• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.422-428
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system (100mm stroke and ${\pm}$ 10nm positioning accuracy) with single plane X-Y stage are materialized.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.524-529
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• 2004

Recently High precision positioning device is used in many kinds of manufacturing and scientific instruments. Piezoelectric transducer is applied to the positioning devive as actuator, PZT has a high resolution, however, moving range is short. Many researcher have developed the mechanism for increasing a motion range. The types of increasing motion range mechanism with PZT are inertial slider, friction driver, ultrasonic motor, etc. In this paper we discuss the review of the hish precision actuator mechanism with PZT. Many kinds of mechanism for high precision are shown and compared.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.453-458
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• 2004

A capacitate sensor is a proper device for measuring high small displacement. General design parameters and procedure are discussed and a test sensor was built to have a measuring range of 100$\mu\textrm{m}$ and a sensitivity about 30nm. This sensor has too opposing electrode of comparably large area and has nominal gap distance about 150$\mu\textrm{m}$. So as to achieve a nano order displacement sensitivity, both sensor and target system have to be considered. This is important for the sensitivity can be achieved by minimizing a system total noise level in electronic type sensor application. Typical performance of the developed sensor is demonstrated in precision moving stage having 0.1$\mu\textrm{m}$ moving resolution.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 추계학술대회(한국공작기계학회)
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• pp.26-31
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• 2001

Recently, miniaturization and mass production are the main trends in manufacturing fields. Therefore, ultraprecision machining and MEMS technology have been taken more and more important position in machining of microparts. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from macro parts to micro products, such as PDP and IT components, in precision products manufacturing. However, the deburring is significant problem in making smooth and precise parts in micro endmilling. This paper shows removal characteristics of burr generated by micro endmilling process. Additionally, it is necessary to understand the formation mechanism of burr of micro barrier ribs to find proper deburring method.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 추계학술대회
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• pp.36-40
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• 2003

In order to discuss the availability of aerostatic guideways driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156N and a laser scale with the resolution of $0.01\mu\textrm{m}$ are used as the feeding system. The experiments are performed on the static stiffness, motion accuracy, positioning accuracy, microstep response and variation of velocity. The guideway also has $0.21\mu\textrm{m}$ of positioning error and $0.09\mu\textrm{m}$ of repeatability, and it shows the stable response against the $0.01\mu\textrm{m}$ resolution step command. The velocity variation of feeding system is less than 0.6%. From these results, it is confirmed that the aerostatic guideway driven by the coreless linear motion is very useful for the ultra precision machine tools.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 추계학술대회
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• pp.313-317
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• 2003

Micro-Channel ultra-precision polishing is a new technology used in magnetic field-assisted relishing. In this paper, an electromagnet or the i18 of test system was designed and manufactured. A size of magnetic abrasive is used on 25~75${\mu}{\textrm}{m}$ and for the polish a micro-channel upper part. A surface of channel which is not even is manufactured using magnetic abrasive finishing at upper surface of micro-channel. As a result, the surface roughness rose by 80％ after upper surface of micro- channel was polished up 8 minutes by polishing.

• 한국공작기계학회논문집
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• 제11권5호
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• pp.65-72
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system(100mm stroke and $\pm$ l0nm positioning accuracy) with single plane X-Y stage are materialized.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1995년도 추계학술대회 논문집
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• pp.18-23
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• 1995

The study was carried out to develope a precision positioning apparatus, consisting of DC servo motor and piezoelectric actuator. This system is composed of fine and coarse apparatus, measurement system and control system, Piezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is drived by DC servo motor. Control system output a signal from laser interferometer and microsense to amplifier of DC servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometor and microsense

• 한국공작기계학회논문집
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• 제11권3호
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• pp.28-32
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• 2002

Recently, the miniature of electric products such as notebook, cellular-phone etc. is apparently appeared, due to the smaller size of the semiconductor chips. As the size of chip gets smaller, the circuit could be easily damaged by the slightest influence, therefore it is important to investigate the machining quality of $\mu$ BGA. This paper deals with machining characteristics of the $\mu$ BGA singulation. The relationships between the singulation face and machining quality of the $\mu$ BGA singulation are investigated. It is confirmed that machining quality improves as the singulation force decreases.

• 한국공작기계학회논문집
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• 제11권3호
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• pp.14-20
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• 2002

Recently, miniaturization and mass production are the main trends in manufacturing fields. Therefore, ultraprecision machining and MEMS technology have been taken more 7md more important position in machining of microparts. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from duo parts to micro products, such as PDP md IT components, in precision products manufacturing. However, decreasing of burr is significant problem in making smooth and precise parts in micro endmilling. This paper shows removal characteristics of burr generated by micro endmilling process. This results satisfies micro endmilling for micro barrier ribs of heights is $50{\mu}m$, $100{\mu}m$, $200{\mu}m$, $300{\mu}m$, and observation from of burr. Additionally, it is necessary to understand the formation mechanism of burr of micro barrier ribs to iud proper decreasing method.