• Nuclear Engineering and Technology
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• v.20 no.3
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• pp.170-178
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• 1988

An automated ultrasonic flaw detection system was developed for thin-walled and short tubes such as Zircaloy-4 tubes used for cladding heavy-water reactor fuel. The system was based on the two channels immersion pulse-echo technique using 14 MHz shear wave and the specially developed helical scanning technique, in which the tube to be tested is only rotated and the small water tank with spherical focus ultrasonic transducers is translated along the tube length. The optimum angle of incidence of ultrasonic beam was 26 degrees, at which the inside and outside surface defects with the same size and direction could be detected with the same sensitivity. The maximum permissible defects in the Zircaloy-4 tubes, i.e., the longitudinal and circumferential v notches with the length of 0.76mm and 0.38mm, respectively and the depth of 0.04 mm on the inside and outside surface, could be easily detected by the system with the inspection speed of about 1 m/min and the very excellent reproducibility. The ratio of signal to noise was greater than 20 dB for the longitudinal defects and 12 dB for the circumferential defects.

• The Journal of the Acoustical Society of Korea
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• v.42 no.5
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• pp.469-490
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• 2023

Survey was carried out on the acoustic outputs from 12 shock wave fields produced by the 10 extracorporeal shock wave lithotriptors whose technical documents are available, among the 33 devices approved by the Ministry of Food & Drug Safety (MFDS).The results show that the acoustic outputs (P+, P-, efd, and E), critical to the therapeutic efficacy and the patient safety, are largely different between the devices. The maximum values of P+, P-, efd, and E vary up to 2.08, 3.72, 3.89, and 15.98 times, respectively. The acoustic output parameters are not thoroughly provided in the technical documents, and some of data (eg. efd) are suspected to be abnormal outside usual ranges. The large device to device differences in the shock wave outputs are likely to undermine equivalence between the ESWL devices approved for the same indication. To verify the reliability of the data in the technical documents of the approved devices and to confirm if the acoustic outputs from the devices in clinical use are the same as those in their technical documents, an authorized test laboratory should be available. A postapproval monitoring led by the regulatory agency is suggested to maintain the acoustic outputs from the ESWL devices that suffer from degrading in performance due to aging.

• Journal of the Korean Society for Nondestructive Testing
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• v.14 no.2
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• pp.112-121
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• 1994

This paper discusses the feasibility of ultrasonic C-scan technique for nondestructive evaluation of spot weld quality. Ultrasonic evaluation for spot weld quality was performed by immersion method with the mechanical and the electronic scanning of point-focussed ultrasonic beam(25 MHz). For the sake of the approach to the quantitative measurement of nugget diameter and the discrimination of the corona bond from nugget, preliminary infinitesimal gap experiment by newton ring is tried in order to set up the optimum ultrasonic test condition. Ultrasonic image data obtained were confirmed and compared by optical microscope and SAM(Scanning Acoustic Microscope) observation of the spot-weld cross section. The results show that the nugget diameter can be measured with the accuracy of 1.0mm, and voids included in nugget can be detected to $10{\mu}m$ extent with simplicity and accuracy. Finally, it was found that it is necessary to make a profound study of definite discrimination of corona bond from nugget and the approach of quantitative evaluation of nugget diameter by utilizing the various image processing techniques.

• Journal of the Korea Convergence Society
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• v.11 no.7
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• pp.157-162
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• 2020

In recent years, laser induced graphene process have been intensively studied for eco-friendly electronic device such as flexible electronics or thin film based energy storage devices because of its simple and effective process. In order to increase the performance and efficiency of an electronic device using such a graphene patterned structure, it is essential to study an optimized laser patterning condition as small as possible linewidth while maintaining the graphene-specific 2-dimensional characteristics. In this study, we analyzed to find the optimal line pattern by using a Ti:sapphire femtosecond laser based photo-thermal reduction process. we tuned intensity and scanning speed of laser spot for generating effective graphene characteristic and minimum thermal effect. As a result, we demonstrated the reduced graphene pattern of 30㎛ in linewidth by using a focused laser beam of 18㎛ in diameter.

• Journal of the Korean Society for Nondestructive Testing
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• v.35 no.5
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• pp.299-306
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• 2015

A conventional phased array system can control an ultrasonic beam electronically by adjusting the excitation time delay of individual elements in a multi-element probe and produce an ultrasonic image. In Contrast, full matrix capture (FMC) is a data acquisition process that allows receiving ultrasonic signals from one single shot of the phased array transducer element through all the other elements and captures the complete dataset from every possible transmit-receive combination. This FMC data can be used to create the ultrasonic image in post processing. It is possible to produce not only images equivalent to conventional phased array image but also total focusing method (TFM) images with improved resolution and sharpness, which is virtually focused at any point in a region of interest. In this paper, the system that can perform FMC by using a conventional phased array instrument is developed, and a study was conducted on the imaging algorithms to reconstruct sector B-scan and TFM images from FMC dataset.

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.5
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• pp.437-443
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• 2010

In recent years, as nano scale structured thin film technology has emerged in various fields such as the materials, biomedical and acoustic sciences, the quantitative nondestructive adhesion evaluation of thin film interfaces using ultra high frequency scanning acoustic microscopy(SAM) has become an important issue in terms of the longevity and durability of thin film devices. In this study, an effective technique for investigating the interfaces of nano scale structured thin film systems is described, based on the focusing of ultrasonic waves, the generation of leaky surface acoustic waves(LSAWs), V(z) curve simulation and ultra high frequency acoustical imaging_ Computer simulations of the V(z) curve were performed to estimate the sensitivity of detection of micro flaws(i.e., delamination) in a thin film system. Finally, experiments were conducted to confirm that a SAM system operating at a frequency of 1 GHz can be useful to visualize the micro flaws in nano structured thin film systems.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.402.2-402.2
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• 2014

과학과 기술이 발전할수록 나노크기를 넘어서 나노 크기미만의 관찰 분해능과 가공능력이 필수로 요구되어 측정장비와 가공장비의 연구 및 개발이 매우 중요하다. 현재는 주사전자현미경과 투과전자현미경의 발달로 나노크기 이하의 이미징 분해능에는 도달하였지만, 전자 입자의 가벼운 무게 때문에 가공측면에서는 한계를 가지고 있다. 또한 지난 수십 년간 정밀가공에 사용된 갈륨이온 LMIS(Liquid Metal Ion Source)기반의 집속이온빔 시스템은 수십 nm의 가공정밀도를 가지지만 10 nm 미만의 가공정밀도까지 구현하기에는 현재 기술적인 한계로 힘들다. 나노크기 이하의 이미징 분해능과 수 nm의 가공정밀도를 갖는 이온현미경이 최근에 상용화되어 판매되고 있는데, 이 이온 현미경에 사용되는 것이 가스장 이온원(GFIS:Gas Field Ionization Source)이다. 가스장 이온원은 작은 발산각, 작은 가상 이온원 크기 그리고 좁은 에너지 퍼짐의 특징을 가지며 이에 따라 구면수차 및 색수차에도 둔감한 특징을 가지고 있다. 또한 LMIS 는 갈륨이온이 시편속에 파고들어 시편의 물질 특성이 변화되는 문제가 있지만, GFIS에서는 주로 He, Ne 와 같은 불활성 기체를 주로 사용하므로 시편과 반응을 최소화 할 수 있는 장점도 있다. 위와 같은 특징을 갖는 이온빔을 GFIS 로 생성하고 이온현미경에 사용하기 위해서는 이온빔이 팁의 단원자 내지 수 개 정도의 원자에서 생성되도록 해야 한다. 본 연구에서는 GFIS 의 원리를 소개하고 장(전계)이온현미경(Field Ion Microscope)실험을 통하여 GFIS기반으로 생성된 이온빔의 형상을 보여준다. 또한 높은 각전류밀도 구현을 위하여 질소가스 에칭으로 텅스텐 팁 끝 단원자에서만 이온빔을 생성하고, 각전류 밀도 계산과 안정도 실험결과로 본 연구에서 개발한 이온원이 이온총으로서의 이온현미경 적용 가능성에 대해 보여준다.

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.4
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• pp.373-379
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• 2010

EMAT has been applied in various fields for flaw detection and material characterization because it has noncontact property in wave generation and a good mode selectivity. Unfortunately, however, EMAT shows low signal to noise ratio relative to commercial contact transducer because of low energy conversion efficiency. If the phase matching through the control of time delay between each coil consisting of the array EMAT is accomplished, it is expected that it will be a solution for the improvement of low signal to noise ratio. In this experiment, the phased array EMATs which consists of 3 or 4 meander coils and one big magnet were fabricated for surface and vertical shear wave generation. Effect of phased delay control on signal directivity and amplitude enhancement was verified. A slit with the depth of 0.5 mm and a side-drill hole of 0.5 mm diameter were clearly detected by fabricated phased array EMATs, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.35-35
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• 2011

반도체 공정 및 디스플레이 공정에서 발생하는 오염입자는 공정 불량을 일으키는 가장 큰 원인 중의 하나이며, 수십 나노에서 수 백 나노의 크기를 갖는다. 최근 디스플레이 및 반도체 산업이 발전함에 따라 회로의 선폭이 점차 감소하고 있으며 오염입자의 임계 직경(critical diameter) 또한 작아지고 있다. 현재 반도체 및 디스플레이 산업에서 사용되는 측정방법은 레이저를 이용하여 공정 후 표면에 남아있는 오염입자를 측정하는 ex-situ 방법이 주를 이루고 있다. Ex-situ 방법을 이용한 오염입자의 제어는 웨이퍼 전체를 측정할 수 없을 뿐만 아니라 실시간 측정이 불가능하기 때문에 공정 모니터링 장비로 사용이 어려우며 오염입자와 공정 간의 상관관계 파악에도 많은 제약이 따르게 된다. 이에 따라 저압에서 in-situ 방법을 이용한 실시간 오염입자 측정 기술 개발이 요구되고 있다. 본 연구에서는 저압 환경에서 실시간으로 입자를 모니터링 할 수 있는 장비를 입자의 광 산란 원리를 이용하여 개발하였으며, 산란 신호를 입자크기로 변환하는 신호 분석 알고리즘 연구를 수행하였다. 빛이 입자와 충돌하게 되면 산란 및 흡수 현상이 발생하게 되는데 이 때 발생하는 산란 및 흡수량과 입자 크기와의 연관성이 Gustav Mie에 의해서 밝혀졌으며, 현재까지 광을 이용한 입자 크기 분석 장치의 기본 원리로 사용되고 있다. 하지만, Mie 이론은 단일입자가 일정한 강도를 가진 광을 통과할 경우인 이상적인 조건에서 적용이 가능하고 실제 조건에서는 광이 가우시안 분포를 가지며 광 집속에 의해서 광 강도가 위치에 따라 변하기 때문에 이러한 조건을 가지는 광을 입자가 통과할 때 발생하는 산란량은 단순히 Mie 이론에 의해서 계산하는 것이 불가능 하다. 본 연구에서는 이러한 현상을 입자 측정의 불확정성 이라고 규정하고 입자가 특정한 위치를 통과할 확률을 이용하여 신호를 분석하는 알고리즘을 개발 및 연구를 수행하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.617-620
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• 1999

In this study, the polarization e(fecal and the birefringence effect of amorphous germanium (a-Ge) thin films were investigated by using linearly polarized He-Ne laser beam. The a-7e thin films were deposited on the quarts substrate by plasma enhanced chemical vapor deposition (PECVD) and thermal vacuum evaporation In order to obtain the optimum grating arrays, inorganci resists such as Si$_3$N$_4$ and a-Se$_{75}$ Ge$_{25}$ , were prepared with the optimized thickness by Monte Carlo (MC) simulation. As the results of MC simulation, the thickness ofa-Se$_{75}$ Ge$_{25}$ resist was determined with Z$_{min}$ of 360$\AA$ . The resists were exposed to Ga$^{+}$-FIB with accelerating energies of 50 keV, developed by wet etching, and a-Ge thin film was etched by reactive ion-etching (RIE). Finally, we were obtained grating arrays which grating width and linewidth are 0.8${\mu}{\textrm}{m}$, respectively and we studied the polarization and birefringence effect in transmission grating array made of high refractive amorphous material, and the applicability as waveplates and polarizers in optical device.e.e.