• Title/Summary/Keyword: 평면도형

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대면적 기판 위에서의 서브마이크로미터 주기와 크기를 갖는 홀 패턴 형성을 위한 포토리소그라피 공정 최적화

  • Kim, Do-Hyeong;Bae, Si-Yeong;Lee, Dong-Seon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.244-245
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    • 2010
  • 최근 광전자 분야에서는 미래 에너지 자원에 대한 관심과 함께 GaN 기반 발광다이오드 및 태양전지 연구가 활발히 진행되고 있다. GaN는 높은 전자 이동도와 높은 포화 속도 등의 광전자 소자에 유리한 특성을 가지고 있으나, 고 인듐 함유량과 막질의 우수한 특성을 동시에 구현하는 것은 매우 어렵다. 이를 극복하기 위한 방법으로써 선택 영역 박막 성장법(Selective Area Growth)은 마스크 패터닝을 통해 제한된 영역에서만 박막을 성장하는 방법으로써 GaN의 막질을 향상 시킬 수 있는 방법으로 주목받고 있다. 본 논문에서는 대면적 기판에서 GaN의 막질 향상뿐만 아니라 고인듐 InGaN 박막 성장을 위하여 서브마이크로미터 주기와 크기를 갖는 홀 패턴을 포토리소그라피 공정 최적화를 통해 구현할 수 있는 방법에 대해 논의한다. 그림. 1은 사파이어 기판 위에 선택 영역 박막 성장법을 이용하여 성장한 n-GaN/활성층/p-GaN의 구조를 나타낸 그림이다. 이를 통하여 서브마이크로미터 스케일의 반극성 InGaN면 위에 높은 인듐 함유량을 가지면서도 우수한 특성을 갖는 박막을 얻을 수 있다. 본 실험을 위하여 사파이어 기판 위에 SiO2를 증착한 후 포토레지스트(AZ5206)을 도포하고 포토리소그라피 공정을 진행하여 2um 크기 및 간격을 갖는 패턴을 형성했다. 그림. 2는 AZ5206에 UV를 조사(5초)하고 현상(23초)한 패턴을 윗면(그림. 2(a))과 $45^{\circ}$ 기울인 면(그림. 2(b)) 에서 본 SEM(Scanning Electron Microscope) 사진이다. 이를 통해 약 2.2um의 홀 패턴이 선명하게 형성 됨을 볼 수 있다. 그 후 수백나노 직경의 홀을 만들기 위해서 리플로우 공정을 수행한다. 그림. 3은 리플로우 온도에 따른 패턴의 홀 모양을 AFM(Atomic Force Microscope)을 이용하여 측정한 표면의 사진이다. 이를 통해 2차원 평면에서 리플로우 온도 및 시간에 따른 변화를 볼 수 있다. 그림.3의 (a)는 리플로우 공정을 진행하기 전 패턴이고, (b)는 $150^{\circ}C$에서 2분, (c)는 $160^{\circ}C$에서 2분 (d)는 $170^{\circ}C$에서 2분 동안 리플로우 공정을 진행한 패턴이다. $150^{\circ}C$$160^{\circ}C$에서는 직경에 큰 변화가 없었고, $160^{\circ}C$에서는 시료별 현상 시간 오차에 따라 홀의 크기가 커지는 경향이 나타났다. 그러나 $170^{\circ}C$에서 2분간 리플로우 한 시료 (그림. 3(d))의 경우는 홀의 직경이 ~970nm 정도로 줄어든 것을 볼 수 있다. 홀의 크기를 보다 명확히 표현하기 위해 그림.3에 대응시켜 단면을 스캔한 그래프가 그림.4에 나타나 있다. 그림.4의 (a) 및 (b)의 경우 포토레지스트의 높이 및 간격이 일정하므로, 리플로우에 의한 영향은 거의 없었다. 그림. 4(c)의 경우 포토레지스트의 높이가 그림.4(a)에 비해 ~25nm 정도 낮은 것으로 볼 때, 과도 현상 및 약간의 리플로우가 나타났을 가능성이 크다. 그림. 4(d)에서는 ~970nm의 홀 크기가 나타나서 본 연구에서 목표로 하는 나노 홀 크기에 가장 가까워짐을 확인할 수 있었다. 따라서, $170^{\circ}C$ 이상의 온도와 2분 이상의 리플로우 시간 조건에서 선택 영역 성장을 위한 나노 홀 마스크의 크기를 제어할 수 있음을 확인하였다.

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Analysis of Importance by Defect Type in Apartment Construction (공동주택 건축공사 하자유형별 중요도 분석)

  • Kim, Do-Hyung;Lee, Dongyoun;Lee, Hak-Ju;Min, Yoon-Gi;Park, Insung;Cho, Hunhee
    • Journal of the Korea Institute of Building Construction
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    • v.20 no.4
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    • pp.357-365
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    • 2020
  • While numbers of apartment housing are continually rising in the domestic housing construction industry, apartment contractors are currently developing plane models, upgrading facilities, and relevant technology, and investing much efforts to meet the higher demands of consumers. However, the construction process of apartment housing involves the intricate properties of the construction industry such as materials, workforce, equipment, weather, and unpredictable situations. If any of these factors becomes discordant and results in interference and interruption of the construction process, then defects, both functional and aesthetic, are likely to occur due to errors in the plan of industry organizers and constructors. Therefore, this research identifies the types of defects in an apartment construction project and analyzes their relative importance. Firstly, this research reviews the previous research trends and will reduce the needs of this research. Afterward, defect repair costs corresponding to the different defect types are calculated by applying results of the research and performing frequency analysis on defect types included in 'Tenant preliminary research' on apartments constructed by Company A. As a result of analyzing the importance of defect type, the top six activities, including tile, floor, paper hanging, PL window, cabinetry, and kitchen cabinet, are found to be of high importance, and the top six activities in question need of repair and management of defects first. The results of this study will help establish a plan to initially respond to such problems as refusal to move in and filing a defect suit against delay in repairing defects.

A Case Study(II) on Development and Application of 'Literature-Art-Science' Integrated Education Programs ('문학-미술-과학' 융합교육 프로그램의 개발 및 적용 사례 연구(II))

  • Choi, Byung Kil
    • Korea Science and Art Forum
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    • v.32
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    • pp.319-334
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    • 2018
  • This research is a case study to make sure the enhancement of students' imagination and creativity through developing and applying the Literature-Art-Science Integrated Education Program. Its research object was totally 25 persons of 29 students of the 1st to the 4 th Grades from Gunsan Sulsan Elementary School. Its research period lasted for 4 months from September to December, 2017, and I, as the research place, used the art room at Gunsan Sulsan Elementary School. The programs were totally 10 sessions with a unit of 1 session per each grade for 2 hours from 1:00 to 3:00 in the afternoon from Monday through Friday. I fixed ten themes of this program-eight plane modeling, and two solid modeling, and finished the work of storytelling during summer vacation. And I arranged their levels as low:middle:high(3:5:2) ones. The former was 'A Film of Monster Gorilla'(L), 'Learning the Spirit of Gyeongju Choi's Family'(M), 'A Tale of My Friend Made of Natural Materials'(L), 'The Reading of My Dream'(M), 'Gathering the Objects in My Mobile'(M), 'A Mock Trial of Marrying Off'(M), 'Painting My Favorite Children's Poem'(H), and 'Painting My Favorite Children's Song'(H), and the latter was 'Seeking for a Bluebird in My Mind'(L), and 'Making My Cherished Object' (M). Then I used the unique art expression technique per each theme, which were in sequence marbling, Korean paper art, combine painting, collage, imaginary painting, imaginary painting, play dough art, imaginary painting techniques. And I delivered to the students the scientific knowledge in terms of growing or manufacturing processes of materials used for making artworks. Prior to and after the processing this program, I surveyed about the students' ability of integrated thinking and emotional experience by 'Figure B Type' and 'Figure A Type' of The Torrance Tests of Creative Thinking, and took statistics with the resultant data. And I executed a paired t-test in order to verify the significance of mean difference in the result of investigation with those data. From the analyzed result according to the elements of creativity and the mean quotients of creativity, there showed a significant difference (t=3.47, p<.01) in 'fluency', and also a significant difference(t=3.59, p<.01) in 'creativity.' Judging from the statistic values of two fields such as the student's ability of integrated thinking and emotional experience, I estimate that over the majority of the students showed the enhancement in self-confident creative expression as well as higher interest and concern through this program. The result that I arranged and analyzed the making process of artworks, the photos of the resultant, etc. as such is as follows : Firstly, from this program being proceeded as art-centered STEAM class, the student's systematic problem-solving ability was improved in his ability of integrated thinking to transform the literary contents into artistic one. Secondly, the student obtained the emotional experience such as interest in the class, self-confidence, intellectual satisfaction, self-fulfillment, etc. through art-centered STEAM class using ten art expression techniques. Thirdly, the student's mind willing to cooperate, communicate with his friends, and care for them was ripened in the process of problem-solving. Fourth, the student's self-confidence was further instilled when presenting famous artists and their artworks in the introduction and finale of ten art expression techniques. Likewise, the statistic values on the fields of student's ability of integrated thinking and emotional experience illustrate that over the majority of the students showed improvement in the ability of creative expression with confidence as well as higher interest and concern upon this program.

A Study on the Characteristics and Model of Lotus Pond in Joseon Royal Tombs (조선왕릉 연지(蓮池)의 특성과 전형)

  • Ko, Seung-Kwan;Koo, Bon-Hak;Choi, Jong-Hee
    • Journal of the Korean Institute of Traditional Landscape Architecture
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    • v.29 no.3
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    • pp.116-123
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    • 2011
  • This study investigates the characteristics(form, material, structure, method of construction, vegetation) and model of lotus pond in Joseon Royal Tombs for conservation and restoration. The objects of study are the lotus pond of Namyangju Gwangreung, Hyoreung, Gimpo Jangreung and Sungreung that are well-preserved and the record is remaining. The form is two plane types, square shaped include an island and square shaped. The pond is 7.5~81m in width and 6.5~45m in length and the island is 8~16m in diameter. The depth of water is 0.5~1.2m and the cross section form is narrow bottom and wide top. The material of shore protection is soil in Hyoreung, Gimpo Jangreung and Sungreung. The bottom is mud in all sites. I think that the main material of the lotus pond in Joseon Royal Tombs is soil. The lotus pond is built by soil bank in the structure and method of construction. The water supply and drainage are worked through the culvert. There are many kinds of plants in the lotus pond today, however I think that the model of vegetation of lotus pond in Joseon Royal Tombs is lotus the inside, pine tree, fir tree and flowers the around and pine tree the inside of island in compared the present and the old literature. In comparison with the lotus pond in Joseon Royal Tombs and the lotus pond in the Joseon palace, the material is the biggest difference. The main material is soil in Royal Tombs but isodomic in Royal Palace. I think that the difference of material in between two causes the difference of structure and method of construction. The Royal Tombs is valuable in architecture, landscape and esthetics, this study investigated the characteristics and model of lotus pond in Joseon Royal Tombs. I think that this study serves as a momentum to find a traditional technique in Royal water space and offer the foundation to plan in the contemporary water space.

A Study on the Policy Direction of Space Composition of the Future School in Old High School - Focused on The Judgment of Space Relocation for the Application of the High School Credit System - (노후고등학교의 미래학교 공간구성 정책방향에 관한 연구 - 고교학점제 적용을 위한 공간 재배치 판단을 중심으로 -)

  • Lee, Jae-Lim
    • The Journal of Sustainable Design and Educational Environment Research
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    • v.21 no.3
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    • pp.1-13
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    • 2022
  • This study is a case study to identify the spatial composition and structural problems of existing schools for spatial innovation as a future school that can operate a credit system for old high schools and establish a mid-to-long-term arrangement plan as a credit system operating school capable of various teaching and learning in the future. The study results are as follows: First, most of the problems of the old high schools entailed that there was very poor connectivity between buildings as most of them were arranged in a single, standard design-type unit building and distributed in multiple buildings. In addition, the floor plan of each building is suggested to be a structure in which student exchange and rest functions cannot be achieved during the break period due to the spatial composition of the classroom and hallway concepts. Second, in the direction of the high school space configuration for future school space innovation, the arrangement plan should be established by reflecting the collective arrangement in consideration of the shortening of the movement route and the expansion of subject areas due to the movement of students on the premise of the subject classroom system. Moreover, it is desirable to provide a square-type space for rest and exchange in the central area where communication and exchange are possible according to the moving class. Third, as the evaluation criteria for relocating old high schools, a space program is prepared based on the number of classes in the future, and legal analysis of school land use and land use efficiency analysis considering regional characteristics are conducted. Based on such analysis data, mid-to-long-term land use plans and space arrangement plans for the entire school space such as the school facility complex are established.

Aesthetics of Samjae and Inequilateral Triangle Found in Ancient Triad of Buddha Carved on Rock - Centering on Formative Characteristics of Triad of Buddha Carved on Rock in Seosan - (고대(古代) 마애삼존불(磨崖三尊佛)에서 찾는 삼재(三才)와 부등변삼각(不等邊三角)의 미학(美學) - 서산마애삼존불의 형식미를 중심으로 -)

  • Rho, Jae-Hyun;Lee, Kyu-Wan;Jang, Il-Young;Goh, Yeo-Bin
    • Journal of the Korean Institute of Traditional Landscape Architecture
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    • v.28 no.3
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    • pp.72-84
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    • 2010
  • This study was attempted in order to offer basic data for implementing and applying Samjonseokjo(三尊石造), which is one of traditional stone construction method, by confirming how the constructive principle is expressed such as proportional beauty, which is contained in the modeling of Triad of Buddha Carved on Rock that was formed in the period of the Three States, centering on Triad of Buddha Carved on Rock in Susan. The summarized findings are as follows. 1. As a result of analyzing size and proportion of totally 17 of Triad of Buddha Carved on Rock, the average total height in Bonjonbul(本尊佛) was 2.96m. Right Hyeopsi(右挾侍) was 2.19m. Left Hyeopsi(左挾侍) was 2.16m. The height ratio according to this was 100:75:75, thereby having shown the relationship of left-right symmetrical balance. The area ratio in left-right Hyeopsi was 13.4:13.7, thereby the two area having been evenly matched. 2. The Triad of Buddha Carved on Rock in Seosan is carved on Inam(印岩) rock after crossing over Sambulgyo bridge of the Yonghyeon valley. Left direction was measured with $S47^{\circ}E$ in an angle of direction. This is judged to target an image change and an aesthetic sense in a Buddhist statue according to direction of sunlight while blocking worshipers' dazzling. 3. As for iconic characteristics of Buddha Carved on Rock in Seosan, there is even Hyeopsi in Bangasang(半跏像) and Bongjiboju(捧持寶珠) type Bosangipsang. In the face of Samjon composition in left-right asymmetry, the unification is indicated while the same line and shape are repeated. Thus, the stably visual balance is being shown. 4. In case of Triad of Buddha Carved on Rock in Seosan, total height in Bonjonbul, left Hyeopsi, and right Hyeopsi was 2.80m, 1.66m, and 1.70m, respectively. Height ratio in left-right Hyeopsibul was 0.60:0.62, thereby having been almost equal. On the other hand, the area ratio was 28.8:25.2, thereby having shown bigger difference. The area ratio on a plane was grasped to come closer to Samjae aesthetic proportion. 5. The axial angle of centering on Gwangbae was 84:46:50, thereby having been close to right angle. On the other hand, the axial angle ratio of centering on Yeonhwajwa(蓮華坐: lotus position) was measured to be 135:25:20, thereby having shown the form of inequilateral triangle close to obtuse angle. Accordingly, the upper part and the lower part of Triad of Buddha Carved on Rock in Susan are taking the stably proportional sense in the middle of maintaining the corresponding relationship through angular proportion of inequilateral triangle in right angle and obtuse angle. 6. The distance ratio in the upper half was 0.51:0.36:0.38. On the other hand, the distance ratio in the lower half was 0.53 : 0.33 : 0.27. Thus, the up-down and left-right symmetrical balance is being formed while showing the image closer to inequilateral triangle. 7. As a result of examining relationship of Samjae-mi(三才美) targeting Triad of Buddha Carved on Rock in Susan, the angular ratio was shown to be more notable that forms the area ratio or triangular form rather than length ratio. The inequilateral triangle, which is formed centering on Gwangbae(光背) in the upper part and Yeonhwajwa(lotus position) in the lower part, is becoming very importantly internal motive of doubling the constructive beauty among Samjae, no less than the mutually height and area ratio in Samjonbul.