• Proceedings of the Korea Contents Association Conference
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• 2014.11a
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• pp.75-76
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• 2014

본 연구는 국토 공간정보 기반으로 새로운 위성측량 기술과 USN 측정기술을 접목하고 구체적인 AGS 공법과 같은 그라우팅 기술의 적용으로, 방재를 필요로 하는 주요 수리시설물에 대한 정밀한 변위와 거동을 모니터링 할 수 있는 첨단기술의 개발 및 적용은 국가적으로 매우 중요한 과제이며 실용성이 높은 기술연구이다. 외부공간에서의 GNSS 위성측위 방식의 초정밀의 위치변위를 실시간으로 추적하고 그에 영향을 주는 환경인자인 온도, 습도, 조도, 이산화탄소, 질소, 함수비, 소음진동 등은 무선 USN에 의하여 실시간으로 동시에 수집하여 통합적으로 분석 적용하여 방재시설의 적절한 대응시기를 찾아낼 수 있을 것으로 판단되며, 특히 정밀한 변위 관측을 필요로 하는 안전진단 및 방재를 필요로 하는 시설물 안전관리 분야에서 다방면으로 크게 활용할 수 있는 방안을 모색하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1041-1044
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• 2002

Inchworm linear motor is one of the ultra precision position apparatuses and has many kinds of forms and structures according to the conditions of working space and range. In this paper, the Inchworm linear motor consists of three PZTs(Piezo-electric transducer), three columns ma two plates. finite element method was used to determine the type or hinges installed in column of inchworm linear motor DOE(Design of experiment) was used to determine the optimal design condition of a column by comparing the von-mises stresses according to the change of thickness of hinge, round of hinge, height of arm, angle of v-notch, round of v-notch and thickness of column. From the result, round of hinge, height of arm and thickness of hinge were determined a effective design parameters.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.7
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• pp.87-94
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• 2008

The displacement sensor using optical pickup head is presented. The measuring principle of optical pickup head in focusing direction is adopted to measure displacement. The preliminary tests were carried out to verify the feasibility of the optical pickup head as a displacement sensor and optical pickup head showed about $8\;{\mu}m$ measuring range and 10nm resolution. The methodology to expand measuring range is proposed and proved its validity. The proposed displacement sensors are applied to AFM(Atomic Force Microscope) probe head to measure the deflection of micro-cantilever.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.86-93
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• 2005

In this paper, we discuss the merits of mechanical machining to generate micro features on large surfaces. An overseas technology trend related to the micro machining and dedicated machinery is also presented. We provide an overview of what characteristics the machinery is required to have to generate micro features on large surfaces and what kind of technical barriers need to be overcome to put the technology to practical use.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Proceedings of the KSRS Conference
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• 2009.03a
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• pp.46-52
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• 2009

TerraSAR-X 자료를 이용하여 고해상 X-밴드 SAR 시스템을 이용한 조간대 적용 가능성을 시험하였다 연구대상지역은 강화도 남단과 영종도를 잇는 조간대이며, 단일편파자료와 이중편파자료를 이용하였다. 연구내용은 다음과 같은 세 가지로 분류된다. 첫째, X-밴드 영상에서의 연안의 레이더 반사도 특성 연구 및 waterline 추출 정밀도를 평가하였다. 연안지역의 wateline은 HH 편광자료의 레이더 반사도 특성을 통하여 추출하였을 때 가장 신뢰도가 높았으며, TerraSAR-X 시스템의 짧은 파장과 높은 제도정밀도로 인하여 정밀한 지리좌표로의 변환이 가능하였다 연구지역의 조간대 지형 경사도는 평균적으로 수평방향으로 60m당 20cm의 고도변화를 가지므로, TerraSAR-X HH 편광자료를 이용한 waterline 추출은 정밀한 조간대 DEM 추출로 응용될 수 있다. 둘째, 이중편파자료의 편파특성을 이용한 조간대 염생식물의 산란특성 관측하였다. 조간대에서 수륙의 경계부에서 잘 관측되는 칠면초와 같은 염생식물은 해수면변화에 따른 조간대의 육지화를 모니터링 하는데 좋은 표적이 된다. TerraSAR-X 이중편파자료의 산란특성을 이용한 염생식물 관측결과는 2007년에 현장에서 취득된 실측자료와 비교하여 3dB 이내의 정밀도로 일치하였다 셋째, 단일편파 자료의 레이더 간섭기법을 이용한 조간대 DEM 작성 시도하였다. 조간대 내에서 육지화가 진행된 지역은 표면에 염생식물이 발달하였음에도 불구하고 높은 간섭긴밀도를 나타내었다. 레이더 간섭기법을 통한 DEM의 제작은 일반적인 조간대에서는 적용이 제한적이며, TanDEN-X의 적용이 필요하다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.36 no.9
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• pp.916-922
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• 2008

Structures being used in space environment, should be designed to have minimum CTE(coefficient of thermal expansion) for the dimensional stability. Accurate CTE data of the materials are required to design the space structures consisting of various materials. There are uncertainties in the characteristics of materials even though the same manufacturing processes are applied. Therefore, it is needed to measure the thermal deformation of not only the material specimen but also substructures in simulated space environment, such as high vacuum condition. In this research, therefore, precise CTE measurement system using displacement measuring interferometer and vacuum chamber has been designed with uncertainty analysis of the measurements. This system can be used to measure the CTE of the specimen or thermal expansion of the substructure with varying size up to 50cm in length. To measure the low CTE material, overall uncertainty of this system is expected under 0.01ppm/K.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.3
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• pp.324-330
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• 2013

This paper describes a novel method to surface large optics mirror with an extremely high hardness, which could replace the high cost of the repetitive off-line measurement steps and the large ultra-precision grinding machine with ultra-positioning control of 10 nm resolution. A lot of diamond pellet to be attached on the convex aluminum base consists of a grinding tool for the concave large mirror, and the tool was pressured down on the large mirror blank. The tool motion at an interval on the spiral path was controlled with each feed rate as the dwell time in the conventional computer-controlled polishing. The shape to be surfaced was measured directly by a touch probe on the machine without any separation of the mirror blank. Total 40 iterative steps of the surfacing and measurement could demonstrate the form error of RMS $7.8{\mu}m$, surface roughness of Ra $0.2{\mu}m$ for the mirror blank with diameter of 1 m and spherical radius of curvature of 5400 mm.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.135-141
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• 2005

Measurement of five DOF motion errors in a ultra precision feed table was attempted in this study. Yaw and pitch error were measured by using a laser interferometer and roll error was measured by using the reversal method. Linear motion errors in the vertical and horizontal directions were measured by using the sequential two point method. In this case, influence of angular motion errors was compensated by using the previously measured ones by the laser interferometer and the reversal method. The capacitive type sensors and an optical straight edge were used in the reversal method and the sequential two point method. Influence of thermal deformation on sensor jig was investgated and minimized by the periodic measurement according to the variation of room temperature. Deviation of gain between sensors was also compensated using the step response data. 5 DOF motion errors of a hydrostatic table driven by the linear motor werer tested using the measurement method. In the horizontal direction, measuring accuracies for the linear and angular motion were within ${\pm}0.02\;{\mu}m$ and ${\pm}0.04$ arcsec, respectively. In the vertical direction, they were within ${\pm}0.02{\mu}m$ and ${\pm}0.05$ arcsec. From these results, it was found that the introduced measurement method was very effective to measure 5 DOF motion errors of the ultra precision feed tables.