Characteristics of Pt/SBT/$Ta_2O_5$ /Si (MFIS) and Pt/SBT/$Ta_2O_5$ /SiNx/Si (MFINS) Structure Gate Capacitors for NDRO type FeRAM Applications
(NDRO형 FeRAM용 MeFIS와 MeFINS 구조의 게이트 캐퍼시터 특성)
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- Proceedings of the Materials Research Society of Korea Conference
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- 2001.05a
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- pp.94-94
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- 2001