• Title/Summary/Keyword: 트렌치 구조

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Fabrication of Depth Probe Type Semiconductor Microelectrode Arrays for Neural Recording Using Both Dry and wet Etching of Silicon (실리콘 건식식각과 습식식각을 이용한 신경 신호 기록용 탐침형 반도체 미세전극 어레이의 제작)

  • 신동용;윤태환;황은정;오승재;신형철;김성준
    • Journal of Biomedical Engineering Research
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    • v.22 no.2
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    • pp.145-150
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    • 2001
  • 대뇌 피질에 삽입하여 깊이에 따라 신경 신호를 기록하기 위한 탐침형 반도체 미세전극 어레이(depth-type silicon microelectrode array, 일명 SNU probe)를 제작하였다. 붕소를 확산시켜 생성된 고농도 p-type doping된 p+ 영역을 습식식각 정지점으로 사용하는 기존의 방법과 달리 실리콘 웨이퍼의 앞면을 건식식각하여 원하는 탐침 두께만큼의 깊이로 트렌치(trench)를 형성한 후 뒷면을 습식식각하는 방법으로 탐침 형태의 미세 구조를 만들었다. 제작된 반도체 미세전극 어레이의 탐침 두께는 30 $\mu\textrm{m}$이며 실리콘 건식식각을 위한 마스크로 6 $\mu\textrm{m}$ 두께의 LTO(low temperature oxide)를 사용하였다. 탐침의 두께는 개발된 본 공정을 이용해서 5~90 $\mu\textrm{m}$ 범위까지 쉽게 조절할 수 있었다. 탐침의 두께를 보다 쉽게 조절할 수 있게 됨에 따라 여러 신경조직에 필요한 다양한 구조의 반도체 미세전극 어레이를 개발할 수 있게 되었다. 본 공정을 이용해서 개발된 4채널 SUN probe를 사용하여 흰쥐의 제1차 체감각 피질에서 4채널 신경 신호를 동시에 기록하였으며, 전기적 특성검사에서 기존의 탐침형 반도체 미세전극, 텅스텐 전극과 대등하거나 우수한 신호대 잡음비(signal to noise ratio, SNR)특성을 가짐을 확인하였다.

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A Study on the Charge Balance Characteristics of Super Junction MOSFET with Deep-Trench Technology (Deep-Trench 기술을 적용한 Super Junction MOSFET의 Charge Balance 특성에 관한 연구)

  • Choi, Jong-Mun;Huh, Yoon-Young;Cheong, Heon-Seok;Kang, Ey-Goo
    • Journal of IKEEE
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    • v.25 no.2
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    • pp.356-361
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    • 2021
  • Super Junction structure is the proposed structure to minimize the Trade-off phenomenon of power devices. Super Junction can have On-resistance(Ron) characteristics as less as five times than conventional structure. There are process methods that Multi-Epi and Deep-Trench of Super Junction structure. The reason for this is that Deep-Trench process is known to be a relatively difficult manufacturing method because it is easy to form a P-Pillar by burying impurities on top of a silicon substrate through a Deep-Trench process. However, the structure created by the Deep-Trench process has low On-resistance and high breakdown voltage, showing better efficiency. In this paper, we suggested a novel method in the process and designed structure with Charge Balance theory.

Interpretation of Deformation History and Paleostress Based on Fracture Analysis Exposed in a Trench (트렌치에서의 단열분석을 통해 도출한 단열발달사 및 고응력 해석: 울산 신암리의 예)

  • Gwon, Sehyeon;Kim, Young-Seog
    • The Journal of Engineering Geology
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    • v.26 no.1
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    • pp.33-49
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    • 2016
  • The study area, located in Sinam-ri, Ulsan, in the southeastern part of the Korean Peninsula, is mainly composed of hornblende granite (ca. 65 Ma). Fracturing and reactivation of a fault striking ENE-WSW was strongly controlled by the intrusion of a mafic dyke (ca. 44 Ma), which behaves as a discontinuity in the mechanically homogeneous pluton, increasing the instability of the basement in this area. A geometric and kinematic study undertaken to interpret the faults and fractures was performed in a trench excavated almost perpendicular to the orientation of the dyke. The analysis of structural elements, such as dykes, veins, and faults, is used to infer the deformation history and to determine the paleostress orientations at the time of formation of the structures. The deformation history established based on this analysis is as follows: (1) NNE-SSW, E-W, ENE-WSW, and NE-SW trending fractures had already developed in the pluton before dyke intrusion; (2) felsic dykes intruded under conditions of σHmax oriented N-S and σHmin oriented E-W; (3) mafic dykes intruded under conditions of σHmax oriented E-W and σHmin oriented N-S; (4) dextral reactivation of the main fault associated with the development of hydrothermal quartz veins under conditions of σHmax oriented E-W and σHmin oriented N-S; (5) sinistral reactivation of the main fault and high-angle normal faults under conditions of σHmax oriented NE-SW and σHmin oriented NW-SE; and (6) dextral reactivation of the main fault and NE-SW low-angle reverse faults under conditions of σHmax oriented NW-SE and σHmin oriented NE-SW. These results are consistent with the tectonic history of the Pohang-Ulsan block in the southeastern part of the Korean Peninsula, and indicates the tectonic deformation of the southern area of the Ulsan fault bounded by Yangsan fault was analogous to that of the Pohang-Ulsan area from the Cenozoic. This work greatly aids the selection of sites for critical facilities to prevent potential earthquake hazards in this area.

Improvement of Bonding Strength Uniformity in Silicon-on-glass Process by Anchor Design (Silicon-on-glass 공정에서 접합력 균일도 향상을 위한 고정단 설계)

  • Park, Usung;An, Jun Eon;Yoon, Sungjin
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.41 no.6
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    • pp.423-427
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    • 2017
  • In this paper, an anchor design that improves bonding strength uniformity in the silicon-on-glass (SOG) process is presented. The SOG process is widely used in conjunction with electrode-patterned glass substrates as a standard fabrication process for forming high-aspect-ratio movable silicon microstructures in various types of sensors, including inertial and resonant sensors. In the proposed anchor design, a trench separates the silicon-bonded area and the electrode contact area to prevent irregular bonding caused by the protrusion of the electrode layer beyond the glass surface. This technique can be conveniently adopted to almost all devices fabricated by the SOG process without the necessity of additional processes.

High-Resolution Seismic Reflection Profiling on Land with Hydrophones Employed in the Stream-Water Driven Trench (하천수유입과 하이드로폰을 이용한 육상 고분해능 탄성파반사법탐사)

  • Kim Ji-Soo;Han Su-Hyung;Kim Hak-Soo;Choi Won-Suk;Jung Chang-Ho
    • Geophysics and Geophysical Exploration
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    • v.4 no.4
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    • pp.133-144
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    • 2001
  • An effective seismic reflection technique for mapping the cavities and bedrock surface in carbonate rocks is described. The high resolution seismic reflection images were successfully registered by using the hydrophones employed in the stream-water driven trench, and were effectively focused by applying optimal data processing sequences. The strategy included enhancement of the signal interfered with the large-amplitude scattering noise, through pre- and post stack processing such as time-variant filtering, bad-trace editing, residual statics, velocity analysis, and careful muting after NMO (normal moveout) correction. The major reflections including the bedrock surface were mapped with the desired resolution and were correlated to the seismic crosshole tomographic data. Shallow major reflectors could be identified and analyzed on the AGC (auto gain control)-applied field records. Three subhorizontal layers were identified with their distinct velocities; overburden (<3000 m/s), sediments (3000-4000 m/s), limestone bedrock (>4000 m/s). Taking into account of no diffraction effects in the field records, gravel-rich overburdens and sediments are considered to be well sorted. Based on the images mapped consistently on the whole survey line and seismic velocity increasing with depth, this area probably lacks in sizable cavities (if any, no air-filled cavities).

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Application and evaluation of improving techniques for watershed water cycle to adapt climate change (Gyeongan-Cheon) (기후변화 적응 유역 물순환 개선 기술 적용 및 평가 (경안천))

  • Jang, Cheol Hee;Kim, Hyeon Jun
    • Proceedings of the Korea Water Resources Association Conference
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    • 2017.05a
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    • pp.461-461
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    • 2017
  • 기후변화 적응 유역 물순환 개선 기술은 기후변화가 진행 중에 있거나 예상되는 지역에 대하여 강우-유출수를 지연, 저류, 침투시켜 지속가능한 물순환체계를 유지 회복하도록 하는 기술이라 할 수 있다. 본 연구에서는 기후변화에 따른 국내 유역의 특성 및 기후를 반영하기 수월한 물순환 개선 및 평가시스템을 국내 기술로 개발하였다. 개발된 유역 물순환 개선 및 평가시스템은 기존 국가연구개발사업을 통해 개발되고 사업화에 성공한 바 있는 유역 물순환 평가 모형인 CAT(Catchment hydrologic cycle Assessment Tool)을 수정 및 개선하여 기후변화에 따른 영향을 평가하고 적응 대책을 수립하기 위한 실무적인 소프트웨어이다. 침투트렌치, 식생침투트렌치, 습지, 저류지, 빗물탱크 등의 물순환개선시설에 대한 효과를 평가할 수 있도록 개별시설의 제원에 따른 물순환개선 효과를 정량적으로 평가할 수 있다. 본 연구의 대상유역으로는 팔당댐 상류의 경안천 유역을 선정하였다. 경안천 유역의 기후변화에 따른 물순환 개선 기술 적용을 위해서 기후변화 시나리오 자료는 기상청 수원 측후소의 1976~2099년 FGOALS-s2, HadGEM-ES, INM-CM4 RCP8.5 시나리오를 적용하였으며 분석기간은 2020s(2010~2039), 2050s(2040~2069), 2080s(2070~2099)로 구분하였다. Baseline은 수원 측후소 과거 30년 1971~2000년 자료를 이용하였고 각 시나리오별 수문성분 및 구조적 물순환 개선기술 적용에 따른 수문성분을 비교 분석하였다. 물순환 개선기술 시나리오 중 침투시설 시나리오는 도시 면적의 20%, 설계침투량은 일본 우수저류침투기술협회 기준인 단위면적($1m^2$)당 10mm 적용하였고, 빗물저장시설 시나리오의 저장시설의 용량은 수도법시행규칙(2011)의 빗물 이용시설기준(도시면적 ${\times}0.05$)을 적용하였다. 시나리오별 강우량은 HadGEM-ES가 증가폭이 크게 나타났고 INM-CM4는 2080s에서 감소 경향을 보였다. 증발산량은 거의 모든 시나리오에서 대부분 감소하였고, 개선기술 적용에 따라 크게 증가하거나 감소폭이 줄어들었다. 직접유출량 및 중간유출량은 기후변화 시나리오별 강우증가분에 따른 미세한 증가 양상을 보였고, 개선기술 적용에 따라 약간 증가하는 양상을 보였다. 지하수유출량의 경우 침투시설 적용으로 함양량이 크게 증가함에 따라 증가폭이 매우 크게 나타났다.

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Patterning and Characterization of Co/Ni Composite Silicide using EIB (FIB를 이용한 CoNi 복합실리사이드 나노배선의 패턴가공과 형상 분석)

  • Song Oh-Sung;Kim Sang-Yeob;Jung Yoon-Ki
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.7 no.3
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    • pp.332-337
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    • 2006
  • We prepared 100 nm-thick CoNi composite silicide on a 70 nm-thick polysilicon substrate. Composite silicide laye.s were formed by rapid thermal annealing(RTA) at the temperatures of $700^{\circ}C,\;900^{\circ}C,\;1000^{\circ}C$ for 40 seconds. A Focused ion beam (FIB) was used to make nano-patterns with the operation range of 30 kV and $1{\sim}100$ pA. We investigated the change of thickness, line width, and the slope angle of the silicide patterns by FIB. More easily made with the FIB process than with the conventional polycide process. We successfully fabricated sub-100nm etched patterns with FIB condition of 30kv-30pA. Our result implies that we may integrate nano patterns with our newly proposed CoNi composite silicides.

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A Case Study on the Modernization of Traditional Brands, 'Burberry Prosum' - Focused on the Design Comparison between Original Burberry and Burberry Prosum - ('버버리 프로섬'의 사례를 통해 본 전통 브랜드의 현대화 연구 - 오리지널 버버리와 버버리 프로섬의 디자인 비교를 중심으로 -)

  • Jung, Kyung-Hee;Kim, Eun-Sil;Bae, Soo-Jeong
    • Journal of Fashion Business
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    • v.13 no.2
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    • pp.87-99
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    • 2009
  • The purpose of this study is to analyse the successful modernization strategy, and the difference between original Burberry and Burberry Prosum design. This will help in providing the fundamental information to Korean luxury fashion brands. Burberry, in particular, is rated as the most popular luxury brand in Korean fashion market. This brand has also rated 5th in sale worldwide and 1st in Korea in 2002, and was continuously been rated in 10th for the last 5 years. Related articles, fashion magazines, fashion web-site were used in this analysis, and the method was theoretical and case study. The results are divided into two categories of internal and external factors and two design patterns of check pattern and trench coat were observed. First of all, internal factor in Burberry is that they have scouted a new CEO and quickly changed their image with famous British models for the purpose of marketing strategies. They have also moved their main shop in London to Bond street, and opened shops in every country's capital cities. They were successful in achieving this by using celebrity marketing strategies with many famous celebrities. Secondly, external factor was that they have hired a designer named Christoper Bailey and this highlighted and enhanced the check pattern and trench coat. As a results, more generalized and diverse design items were presented and accessory line was enhanced, creating a much more younger image. This in turn attracted more younger customers. To sum up, original Burberry focused on classic designs, however Burberry Prosum focused on transforming traditional Burberry design into avant-garde and young. In other words, the reason for the success of this brand is highly dependent on its marketing strategies in which its uniqueness of schizophrenic cloche has appropriately represented and used in design.

A Study on the Focal Mechanism of the Hongsung Earthquake from the P-Wave Polarity Distributions (초동극성분포를 이용한 홍성지진의 Focal Mechanism 연구)

  • 김준경
    • The Journal of Engineering Geology
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    • v.1 no.1
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    • pp.121-136
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    • 1991
  • The focal mechanism of the Hongsung Earthquake (1978. Oct. 7, M$_L$=5.0, Latitude 36.62N, Longitude 1 26.67E) was evaulated using the polarity distribution of the P-Waveforms. Through the non-linear computer process, the compatibility of polarity distributions of the 9 P-Waveforms observed at teleseismic distances from the Hongsung Earthquake epicenter was investigated to those of the focal mechanism determined from the varying strike, dip and rake angles. The resultant values for the strike and dip angle of the principal fault plane, which apparently matches very well the sunface lineament of the Hongsung region, are determined to be about 247 degree and 78 degree with uncertainties, respectively. However, the rake angle of the focal mechanism has wide range of 40 degree to 160 degree, which is mainly due to the poor coverage of the azimuthal angle of the observed seismic stations. Due to the consistency of principal stress axes, the resultant focal mechanism could support the current stress regime of that region, which may be caused by subduction of the Pacific Plate under the Eurasia Plate along the Japan Trench. It also provides information of seismic source characteristics of the part of the Korean Peninsula for aseismic design criteria such as Site Specific Response Spectrum and Strong Ground Motion Time History for the nuclear power plants and related nuclear waste disposal facility sites.

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An Experimental Study of Runoff Reduction Using Infiltration Facility (건축물에 적용된 우수침투시설의 유출저감효과에 관한 실험적 연구)

  • Park Jae-Roh;Kwon Hyok
    • Journal of Soil and Groundwater Environment
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    • v.10 no.5
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    • pp.37-44
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    • 2005
  • The main object of this study is to develop the infiltration facility that it can be used in grounds, parking areas, roads, pathway, housing etc. As a result, it is much alike in the infiltration method of facility to use permeable concrete, permeable hole and be filled with broken stones. And through this experiment, it was perceived the truth that the state of ground, the groundwater level, buildings around them, the history of submerging and the applicable infiltration facilities are the key. To verify how much the infiltration facility reduce the outflow, we set up the infiltration facility in the test area. In result, it reduced the outflow 89% in 24 mm rainfall, 93% in 12 mm, 51% in 140 mm, 75% in 64 mm and 80% in 54 mm. As the rainfall rate increased, the infiltration increased up to the limited rainfall. And in the limited rainfall, we knew that the infiltration was reduced suddenly. Infiltration is closely related to the state of ground, the rain interval etc. and we will analyze these conditions through the continuous monitoring.