• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
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• pp.195-195
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• 2004

리니어 모터는 큰 이송속도와 정밀한 위치제어가 가능하여 고정밀도가 요구되는 분야에서 널리 사용되고 있으며, 이에 대한 연구도 활발히 진행되고 있다. 그 중 리니어 모터의 정밀도를 저해하는 요인 및 측정 방법에 대해서도 연구가 점차로 많이 진행되고 있으며, 현재 시스템이 가지고 있는 기하학적 오차에 관한 연구와 열변형에 관한 연구가 보고되었다. 특히 기하학적 오차는 가공물의 정밀도를 결정하는 중요한 지표이며, 가공된 물체를 결정하는 기본요소이기 때문에 가장 많이 연구되었으며, 이에 대한 다양한 해석 방법과 보상에 관한 연구가 이루어졌다.(중략)

• 마이크로전자및패키징학회지
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• 제26권1호
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• pp.17-21
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• 2019

본 논문에서는 공작기계 등에서 필요로 하는 진직도 측정시스템을 가시광의 레이저와 CMOS 이미지센서를 사용하여 저가로 구현하였다. CMOS 이미지센서를 이용하여 광이미지를 검출하고 영상처리를 통해 진직도 변화를 계산하였다. 레이저와 이미지센서의 거리를 3m로 하여 실험한 진직도 측정에서 오차가 0.9%로 우수함을 확인하였으며, 제작된 진직도 시스템은 3D 프린터 등 다른 응용분야에서도 사용 할 수 있을 것으로 생각된다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.114-118
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• 2001

HP Laser Interferometer Measurement System[HP5529A] is one of the most powerful equipment for measurement of the motion accuracy. The straightness measurement system of the HP5529A is composed of wollastone prism and reflector. In this system, straightness error is measured by relative lateral motion between prism and reflector. But rotating motion of prism or reflector as moving optic causes not real straightness error but additive straightness error. Especially unwanted straightness error as this becomes very large when reflector is used as moving optic and an interval between reflector and prism is distant. In this paper, the compensation method is proposed for removing additive error and experiment is carried out for theoretical verification.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.203-206
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• 2001

This paper presents a straightness measurement system for flat and long workpieces. The measurement system consists of a laser optical unit, a CCD camera and processing system, and a carrier system with a stylus. The carrier system accompanies the stylus, which displaces a retroreflector along the surface profile. The optical unit is used to optically amplify the displacement of retroreflector. The CCD camera and processing system finally identifies the vertical displacement of the stylus unit. The developed system is applied to two surfaces: ground surface and LM guide surface. The experimental results show that the developed system can measure the straightness of flat surfaces within sub-micron error.

• 한국정밀공학회지
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• 제22권9호
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• pp.69-76
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• 2005

The laser interferometer system such as HP5529A is one of the most powerful equipment fur measurement of the straightness error in precision stages. The straightness measurement system, HP5529A is composed of a Wollaston prism and a reflector. In this system, the straightness error is defined as relative lateral motion change between the prism and the reflector and computed from optical path difference of two polarized laser beams between these optics. However, rotating motion of the prism or the reflector used as a moving optic causes unwanted straightness error. In this paper, a compensation method is proposed for removing the unwanted straightness error generated by rotating the moving optic and an experiment is carried out for theoretical verification. The result shows that the unwanted straightness error becomes very large when the reflector is used as the moving optic and the distance between the reflector and the prism is far. Therefore, the prism must be generally used as the moving optic instead of the reflector so as to reduce the measurement error. Nevertheless, the measurement error must be compensated because it's not a negligible error if a rotating angle of the prism is large. In case the reflector must be used as the moving optic, which is unavoidable when the squareness error is measured between two axes, this compensation method can be applied and produces a better result.

• 대한기계학회논문집
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• 제17권6호
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• pp.1431-1440
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• 1993

This paper presents a new NC machine performance test and calibration system. In order to measure NC machine erros in simpler, and less time-comsuming way, some indirect measuring systems such as circular disk system and double ball bar system have been developed instead of laser interferometer. But these indirect measuring systems have shown their limits in identifying each of NC machine error sources in absolute numerical value. Therefore, we developed an unique NC machine error measurement system which provides a simple measuring process like other conventional indirect methods and still can indentify each of NC machine error sources in absolute numerical value.

• 한국정밀공학회지
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• 제31권12호
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• pp.1133-1139
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• 2014

This paper proposes a simple method to improve a sensitivity of a straightness measurement system for a linear stage, which is applied to a system based on a geometric optic method. An optical system for this method is composed of a corner-cube retro-reflector, a ball-lens and a twodimensional position sensitive detector (2D PSD). The effectiveness of the proposed method was examined theoretically, and verified experimentally using a prototype measurement system. The results show that the measuring sensitivity was dependent on the size of the ball-lens and the setup position of PSD from the ball-lens, and that the proposed method is efficient method to improve the measuring sensitivity.

• 한국정밀공학회지
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• 제17권5호
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• pp.124-130
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• 2000

For measuring out the submicron order straightness, a precision measuring device is developed in this paper. The device is constructed with a hydrostatic feed table and a capacitive type sensor which is mounted to the feed table. Straightness is acquired as substracting the motion error of feed table from the measured profile with probe. Motion error of feed table is simultaneously compensated upto 0.120${\mu}{\textrm}{m}$ of linear motion error and 0.20arcsec of angular motion error using the active controlled capillary. Reversal method and strai호t-edge is used fur estimating the measuring accuracy and from the experimental result, it is verified that the device has the measuring accuracy 0.030m. Also, through the practical application on the measurement of ground surface, it is confirmed that the device is very effective to measure the submicron order straightness.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1992년도 춘계학술대회 논문집
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• pp.120-124
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• 1992

평면 연삭가공에 있어서 피삭재의 진직도의 제어는 정밀계측기와 같은 정밀기기의 제작에 중요한 문재중 하나이다. 본 연구에서는 연삭작업 능률을 향상시키기 위해 고 능률 단공정 가공시 발생할 수 있는 피삭재의 열변형기등을 유한요소법으로 밝힌것을 기초로 실험과의 타당성 여부를 검토하고, 고능률 연삭시 형상오차에 미치는 여러가지인자의 영향을 조사하였으며, 회귀분석에의해 형상오차의 추정치를 예측하였다.

• 한국정밀공학회지
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• 제30권6호
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• pp.607-614
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• 2013

In this study, effect of the sensor gain error is theoretically analyzed and simulated when mixed sequential two-prove method(MTPM) is applied for the precision measurement of straightness error of a linear motion table. According to the theoretical analysis, difference of the gain errors between two displacement sensors increases measurement error dramatically and alignment error of the straightedge is also amplified by the sensor gain difference. On the other hand, if the gain errors of the two sensors are identical, most of error terms are cancelled out and the alignment error doesn't give any influence on the measurement error. Also the measurement error of the straightness error is minimized compared with that of the straightedge's form error owing to close relationship between straightness error and angular motion error of the table in the error terms.