• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.295-295
• /
• 2012

본 연구에서는 아크방전을 이용한 질화 티타늄의 합성 과정 중에서, 시편 청정 공정변수를 변화시킴에 따라 계면에서의 미세조직 변화와 코팅층의 물성을 평가하였다. 아크 소스에 장착된 타겟은 $120mm{\Phi}$, 99.5 %의 티타늄 타겟을 사용 하였고, 시편과 타겟 간의 거리는 약 30 cm이며, 시편은 SUS를 사용하였다. 시편을 진공용기에 장착하고 진공배기를 실시한 후 Ar 가스 분위기에서 시편에 전압을 인가한 후 아크를 발생시켜 약 5분간 시편 청정을 실시하였다. 이 시편 청정 과정에서 시편 인가전압을 0~1,000 V로 변화시켰고 시편 정청이 끝나면 시편에 인가된 전압을 차단하고 코팅하였다. 질화 티타늄의 두께는 약 $3{\mu}m$로 동일하게 코팅하였다. 시편 인가전압 변화에 따라 시편청정 공정 시 계면에서 티타늄층이 코팅되거나 모재 내부까지 침투하는 현상을 관찰하였다. 시편청정 공정변수 변화에 따른 질화 티타늄의 코팅을 통해 계면의 미세조직과 성분의 변화를 주사전자현미경, 투과전자현미경 이미지와 에너지 분산분광기 (Energy Dispersive Spectroscopy ; EDS)를 통해 확인하였으며 나노인덴터를 이용해 경도, 탄성계수 등의 물성변화를 측정하였다. 본 연구에서 얻어진 결과를 이용하여 시편 청정 공정 제어를 통한 다양한 물성변화가 가능 할 것으로 예상된다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2005.05b
• /
• pp.10-14
• /
• 2005

Zinc Oxide(ZnO) thin films on Si (100) substrates were deposited by RF magnetron reactive sputtering. The characteristics of zinc oxide thin films with changing sputtering conditions such as argon/oxygen gas ratios, RF power, and substrate temperature, chamber pressure and target-substrate distance were investigated. To analyze a crystallographic properties of the films, $\theta/2{\theta}$ mode X -ray diffraction, SEM, and AFM analyses. C-axis preferred orientation, resistivity, and surface roughness highly depended on Ar/$O_2$ gas ratios. The resistivity of ZnO thin films rapidly increased with increasing oxygen ratio and the resistivity value of $9{\times}10^7\;{\Omega}cm$ was obtained at a working pressure of 10 mTorr with Ar/$O_2$=50/50. The surface roughness was also improved with increasing oxygen ratio and the ZnO films deposited with Ar/$O_2$=50/50 showed the excellent roughness value of $28.7{\AA}$.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2012.05a
• /
• pp.77.2-77.2
• /
• 2012

급속한 첨단기술의 발전으로 인해 차세대 정보산업의 핵심 기술은 사용자의 편의를 바탕으로 필요에 따라 형태가 변환되어 휴대 또는 착용이 가능하고 다양한 기능이 융합된 전자소자의 기술을 개발 하는 것이다. 현재까지는 이를 구현하기 위해 저분자, 고분자 반도체 및 박막형 무기 반도체를 이용하여 신축 가능한 소자를 구현 하였으나 기존 소재들의 제한적인 물성으로 인해 그 연구가 한계를 다다르고 있다. 이에 반해 신소재 그래핀은 우수한 기계적, 전기적 및 광학적 특징을 동시에 가지고 있는 물질로써 유연 소자분야에 적합한 재료로 각광받고 있다. 하지만 뛰어난 그래핀의 특성에도 불구하고 소자를 구성하는 다른 요소인 기판, 유전막 등의 물성적 한계로 인하여 신축 가능한 소자제작을 위해서는 아직도 많은 과제가 남아있다. 본 연구에서는 Polydimethylsiloxane (PDMS) 고무기판 위에 전해질 유전막을 도입하여 신축 가능하고 투명한 그래핀 트렌지스터를 구현하였다. 에어로졸 프린팅 방법으로 상온에서 형성 된 전해질 유전막은 높은 정전용량으로 인해 3V이하의 낮은 전압에서도 소자가 구동하는 것을 확인할 수 있었으며, 1100 과 420 $cm^2/Vs$의 높은 정공과 전자의 이동도를 나타내었다. 뿐만 아니라 이러한 전기적 특성은 외부에 가해지는 5%의 응력 및 1000회의 피로도 테스트 후에도 안정적인 거동을 보이는 매우 우수한 탄성특성을 보였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.06a
• /
• pp.429-429
• /
• 2008

The structural stability and the elastic modulus of hexagonal ZnO nanowires and nanotubes are investigated using atomistic simulations based on the shell model. The ZnO nanowire with (10-10) facets is energetically more stable than that with (11-20). Our calculations indicate that the structural change of ZnO nanowires with (10-10) facets is sensitive to the diameter. With decreasing the diameter of ZnO nanowires, the unit-cell length is increased while the bond-length is reduced due to the change of surface atoms. Unlike the conventional layered nanotubes, the energetic stability of single crystalline ZnO nanotubes is related to the wall thickness. The potential energy of ZnO nanotubes with fixed outer and inner diameters decreases with increasing wall thickness while the nanotubes with same wall thickness are independent of the outer and inner diameters. The transformation of single crystalline ZnO nanotubes with double layer from wurtzite phase to graphitic suggests the possibility of wall-typed ZnO nanotubes. The size-dependent Young's modulus for ZnO nanowires and nanotubes is also calculated. The diameter and the wall thickness play a significant role in the Young's modulus of single crystalline ZnO nanowires and nanotubes, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.07a
• /
• pp.461-464
• /
• 2004

In this paper, the elastic epoxy added elastomer having viscoelasticity to existing epoxy was measured thermal, structural properties through TGA(Thermogravimetric Analysis) and FESEM(Field Emission Scanning Electron Microscope). Specimens were made of dumbbell forms by the ratio of 5[phr], 10[phr], 15[phr], and 20[phr] by regulation with elastomer contents. The measurement temperature dimensions of TGA were $0[^{\circ}C]\;to\;800[^{\circ}C]$, and rising temperature was $5[^{\circ}C/min]$. And we observed structure through FESEM at the magnification of 1000times with the voltage of 15[kV] after breaking by quenching specimens. As thermal analysis results, we could know that thermal and structural properties was improved quantity according to decrease of elastomer contents. In general, thermal, structural properties of 15[phr] was excellent among the specimens.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.11a
• /
• pp.248-251
• /
• 2003

In this paper, it was experimented about thermal and mechanical insulation properties of a elastic epoxy specimen. We made elastic epoxy specimen adding a ratio of 0[phr], 20[phr], 35[phr] and 53[phr] with modifier to existing epoxy. Each specimen was absorbed by 25h, 196h, 361h 484h with water. In water-absorption state, it was experimented a change of heat flows by temperature of elastic epoxy and changes of thermal expansion coefficient. Also, a hardness-change of each specimen was experimented by change of water-absorption time. In this experiment DSC (Differential Scanning Calorimetry) and TMA (Thermomechanical Analysis) were used. A temperature range of DSC was changed from -0[$^{\circ}C$] to 200[$^{\circ}C$], TMA was changed from -0[$^{\circ}C$] to 350[$^{\circ}C$]. In addition, we investigated structural analysis of water absorbed specimen using SEM (Scanning electron microscope).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.11a
• /
• pp.208-211
• /
• 2003

In this paper, mechanical property of electric epoxy with water aging was discussed. We studied mechanical property of elastic resin after absorption in water from 0 to 484 hour. As a result, diffusion factor of elastic epoxy showed $20-21{\times}10^{-4}mm^2/s$ and general epoxy showed $9.5{\times}10^{-4}mm^2/s$. Elastic property increased linearly according to amount of addictives and decreased elastic property according to amount of water absorption. Tensile strength was reduced to add to addictives. It was effected by water absorption of micro-void of elastic epoxy. Hardness inclined to decrease after increasing according to absorbed time.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2005.07a
• /
• pp.518-519
• /
• 2005

We have studied the transmittance of fringe-filed switching(FFS) using a liquid crystal with positive dielectric anisotropy. Generally, FFS having positive dielectric anisotropy has less transmittance than FFS using negative dielectric anisotropy. FFS mode transmittance depends on horizontal director deformation, however fringe filed is composed of vertical and horizontal field. Vertical field in the middle of electrode suppresses the transmittance of FFS mode, especially when we use positive one. So, it is important to prevent the LC director from the effect of vertical field. We changed the splay elastic constant and checked the transmittance. The transmittance of FFS having positive dielectric anisotropy was improved. Less tilted LC directors improve the transmittance of FFS using positive dielectric anisotropy. We can improve the transmittance by using LC which have high splay elastic constant when another LC properties are equal.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2005.07a
• /
• pp.213-214
• /
• 2005

To measure modulus and damping of semiconductive materials in power cable, we have investigated the modulus and damping of semiconductive materials showed by changing the content of carbon black. Then they were produced as sheets after pressing for 20 minutes at 180[$^{\circ}C$] with a pressure of 200[$kg/cm^2$]. The content of conduct ive carbon black was the vailable, and their contents were 20, 30 and 40[wt%], respectively. The modulus and $Tan\delta$ experiments were measured by DMA 2980. Ranges of measurement temperature from -50[$^{\circ}C$] to 100[$^{\circ}C$] and measurement frequency is 1[Hz]. The modulus of specimens was increased according to a increment of a carbon black content. And modulus was rapidly decreased at the glass transition temperature. The $Tan\delta$ of specimens was decreased according to a increment of a carbon black content.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.11a
• /
• pp.319-322
• /
• 2004

In this paper, we studied on the thermal conductivity and a mechanical property of the elastic epoxy. According to industrial development, insulation materials have various properties. They are solid, liquid, gas state, there are various type. Epoxy, a kind of insulation material, demand of not only high hardness but also elastic property. When the electric current flows into the conductor and the place where the heat occurs, this heat becomes the cause which shortens the life of the electrical appliance. Therefore, for the heat occurred transmit quickly, thermal conductivity of the insulation material is highly demanded. We studied on the thermal conductivity of elastic epoxy on the high voltage. In this result, thermal conductivity confirmed that it followed thermal property of mixed epoxy and addictives. Hardness is decreased when addictives increased.