• Title/Summary/Keyword: 친수박막

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Study on fine pattern with Micro filling using Etching-free process (Etching-free 공정 적용 Micro filling 미세 패턴 구현 연구)

  • Kim, Wan-Gyu;Yun, Yeong-U;Lee, Seong-Ui
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2012.11a
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    • pp.72-73
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    • 2012
  • Metal line을 형성하는 방법에는 그라비아 인쇄, 잉크젯 인쇄, photo 공정 후 박막 증착 공정 등을 많이 사용한다. 본 연구에서는 Micro-imprinting 공정과 DFR photo lithography 공정을 통해 음각의 미세한 pattern을 형성한 후 sputtering과 printing을 이용하여 pattern의 filling을 통해 metal line을 구현하는 것을 목표로 하였다. Pattern을 형성한 후 RIE 공정을 통해 기판 표면의 친수성 처리를 하고, SAM 공정을 통해 코팅 막의 소수성 처리를 하였다. Sputtering과 전면 프린팅 및 건조 후 strip 공정을 통해 metal line을 형성하고, 이에 대한 표면 특성과 전기적 특성을 분석하였다.

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Dielectric Property of Hydrophilic Copolymer Thin Films (친수성 고분자 박막의 유전 특성)

  • Choi, Seung-Ryul;Im, Kyung-Jin;Kim, Jun-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.229-229
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    • 2007
  • In this study, HEMA-based hydrophilic copolymers were synthesized and dielectric constant (K) of the polymer thin films were investigated by change hydroxyl group (-OH) ratio in the polymer chain. The different hydroxyl group ratios were characterized by FT-IR and its thin films were obtained by spin coating. As a result, due to the moisture absorption of the hydrophilic thin film, the dielectric constant has been increased as was expected. The highest dielectric constant (K=4.19, @1MHz) was observed at 40% hydroxyl group ratio among the several polymers.

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Selective Array of Polystyrene Beads by Using Nanometer-Scaled Hydrophilic Thin Film Patterning (나노미터 규격의 친수성 박막 패터닝을 이용한 선택적 폴리스티렌 입자 배열)

  • Kang, Jung-Hwa;Kim, Kyoung-Soeb;Kim, Nam-Hoon;Roh, Yong-Han
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.103-104
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    • 2007
  • Nanometer-scaled polymer beads, such as polystyrene beads, were used as nanometer fabrication materials due to their some advantages such as self-assembled monolayer, nanometer scaled size and excellent compatibility with silicon based devices. Thus, the investigation on these properties of polymer beads was required. It is difficult to control the array of polystyrene beads on silicon substrate. In this study, we investigated the condition of selective array of polystyrene beads on nanometer-scaled hydrophilic surface which was obtained by APS coating. A tilting method was used to array the polystyrene beads selectively on the substrate. The polystyrene beads could be arrayed selectively by this method. From these results, we verified that there are possibilities to fabricate unique tools for the nanometer-scaled electrical devices.

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표면에너지 영향에 따른 ZnO 나노와이어의 형태변화

  • No, Im-Jun;Kim, Seong-Hyeon;Sin, Baek-Gyun;Jo, Jin-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.64-64
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    • 2010
  • ZnO 나노와이어를 수열합성법에 의하여 합성 하였다. 나노와이어 합성을 위한 Seed layer는 Al 이 2% 도핑된 ZnO타겟을 이용하여 스퍼터링 공정을 통해 증착시켰다. 이 Seed layer박막을 대기압 플라즈마 공정을 통하여 친수처리와 소수처리를 한 후 접촉각을 측정 하여 표면에너지를 관찰하였다. 또한 각각의 표면에너지에 의한 ZnO 나노와이어 합성결과 ZnO 나노와이어의 밀도, 직경, 길이가 표면에너지와 밀접한 관련이 있다는 것을 확인 하였다. 결과적으로 수열합성법에 의해 성장된 나노와이어는 Seed layer의 표면에너지에 큰 영향을 받는 것을 확인하였고 이것은 향후 연구에서 나노 구조체 전반에 밀도, 직경, 길이를 조절할 수 있는 핵심 기술임을 제시한다.

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Surface Modification of Polystyrene (PS) by Atmospheric Pressure Plasma (상압 플라즈마를 이용한 Polystyrene (PS)의 표면개절)

  • Lee, Jong-Su;Shin, Hyun-Seok;Seok, Jin-Woo;Jang, Gyu-Wan;Beag, Yeong-Hwan
    • Journal of the Korean Vacuum Society
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    • v.18 no.1
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    • pp.1-8
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    • 2009
  • Hydrophilic Surface modification of Polysarene (PS) was performed by Atmospheric Pressure Plasma (APP). Air or 0, gases were used for carrier gases and RF power was changed from 150 to 350 W. We controlled the treatment time as 1 time to 4 time passing through the plasma region. when the carrier gas was air, the water contact angle on the PS surface was decreased from $91^{\circ}$ to $20^{\circ}$. And the surface energy increased from 45.74 dyne/cm to 68.48 dyne/cm. In case of the $O_2$ plasma treatment, at 300 W of RF power and 4 times treatment, the water contact angle on the PS. Surface was decreased from $91^{\circ}$ to $17^{\circ}$ and the surface energy was increased from 45.74 dyne/cm to 69.73 dyne/cm. The surface energy was increased by polar force not by dispersion force. Improvement of surface properties can be explained by the formation of new hydrophilic groups which is identified as C-O, C=O by XPS analysis. The contact angle of APP treated PS surface kept in air was increased with time elapse, but maintained same value when it was kept in water. We treated the PS surface by APP and deposited Cu as $4,000\;{\AA}$ and $8,000\;{\AA}$ by thermal evaporation. The adhesion between sample and Cu thin film improvement of treated PS surface against untreated sample. could be verifiable by Tape test (ASTM D3359)

Novel Thin Film Composite Forward Osmosis Membranes of Highly Enhanced Water Flux with Interlayer Polysiloxane Between Polysulfone and Polyamide (폴리술폰과 폴리아미드 경계층에 형성된 폴리실록산을 이용한 정삼투 복합 박막의 유량 향상)

  • Jung, Boram;Kim, Nowon
    • Membrane Journal
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    • v.26 no.5
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    • pp.391-400
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    • 2016
  • In this work, novel thin film composite (TFC) forward osmosis (FO) membranes are developed via interfacial polymerization on the polysulfone (PS) substrate, using TEOS as the a sol-gel reagent to form hydrophilic interlayer polymer between PS and polyamide (PA). The PS substrate was cast on a very thin polyester nonwoven to reduce membrane resistance. With the incorporation of TEOS (tetraethoxy silane) polymer in the interface between PS and PA, the formed TFC FO membrane exhibits better hydrophilicity and improved water flux, and therefore superior membrane performance. By changing the polymerization sequence of PA interfacial polymerization and TEOS sol-gel condensation, the surface properties and performance of FO membranes are changed significantly. The permeability of FO membranes were estimated using the bench-scale FO test equipment. The distribution of the polysiloxane on composite membrane and morphology are also studied with FE-SEM and EDAX. The PS_PA_TEOS membrane showed highly enhanced water flux (79.2 LMH) but reverse salt flux (RSF) value (7.10 GMH) also increased. However, the flux of PS_TEOS_PA membrane increased moderately (54.1 LMH) without increasing RSF value (1.60 GMH) compare with PS_PA membrane.

Hydrophobic Polydimethylsiloxane Thin Films Prepared by Chemical Vapor Deposition: Application in Water Purification (화학적 증기 증착 방법을 통해 제조한 소수성 폴리디메틸실록산 박막: 수처리로의 응용)

  • Han, Sang Wook;Kim, Kwang-Dae;Kim, Ju Hwan;Uhm, Sunghyun;Kim, Young Dok
    • Applied Chemistry for Engineering
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    • v.28 no.1
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    • pp.1-7
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    • 2017
  • Polydimethylsiloxane (PDMS) can be deposited on various substrates using chemical vapor deposition process, which results in the formation of PDMS thin films with thickness below 5 nm. PDMS layers can be evenly deposited on surfaces of nanoparticles composed of various chemical compositions such as $SiO_2$, $TiO_2$, ZnO, C, Ni, and NiO, and the PDMS-coated surface becomes completely hydrophobic. These hydrophobic layers are highly resistant towards degradation under acidic and basic environments and UV-exposures. Nanoparticles coated with PDMS can be used in various environmental applications: hydrophobic silica nanoparticles can selectively interact with oil from oil/water mixture, suppressing fast diffusion of spill-oil on water and allowing more facile physical separation of spill-oil from the water. Upon heat-treatments of PDMS-coated $TiO_2$ under vacuum conditions, $TiO_2$ surface becomes completely hydrophilic, accompanying formation oxygen vacancies responsible for visible-light absorption. The post-annealed $PDMS-TiO_2$ shows enhanced photocatalytic activity with respect to the bare $TiO_2$ for decomposition of organic dyes in water under visible light illumination. We show that the simple PDMS-coating process presented here can be useful in a variety of field of environmental science and technology.

Recent Progress in Qantum Dots Containing Thin Film Composite Membrane for Water Purification (양자점이 합체된 복합 박막을 이용한 정수의 최근 발전)

  • Park, Shinyoung;Patel, Rajkumar
    • Membrane Journal
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    • v.30 no.5
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    • pp.293-306
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    • 2020
  • Increasing harmful effects of climate change, such as its effect on water scarcity, has led to a focus on developing effective water purification methods to obtain pure water. Additionally, rising levels of water pollution is increasing levels of environmental degradation, calling for sources of water treatment to remove contaminants. To purify water, osmotic processes across a semipermeable membrane can take place, and recent studies are showing that incorporating nanoparticles, including carbon quantum dots (CQDs), graphene carbon dots (GQDs), and graphene oxide quantum dots (GOQDs) are making thin film composite (TFC) membranes more effective by increasing water flux while maintaining similar levels of salt rejection, increasing the hydrophilicity of the membrane surface, showing bactericidal properties, exhibiting antifouling properties to prevent accumulation of bacteria or other microorganisms from reducing the effectiveness of the membrane, and more. In the review, the synthesis process, applications, functionality, properties, and the role of several types of quantum dots are discussed in the composite membrane for water purification.

A Study on the Characteristics of the Functional Groups of the Alkanethiol Molecules in UV Laser Photochemical Patterning and Wet Etching Process (UV Laser를 이용한 광화학적 패터닝과 습식에칭에 따른 알칸티올 분자 작용기의 특성 연구)

  • Huh, Kab-Soo;Chang, Won-Seok
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.5
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    • pp.104-109
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    • 2007
  • Photochemical patterning of self-assembled mono layers (SAMs) has been performed by diode pumped solid state (DPSS) 3rd harmonic Nd:$YVO_4$ laser with wavelength of 355 nm. SAMs patternings of parallel lines have subsequently been used either to generate compositional chemical patterns or fabricate microstructures by a wet etching. This paper describes a selective etching process with patterned SAMs of alkanetiolate molecules on the surface of gold. SAMs formed by the adsorption of alkanethiols onto gold substrate employs as very thin photoresists. In this paper, the influence of the interaction between the functional group of SAMs and the etching solution is studied with optimal laser irradiation conditions. The results show that hydrophobic functional groups of SAMs are more effective for selective chemical etching than the hydrophilic ones.

The Effect of Ag thickness on Optical and Electrical Properties of V2O5/Ag/ITO Multilayer (Ag의 두께에 따른 V2O5/Ag/ITO 구조의 다층 박막의 광학적, 전기적 특성)

  • Ko, Younghee;Park, Gwanghoon;Ko, Hang-Ju;Ha, Jun-Seok
    • Journal of the Microelectronics and Packaging Society
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    • v.21 no.1
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    • pp.7-11
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    • 2014
  • Recently, the buffer layers consisting of poly (3,4-ethylenedioxythiophene): poly (styrenesulfonate) (PEDOT-PSS) are extensively used to improve power conversion efficiency (PCE) of organic solar cells. However, PEDOT-PSS is not suitable for mass production of organic solar cells due to its intrinsic acid and hygroscopic properties. Moreover, because of chemical reactions between indium tin oxide (ITO) layer and PEDOT-PSS layer, the interface is not stable. For these reasons, alternative materials such as $V_2O_5$ have been developed to be an effective buffer layer. In this work, we used $V_2O_5$/Ag/ITO multilayer structure for the anode buffer layer. With variation of thickness of Ag layer, we investigated the optical and electrical properties of $V_2O_5$/Ag/ITO multi-layer films. As a result, we found that the electrical properties were improved with increasing Ag thickness while optical transmittance decreases in visible wavelength region. From the calculation of figure of merit (FOM) which is used to evaluate proper structure for transparent of optoelectronic, $V_2O_5$/Ag/ITO multilayer electrode was optimized with 4 nm thick Ag layer in optical (88% in transmittance) and electrical ($4{\times}10^{-4}{\Omega}cm$) properties. This indicates that $V_2O_5$/Ag/ITO multilayer electrode could be a candidate for the anode of optoelectronic devices.