bending시에 낮은 기계적 내구성이 문제점으로 지적되고 있다. 한편, 기판가열 없이 증착한 비정질 ITO박막은 낮은 표면조도, 높은 엣칭속도 및 양호한 식각특성을 나타내지만, 상대적으로 높은 비저항 및 기판과의 낮은 부착력 등이 지적되고 있다. 따라서 본 강연에서는 비정질 ITO박막의 결정화 온도 (약 $160^{\circ}C$) 이상에서도 비정질 구조를 유지하기 때문에 낮은 표면조도와 높은 엣칭속도를 가지면서 상대적으로 전기적 특성과 기계적 내구성이 개선된 새로운 고온형 비정질 TCO박막에 대한 최근의 연구성과를 소개하고자 한다.

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A Study on the Mask Fabrication Process for X-ray Lithography (X-선 노광용 마스크 제작공정에 관한 연구)

  • 박창모;우상균;이승윤;안진호
    • Journal of the Microelectronics and Packaging Society
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    • v.7 no.2
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    • pp.1-6
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    • 2000
  • X-ray lithography mask with SiC membrane and Ta absorber patterns has been fabricated using ECR plasma CVD, d.c. magnetron sputtering, and ECR plasma etching. The stress of stoichiometric SiC film was adjusted by rapid thermal annealing under $N_2$, ambient. Adjusting the working pressure during sputtering process resulted in a near-zero residual stress, reasonable density, and smooth surface morphology of Ta film. Cl-based plasma showed a good etching characteristics of Ta, and two-step etching process was implemented to suppress microloading effect fur sub-quarter $\mu\textrm{m}$ patterning.

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Propagation Characteristics of Fatigue Microcracks on Smooth Specimen of $2_{1/4}$ Cr-1 Mo Steel ($2_{1/4}$ Cr-1 Mo강의 평활재상의 미소한 표면피로균열의 성장특성)

  • Suh, Chang-Min;Woo, Byung-Chul;Jang, Hui-Rak
    • Journal of Ocean Engineering and Technology
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    • v.4 no.2
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    • pp.100-111
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    • 1990
  • In this paper, fatigue tests were carried out at stress test levels of 461 MPa, 441 MPa, and 431 MPa by using smooth specimen of$2_{1/4}$ Cr-1 Mo steel with the stress ratio(R) of 0.05. The initiation, growth and coalescense process of the major cracks and sub-cracks among the fatigue cracks on the smooth specimen are investigated and measured under each stress level at a constant cycle ratio by the replica technique with optical microscope. Some of the important results are as follows: In spite of the difference of stress levels, the major crack data gather into a small band in the curve of surface crack length and crack depth against cycle ratio N/Nf. The sub-crack data, however, deviate from the band of the major crack. The growth rates, da/dN, of major and sub-crack plotted against the stress intensity factor range, ${\Delta}K$, have the tendency to be compressed on a relatively small band. But it is more effective to predict fatigue life through major cracks. The propagation behavior of surface microcracks on the smooth specimens coincides with that of the specimen having an artificial small surface defect or through crack.

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