• 제목/요약/키워드: 충질소

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Buried Channel PMOS에서 이온 주입된 $BF_2$ 열처리 거동

  • Heo, Tae-Hun;No, Jae-Sang
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.374-374
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    • 2012
  • 반도체 소자의 크기가 100 nm 이하로 감소되면 통상적인 이온 주입 조건인 이온 에너지, 조사량 및 이온 주입 각도뿐만 아니라 Dose Rate 및 모재 온도가 Dopant Profile을 조절하는 데에 있어서 매우 중요한 인자로 작용한다. 본 연구에서는 Ribbon-beam 및 Spot-beam을 사용하여 활성화 열처리 후 Dopant Profile을 분석하였다. 이온 주입은 모든 시편에서 $BF_2$를 가속 에너지 10 keV 및 조사량 $2{\times}10^{15}/cm^2$로 고정하였다. 이온 주입 후 도펀트 활성화는 100% 질소 분위기 하에서 $850^{\circ}C$-30s 조건으로 RTA 열처리를 수행하였다. Boron 및 Fluorine의 Profile은 SIMS 분석을 통하여 구하였다. Spot-beam은 Ribbon-Beam에 비하여 Dose Rate 및 Cooling Efficiency가 높기 때문에 이온 주입 후 더욱 많은 양의 Primary-defect를 발생시키고 이에 따라 두꺼운 비정질 충을 형성한다. $BF_2$ 이온 주입 된 시편에서 B 및 F의 농도 Peak-height는 a/c 계면에 위치하는 것을 관찰하였다. 또한 B 및 F의 농도 Peak-height는 Silicon 모재의 온도가 증가할수록 증가하는 것을 관찰하였다. Silicon 모재의 온도가 증가함에 따라 Active-area의 면저항이 변화하지 않는 상태에서 Vt (Threshold Voltage)가 급격히 감소함을 관찰 하였다. 비정칠 층의 두께가 증가할수록 a/c 계면 하단에 잔존하는 Residual-defect의 양이 감소하고 이는 측면확산을 감소시키는 역할을 한다는 것이 관찰되었다.

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Larvicidal Action of Liquid Nitrogen against. Metacercariae of Clonorchis sinensis (액화질소에 의한 간흡충 피낭유충의 살충에 대한 연구)

  • 송수복
    • Parasites, Hosts and Diseases
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    • v.25 no.2
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    • pp.123-128
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    • 1987
  • The author investigated the larvicidal action of liquid nitrogen against the metacercariae of Clonorchis sinensis, with an observation on the freshness and change of taste in the flesh of fishes. The results obtained were as follows: 1. The metacercariae in the mesh of Pseudorasbora parve, which were treated with liquid nitrogen ($-192^{\circ}C$), were not killed within 10 seconds, but completely killed over 30 seconds. In comparison, the metacercariae in the flesh of p. parka kept in a refrigerator ($-12^{\circ}C$) were killed only in 84% in 10-hour exposure group. 2. The freezing speed of fishes by liquid nitrogen was 4 min.(') and 15 seconds(") for Cyprinus carpio, 1'22" for Carassius carassius and only $30^{\circ}C$ for Pseudorasbora larva. 3. As for the freshness and taste of raw fresh water fishes, they were not deteriorated after the treatment with liquid nitrogen. 4. In animal infection experiment of C. sinensis metacercariae after freezing, they were found not infective after they were treated with liquid nitrogen. From the results, it is inferred that the treatment of fresh water fishes for longer than 30 seconds with liquid nitrogen is helpful to reduce the possibility of C, sinensis infection without alteration of the freshness and taste of fishes.

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Remote Plasma Enhanced-Ultrahigh Vacuum Chemical Vappor Deposition (RPE-UHVCD)법을 이용한 GaN의 저온 성장에 관한 연구

  • 김정국;김동준;박성주
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.108-108
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    • 1998
  • 최근의 GaN에 관한 연구는 주로 MOCVD법과 MBE법이 이용되고 있으며 대부분 800¬1$\alpha$)()t 정도의 고옹에서 이루어지고 었다. 그러나 이러한 고온 성장은 GaN 성장 과청에서 질 소 vacancy를 생성시켜 광특성을 저하시키고 청색 발광충인 InGaN 화합물에 In의 유입울 어 렵게 하며 저온에서보다 탄소 오염이 증가하는 동의 문제캠을 가지고 있다. 이러한 고온 생장 의 문제점을 해결하기 위한 방법중의 한 가지로 제시되고 있는 것이 저온 성장법이다. 본 연구 에 사용된 RPE-UHVCVD법은 Nz률 rf plasma로 $\sigma$acking하여 공급함으로써 NI-h롤 질소원으 로 사용하는 고온 성장의 청우와는 다르게 온도에 크게 의존하지 고 질소원올 공급할 수 있 어 저옹 성장이 가능하였다. 기판으로는 a - Alz03($\alpha$)()1)를 사용하였고 3족원은 TEGa(triethylgallium)이며,5족원으로는 6 6-nine Nz gas를 rf plasma로 cracking하여 활성 질소원올 공급하였다 .. Nz plasma로 질화처리 를 한 sapphire 표면 위에 G따애 핵생성충을 성장 옹도(350 t, 375 t, 400 t)와 성장시간(30 분,50 분) 그리고 VIllI비(1$\alpha$)(), 2뼈)둥을 변화시키면서 성장시킨 후 GaN 에피택시충을 450 $^{\circ}C$에서 120 분 동안 성장시켰다 .. XPS(x-ray photoelectron spectroscopy), XRD(x-ray d diffraction), AFM(atomic force microscope)둥올 이용하여 표면의 조성 및 morphology 변화와 결정성을 관찰하였다. X XPS 분석 결과 질화처리를 한 sapphire 표면에는 AlN가 형성되었다는 것을 확인 할 수 있 었으며 질화처리를 한 후 G따J 핵생성충올 성장시킨 경우에 morphology 변화를 AFM으로 살 펴본 결과 표면에 facet shape의 island가 형성되었고 이러한 결파는 질화처리 과청이 facet s shape의 island 형성을 촉진시킨다는 것을 알 수 있었다. 핵생성충의 성장온도가 중가함에 따 라 island의 모양은 round shape에서 facet shape으로 변화하였다. 이러한 표면의 morphology 변화와 GaN 에피택시충의 결정성과의 관계를 살펴보면 GaN 에피택시충 표면의 rms(root m mean square) roughness가 중가하는 경 우 XRD (j -rocking curve의 FWHM(full width half m maximum) 값이 감소하는 것으로 나타났다. 이러한 현상은 결정성의 향상이 columnar 성장과 관계가 었다는 것올 알 수 있었다 .. columnar 성장은 결함의 밀도가 낮은 column의 형생과 G GaN 에피택시충의 웅력 제거로 인해 G값{의 결정성을 향상시킬 수 있는 것으로 생각된다. 톡 히 고온 성장의 경우와는 달리 rms roughness의 중가가 100-150 A청도로 명탄한 표면올 유 지하면서 결정성을 향상시킬 수 있었다. 본 실험에서는 핵생성충올 375 t에서 30 분 생장시킨 경우에 hexagonal 모양의 island로 columnar 성장을 하였고 GaN 에피태시충의 결정성도 가장 향상되었다 이상의 결과로부터 RPE-UHVCVD법용 이용한 GaN 저온 성장에서도 GaN의 결청성올 향 상시킬 수 있음융 확인할 수 있었다.

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Effects of Different Nitrogen Levels and Planting Densities on the Quality and Yield of the Black Rice Cultivar 'Shinnongheugchal' (재식밀도 및 시비량 차이가 신농흑찰 품질 및 수량에 미치는 영향)

  • Lee, In-Sok;Lee, Deok-Ryeol;Cho, Seung-Hyun;Lee, Song-Yi;Kim, Kab-Cheol;Lee, Ki-Kwon;Song, Young-Ju
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.61 no.2
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    • pp.79-86
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    • 2016
  • The late-maturing black rice cultivar Shinnongheugchal from Jeollabuk-do Agricultural Research and Extension Service was used as the plant material for estimating growth characters, quality and yield from the vegetation period to harvest age. This study was performed to select an optimum combination of nitrogen level and planting density for the maximum yield of Shinnongheugchal. The plant height, number of tillers, and SPAD index were higher when the combination of 70 hills per $3.3m^2$ and 13 kg/10 a nitrogen level was used at 30 days after transplanting. The heading date for the combination of 70 hills per $3.3m^2$ and 15 kg/10 a nitrogen level, and 80 hills per $3.3m^2$ and 15 kg/10 a nitrogen level was August 22. The heading date for the other combinations was August 21. The combination of 70 hills per $3.3m^2$ and 13 kg/10 a nitrogen level yielded the highest number of tillers at 40 days after flowering. Even though the lodging index was increased with increasing nitrogen levels, field lodging did not occur until harvest time. Seed nitrogen concentration in the combination of 70 hills per $3.3m^2$ and 13 kg/10 a nitrogen level showed a significant difference when compared with the other combinations. The black rice yield varied significantly, and the highest yield was observed in the combination of 70 hills per $3.3m^2$ and 13 kg/10 a nitrogen level. The yield was significantly correlated with seed nitrogen concentration. The maximum yield was estimated to be 14.67 kg/10 a nitrogen level by using the regression equation. On average, the coloring degree of the black rice was higher at planting density of 70 hills per $3.3m^2$ than at 80 hills per $3.3m^2$. The highest yield of perfect black rice was obtained using the combination of 70 hills per $3.3m^2$ and 13 kg/10 a nitrogen level. Our findings demonstrate that a nitrogen level of 13-14 kg/10 a can be used to obtain the maximum yield from Shinnongheugchal with yield, cyanidin 3-glucoside content, and perfect black rice yield as the standard.

Application of unmanned helicopter on pest management in rice cultivation (무인 항공기 이용 벼 병해충 방제기술 연구)

  • Park, K.H.;Kim, J.K.
    • Journal of Practical Agriculture & Fisheries Research
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    • v.10 no.1
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    • pp.43-58
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    • 2008
  • This research was conducted to determine the alternative tool of chemical spray for rice cultivation using the unmanned helicopter(Yamaha, R-Max Type 2G-remote controlled system) at farmer's field in Korea. The unmanned helicopter tested was introduced form Japan. In Korea the application of chemicals by machine sprayer for pest management in rice cultivation has been ordinarily used at the farmer's level. However, it involved a relatively high cost and laborious for the small scale of cultivation per farm household. Farm population has been highly decreased to 7.5% in 2002 and the population is expected to rapidly reduce by 3.5% in 2012. In Japan, pest control depending on unmanned helicopter has been increased by leaps and bounds. This was due in part to the materialization of the low-cost production technology under agricultural policy and demand environmentally friendly farm products. The practicability of the unmanned helicopter in terms of super efficiency and effectiveness has been proven, and the farmers have understood that the unmanned helicopter is indispensable in the future farming system that they visualized. Also, the unmanned helicopter has been applied to rice, wheat, soybean, vegetables, fruit trees, pine trees for spraying chemicals and/or fertilizers in Japan Effect of disease control by unmanned helicopter was partially approved against rice blast and sheath blight. However, the result was not satisfactory due to the weather conditions and cultural practices. The spray density was also determined in this experiment at 0, 15, 30, and 60cm height from the paddy soil surface and there was 968 spots at 0cm, 1,560 spots at 15cm, 1,923 spots at 30cm, and 2,999 spots at 60cm height. However, no significant difference was found among the treatments. At the same time, there was no phytotoxicity observed under the chemical stray using this unmanned helicopter, nor the rice plant itself was damaged by the wind during the operation.

Effect of RuO$_2$ Thin Film Microstructure on Characteristics of Thin Film Micro-supercapacitor ($RuO_2$박막의 미세 구조가 박막형 마이크로 슈퍼캐패시터의 특성에 미치는 영향)

  • Kim, Han-Ki;Yoon, Young-Soo;Lim, Jae-Hong;Cho, Won-Il;Seong, Tae-Yeon;Shin, Young-Hwa
    • Korean Journal of Materials Research
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    • v.11 no.8
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    • pp.671-678
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    • 2001
  • All solid-state thin film micro supercapacitor, which consists of $RuO_2$/LiPON/$RuO_2$ multi layer structure, was fabricated on Pt/Ti/Si substrate using a $RuO_2$ electrode. Bottom $RuO_2$ electrode was grown by dc reactive sputtering system with increasing $O_2/[Ar+O_2]$ ratio at room temperature, and a LiPON electrolyte film was subsequently deposited on the bottom $RuO_2$ electrode at pure nitrogen ambient by rf reactive sputtering system. Room temperature charge-discharge measurements based on a symmetric $RuO_2$/LiPON/$RuO_2$ structure clearly demonstrates the cyclibility dependence on the microstructure of the $RuO_2$ electrode. Using both glancing angle x-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the microstructure of the $RuO_2$ electrode was dependent on the oxygen flow ratio. In addition, x- ray photoelectron spectroscopy(XPS) examination shows that the Ru-O binding energy is affected by increasing oxygen flow ratio. Furthermore, TEM and AES depth profile analysis after cycling demonstrates that the interface layer formed by interfacial reaction between LiPON and $RuO_2$ act as a main factor in the degradation of the cyclibility of the thin film micro-supercapacitor.

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Effect of Carbon Felt Oxidation Methods on the Electrode Performance of Vanadium Redox Flow Battery (탄소펠트의 산화처리 방법이 바나듐 레독스 흐름 전지의 전극 성능에 미치는 영향)

  • Ha, Dal-Yong;Kim, Sang-Kyung;Jung, Doo-Hwan;Lim, Seong-Yop;Peck, Dong-Hyun;Lee, Byung-Rok;Lee, Kwan-Young
    • Journal of the Korean Electrochemical Society
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    • v.12 no.3
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    • pp.263-270
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    • 2009
  • Carbon felt surface was modified by heat or acid treatment in order to use for the electrode of a redox-flow battery. Polymers on the surface of carbon felt was removed and oxygen-containing functional group was attached after the thermal treatment of carbon felt. Thermal treatment was better for the stability of the carbon structure than the acid treatment. Oxygen-containing functional group on the thermally treated carbon felt at 500$^{\circ}C$ was confirmed by XPS and elementary analysis. BET surface area was increased from nearly zero to 96 $m^2/g$. Thermally treated carbon felt at 500$^{\circ}C$ showed lower activation polarization than the thermally treated carbon felt at 400$^{\circ}C$ and the acid-treated carbon felt in the cyclicvoltammetry and polarization experiments. The thermally treated carbon felts at 400$^{\circ}C$ and 500$^{\circ}C$ and the acid-treated carbon felt was applied for the electrode to prepare vanadium redox flow battery. Voltage efficiencies of charge/discharge were 86.6%, 89.6%, and 96.9% for the thermally treated carbon felts at 400$^{\circ}C$ and 500$^{\circ}C$ and the acid-treated carbon felt, respectively.

Growth Characteristics of Six Rice Cultivars under Rice-Chinese Milk Vetch (Astragalus sinicus L.) Cropping System (자운영 환원답의 벼 품종간 생육특성과 수량에 관한 연구)

  • Lee, Byung-Jin;Ahn, Jong-Woong;Hwang, Dong-Yong;Oh, Seong-Hwan;Kim, Joon-Hwan;Kim, Sang-Yeol;Ku, Yeon-Chung;Choi, Zhin-Ryong
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.51 no.spc1
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    • pp.84-91
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    • 2006
  • This study was carried out to comparatively evaluate growth characteristics of rice cultivars under rice-mono (conventional) and rice-Chinese milk vetch (Vetch) cropping system. Six rice cultivars such as Geumobyeo, Pungmibyeo, Hwayeongbyeo, Sobibyeo, Junambyeo and Dongjinbyeo were tested in 2005. The results obtained are summarized as follows ; plant height and culm length of all the tested cultivars at heading and harvest time were shorter in rice-vetch cropping system than conventional, however, nitrogen content of rice plants at heading and harvesting time was higher in rice-vetch cropping system. The total amount of nitrogen of rice plants was higher in conventional than rice-vetch cropping system. Nitrogen content of rice plant and uptake of Pungmibyeo was the highest of all the tested cultivars in both cropping systems. Generally, grain yietd ef tested cultivars seemed to be higher in conventional than rice-vetch cropping system. And it was the highest in Junambyeo as compared to those of other cultivars. Head rice ratio and protein content were higher in rice-vetch cropping system.

Translocation Pattern of Photosynthate(14C) and Nutrient Effect on Translocation during Ripening in Rice (수도(水稻) 등숙기간(登熟期間中) 동화산물(同化産物)(14C)의 전유특성과 무기성분(無機成分)의 영향(影響))

  • Hong, Young-Pyo;Seok, Soon-Jong;Hwang, Young-Soo;Ryu, In-Soo
    • Korean Journal of Soil Science and Fertilizer
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    • v.15 no.4
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    • pp.233-240
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    • 1982
  • This study was conducted to elucidate the translocation pattern of photosynthate labelled by $^{14}C$ in rice cultivars and the effects of nutrient composition on the translocation in rice plant during ripening, Showing coincidence between the grain filling rate and the translocation of $^{14}C$ into the grain during ripening period, the translocation patterns of cultivars tested were grouped by three; 1) the late dominance type (Akibare), 2) the early dominance type (Taebaegbyeo, Chupungbyeo), and 3) the semi-late dominance type (Milyang #23, Milyang #42, and Yushin). The negative relation ship existed between the translocation ratio of $^{14}C$ into the grain and the nitrogen content in plants, but not significant, The nutrient depletion of P, K, Ca, Mg, and Si in water medium from the panicle initiation to the heading stage resulted in the decrease of grain weight by 4 to 12 percent and the increase of translocation of $^{14}C$ into grain assimilated at heading. The effect of resupply of these nutrients after heading was recognized by the order of P>Mg>K and Ca. But the effect of Si resupply was hardly recognized in increasing grain weight. The photosynthetic rate was greatly affected by the nitrogen status and the depletion of P, K, and Ca decreased the photosynthetic rate in single leaf at heading, while the depletion of Si enhanced the rate.

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Neuronal Nitric Oxide Synthase-Immunoreactive Neurons In the Hamster Visual Cortex: Lack of Co-localization with Parvalbumin (햄스터 시각피질에서 Neuronal nitric oxide synthase-면역반응성 뉴런: parvalbumin과의 co-localization 부재)

  • Jin Mi-Joo;Lee Jee-Eun;Ye Eun-Ah;Jeon Chang-Jin
    • Journal of Life Science
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    • v.15 no.3 s.70
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    • pp.344-351
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    • 2005
  • Nitric oxide (NO) and calcium-binding proteins occur in various types of cells in the central nervous system. They are important signaling and calcium buffering molecules, respectively. In the present study, using immunocytochemistry we examined the distribution and the co-localization pattern of neurons containing neuronal nitric oxide synthase (nNOS) and parvalbumin in the visual cortex of hamster. The overall number of parvalbumin-immunoreactive (IR) neurons was 17 times higher than that of the nNOS-IR neurons in the hamster visual cortex. The highest differences were found in layer V, where parvalbumin-IR neurons were 54.7 times more abundant than nNOS-IR neurons. Many nNOS- and parvalbumin-IR neurons were similar in size, shape, and manner of distribution in the visual cortex. However, two-color immunofluorescence revealed that no neurons in the hamster visual cortex expressed both nNOS and parvalbumin. The present results indicate that there are subtle species differences in the co-localization pattern between nNOS and calcium-binding proteins. The present results also suggest not only the heterogeneity and functional diversity of nNOS-IRneurons in the visual cortex, but also the importance of understanding animal diversity