1 |
S. Hirai, J. Precision Eng 64, 157 (1998).
DOI
ScienceOn
|
2 |
H. Tanaka, Y. Abe, T. Yoneyama, J. Ishikawa, O Takenaka, K. Inoue Sensors and Actuators 82, 270 (2000).
DOI
|
3 |
S.A. Campbell, K. Cooper, L. Dixon, R. Earwaker, S.N. Port, J. Schiffrin, J. Micromech. Micro-eng 5, 209 (1995).
DOI
|
4 |
Jing Chen, Litian Liu, Zhijian Li, Zhimin Tan, Qianshao Jiang,Huajun Fang, Yang Xu, Yanxiang Liu, Sensors and Actuators A 96, 152 (2002).
DOI
ScienceOn
|
5 |
A. Hein, O. Dorcsh, E. Obermeier, Tech. Digest, 10th Int. Conf. on Solid-State Sensors and Actuators (Transducers'97) 687 (1997).
|
6 |
Jing Chen, Litian Liu, Zhijian Li, Zhimin Tan, Qianshao Jiang, Huajun Fang, Yang Xu, Yanxiang Liu, Sensors and Actuators A 96, 152 (2002).
DOI
ScienceOn
|
7 |
Theo Baum and David J Schiffrin, J. Micromech. Microeng. 7, 338 (1997).
DOI
|
8 |
http://cleanroom.byu.edu/KOH.phtml.
|
9 |
C. Kim, J.H. Lee, S.M. Choi, N.I. Cho, C. Hong, and G.E. Jang,, Sensors and Actuators B77, 455 (2001).
|
10 |
H. Park, K. Kim, and E. Lee, 2001, 28, The Magazine of the KITE 28, 1072 (2001).
|
11 |
H. Seidel, L. Csepregi, A. Heuberger H. Baumgartel,”J. Electrochem. Soc 137, 3612 (1990).
DOI
|
12 |
M. Elwenspoek, J. Electrochem. Soc. 140, 2075 (1993).
DOI
|