• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.195-195
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• 2004

리니어 모터는 큰 이송속도와 정밀한 위치제어가 가능하여 고정밀도가 요구되는 분야에서 널리 사용되고 있으며, 이에 대한 연구도 활발히 진행되고 있다. 그 중 리니어 모터의 정밀도를 저해하는 요인 및 측정 방법에 대해서도 연구가 점차로 많이 진행되고 있으며, 현재 시스템이 가지고 있는 기하학적 오차에 관한 연구와 열변형에 관한 연구가 보고되었다. 특히 기하학적 오차는 가공물의 정밀도를 결정하는 중요한 지표이며, 가공된 물체를 결정하는 기본요소이기 때문에 가장 많이 연구되었으며, 이에 대한 다양한 해석 방법과 보상에 관한 연구가 이루어졌다.(중략)

• Journal of the Microelectronics and Packaging Society
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• v.26 no.1
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• pp.17-21
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• 2019

In this paper, a high precision straightness measurement system has been developed at low cost using a visible laser and CMOS image sensor. CMOS image sensor detected optical image and the variation of straightness was calculated by image processing. We have observed that the error of the developed straightness measurement system was 0.9% when a distance of 3m between laser and image sensor. And it can be applied to 3D printer and any other areas.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.6
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• pp.607-614
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• 2013

In this study, effect of the sensor gain error is theoretically analyzed and simulated when mixed sequential two-prove method(MTPM) is applied for the precision measurement of straightness error of a linear motion table. According to the theoretical analysis, difference of the gain errors between two displacement sensors increases measurement error dramatically and alignment error of the straightedge is also amplified by the sensor gain difference. On the other hand, if the gain errors of the two sensors are identical, most of error terms are cancelled out and the alignment error doesn't give any influence on the measurement error. Also the measurement error of the straightness error is minimized compared with that of the straightedge's form error owing to close relationship between straightness error and angular motion error of the table in the error terms.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.114-118
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• 2001

HP Laser Interferometer Measurement System[HP5529A] is one of the most powerful equipment for measurement of the motion accuracy. The straightness measurement system of the HP5529A is composed of wollastone prism and reflector. In this system, straightness error is measured by relative lateral motion between prism and reflector. But rotating motion of prism or reflector as moving optic causes not real straightness error but additive straightness error. Especially unwanted straightness error as this becomes very large when reflector is used as moving optic and an interval between reflector and prism is distant. In this paper, the compensation method is proposed for removing additive error and experiment is carried out for theoretical verification.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.203-206
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• 2001

This paper presents a straightness measurement system for flat and long workpieces. The measurement system consists of a laser optical unit, a CCD camera and processing system, and a carrier system with a stylus. The carrier system accompanies the stylus, which displaces a retroreflector along the surface profile. The optical unit is used to optically amplify the displacement of retroreflector. The CCD camera and processing system finally identifies the vertical displacement of the stylus unit. The developed system is applied to two surfaces: ground surface and LM guide surface. The experimental results show that the developed system can measure the straightness of flat surfaces within sub-micron error.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.9 s.174
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• pp.69-76
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• 2005

The laser interferometer system such as HP5529A is one of the most powerful equipment fur measurement of the straightness error in precision stages. The straightness measurement system, HP5529A is composed of a Wollaston prism and a reflector. In this system, the straightness error is defined as relative lateral motion change between the prism and the reflector and computed from optical path difference of two polarized laser beams between these optics. However, rotating motion of the prism or the reflector used as a moving optic causes unwanted straightness error. In this paper, a compensation method is proposed for removing the unwanted straightness error generated by rotating the moving optic and an experiment is carried out for theoretical verification. The result shows that the unwanted straightness error becomes very large when the reflector is used as the moving optic and the distance between the reflector and the prism is far. Therefore, the prism must be generally used as the moving optic instead of the reflector so as to reduce the measurement error. Nevertheless, the measurement error must be compensated because it's not a negligible error if a rotating angle of the prism is large. In case the reflector must be used as the moving optic, which is unavoidable when the squareness error is measured between two axes, this compensation method can be applied and produces a better result.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.6
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• pp.1431-1440
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• 1993

This paper presents a new NC machine performance test and calibration system. In order to measure NC machine erros in simpler, and less time-comsuming way, some indirect measuring systems such as circular disk system and double ball bar system have been developed instead of laser interferometer. But these indirect measuring systems have shown their limits in identifying each of NC machine error sources in absolute numerical value. Therefore, we developed an unique NC machine error measurement system which provides a simple measuring process like other conventional indirect methods and still can indentify each of NC machine error sources in absolute numerical value.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.5 no.3
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• pp.22-30
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• 1996

In order to compensate for out-of-straightness of shafts, an automatic straightening process composed of an automatic measuring module, an automatic control unit and operating softwares was developed with a hydraulic press. The out-of-sraightness of each shaft was measured automatically in the measuring stage. An optimal pressure point was determined to minimize TIR value of the shaft according to press count of 3-points bending process. In the geometric adaptive control procedure, punch stroke and springback of the shaft were predicted by an observer using on-line measured values of press force and deflection amount I each press count. An automatic straightening machine was realized with the measuring module, the GAC module, PLD, IBM-PC and the operating software on the hydraulic press. the validity of the proposed straightening process was confirmed through a series of experiments with cam shafts.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1133-1139
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• 2014

This paper proposes a simple method to improve a sensitivity of a straightness measurement system for a linear stage, which is applied to a system based on a geometric optic method. An optical system for this method is composed of a corner-cube retro-reflector, a ball-lens and a twodimensional position sensitive detector (2D PSD). The effectiveness of the proposed method was examined theoretically, and verified experimentally using a prototype measurement system. The results show that the measuring sensitivity was dependent on the size of the ball-lens and the setup position of PSD from the ball-lens, and that the proposed method is efficient method to improve the measuring sensitivity.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.5
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• pp.124-130
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• 2000

For measuring out the submicron order straightness, a precision measuring device is developed in this paper. The device is constructed with a hydrostatic feed table and a capacitive type sensor which is mounted to the feed table. Straightness is acquired as substracting the motion error of feed table from the measured profile with probe. Motion error of feed table is simultaneously compensated upto 0.120${\mu}{\textrm}{m}$ of linear motion error and 0.20arcsec of angular motion error using the active controlled capillary. Reversal method and strai호t-edge is used fur estimating the measuring accuracy and from the experimental result, it is verified that the device has the measuring accuracy 0.030m. Also, through the practical application on the measurement of ground surface, it is confirmed that the device is very effective to measure the submicron order straightness.