• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.10a
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• pp.537-537
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• 2010

High precision sensing is very important in various technologies. Especially, it is more important when it were applied to nano/micro meter level's sensing like AFM, storage, etc. And capacitive sensing is widely used method. To improve the measurement efficiency, many signal conditioners were studied and one of them was surface acoustic wave (SAW) device. SAW device is very widely used as a high frequency bandwidth filter. Due to the reflective characteristic of high frequency, the response of SAW device contains both propagative and reflective signal at the external impedance. In this paper, we used SAW device as signal conditioner of capacitive sensor. And high precision gap measurement was executed using capacitive load. Reference signal was reflective SAW response and the magnitude at the center frequency of SAW device by the change of impedance was checked. Finally, the attainable gap resolution was determined.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.5
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• pp.824-830
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• 2013

In ultra-precision machining, the inside temperature should be controlled precisely. The important factors are environmental conditions (outside temperature, humidity) and temperature conditions (cutting heat, spindle heat). Thus, in this study, an environmental control cell for the ultra-precision machine that could control the inside temperature and minimize effects of the surrounding environment to achieve a thermal deformation of less than 400nm of a specimen was designed and verified through C.F.D. Further, a method that could control the temperature precisely by using a blower, heat exchanger and heater was evaluated. As a result, this study established a C.F.D technic for the environmental control cell, and the specimen temperature was controlled to be within $17.465{\pm}0.055^{\circ}C$.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.7
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• pp.4405-4410
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• 2015

Two-dimensional displacements are obtained from the sandwiched patterns, which superpose two linearly-periodic patterns orthogonally, respectively. The transparent top pattern is identified by deflection of the laser beam due to a difference of refractivity and the opaque bottom pattern is identified by deviation of the beam intensity due to a difference of reflectance. In the sample setup, the top pattern made up of build-up film is manufactured by UV laser machining and the bottom pattern is manufactured by ultra-precision trench machining and deposition for aluminum plate. The proposed decoding method is verified experimentally using the $10{\mu}m$ equally spaced sample patterns and the devised optical system. The Korea Academia-Industrial cooperation Society.

• Journal of the Korean Magnetics Society
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• v.20 no.4
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• pp.149-152
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• 2010

The flat coil actuator is widely used to make high precision products because it has no friction between the moving coil and the guide. Finite Element Method, a favored actuator design tool due to its high accuracy, was utilized to analyze the electromagnetic actuator, but it consumes a lot of time especially in computation iterations for optimization. Accordingly, the magnetic equivalent circuit analysis can be an alternative tool to FEM because of its computation iteration capability with fair accuracy. In this paper, lumped parameter model and the simulation results are presented. In addition, the result of lumped parameter analysis is compared with those obtained from finite element analysis for verification.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.290-290
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• 2009

Blu-ray Disk, the next generation optical information storing equipment used Blu-ray is the next generation leading storing equipment that has capacity is about from six times to thirty-five times bigger than the existing CDs, DVDs. Especially, we need elaborate optical pick-Up equipment to record and recognize detailed date. Moreover, Blu-ray disk has so narrow track-pitch so it is used high NA(Numerical Aperture) aspheric glass objective lens. In this research, we processed optical pick-up aspheric glass objective lens molding press core by parallel grinding method with ultra precision machining and mold core surface measured form accuracy(PV), surface roughness(Ra).

• Proceedings of the KSME Conference
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• 2001.06c
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• pp.83-87
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• 2001

A 110 mm diameter aspheric metal secondary mirror for a test model of an earth observation satellite camera was fabricated by ultra-precision single point diamond turning (SPDT). Aluminum alloy for mirror substrates is known to be easily machinable, but not polishable due to its ductility. A harder material, Ni, is usually electrolessly coated on an Al substrate to increase the surface hardness for optical polishing. Aspheric metal secondary mirror without a conventional polishing process, the surface roughness of Ra=10nm, and the form error of $Ra={\lambda}/12({\lambda}=632nm)$ has been required. The purpose of this research is to find the optimum machining conditions for reflector cutting of electroless-Ni coated Al alloy and apply the SPDT technique to the manufacturing of ultra precision optical components of metal aspheric reflector.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.4
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• pp.747-754
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• 2013

This study introduces a recently designed desktop-sized NC turning system and its components. This machine is designed for the ultra-precise turning of parts with a diameter of 0.5-20 mm with minimum space usage for the machine. This study aims to achieve submicron-level accuracy of movements and good rigidity of the machine for precision machining using the desktop-sized machine. The components such as the main machine structure, air bearing servo spindle, and XZ stage with needle roller guides are designed, and the designed machine is built with a PC-based CNC controller. Its static and dynamic stiffness performances and positioning resolutions are tested. Through machining tests with single-crystal diamond tools, a form error less than $0.8{\mu}m$ and surface roughness (Ra) of $0.03{\mu}m$ for workpieces are obtained.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.731-736
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• 2007

Vibration isolation equipments are mostly required in precise measurement and manufacturing system. Among all the vibration isolation system, air-spring is the most widely used equipment because of low resonant frequency and high damping ratio. In this study, Takagi-Sugeno fuzzy method is used to design an active vibration isolation system using air-spring, and compared the fuzzy method with passive control method and PID control method. Due to the non-linearity characteristics of air-spring, fuzzy controller was verified to be the most effective both in simulation and experiment.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.555-556
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• 2011

오늘날 전기는 물과 같이 일상생활에 없어서는 안 될 생활 필수품이다. 특히 21세기는 IT, 디지털, 초정밀 산업의 시대로 순간정전에도 민감하게 반응하는 고품질의 전력이 요구되는 시대이다. KEPCO는 세계 최고 수준의 전기품질과 저렴한 요금으로 모든 국민에게 안정적으로 전력을 공급해야 하는 막중한 책임이 있다. 따라서 고품질의 전력을 주요 수요지로 수송하기 위한 송전선로와 변전소의 적기 건설을 위한 효율적이고 체계적인 프로젝트관리 중요성이 대두되었으며, KEPCO는 경영의 투명성을 제고하고 회사내부의 자원 및 업무 프로세스를 통합관리하고자 도입한 전사적자원관리(Enterprise Resource Planning; ERP) 시스템내에 송변전 건설 프로젝트 시스템(PS)을 구축함으로써 송변전건설 프로젝트 관리업무를 ERP라는 통합된 환경에서 수행할 수 있게 되었다. 그러나 최근 생활수준의 향상에 따른 송변전 건설관련 민원과 각종 건설규제 법률 강화 등으로 보다 효율적이고 통제 가능한 송변전설비 건설프로젝트 관리의 필요성에 대한 요구가 지속적으로 제기되었다. 이에 본 논문에서는 KEPCO의 효율적인 송변전 건설사업 공정관리를 위한 ICT기반의 건설 프로젝트 관리 방안에 대해 살펴보고자 한다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.2
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• pp.156-161
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• 2011

The present study introduces a novel wet etching technique for nanostructure fabrications which usually requires low surface roughness. Using the current method, acquired profiles were smooth even in the nanoscale, which cannot be easily achieved with conventional wet or dry etching methods. As one of the most popular single crystal silicon etchant, potassium hydroxide (KOH) solution was used as a base solvent and two additives, antimony trioxide (Sb2O3) and ethyl alcohol were employed in. Four experimental parameters, concentrations of KOH, Sb2O3, and ethyl alcohol and temperature were optimized at 60 wt.%, 0.003 wt.%, 10 v/v%, and $23^{\circ}C$, respectively. Effects of additives in KOH solution were investigated on the profiles in both (110) and (111) planes of single crystal silicon wafer. The preliminary results show that additives play a critical role to decrease etch rate significantly down to ~2 nm/min resulting in smooth side wall profiles on (111) plane and enhanced surface roughness.