• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.291-295
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• 1996

This paper discusses several design factors of a capacitance displacement sensor with a numerical method and several experiments and describes guide lines of the design of this type sensor. We introduce the charge density method for the analysis of this type sensor, which has feasible accuracy and efficiency. The analysis of this type sensor with the charge density method agrees with displacement sensitivity experiments of a circular plate capacitance sensor with the sensor amp based In the charge transfer principle.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.05a
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• pp.150-155
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• 2006

PZT는 높은 분해능을 구현할 수 있는 구동기이지만 그 구동 범위가 협소하다는 단점이 있다. 최근에는 이러한 단점을 극복하기 위한 여러가지 메커니즘들이 제안되고 있다. 본 논문에서는 PZT를 이용하여 넓은 범위의 높은 분해능을 갖는 회전형 스테이지를 개발하였다. 개발되어진 회전형 스테이지는 빔 형태의 예압구조를 이용하였으며 일정한 마찰력을 구현하기 위하여 알루미나와 오닉스를 사용하였다. 대 변위와 미소변위를 동시에 구동하기 위하여 Dual mode control을 적용하였다. 또한 레이지 간섭계를 이용하여 구동기의 최대속도와 분해능을 측정하였으며 Sinsweep를 이용하여 구동기의 주파수 응답을 구하였다.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.11
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• pp.110-117
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• 1997

This paper discusses numerically and experimenally several design parameters for the plate- type capacitive displacement sensor. The influenences of shape of this sensor on the sensitivity are numerically analyzed with the charge density method. Using many test sensor plates of different shape for verifing the validity of this method can not guarantee the repetibility of experiments. Therefore we made specially the test sensor plate so that experiments of effects of shape of this sensor on sensitivity can be done with only that plate. Results from these experiments agree well with those from numerical analysis.

• Journal of Korean Society of Disaster and Security
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• v.14 no.1
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• pp.41-50
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• 2021

As a method of predicting the displacement of river levee in advance, Differential Interferometry (D-InSAR) kind of InSAR techniques was used to identify weak points in the area of the levee collapes near Gumgok Bridge (Somjin River) in Namwon City, which occurred in the summer of 2020. As a result of analyzing the displacement using five images each in the spring and summer of 2020, the Variation Index (V) of area where the collapse occurred was larger than that of the other areas, so the prognostic sysmptoms was detected. If the levee monitoring system is realized by analyzing the correlations with displacement results and hydrometeorological factors, it will overcome the existing limitations of system and advance ultra-precise, automated river levee maintenance technology and improve national disaster management.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.7
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• pp.4405-4410
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• 2015

Two-dimensional displacements are obtained from the sandwiched patterns, which superpose two linearly-periodic patterns orthogonally, respectively. The transparent top pattern is identified by deflection of the laser beam due to a difference of refractivity and the opaque bottom pattern is identified by deviation of the beam intensity due to a difference of reflectance. In the sample setup, the top pattern made up of build-up film is manufactured by UV laser machining and the bottom pattern is manufactured by ultra-precision trench machining and deposition for aluminum plate. The proposed decoding method is verified experimentally using the $10{\mu}m$ equally spaced sample patterns and the devised optical system. The Korea Academia-Industrial cooperation Society.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.6
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• pp.703-713
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• 2011

In this study, to minimize trial and error in the design and manufacturing processes of a high-precision large-surface micro-grooving machine which is able to fabricate the molds for 42 inch LCD light guide panels, the effects of the structural deformation of the micro-grooving machine according to the positions of the X-axis, Y-axis and Z-axis feed systems were examined on the tool tip displacement errors associated with the machining accuracy. The virtual prototype (finite element model) of the micro-grooving machine was constructed to include the joint stiffnesses of the hydrostatic bearings, hydrostatic guideways and linear motors, and then the tool tip displacement errors were measured from the virtual prototype. Especially, to establish the prediction model of the tool tip displacement errors, which was constructed using the positions of the X-axis, Y-axis and Z-axis feed systems as independent variables, the response surface method based on the central composite design was introduced. The reliability of the prediction model was verified by the fact that the tool tip displacement errors obtained from the prediction model coincided well those measured from the virtual prototype. And the causes of the tool tip displacement errors were identified through the analysis of interactions between the positions of the X-axis, Y-axis and Z-axis feed systems.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.2
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• pp.35-44
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• 2009

Long stroke Fast Tool Servo (LFTS) with maximum stroke of $432{\mu}m$ is designed, manufactured and tested for fabrication of optical free-form surfaces. The large amount of stroke in LFTS has been realized by utilizing the hinge and lever mechanisms which enable the displacement amplification ratio of 4.3. In this mechanism the peculiar shape was devised for maximizing the displacement of end tip in LFTS and special mechanical spring has been mounted to provide the sufficient preload to the piezoelectric actuator. Also, its longitudinal motion of tool tip can be measured by capacitive type displacement sensor and closed-loop controlled to overcome the nonlinear hysteresis. In order to verify the static and dynamic characteristics of designed LFTS, several features including step response, frequency response and cut-off frequency in closed-loop mode were experimentally examined. Also, basic machining result shows that the proposed LFTS is capable of generating the optical free-form surface as an additional axis in diamond turning machine.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.8
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• pp.29-36
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• 2008

An optical rotary encoder is easy to implement for automation system applications. In particular, the output of the encoder has a digital form pulse, which is also easy to be connected to a popular digital controller. By using an incremental encoder and a counting device, it is easy to measure angular displacement, as the number of the output pulses is proportional to the rotational displacement. This method can only detect the angular placement once a pulse signal comes out of the encoder. The angular displacement detection period is strongly subject to the change of the angular displacement in case of ultimate low velocity range. They have ultimate long detection period or cannot even detect angular displacement at near zero velocity. This paper proposes an algorithm for detecting angular displacement by using a dual encoder system with two encoders of normal resolution. The angular displacement detecting algorithm is able to keep detection period moderately at near zero velocity and even detect constant angular displacement within nominal period. It is useful for motion control applications in case of changing rotational direction at which there occurs zero velocity. In this paper, various experimental results are shown for the angular displacement detection algorithm.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.6
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• pp.80-86
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• 2001

This paper proposes a precision displacement measuring method of detecting fringe movement of interferograms with a nanometric resolution. It is well known that the laser interferometer plays a useful and essential role in scientific and industrial application, but they have such error sources as an unequal gain of detectors, imbalanced beams, and lack of quadrature. These error sources degrade the accuracy of the interferometer. However, the fringe movement of interferograms has little relation with these error sources. In order to investigate performance of the proposed method. analysis and simulation were executed over random noise and wavefront distorion. Results of the simulation show that the proposed method is robust against these errors. Experiment was implemented to verify this method.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.8
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• pp.40-47
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• 2001

Optical measurement methods make it possible to detect object displacements with high resolution and noncontact measurements. Also, they are very robust against EMI noises and have long operation range. An optical triangulation sensor is one of widely used displacement measurement sensors for its sub-micron resolution, fast response, simple structure, and low cost. However. there are several errors caused by inclinations of a surface. speckle effects, power fluctuations of light sources, and noises of detectors. In this paper, in order to minimize error effects, we performed error analysis and proposed a new structure. Then, we setup a new modeling method and verify it through simulations and experiments. Based on the new model. we propose a new sensor structure and establish design criteria. Finally, we design a signal processing system to overcome a resolution-limited problem of light detectors. The resolution of the proposed system is 0.2${\mu}{\textrm}{m}$ in 5mm operating range.