• The Journal of the Korea institute of electronic communication sciences
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• v.8 no.4
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• pp.549-554
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• 2013

With the synthesis of graphene on Cu using CVD, it was tried to show the behavior of graphene growth depending on the size and orientation of Cu grain. It was found out that even under the same temperature and pressure the use of different gases influences on the diffusion rate of Cu. As compared to Ar gas, Cu grain growing bigger under $H_2$ and $CH_4$ was resulted in bigger graphene grain. Corrosion resistance was evaluated by potentiodynamic polarization test in room temperature and found out that the graphene on Cu was more stable in order of 10 than pure Cu due to the chemical stability of graphene. The future work of this research will focus on the synthesis of graphene having no defects including grain boundaries, and its engineering use.

• Journal of the Korean Chemical Society
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• v.43 no.1
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• pp.58-68
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• 1999

The phthalocyanine(Pc) film can not be prepared by LB method because it is insoluble in organic solvents. In order to increase its solubility, two kinds of copper phthalocyanine derivatives (CuPc$(COOH)_2$ and CuPc$(COOH)_4$) were synthesized and their monolayers were prepared by LB method. It is found from the surface pressure-area curves that the LB monolayer film of CuPc$(COOH)_2$ have more ordered structure than that of CuPc$(COOH)_4$. In the photocurrent characteristic the value Of CuPc$(COOH)_2$ was superior to that of CuPc $(COOH)_4$. Therefore, it is found that the charge generation efficiency for phthalocyanines have influenced on its ordered structure as the functional groups.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.39 no.9
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• pp.719-726
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• 2015

One method of increasing the heat-transfer rate is to increase the heat-transfer area. In this study, we test a wide louver fin-and-tube heat exchanger with $P_t/P_l$ = 1.03, and we compare the results with those of a louver fin-andtube heat exchanger with $P_t/P_l$ = 0.6. The results obtained show that the heat-transfer capacities of the wide louver samples are larger (16% in one row, 29% in two rows, and 38% in three row samples) than those of the louver samples. Considering the area ratio of 2.17, the increase in the heat-transfer capacity is somewhat small. The reason for this may be due to the smaller heat-transfer coefficient and fin efficiency of the wide louver sample. The effect of the fin pitch on the j and f factors are not profounded. The j and f factors decreased as the number of tube rows increased. We compare the data obtained with existing correlations.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.6
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• pp.427-434
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• 2009

A new surface shape of an internal cooling passage which largely reduces the pressure drop and enhances the surface heat transfer is proposed in the present study. The surface shape of the cooling passage is consisted of the concave dimple and the riblet inside the dimple which is protruded along the stream-wise direction. Direct Numerical Simulation (DNS) for the fully developed turbulent flow and thermal fields in the cooling passage is conducted. The numerical simulations for five different surface shapes are conducted at the Reynolds number of 2800 based on the mean bulk velocity and channel height and Prandtl number of 0.71. The driving pressure gradient is adjusted to keep a constant mass flow rate in the x direction. The thermoaerodynamic performance for five different cases used in the present study was assessed in terms of the drag, Nusselt number, Fanning friction factor, volume and area goodness factor in the cooling passage. The value of maximum ratio of drag reduction is -22.86 %, and the value of maximum ratio of Nusselt number augmentation is 7.05% when the riblet angle is $60^{\circ}$. The remarkable point is that the ratio of Nusselt number augmentation has the positive value for the surface shapes which have over $45^{\circ}$ of the riblet angle. The maximum volume and area goodness factors are obtained when the riblet angle is $60^{\circ}$.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.37 no.4
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• pp.467-473
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• 2013

In this study, two-dimensional finite element models were developed and experiments were conducted using an atomic force microscope to investigate the tribological characteristics of an SU-8 layer coated on a patterned wafer for microsystem applications. The results revealed that both the adhesion and the friction forces measured by the atomic force microscope were lower for the SU-8 coated surface than for the bare silicon surface. This is attributed to the hydrophobicity of SU-8. Another important result derived from the finite element analysis was the critical load required to fracture the SU-8 film with respect to the thickness. The critical loads for thicknesses of 200, 400, and 800 nm were approximately 13, 22, and 28 mN, respectively, which corresponded to a Hertzian contact pressure of 1.2-1.8 GPa. These results will aid in the design of a suitable SU-8 thickness for microsystem components that are in contact with one another.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.37 no.4
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• pp.437-442
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• 2013

In recent times, surface texturing methods have been widely applied to reduce friction and improve the reliability of machine components such as parallel thrust bearings, mechanical face seals, and piston rings. In this study, a numerical analysis is carried out to investigate the effect of uniformly spaced hemispherical dimples on the lubrication characteristics of a slider bearing using a commercial computational fluid dynamics (CFD) code, FLUENT. The pressure distributions, load capacity, leakage flowrate, and friction force are strongly affected by the dimple diameter and the number of dimples. In particular, the load capacity and friction force decrease linearly with the dimple density whereas the leakage increases. These results can be used for designing the optimum dimple characteristics in order to improve the lubrication performance of slider bearings, for which further studies are required.

• Journal of Energy Engineering
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• v.12 no.3
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• pp.231-240
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• 2003

Reactivity of Char-CO$_2$ gasification of five coals for power generation was investigated with PTGA in the temperature range 850∼1000$^{\circ}C$ and the pressure range 0.5∼2.0 MPa. The effect of coal rank, initial char characteristics and pressure on the reaction rate was evaluated for five chars. The reactivity of low lank coal char was better than that of high rank coal char, and this could be explained with the initial pore structure and surface area of char. Meso/macro-pores of char seems to markedly affect char reactivity by way of providing channels for diffusion of reactant gas into the reactive surface area. For the range of tested pressure, the reaction rate is proportional to CO$_2$ partial pressure and the reaction order ranges from 0.4 to 0.7 for five chars. The effect of total pressure on the reaction rate was small, and kinetic parameters, based on the unreacted core model, were obtained for five chars.

• Journal of Energy Engineering
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• v.17 no.1
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• pp.1-7
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• 2008

The present study has been conducted to understand the heat and mass transfer characteristics of humid airflow in frosting conditions. A flat plate of aluminum was used for the simulation of flat surface part of the fin of the heat exchanger. The aluminum surface temperatures were measured and analyzed to clarify the heat and mass transfer characteristics under frosting conditions. Also, the pressure drops were measured to clarify the air-blocking effect of frost in the mini channel of the air-side hoot exchangers. A data reduction method was developed far the analysis of local characteristics of humid air under frosting conditions.

• Journal of the Korean Vacuum Society
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• v.14 no.1
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• pp.1-6
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• 2005

Getters are invariably covered with thin layers of oxides even in air. For the getter to function properly it is necessary to activate them by heating in vacuum during which the oxide layer is removed exposing clean surface. The so-called activation temperature is an important parameter along with gas sorption capacity since it determines the maximum temperature of a device in which a getter can be installed. Nevertheless, no standard method to measure activation temperature has been documented yet. In this study, a relatively simple method to measure the activation temperature based on the ultimate pressure measurement was suggested. The activation temperature of TiZrV alloy measured by the method was between 100℃～200℃.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.23-23
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• 2011

Chemical-Mechanical Planarization (CMP) 공정이란 화학적 반응 및 기계적인 힘이 복합적으로 작용하여 표면을 평탄화하는 공정이다. 이러한 CMP 공정은 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위하여 도입되었으며 반도체 제조를 위한 필수공정으로 그 중요성이 강조되고 있다. 특히 최근에는 Inter-Level Dielectric (ILD)의 형성과 Shallow Trench Isolation (STI) 공정에서실리콘 산화막을 평탄화하기 위한 CMP 공정에 대해 연구가 활발히 이루어지고 있다. 그러나 CMP 공정 후 scratch, pitting corrosion, contamination 등의 Defect가 발생하는 문제점이 존재한다. 이 중에서도 scratch는 기계적, 열적 스트레스에 의해 생성된 패드의 잔해, 슬러리의 잔유물, 응집된 입자 등에 의해 표면에 형성된다. 반도체 공정에서는 다양한 종류의 실리콘 산화막이 사용되고 gks이러한 실리콘 산화막들은 종류에 따라 경도가 다르다. 따라서 실리콘 산화막의 경도에 따른 CMP 공정 및 이로 인한 Scratch 발생에 관한 연구가 필요하다고 할 수 있다. 본 연구에서는 scratch 형성의 거동을 알아보기 위하여 boronphoshposilicate glass (BPSG), plasma enhanced chemical vapor deposition (PECVD) tetraethylorthosilicate (TEOS), high density plasma (HDP) oxide의 3가지 실리콘 산화막의 기계적 성질 및 이에 따른 CMP 공정에 대한 평가를 실시하였다. CMP 공정 후 효율적인 scratch 평가를 위해 브러시를 이용하여 1차 세정을 실시하였으며 습식세정방법(SC-1, DHF)으로 마무리 하였다. Scratch 개수는 Particle counter (Surfscan6200, KLA Tencor, USA)로 측정하였고, 광학현미경을 이용하여 형태를 관찰하였다. Scratch 평가를 위한 CMP 공정은 실험에 사용된 3가지 종류의 실리콘 산화막들의 경도가 서로 다르기 때문에 동등한 실험조건 설정을 위해 동일한 연마량이 관찰되는 조건에서 실시하였다. 실험결과 scratch 종류는 그 형태에 따라 chatter/line/rolling type의 3가지로 분류되었다 BPSG가 다른 종류의 실리콘 산화막에 비해 많은 수에 scratch가 관찰되었으며 line type이 많은 비율을 차지한다는 것을 확인하였다. 또한 CMP 공정에서 압력이 증가함에 따라 chatter type scratch의 길이는 짧아지고 폭이 넓어지는 것을 확인하였다. 본 연구를 통해 실리콘 산화막의 경도에 따른 scratch 형성 원리를 파악하였다.