• Title/Summary/Keyword: 트라이볼로지

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PCMO and HDDEO Trends

  • Lee, Dong-Hoon
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2000.11a
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    • pp.89-89
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    • 2000
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Micro-tribological Properties of Coated Silicon Wafer (코팅된 실리콘웨이퍼의 Microtribological 특성)

  • 차금환;김대은
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1998.04a
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    • pp.91-96
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    • 1998
  • In recent years, the tribological behavior of coated ceramic material has been the topic of much interest. Particularly, the understanding of the tribological performance of thin film under light load is important for potential applications in MEMS. In this work under light load and low speed, the tribological behavior of coated silicon was investigated. The results show that both adhesive and abrasive wear occur depending on the sliding condition. Also the effect of humidity on friction was influenced by the apparent ares of contact between the two surfaces. Finally, undulations on the silicon wafer were found to be effective in trapping wear particles.

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Nanotribological Behavior of Adsorbed Water Layer on Silicon Surface (실리콘 표면에 흡착된 수분층의 나노트라이볼로지 거동)

  • 안효석;김두인;최동훈
    • Tribology and Lubricants
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    • v.19 no.5
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    • pp.245-250
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    • 2003
  • Water is known to playa crucial role on friction of moving parts in nanoscale contact. Little is, however, known about the tribological behavior of a solid surface that is covered with water adsorption layer. The objective of this study is to investigate the nanotribological behavior of the water layer in relation to water affinity of the surface and relative humidity. This paper presents an examination of the frictional behavior of water adsorption layer as 'confined liquid film'. It is shown that the friction is inversely proportional to the hydrophilicity of surface and relative humidity. On the other hand, friction of hydrophobic surface is not influenced by relative humidity. A model is proposed for the water-mediated contact in which it is shown that the water layer between two hydrophilic surfaces with high relative humidity behaves as a lubricant.

압입속도의 변화에 따른 탄성계수와 경도의 오차 연구

  • Lee, Gyu-Yeong;Lee, Chan-Bin;Kim, Su-In;Lee, Chang-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.182-182
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    • 2010
  • 나노 소재의 물성을 측정하기 위하여 대부분의 연구 구룹에서는 크게 두 가지 분석 기법인 분광학을 이용한 분석과 나노트라이볼로지를 이용한 분석을 사용하고 있다. 분광학을 이용한 분석에는 NMR, IR, Raman, SEM, TEM 등이 대표적이라 할 수 있고, 나노트라이볼로지를 이용한 분석에는 AFM, EFM, KFM, Nano-indenter 등의 탐침을 이용한 측정 기법이 대표적이다. Nano-indenter는 물질의 탄성 및 경도를 측정 할 수 있으며 이를 통해 물질의 특성을 연구하는데에 사용된다. 그러나 이런 Nano-indenter의 압입 실험에서는 그 결과값이 압입 조건 등의 통제변수의 함수가 될 것이다. 이를 확인하고 변화값의 parameter를 추출하기 위하여 본 실험에서는 이런 압입 조건 중 Load - Hold - Unload force의 속도 및 시간을 변화시켜 물질의 탄성계수와 경도가 어떻게 변하는지에 대한 역학관계를 연구하였다.

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