• Clean Technology
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• v.13 no.4
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• pp.257-265
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• 2007

As a basic study for the development of pilot-scale distillation process of waste photoresist strippers from semiconductor industry, lab-scale experiments for the recovery of NMP (N-methy1-pyrrolidione) and BDG (Butyldiglycol) from waste photoresist strippers have been made using a spinning band vacuum distillation column. Purities of NMP and BDG obtained from the present experiments were higher than 99.5%. Furthermore, water content was less than 1000 ppm, color grade(APHA) less than 50, most metal contents except sodium less than 1 ppb. Those results indicate that NMP and BDG reclamed by distillation satisfy the their specifications required for the formulation of new photoresist strippers. Recovery rate of NMP and BDG was 96 and 53%, respectively, for type A, and 93 and 57%, respectively, for type B waste PR stripper solution.

• Resources Recycling
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• v.18 no.1
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• pp.58-67
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• 2009

The annual requirement of domestic waste photoresist stripper solution is about 1 trillion won level (50,000 tons) depends entirely on imports for its supplies. Nevertheless, there waste strippers which contain the impurities have been recycled or incinerated to a low level of recycle. These days the recycling technologies of the waste stripper solution has been widely studied from the view points of economy and efficiency. In this paper, the recycling technologies on patent of the waste stripper solution were analyzed. The range of search was limited within the open patents of USA (US), European Union (EP), Japan (JP), and Korea (KR) up to september, 2007. Patents have been collected using key-words searching and filtered by filtering criteria. The trends of the patents was analyzed by the years, countries, companies, and technologies.