• Title/Summary/Keyword: 최정환

Search Result 158, Processing Time 0.023 seconds

A Study of carrier gas and ligand addition effect on MOCVD Cu film deposition (운반기체와 Ligand의 첨가가 MOCVD Cu 증착에 미치는 영향에 관한 연구)

  • 최정환;변인재;양희정;이원희;이재갑
    • Journal of the Korean Vacuum Society
    • /
    • v.9 no.3
    • /
    • pp.197-206
    • /
    • 2000
  • The deposition characteristics of MOCVD Cu using the (hfac)Cu(1,1-COD)(1,1,1,5,5,5-hexafluoro-2,4-pentadionato Cu(I) 1,5-cyclooctadine) have been investigated in terms of the effects of carrier gas such as hydrogen and argon as well as the effects of H(hfac) ligand addition. MOCVD Cu using a hydrogen carrier gas led to a higher deposition rate and lower resistivity than an argon carrier gas system. The improvement in the surface roughness of the MOCVD Cu films and the (111) preferred orientation texture was obtained by using a hydrogen carrier gas. However, the adhesion characteristics of the films showed relatively weaker compared to the Ar carrier gas system, probably due to the larger amount of F content in the films, which was confirmed by the AES analyses. When an additional H(hfac) ligand was added, the deposition rate was significantly enhanced in the case of an argon + H(hfac) carrier gas system while significant change in the deposition rate of MOCVD Cu was not observed in the case of the hydrogen carrier gas system. However, the addition of H(hfac) in both carrier gases led to lowering the resistivity of the MOCVD Cu films. In conclusion, this paper suggests the deposition mechanism of MOCVD Cu and is expected to contribute to the enhancement of smooth Cu films with a low resistivity by manipulating the deposition conditions such as the carrier gas and addition of H(hfac) ligand.

  • PDF

Formation of MOCVD TiN from a New Precursor (새로운 증착원으로 형성된 MOCVD TiN에 관한 연구)

  • Choe, Jeong-Hwan;Lee, Jae-Gap;Kim, Ji-Yong;Lee, Eun-Gu;Hong, Hae-Nam;Sin, Hyeon-Guk
    • Korean Journal of Materials Research
    • /
    • v.9 no.3
    • /
    • pp.244-250
    • /
    • 1999
  • MOCVD TiN films were prepared from a new TiN precursor, tetrakis(etylmethylamino)titanium (TEMAT) and ammonia. Deposition of TiN films from a single precursor, TEMA T yielded the growth rates of $70 to 1050\AA$/min, depending on the deposition temperature. Furthermore, the excellent bottom coverage of -90% over $0.35\mu\textrm{m}$ contacts was obtained at $275^{\circ}C$. The addition of ammonia to TEMA T lowered the resistivity of as- deposited TiN film to ~ $800\mu\omega-cm$ from $3500~6000\mu\omega-cm$ and improved the stability of TiN film in air. Examination of the films by Auger electron spectroscopy(AES) showed that the oxygen and carbon contents decreased with the addition of ammonia. However, increasing ammonia flow rate decreased the bottom coverage of TiN films over $0.5\mu\textrm{m}$ contacts, probably due to the high sticking coefficient of intermediate species produced from the gas phase reaction of TEMA T and ammonia. Based on the byproduct gases detected by the quadrupole mass spectrometer (QMS), the transammination reaction was proposed to be responsible for TiN deposition. In addition, XPS analysis revealed that the carbon in the films made from TEMA T and ammonia was metallic carbon, suggesting that $\beta$-hydrogen activation process occurs competitively with the transammination reaction.

  • PDF

Physiological Activities According to Cultivars and Parts of Ulsan Pear (울산지역 생산 배의 품종 및 부위별 생리활성)

  • Choi, Jeong-Hwan;Lee, Eun-Young;Kim, Jong-Su;Choi, Gil-Bae;Jung, Su-Geun;Ham, Yu-Sik;Seo, Dong-Cheol;Heo, Jong-Soo
    • Applied Biological Chemistry
    • /
    • v.49 no.1
    • /
    • pp.43-48
    • /
    • 2006
  • This study was performed to confirm physiological activities according to cultivars and parts of Ulsan pear (wonhwang, pungsu, whangkeum, whasan and shingo). Total contents of phenolic compounds from peel, pulpy substance and core were 699.3-800.6, 51.5-112.5 and 254.0-401.5 mg/100 g as tannic acid equivalent, respectively. There were difference contents by cultivars, and peel and core of shingo and pulpy substance of wonhwang showed high contents, respectively. Total flavonoid contents of peel, pulpy substance and core were 125.2-164.2, 25.9-35.9 and 45.1-60.0 mg/100g, respectively and those of shingo cultivar showed comparatively high. Electron donating ability was in the order of peel (66.1-90.7%), core (48.5-82.8%) and pulpy substance (24.9-58.2%), and whasan cultivar showed comparatively low. Nitrite scavenging activity was in the order of peel (58.2-100.8%), core (59.5-86.2%), pulpy substance (39.9-82.5%). There were little difference by cultivars of core but peel and pulpy substance of shingo cultivar showed comparatively low nitrite scavenging activity. And as the concentration of each extract increased, nitrite scavenging activity increased. Xanthine oxidase inhibition rate was in the order of peel (14.1-75.4%), core (5.3-71.8%), pulpy substance (2.2-67.5%). And there little difference by cultivars and which was increased as the concentration of each extract increased.

An Investigation of Microbial Contamination of Side Dishes sold at Traditional Market and Super Market in Ulsan (울산지역 재래시장 및 대형 할인점 유통 반찬류의 미생물 오염도 조사)

  • Choi, Jeong-Hwan;Park, Joo-Young;Lim, Eun-Gyung;Choi, Myung-Kyu;Kim, Jong-Soo;Choi, Gil-Bae;Jeong, Su-Geun;Hahm, Yu-Sik
    • Journal of Food Hygiene and Safety
    • /
    • v.27 no.1
    • /
    • pp.87-95
    • /
    • 2012
  • This study was investigated to determine the contamination levels of total aerobic bacteria, coliform group, $E.$ $coli$ and food-borne pathogens of side dishes from 2 traditional markets (100 samples) and 2 super markets (100 samples) located on Ulsan. The levels (range) of total aerobic bacteria was 4.75 log CFU/g (1.60~6.92 log CFU/g) in traditional market and 4.62 log CFU/g (2.00~6.46 log CFU/g) in super market, respectively. Coliform was detected in 64 and 66 samples sold at traditional markets and super markets, respectively. $E.$ $coli$ was detected in 4 and 6 samples sold at traditional markets and super markets, respectively. The food-borne pathogens, namely $Bacillus$ $cereus$ and $Listeria$ $monocytogenes$ were detected in 1 sample sold at traditional markets, respectively, and $Bacillus$ $cereus$ was detected in 4 samples sold at super markets. However, other pathogens such as $Salmonella$ spp., $Shigella$ spp., $Vibrio$ $parahaemolyticus$, $Yersinia$ $enterocolitica$, $Clostridium$ $perfringens$, $Camphylobacter$ $jejuni$ and Pathogenic $E.$ $coli$ were not detected. The $Saengchae$ and $Seasoned$ $Jeotgal$ were relatively vulnerable compared to the others in the food-borne pathogens.

Behavior and Decomposition Velocity of Pollutants on Various Forms from Domestic Sewage in Small-scale Sewage Treatment Plant by Natural Purification Method (자연정화공법에 의한 농촌 전원독립가구 하수처리장에서 하수 중 오염물질의 존재형태별 거동과 분해속도)

  • Seo, Dong-Cheol;Kim, Hyung-Jun;Park, Woo-Young;Lim, Jong-Sir;Hwang, Seung-Ha;Park, Chan-Hoon;Choi, Jeong-Hwan;Lee, Hong-Jae;Lee, Do-Jin;Cho, Ju-Sik;Heo, Jong-Soo
    • Korean Journal of Environmental Agriculture
    • /
    • v.27 no.1
    • /
    • pp.18-26
    • /
    • 2008
  • Behavior and decomposition velocity of pollutants on various forms from domestic sewage in sewage treatment plant were investigated in order to obtain the basic data for improving the removal efficiency of pollutants and to reduce the area in constructed wetland by natural purification method. The removal amounts of BODs and CODs in aerobic bed were significantly higher than those of the other beds. In aerobic bed, the removal amounts of IBOD and ICOD were more than those for SBOD and SCOD, respectively, whereas the removal amounts of BODs and CODs in anoxic and anaerobic beds were little different. The removal amounts of SSs in aerobic bed were also higher than those for the other beds, and the removal amounts of VSS in all beds were more than those for FSS. The removal amounts of DTN and DTP in all beds were more than those for STN and STP, respectively. In addition, the decomposition velocities of TBOD, TCOD and TSS in aerobic bed were 30.79, 17.15 and 29.96 $day^{-1}$. Moreover, the decomposition velocities of BODs, CODs and SSs in aerobic bed were very rapid than those in the other beds. On the other hand, the decomposition velocities of BODs, CODs and SSs in anoxic and anaerobic beds were a little different regardless of the forms of pollutant. The decomposition velocities constants of T-N in aerobic, anoxic and anaerobic beds were 4.78, 0.12 and 0.10 $day^{-1}$, respectively. Moreover, the decomposition velocities constants of T-P in aerobic, anoxic and anaerobic beds were 13.09, 0.12 and 0.13 $day^{-1}$ respectively. The decomposition velocity of T-Ns and T-Ps in aerobic bed were slightly rapid than those in the other beds, whereas the decomposition velocities of T-Ns and T-Ps in anoxic and anaerobic beds were slightly different regardless of the forms of pollutant.

Usefulness of Customized Cervical Spine Immobilizer in Head & Neck Image-Guided Radiation Therapy with Tomotherapy® (토모테라피를 이용한 두경부암 영상유도 방사선 치료 시 개인별 경추고정용구의 유용성 평가)

  • Jin, Sung Eun;Chang, Se Wuk;Choi, Jung Hoan;Kim, Min Joo;Ahn, Seung Kwon;Lee, Sang Kyu;Cho, Jung Heui
    • The Journal of Korean Society for Radiation Therapy
    • /
    • v.30 no.1_2
    • /
    • pp.65-71
    • /
    • 2018
  • Purpose : Standardized pillow may not support patient's individual cervical spine thoroughly when head and neck radiation therapy with $Tomotherapy^{(R)}$. Therefore, the purpose of this study was to make a comparative analysis for the difference of using standardized pillow only and using customized cervical spine immobilizer with standardized pillow. Materials and Methos : The head and neck cancer patients who are treated image-guided radiation therapy(IGRT) with $Tomotherapy^{(R)}$ were divided into two groups, 20 patients using standardized pillow only, and 20 patients using customized cervical spine immobilizer with standardized pillow. We achieved 20 mega-voltage computed tomography(MVCT) image per patient, compared curvature of the cervical spine in MVCT with curvature of the cervical spine in CT-simulation. Results : Results of comparative analysis were curvature consistency 95.9 %, maximum error of distance 41.9 mm, average distance error per fractionation 19.4 mm, average standard deviation 1.34 mm in case of using standardized pillow only, curvature consistency 98.9 %, maximum error of distance 12.9 mm, average distance error per fractionation 5.8 mm, average standard deviation 0.59 mm in case of using customized cervical spine immobilizer with standardized pillow. Conclusion : Using customized cervical spine immobilizer shows higher reproducibility and low distance error, therefore customized cervical spine immobilizer could be useful for head and neck cancer patients who need radiation therapy.

  • PDF

Evaluation of usefulness for Stereotactic Partial Breast Irradiation(S-PBI) by using Surface Fiducial Marker (표면위치표지자를 적용한 정위적 부분유방방사선치료의 유용성 평가)

  • Kim, JongYeol;Jung, DongMin;Kim, SeYoung;Yoo, HyunJong;Choi, JungHoan;Park, HyoKuk;Baek, JongGeol;Lee, SangKyu;Cho, JeongHee
    • The Journal of Korean Society for Radiation Therapy
    • /
    • v.33
    • /
    • pp.99-108
    • /
    • 2021
  • Purpose: The goal of this study is to evaluate usefulness of noninvasive method instead of previous inserting Fiducial Marker Method when performing Stereotactic Partial Breast Irradiation in CyberKnife. Material and methods: For consistency of Imaging Center, we evaluated both oblique images at angle 45 and 315 acquired from 2D Simulator and CyberKnife quantitatively through dice similarity coefficient. Also, location reproducibility of Surface Fiducial Marker was analyzed from 2D Simulator, treatment plans and CyberKinfe images by using 8 Fiducial Markers made of gold attached to ATOM Phantom based on our institution's protocols. Results: The results of the estimated consistency were 0.87 and 0.9 at the oblique angle 45 and 315, respectively. For location consistency of Surface Fiducial Markers, values of horizontal vertical direction of left breast were Superior/Inferior 0.3 mm, Left/Right -0.3 mm, Anterior/Posterior 0.4 mm, and the values of rotational direction were Roll 0.3 °, Pitch 0.2 °, Yaw 0.4 °. The values of horizontal vertical direction of right breast were Superior/Inferior -0.1 mm, Left/Right -0.1 mm, Anterior/Posterior -0.1 mm, and the values of rotational direction were Roll 0.2°, Pitch 0.1°, Yaw 0.1°. Conclusions: We expect that the protocols used by Surface Fiducial Markers when performing Stereotactic Partial Breast Irradiation in CyberKnife will provide protection from pain and cut expenses for treatment and reduce treatment errors and make treatment more accurate by suggesting treatment protocols based on high consistency of Imaging Center and reproducibility of Fiducial Markers.

A Study on People Counting in Public Metro Service using Hybrid CNN-LSTM Algorithm (Hybrid CNN-LSTM 알고리즘을 활용한 도시철도 내 피플 카운팅 연구)

  • Choi, Ji-Hye;Kim, Min-Seung;Lee, Chan-Ho;Choi, Jung-Hwan;Lee, Jeong-Hee;Sung, Tae-Eung
    • Journal of Intelligence and Information Systems
    • /
    • v.26 no.2
    • /
    • pp.131-145
    • /
    • 2020
  • In line with the trend of industrial innovation, IoT technology utilized in a variety of fields is emerging as a key element in creation of new business models and the provision of user-friendly services through the combination of big data. The accumulated data from devices with the Internet-of-Things (IoT) is being used in many ways to build a convenience-based smart system as it can provide customized intelligent systems through user environment and pattern analysis. Recently, it has been applied to innovation in the public domain and has been using it for smart city and smart transportation, such as solving traffic and crime problems using CCTV. In particular, it is necessary to comprehensively consider the easiness of securing real-time service data and the stability of security when planning underground services or establishing movement amount control information system to enhance citizens' or commuters' convenience in circumstances with the congestion of public transportation such as subways, urban railways, etc. However, previous studies that utilize image data have limitations in reducing the performance of object detection under private issue and abnormal conditions. The IoT device-based sensor data used in this study is free from private issue because it does not require identification for individuals, and can be effectively utilized to build intelligent public services for unspecified people. Especially, sensor data stored by the IoT device need not be identified to an individual, and can be effectively utilized for constructing intelligent public services for many and unspecified people as data free form private issue. We utilize the IoT-based infrared sensor devices for an intelligent pedestrian tracking system in metro service which many people use on a daily basis and temperature data measured by sensors are therein transmitted in real time. The experimental environment for collecting data detected in real time from sensors was established for the equally-spaced midpoints of 4×4 upper parts in the ceiling of subway entrances where the actual movement amount of passengers is high, and it measured the temperature change for objects entering and leaving the detection spots. The measured data have gone through a preprocessing in which the reference values for 16 different areas are set and the difference values between the temperatures in 16 distinct areas and their reference values per unit of time are calculated. This corresponds to the methodology that maximizes movement within the detection area. In addition, the size of the data was increased by 10 times in order to more sensitively reflect the difference in temperature by area. For example, if the temperature data collected from the sensor at a given time were 28.5℃, the data analysis was conducted by changing the value to 285. As above, the data collected from sensors have the characteristics of time series data and image data with 4×4 resolution. Reflecting the characteristics of the measured, preprocessed data, we finally propose a hybrid algorithm that combines CNN in superior performance for image classification and LSTM, especially suitable for analyzing time series data, as referred to CNN-LSTM (Convolutional Neural Network-Long Short Term Memory). In the study, the CNN-LSTM algorithm is used to predict the number of passing persons in one of 4×4 detection areas. We verified the validation of the proposed model by taking performance comparison with other artificial intelligence algorithms such as Multi-Layer Perceptron (MLP), Long Short Term Memory (LSTM) and RNN-LSTM (Recurrent Neural Network-Long Short Term Memory). As a result of the experiment, proposed CNN-LSTM hybrid model compared to MLP, LSTM and RNN-LSTM has the best predictive performance. By utilizing the proposed devices and models, it is expected various metro services will be provided with no illegal issue about the personal information such as real-time monitoring of public transport facilities and emergency situation response services on the basis of congestion. However, the data have been collected by selecting one side of the entrances as the subject of analysis, and the data collected for a short period of time have been applied to the prediction. There exists the limitation that the verification of application in other environments needs to be carried out. In the future, it is expected that more reliability will be provided for the proposed model if experimental data is sufficiently collected in various environments or if learning data is further configured by measuring data in other sensors.