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Study on the measurement of activation temperature of Non-Evaporable Getter  

Lee D. J. (Dept. Metallurgical System Eng., Yonsei University)
Kim K. B. (Dept. Metallurgical System Eng., Yonsei University)
In S. R. (KAERI)
Lim J. Y, (KRISS)
Kim W. B. (KIGAM)
Publication Information
Journal of the Korean Vacuum Society / v.14, no.1, 2005 , pp. 1-6 More about this Journal
Abstract
Getters are invariably covered with thin layers of oxides even in air. For the getter to function properly it is necessary to activate them by heating in vacuum during which the oxide layer is removed exposing clean surface. The so-called activation temperature is an important parameter along with gas sorption capacity since it determines the maximum temperature of a device in which a getter can be installed. Nevertheless, no standard method to measure activation temperature has been documented yet. In this study, a relatively simple method to measure the activation temperature based on the ultimate pressure measurement was suggested. The activation temperature of TiZrV alloy measured by the method was between 100℃～200℃.
Keywords
Non-Evaporable Getter; Activation; TiZrV alloy Getter;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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