• Title/Summary/Keyword: 질화 지르코늄

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A Study on the Amorphization Reaction of the Co-Zr Multilayered Thin Film (Co-Zr 다층 박막의 저온 비정질화에 관한 연구)

  • 안지수;이병일;주승기
    • Journal of the Korean Magnetics Society
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    • v.6 no.3
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    • pp.170-173
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    • 1996
  • Co-Zr multilayered thin films were prepared by three-gun magnetron sputtering system and low temperature arrorphization was attempted. According to thin film X-ray and cross-sectional TEM analysis, it has been found that zirconium layer is arrorphized by diffusion of cobalt and the amorphization rate at the upper interface is two or three times faster than that at the lower interface of the zirconium layers. This new phenomenon is explained in terms of atomic mixing during sputtering.

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A Study on the Synthesis of Fine Zirconium Nitride Powder from Zirconium Chloride(IV) (염화지르코늄(IV)으로부터 질화지르코늄 미분체의 합성에 관한 연구)

  • 김영우;장윤식;박홍채;오기동
    • Journal of the Korean Ceramic Society
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    • v.25 no.2
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    • pp.184-190
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    • 1988
  • ZrN powder was prepared from the powder mixture of ZrCl4 and Al by the halogenide process in nitrogen gas flow (100-150ml/min) at the temperatures from 200$^{\circ}$to 1050$^{\circ}C$. ZrN powder was formed about 600$^{\circ}C$ and in the slow nitriding reaction, however, an intermediate product of Al3Zr was formed. The fine powder (0.1-10$\mu\textrm{m}$) of single phase ZrN was obtained at 1050$^{\circ}C$ after 1 hour. The lattice parameter and crystallite size of ZrN were 4.5787A and 360A, respectively. According to SEM observation, the particles were apt to agglomerates. The apparent activation energy for the formation of ZrN was approximately 13.2kcal/mole(750$^{\circ}$-1000$^{\circ}C$).

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A study on ZrN layer as a diffusion barrier between Cu and Si (Cu와 Si 사이에서 확산방지막으로 사용하기 위한 ZrN 층의 연구)

  • 김창조;김좌연;윤의중;이재갑
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.11a
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    • pp.21-24
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    • 1998
  • The properties of ZrN layer deposited by Sputtering system have been investigated in the application of diffusion barrier layer to copper. ZrN layer exhibited a excellent barrier property up to $700^{\circ}$ and higher resistivity. If an excess $O_2$is protected during the process of ZrN deposition, ZrN layer will be possible to use a diffusion barrier layer to copper.

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The effect of Zirconium Nitride coating on shear bond strength with denture base resin in Co-Cr alloy and titanium alloy (질화 지르코늄 코팅이 코발트 크롬 합금과 타이타늄 합금에서 의치상 레진과의 전단결합강도에 미치는 영향)

  • Park, Chan;Lee, Kyoung-Hun;Lim, Hyun-Pil
    • Journal of Dental Rehabilitation and Applied Science
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    • v.32 no.3
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    • pp.194-201
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    • 2016
  • Purpose: The purpose of this study was to evaluate of Zirconium Nitride (ZrN) coating on shear bond strength with denture base resin in Co-Cr and Ti-6Al-4V alloy. Materials and Methods: Co-Cr and Ti-6Al-4V alloy disks (10 mm in diameter, 2.5 mm in thickness; each other: n = 14) were prepared and divided with 2 groups each other by ZrN coating. After primer was applied to disks surface, denture base resin with diameter 6 mm, height 5 mm was bonded on metal disk surface. After surface roughness was measured by Profiler, shear bond strength was determined with Universal testing machine and analyzed with two-way ANOVA. The specimen surfaces and failure mode were examined using a scanning electron microscope. Results: ZrN coated groups showed significantly higher rough surface than non-coated groups (P < 0.05). Irrespective of alloy materials, shear bond strength of ZrN coated groups were lower than non-coated groups (P < 0.001). The scanning electron microscope (SEM) of ZrN coated groups showed mixed and adhesive fractures. Conclusion: ZrN coating weakened bonding strength between denture base resin and Co-Cr, Ti-6Al-4V alloy.

Evaluation of TiN-Zr Hydrogen Permeation Membrane by MLCA (Material Life Cycle Assessment) (물질전과정평가(MLCA)를 통한 TiN-Zr 수소분리막의 환경성 평가)

  • Kim, Min-Gyeom;Son, Jong-Tae;Hong, Tae-Whan
    • Clean Technology
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    • v.24 no.1
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    • pp.9-14
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    • 2018
  • In this study, Material life cycle evaluation was performed to analyze the environmental impact characteristics of TiN-Zr membrane manufacturing process. The software of MLCA was Gabi. Through this, environmental impact assessment was performed for each process. Transition metal nitrides have been researched extensively because of their properties. Among these, TiN has the most attention. TiN is a ceramic materials which possess the good combination of physical and chemical properties, such as high melting point, high hardness, and relatively low specific gravity, high wear resistance and high corrosion resistance. With these properties, TiN plays an important role in functional materials for application in separation hydrogen from fossil fuel. Precursor TiN was synthesized by sol-gel method and zirconium was coated by ball mill method. The metallurgical, physical and thermodynamic characteristics of the membranes were analyzed by using Scanning Electron Microscope (SEM), Energy Dispersive X-ray (EDS), X-ray Diffraction (XRD), Thermo Gravimetry/Differential Thermal Analysis (TG/DTA), Brunauer, Emmett, Teller (BET) and Gas Chromatograph System (GP). As a result of characterization and normalization, environmental impacts were 94% in MAETP (Marine Aquatic Ecotoxicity), 2% FAETP (Freshwater Aquatic Ecotoxicity), 2% HTP (Human Toxicity Potential). TiN fabrication process appears to have a direct or indirect impact on the human body. It is believed that the greatest impact that HTP can have on human is the carcinogenic properties. This shows that electricity use has a great influence on ecosystem impact. TiN-Zr was analyzed in Eco-Indicator '99 (EI99) and CML 2001 methodology.