• 마이크로전자및패키징학회지
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• 제26권1호
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• pp.17-21
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• 2019

본 논문에서는 공작기계 등에서 필요로 하는 진직도 측정시스템을 가시광의 레이저와 CMOS 이미지센서를 사용하여 저가로 구현하였다. CMOS 이미지센서를 이용하여 광이미지를 검출하고 영상처리를 통해 진직도 변화를 계산하였다. 레이저와 이미지센서의 거리를 3m로 하여 실험한 진직도 측정에서 오차가 0.9%로 우수함을 확인하였으며, 제작된 진직도 시스템은 3D 프린터 등 다른 응용분야에서도 사용 할 수 있을 것으로 생각된다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 추계학술대회 논문요약집
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• pp.288-288
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• 2003

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
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• pp.195-195
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• 2004

리니어 모터는 큰 이송속도와 정밀한 위치제어가 가능하여 고정밀도가 요구되는 분야에서 널리 사용되고 있으며, 이에 대한 연구도 활발히 진행되고 있다. 그 중 리니어 모터의 정밀도를 저해하는 요인 및 측정 방법에 대해서도 연구가 점차로 많이 진행되고 있으며, 현재 시스템이 가지고 있는 기하학적 오차에 관한 연구와 열변형에 관한 연구가 보고되었다. 특히 기하학적 오차는 가공물의 정밀도를 결정하는 중요한 지표이며, 가공된 물체를 결정하는 기본요소이기 때문에 가장 많이 연구되었으며, 이에 대한 다양한 해석 방법과 보상에 관한 연구가 이루어졌다.(중략)

• 한국정밀공학회지
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• 제31권12호
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• pp.1133-1139
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• 2014

This paper proposes a simple method to improve a sensitivity of a straightness measurement system for a linear stage, which is applied to a system based on a geometric optic method. An optical system for this method is composed of a corner-cube retro-reflector, a ball-lens and a twodimensional position sensitive detector (2D PSD). The effectiveness of the proposed method was examined theoretically, and verified experimentally using a prototype measurement system. The results show that the measuring sensitivity was dependent on the size of the ball-lens and the setup position of PSD from the ball-lens, and that the proposed method is efficient method to improve the measuring sensitivity.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.114-118
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• 2001

HP Laser Interferometer Measurement System[HP5529A] is one of the most powerful equipment for measurement of the motion accuracy. The straightness measurement system of the HP5529A is composed of wollastone prism and reflector. In this system, straightness error is measured by relative lateral motion between prism and reflector. But rotating motion of prism or reflector as moving optic causes not real straightness error but additive straightness error. Especially unwanted straightness error as this becomes very large when reflector is used as moving optic and an interval between reflector and prism is distant. In this paper, the compensation method is proposed for removing additive error and experiment is carried out for theoretical verification.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 추계학술대회 논문집
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• pp.269-270
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• 2007

• 한국공작기계학회논문집
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• 제11권1호
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• pp.83-90
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• 2002

As high-precision parts are needed with manufacturing techniques improved. the demand of high-precision machine tools has been increasing They are made to developed the precision measuring skill to maintenance the accuracy of themselves as a matter or course We one paper measured straightness and orthogonality of the square to verify that it is possible for CT(circular test) method by 2-dimensional probe and the square to measure orthogonality Furthemore we compared the result of the study with the computer simulation's to prove its possibility and made an improvement of measuring method.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.203-206
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• 2001

This paper presents a straightness measurement system for flat and long workpieces. The measurement system consists of a laser optical unit, a CCD camera and processing system, and a carrier system with a stylus. The carrier system accompanies the stylus, which displaces a retroreflector along the surface profile. The optical unit is used to optically amplify the displacement of retroreflector. The CCD camera and processing system finally identifies the vertical displacement of the stylus unit. The developed system is applied to two surfaces: ground surface and LM guide surface. The experimental results show that the developed system can measure the straightness of flat surfaces within sub-micron error.

• 한국정밀공학회지
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• 제17권5호
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• pp.124-130
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• 2000

For measuring out the submicron order straightness, a precision measuring device is developed in this paper. The device is constructed with a hydrostatic feed table and a capacitive type sensor which is mounted to the feed table. Straightness is acquired as substracting the motion error of feed table from the measured profile with probe. Motion error of feed table is simultaneously compensated upto 0.120${\mu}{\textrm}{m}$ of linear motion error and 0.20arcsec of angular motion error using the active controlled capillary. Reversal method and strai호t-edge is used fur estimating the measuring accuracy and from the experimental result, it is verified that the device has the measuring accuracy 0.030m. Also, through the practical application on the measurement of ground surface, it is confirmed that the device is very effective to measure the submicron order straightness.

• 한국정밀공학회지
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• 제19권3호
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• pp.107-113
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• 2002

This paper presents a straightness measurement system for flat and long workpieces. The measurement system consists of a laser, a CCD camera and processing system, a carrier system with a stylus, and some optical units. The carrier system accompanies the stylus, which displaces and retroreflector along the surface profile. The optical unit is used to optically amplify displacement of the stylus unit. The developed system is applied to a ground surface and a LM guide unit. The experimental results show that the developed system can measure the straightness of flat surface and moving systems.