• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.24 no.4
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• pp.110-115
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• 2010

Transparent conducting gallium-doped zinc oxide (GZO) thin films which were deposited on Corning glass substrate using an Gun-type rf magnetron sputtering deposition technology. The GZO thin films were fabricated with an GZO ceramic target (Zn : 97[wt%], $Ga_2O_3$ : 3[wt%]). The GZO thin films were deposited by varying the growth conditions such as the substrate temperature, oxygen pressure. Among the GZO thin films fabricated in this study, the one formed at conditions of the substrate temperature of 200[$^{\circ}C$], Ar flow rate of 50[sccm], $O_2$ flow rate of 5[sccm], rf power of 80[W] and working pressure of 5[mtorr] showed the best properties of an electrical resistivity of $2.536{\times}10^{-4}[{\Omega}{\cdot}cm]$, a carrier concentration of $7.746{\times}10^{20}[cm^{-3}]$, and a carrier mobility of 31.77[$cm^2/V{\cdot}S$], which indicates that it could be used as a transparent electrode for thin film transistor and flat panel display applications.

• Membrane Journal
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• v.26 no.4
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• pp.273-280
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• 2016

Pressure assisted forward osmosis (PAFO) is recently introduced because of its improved process efficiency to overcome drawbacks of forward osmosis (FO) such as low water flux and reverse solute diffusion. However, it is known that membrane fouling becomes deteriorated by additional hydraulic pressure applied in PAFO compared to FO. This study was performed to investigate possibility of intermittent pressure-assisted forward osmosis (I-PAFO) operation for fouling mitigation using colloidal silica particles as model foulants. FO, PAFO were operated as well to compare with. Two different solution pH conditions (pH 3, 10) were applied to see the effect of electrostatic interactions between the membrane and silica particles on fouling tendency. In the results, higher water flux was observed during pressurization and pressure relaxation periods in I-PAFO than water flux of PAFO, and FO on both pH conditions. Water flux decreased less in I-PAFO than PAFO after fouling. It resulted in higher water flux recovery in I-PAFO than PAFO after physical cleaning.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.20 no.7
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• pp.6-13
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• 2006

Tin doped indium oxide(ITO) and Al doped zinc oxide(ZnO:Al) films, which are widely used as a transparent conductor in optoelectronic devices, were prepared by using the capacitively coupled DC magnetron sputtering method. ITO and ZnO:Al films with the optimum growth conditions showed each resistivity of $1.67{\times}10^{-3}[{\Omega}-cm],\;2.2{\times}10^{-3}[{\Omega}-cm]$ and transmittance of 89.61[%], 90.88[%] in the wavelength range of the visible spectrum. The two types of 5 inch-PDP cells with ZnO:Al and ITO transparent electrodes were made under the same manufacturing conditions. The PDP cell with ZnO:Al film was optimally operated in the mixing gas rate of Ne(base)-Xe(8[%]), and at gas pressure of 400[Torr]. It also shows the average measured brightness of $836[cd/m^2]$ at voltage range of $200{\sim}300$[V]. Luminous efficiency, one of the key parameter for high brightness and low power consumption, ranges from 1.2 to 1.6[lm/W] with increasing frequency of ac power supplier from 10 to 50[Khz]. The brightness and luminous efficiency are lower than those with ITO electrode by about 10[%]. However, these values are considered to be enough for the normal operation of PDP TV.

• Korean Chemical Engineering Research
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• v.45 no.3
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• pp.304-309
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• 2007

In this study, the "Multi Well Plate-type cell Apparatus" was designed and setup for performing the producing experiments of methane hydrate by depressurization, heat stimulating methods. In order to characterizing the producing mechanism of hydrate through porous materials, the experiments for various producing methods have been conducted with the aid of the apparatus which has high permeability. In the experimental result of depressurization method, the pressure is temporarily increased unlikely conventional gas reservoir due to the sourcing effect of hydrate dissociation in the pore. Meanwhile, the temperature is decreased because of the endothermic reaction while hydrate is dissociated. In the experimental results of heat stimulating method, the dissociation in depressurization method is more slowly processed than that in thermal method, and hence, its gas production is lower. In the case of production right after heating, hydrate is dissociated only near injecting point and the permeability becomes greater at that area only. It infers that the more gas is produced during relatively earlier producing period. Since then, the hydrate is more slowly dissociated than the case of production after heating and soaking. This time, the performances of pressure and production obtained by thermal method have been analyzed in order to investigate the effect of soaking time on gas recovery. As a result, the gas recoveries in the case of 2 min and 4 min soaking are higher than case in 6 min soaking. This is reason that hydrate is reformed due to the decrease of temperature. It is expected that the experimental results obtained in this work may be more clearly explained by utilizing the lower permeable porous system with the greater hydrate saturation.

• Journal of Sensor Science and Technology
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• v.6 no.1
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• pp.49-55
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• 1997

ZnO thin film had been deposited on the glass by sputtering method, and investigated by optical and electrical properties. When the rf power was 180W and sputtering pressure was $1{\times}10^{-3}$Torr at room temperature, thin lam deposited had strongly oriented c-axis and the lowest resistivity($1{\times}10^{-4}{\Omega}{\cdot}cm$), and then carrier concentration and Hall mobility were $6.27{\times}10^{20}cm^{-3}$ and $22.04cm^{2}/V{\cdot}s$, respectively. Transmittance of ZnO thin film in visible range was above 90%, and this thin film cut of the ultraviolet range below 320nm and the infrared range above 850nm. And after annealing in hydrogen atmosphere, the resistivity of ZnO thin film was somewhat decreased, while obtained as stable state.

• Membrane Journal
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• v.14 no.4
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• pp.304-311
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• 2004

The poly(1-trimethylsilyl-1-propyne) (PTMSP) and silica-filled PTMSP membranes were prepared by casting from a toluene solution on porous polyetherimide (PEI). FT-IR spectrum, GPC and SEM pictures have been taken to characterize the membranes. The particle size of membrane decreases as silica content of the membrane increases from 23 to 60 wt%, and a uniform distribution of the silica is observed. The separation properties of the gas mixture (32 mol% $H_2$/ 68 mol% $N_2$) through the composite membranes were studies as a function of pressure and percentage of silica. Selectivity values of $H_2$/$N_2$ increased as the pressure of permeation cell and silica content of the membrane increased. The real separation factor($\alpha$), head separation factor($\beta$), and tail separation factor((equation omitted)) of PTMSP-PEI composite membrane were 2.28, 1.58, and 1.44 respectively at $\Delta$P 30 psi and $25^{\circ}C$. $\alpha$, $\beta$, and (equation omitted) of PTMSP-Silica-PEI composite membrane for 60 wt% silica were 3.34, 1.95, 1.72 at $\Delta$P 30 psi and $25^{\circ}C$.

• Membrane Journal
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• v.22 no.4
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• pp.280-283
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• 2012

The study is aiming to prepare supported ionic liquid membranes for carbon dioxide separation efficiently. The ionic liquid, [bmim][${PF_6}^-$] (1-butyl-3-methyl-imidazolium hexafluorophosphate) was fixed in the pores of PVDF micro-filtration membrane with a nominal pore size 0.1 ${\mu}m$. The permeabilities of $N_2$, $H_2$ and $CO_2$ gases through the prepared ionic liquid membrane were 0.075, 0.203 and 1.380 GPU, respectively. The selectivities of $CO_2/N_2$, $H_2/N_2$ were 14.2 and 2.69, respectively. Also, the supported ionic liquid membrane could be operated stably up to 2.0 bar with the immobilization of ionic liquid in the pores.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.96-96
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• 2009

투명전도막은 FPD의 전자부품에서 전극으로 널리 사용되고 있으며 현재 대부분의 투명전도막으로는 ITO가 사용되고 있다. 하지만, ITO에 사용되는 In은 희유금속으로 지속적인 사용량 증가로 가격의 급등과 더불어 수급 불안정으로 인해 In을 대체하고자 하는 연구가 집중적으로 이루어지고 있다. 그러나 $In_2O_3$를 대체한 ZnO계 등은 비저항이 높아 대체 적용이 가능하지 못하고 있다. 이에 In의 양을 줄이면서 상대적으로 저가이면서 광학적 특성이 우수한 ZnO을 첨가하여 기존의 ITO에 상응하는 전기전도도와 광투과율을 얻을 수 있는 새로운 3성분계 TCO 에 대한 연구가 활발히 이루어지고 있다. 따라서, 본 연구그룹은 $In_2O_3$을 기본 조성으로 하는 $In_2O_3-ZnO-SnO_2$계를 선정하여 IZTO target을 제조 후 RF magnetron sputtering 방법으로 투명전도막을 제작하였다. 본 연구에서는 RF 파워와 동작압력, 동작시간 그리고 열처리온도의 증착 조건에 따른 IZTO 박막의 특성을 평가하였다. 박막의 특성 및 표면 미세구조를 관찰하기 위해 AFM(Atomic Force Microscope)을 이용하였으며, XRD(X-ray diffraction)을 이용하여 결정성을 분석하였고, 4 point-prove, Hall effect measurement와 UV/Visible spectrometer를 통해 전기적, 광학적 특성을 평가하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.180-180
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• 2016

최근 디스플레이 시장의 주요 키워드는 flexible organic light emitting diode (OLED) 이다. OLED 소자의 수명을 결정하는 가장 큰 요인 중의 하나는 공기 중의 O2와 H2O에 의한 유기물의 열화이다. 따라서 공기 중의 O2나 H2O가 유기물에 쉽게 침투하는 것을 막는 것은 소자의 수명 향상을 위하여 필수적이라 할 수 있다[1-3]. SiNx 박막은 경질로 투과성이 우수하며, 화학적 불활성인 특성으로 이러한 Barrier 역할로 연구되어 산업분야에 다양하게 응용되고 있다[4]. SiNx 박막은 일반적으로 plasma enhanced chemical vapor deposition (PECVD) 기술을 이용하여 증착되는데 기존의 PECVD 기술을 이용한 SiNx 박막은 낮은 water vapor transmission rate (WVTR) 등의 문제점들로 인해 한계점이 들어났다. 본 연구에서는, flexible display의 thin film encapsulation (TFE) 공정에서의 적용을 알아보기 위해 $370{\times}470$ size를 증착할 수 있는 In-line 장비를 이용하였으며, 기존의 PECVD 기술의 문제점으로 지적되고 있는 낮은 WVTR을 해결하기 위하여 저온 (<$100^{\circ}C$) 선형 PECVD 기술을 이용하여 WVTR을 개선하고자 하였다. 공정가스로는 SiH4와 NH3를 사용하였으며, SiH4 Carrier 가스로 He을 추가적으로 사용하였다. 또한 공정 압력은 100mTorr를 유지하였다. 증착된 SiNx 박막의 물리적, 화학적 특성 분석을 위해 분광엘립소메타, field emission electron microscopy (FESEM), X-ray diffraction (XRD), Rutherford backscattering spectrometry (RBS) 등을 이용하여 측정하였으며, 박막에 투습되는 수분의 양은 MOCON사의 AQUATRAN 2(W)로 측정하였다. OLED 소자를 구현하기 위해서는 기본적으로 봉지층에 투습되는 양을 $10-6g/m2{\cdot}day$ 이하로 막아줘야 한다고 알려져 있으나, 기존의 PECVD 기술을 이용하여 제작된 SiNx 박막의 WVTR은 $10-2{\sim}10-3g/m2{\cdot}day$ 레벨의 WVTR 결과를 보이고 있다. 본 연구에서 사용된 저온 선형 PECVD 기술을 이용하여 제작된 SiNx 박막의 WVTR은 $5.0{\times}10-5g/m2{\cdot}day$ 이하의 개선된 결과를 확인 할 수 있었다. 또한 flexible display에 적용하기 위해 SiNx 박막의 두께를 최소화한 100nm의 두께에서도 WVTR은 $5.0{\times}10-5g/m2{\cdot}day$ 이하의 결과가 유지됨을 알 수 있었다.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.23 no.1
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• pp.63-69
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• 2011

In this paper, the wave forces on a cylindrical aquaculture fish cage, which consists of the porous mesh with the uniform porosity, are analyzed using matched eigenfunction expansion method. The boundary condition on the porous net is derived based on the Darcy's law, which implies that the velocity of the fluid passing through the net is linearly proportional to the pressure difference between two sides of the net. The wave forces and wave responses are investigated by changing the porous parameter of porous net as well as the submerged position (floating type, bottom-mounted type) of an aquaculture fish cage. It is found that the wave forces on a bottom-mounted type are largely decreased compared with that on a floating type. Also, the porosity of the netting structure plays an important role in reducing the wave forces and the wave elevation in the vicinity of an aquaculture fish cage.