• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.58.2-58.2
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• 2010

FPD (Flat Panel Display) 제조 공정에서 사용되는 패턴은 수 ${\mu}m$ 수준까지 감소하였으며, FPD의 크기는 급격하게 대형화 되여 현재 8세대(2200mm*2500mm)에 이르고 있다. 이에 따라, $1\;{\mu}m$ 이상의 크기를 갖는 오염입자에 의한 수율 저하를 극복하기 위한 세정효율의 향상 및 다량의 초순수 사용에 따른 폐수 발생으로 인한 환경오염, 또한 장비의 크기에 따른 공간 효용성 감소와 이에 따른 공정 비용의 증가 등의 어려움에 직면하고 있다. 따라서, 현장에서는 고효율, 저비용의 세정 공정 기술 개발에 대한 연구가 활발히 진행되고 있다. 이러한 문제점들을 해결 하고자 이류체 노즐 세정 장치와, 화학액 린스를 위한 초순수 Spray, 건조 공정에 해당하는 Air-knife, Halogen lamp로 구성된 소형화 된 고속 FPD(Flat Panel Display) 세정기에 대한 연구를 진행 하였다. 이류체 노즐은 초순수와 $N_2$ 가스를 내부에서 혼합하여 액적(Droplet)을 형성하여 고압으로 분사시키는 장치로서 화학액을 사용하지 않고 물리적인 방법으로 오염입자를 제거한다. Spray는 유기 오염입자 제거를 위한 오존수의 린스 공정을 위해 설치 하였다. 세정 후 표면에 남아있는 기판의 액막(water film)은 고압의 가스를 분사하는 Air-knife를 통해 제거하였으며, 고속 공정시 발생할 수 있는 Air-knife에서 제거하지 못한 잔류 액막을 Halogen lamp를 사용하여 효과적으로 제거함으로써, 물반점(water mark) 없는 건조 공정을 얻을 수 있었다. 실험에는 미세 입자의 정량적인 측정을 위하여 유리 기판 대신에 6인치 실리콘 웨이퍼(P-type (100))를 사용하였으며, > $\;1{\mu}m$ 실리카 입자를 스핀방식을 사용하여 정량적으로 균일하게 오염하였으며, 오염물의 개수 및 분포는 파티클 스캐너 (Surfscan 6200, KLA-Tancor, USA)를 사용하여 분포 및 개수를 정량적으로 측정 하였다. 이류체 노즐은 $N_2$ 가스의 압력과 초순수의 압력을 변화시켜 측정하여, 각각 0.20 MPa, 0.01 MPa에서 최적의 세정 결과를 얻을 수 있었으며, 건조 효율은 Air-Knife의 입사 각도와 건조면 간격, 할로겐 램프의 온도를 조절 하여 최적의 조건을 얻을 수 있었다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.9
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• pp.518-525
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• 2018

In the 21st century, human beings are becoming increasingly concerned about greenhouse gas emissions as the environment changes due to climate change become serious. The temperature of Korea has risen by approximately $1.5^{\circ}C$ from 1904 to 2000, and the climate is changing gradually to a subtropical climate. As a result, the frequency of floods and droughts increases, so that the water available to humans is decreasing every year, and the cost of using city water is rising every year. The reuse of wastewater that is normally abandoned is inevitable. This study examined the monthly data for 6 months of operation by installing a reuse system of concentrated wastewater (Re R/O System) that is generated during the process of manufacturing de-ionized water (DI-Water System) used in semiconductor processing. As a result of the survey, the city water supply saved approximately $2,767m^3$ per month. The average annual greenhouse gas emissions was $1,329.07kg-CO_2$ per month due to the electricity consumption of the water reuse system. On the other hand, because of the reduction in city water supply, the average monthly average of $918.64kg-CO_2$ was reduced, and the greenhouse gas emissions were increased to $410.43kg-CO_2$ per month. If it improves some processes in the water reuse system, the amount of greenhouse gas emissions can be reduced by an average of $254.41kg-CO_2$ per month.

• Clean Technology
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• v.8 no.4
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• pp.205-215
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• 2002

Can industry has grown up with growth of packing industry and its recycling activation in recent years. But profit has became low by oversupply. Therefore, can industry needs a reduction of environmental load and official loss by an optimization of process in order to maintain its competitiveness. In this study, the main issues of aluminium can production was investigated by life cycle assessment. As a result of LCA, it examined closely by main issues that reduce defective cans and remove tramp oil. In the present work, it was recommended that setup of R/O system, sterillizing tramp oil separation, and heating system of DI water. The ROI investigated 6.4 months. The operating cost with the advanced processes could be reduced annually by 300 million won.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.596-601
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• 2006

Because of insufficiency of energy resources and pollution of environment, it is necessary to develop alternative energy sources. Nuclear fission energy is used widely for source of electric Power but being restricted due to radioactivity problem. Nuclear fission is highlighted as the new generation of nuclear energy and researched worldwide because of low risk of radiation effect. The representatives of fusion research is China's EAST, KSTAR of Korea and ITER of world. Korea Superconducting Tokamak Advanced Research(KSTAR) project is on progress for the completion in August, 2007. In this study, the research of utility system for KSTAR be carried out. The utility system of KSTAR is consist of water cooling & heating system, $N_2$ gas system, DI water system, service water system and instrument air & auto control system. The progress of KSTAR utility system is under commissioning state after construction completion. The optimal operation scenario will be verified during commissioning and adopted to the KSTAR operation.

• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.55-59
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• 2010

In this study, we developed nonvolatile residue (NVR) real-time monitoring system to measure the nonvolatile residue particle in ultra pure water (UPW). This device has a capability of measuring 4 different channels, i.e., 10 nm, 30 nm, 50 nm, and 100 nm. Until now, the light scattering method to detect RAE(residue after evaporation) was the only choice. However, this method can detect RAE larger than ca. 50 nm. In ultra pure water, RAE particles are usually very small and hard to detect with conventional laser scattering devices. To detect very small RAEs, a new system is developed and tested. The system consists of an atomizer that generates RAE particles and a four channel condensation particle counter (CPC). During the several months' operation in manufacturing line, the system was successfully tested and showed reliable results.

• Membrane Journal
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• v.18 no.2
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• pp.109-115
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• 2008

To remove total dissolved solid (TDS) from wastewater, a carbon membrane system was prepared, using carbon membranes made from conductive activated carbon and poly(vinylidene fluoride) (PVDF). Using 100 ppm aqueous solutions of NaCl, $Na_2SO_4,\;MgCl_2,\;MgSO_4$, the basic properties of the carbon membranes used were studied. For the treatment of the real dye wastewater supplied from Kyungin Corp., a pilot scale carbon membrane system was also prepared, which was consisted of 240 plies of carbon membranes of $20cm{\times}20cm$ (length${\times}$width). Using the real wastewater with different TDS such as 941, 2050, 2810, 3830, 4960, 6030 ppm, prepared by the dilution of the original wastewater with pure water, the performance of the pilot scale carbon membrane system was studied. The effect of the operational conditions was studied.

• Korean Journal of Soil Science and Fertilizer
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• v.43 no.3
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• pp.374-383
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• 2010

Microwave radar can penetrate cloud cover regardless of weather conditions and can be used day and night. Especially a ground-based polarimetric scatterometer has advantages of monitoring crop conditions continuously with full polarization and different frequencies. Kim et al. (2009) have measured backscattering coefficients of paddy rice using L-, C-, X-band scatterometer system with full polarization and various angles during the rice growth period and have revealed the necessity of near-continuous automatic measurement to eliminate the difficulties, inaccuracy and sparseness of data acquisitions arising from manual operation of the system. In this study, we constructed an X-band automatic scatterometer system, analyzed scattering characteristics of paddy rice from X-band scatterometer data and estimated rice growth parameter using backscattering coefficients in X-band. The system was installed inside a shelter in an experimental paddy field at the National Academy of Agricultural Science (NAAS) before rice transplanting. The scatterometer system consists of X-band antennas, HP8720D vector network analyzer, RF cables and personal computer that controls frequency, polarization and data storage. This system using automatically measures fully-polarimetric backscattering coefficients of rice crop every 10 minutes. The backscattering coefficients were calculated from the measured data at a fixed incidence angle of $45^{\circ}$ and with full polarization (HH, VV, HV, VH) by applying the radar equation and compared with rice growth data such as plant height, stem number, fresh dry weight and Leaf Area Index (LAI) that were collected at the same time of each rice growth parameter. We examined the temporal behaviour of the backscattering coefficients of the rice crop at X-band during rice growth period. The HH-, VV-polarization backscattering coefficients steadily increased toward panicle initiation stage, thereafter decreased and again increased in early-September. We analyzed the relationships between backscattering coefficients in X-band and plant parameters and predicted the rice growth parameters using backscattering coefficients. It was confirmed that X-band is sensitive to grain maturity at near harvesting season.

• Proceedings of the KSRS Conference
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• 2009.03a
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• pp.40-45
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• 2009

본 연구에서는 기후 등의 영향을 받지 않고 레이더 산란 측정을 할 수 있는 X-band antenna 기반의 자동관측 시스템을 이용하여 벼 생육시기에 따른 후방산란계수와 벼 생육인자와의 관계를 분석하여 후방산란계수를 이용한 벼 생육인자를 추정한 것을 목적으로 하였다. 2008년도 국립농업과학원 시험포장 ($37^{\circ}$15'28.0"N, $126^{\circ}$59'21.5"E)에서 추청벼를 대상으로 생육시기별 후방산란계수를 관측하였는데 모든 편파별 후방산란계수가 벼 유수형성기 (7월 말경)까지 증가하다가 그 후 감소하다가 수확기가 가까워지는 9월 중순이후 다시 증가하는 dual-peak 현상을 보였고 특히 W-편파의 경우 9월 초순부터 후방산란계수 증가가 다른 polarization에 비해 크게 나타났다. 후방산란계수와 작물생육인자와의 관계를 분석한 결과 고주파수인 X-band는 상대적으로 바이오메스, 엽 면적지수와의 상관이 낮게 나타났지만 이삭 건물중은 VV-편파 후방산란계수와 상관관계를 보였다. 이삭 건물중과 상관관계가 높게 나타난 X-band의 W-편파 후방산란계수를 이용하여 수확기 이삭 건물중을 추정하였는데 VV-편파 후방산란계수와 이삭 건물중과는 결정계수 $(R^2)$가 0.85이었고, 이삭 건물중 실측값과 추정값을 비교해 본 결과 1:1 line에 근접하게 분포하였다 ($R^2$=0.85).

• Korean Journal of Ecology and Environment
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• v.37 no.3 s.108
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• pp.344-354
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• 2004

A pilot study was performed from September 2000 to April 2004 to examine the feasibility of the wetland-pond system for the agricultural reuse of reclaimed water. The wetland system was a subsurface flow type, with a hydraulic residence time of 3.5 days, and the subsequent pond was 8 $m^3$ in volume (2 m ${\times}$ 2 m ${\times}$ 2 m) and operated with intermittent-discharge and continuous flow types. The wetland system was effective in treating the sewage; median removal efficiencies of $BOD_5$ and TSS were above 70.0%, with mean effluent concentrations of 27.1 and 16.8 mg $L^{-1}$, respectively, for these constituents. However, they did often exceed the effluent water quality standards of 20 mg $L^{-1}$. Removal of T-N and T-P was relatively less effective and mean effluent concentrations were approximately 103.2 and 7.2 mg $L^{-1}$, respectively. The wetland system demonstrated high removal rate (92 ${\sim}$ 90%) of microorganisms, but effluent concentrations were in the range of 300 ${\sim}$ 16,000 MPN 100 $mL^{-1}$ which is still high for agricultural reuse. The subsequent pond system provided further treatment of the wetland effluent, and especially additional microorganisms removal in addition to wetland-pond system could reduce the mean concentration to 1,000 MPN 100 $mL^{-1}$ from about $10^5$ MPN 100 $mL^{-1}$ of wetland influent. Other parameters in the pond system showed seasonal variation, and the upper layer of the pond water column became remarkably clear immediately after ice melt. Overall, the wetland system was found to be adequate for treating sewage with stable removal efficiency, and the subsequent pond was effective for further polishing. This study concerned agricultural reuse of reclaimed water using natural systems. Considering stable performance and effective removal of bacterial indicators as well as other water quality parameters, low maintenance, and cost-effectiveness, wetland- pond system was thought to be an effective and feasible alternative for agricultural reuse of reclaimed water in rural area.

• Korean Journal of Plant Resources
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• v.8 no.1
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• pp.71-80
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• 1995

In order to establish utilijzation of medicinal herb as vegetable by Hadroponcis, the present studies were conducted to inverstigate the experiment on year-round Production of medicinal herb. The results obtained are summaried as follows: Among Planting date, April 5 Planting date obtained the highest yield of Scutellariae Radix and Agastache rugosa Folium. Treatment of $10\times5cm$(200 Plant/$m^2$) among Planting densities showed the highest yield of Scutellariae Radix and Agastache rugosa Folium. Plant height was thick in spacious planting, and was thin dense planting. Stem diameter was thick in spacious planting, and was thin in dense planting. Quality and yield of fresh weight ware highest in optimum planting densities($10\times5cm$ : 200 plants/$m^2$).