• Title/Summary/Keyword: 직접냉각

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A Study on Direct Cooling and Indirect Cooling in Etching Process Cooling System (식각 공정용 냉각시스템에서의 직접 냉각 방식과 간접 냉각 방식에 관한 연구)

  • Jang, Kyungmin;Kim, Kwangsun
    • Journal of the Semiconductor & Display Technology
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    • v.17 no.3
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    • pp.100-103
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    • 2018
  • Due to the plasma applied from the outside, which acts as an etchant during the etching process, considerable heat is transferred to the wafer and a separate cooling process is performed to effectively remove the heat after the process. In this case, a direct cooling method using a refrigerant is suitable for cooling through effective heat exchange. The direct cooling method using the refrigerant using the latent heat exchange is superior to the cooling method using the sensible heat exchange. Therefore, in this paper, AMESim is used to design a direct refrigerant cooling system using latent heat exchange simulator was built.The constructed simulator is reliable compared with the actual experimental results. It is expected that this simulator will help to design and search for optimal process conditions.

Flow and Heat Transfer Characteristics of Acoustically Excited Axisymmetric Impinging Jet (음향여기된 축대칭 충돌제트의 유동 및 열전달 특성)

  • 조형희;이창호
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 1997.11a
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    • pp.8-9
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    • 1997
  • 산업의 발달과 환경에 대한 관심이 높아짐에 따라 고효율, 저공해인 가스터빈의 응용범위가 넓어지고 있는 추세이다. 가스터빈 기관의 효율을 높이기 위해서는 터빈 입구온도를 높이는 것이 필수적인데 이는 재질에 의해 제한 받게 되고 이 때문에 효과적인 냉각방법의 필요성이 대두되었다 충돌제트는 국소적으로 높은 열/물질 전달 효과를 얻을 수 있어서 터빈 블레이드 냉각과 연소기 벽면 냉각에 효과적으로 응용 될 수 있다. 이러한 충돌제트의 냉각효과는 제트출구의 초기조건에 매우 민감한데 Kelvin-Helmholts 불안정은 불안정한 자유전단층에서 자연적인 와류생성(roll up)과 개개의 와류고리 형성의 원인이 되고 이 고리의 성장과 병합(pairing)은 제트의 유동특성에 상당히 영향을 미친다. 제트주위에 생성되는 이러한 와류에 의해 제트중심에서 속도와 난류강도가 변하게 된다. 이러한 제트초기의 불안정성은 하류에서의 와류성장에 영향을 끼치기 때문에 와류의 조절에 의한 충돌 면에의 열 전달 효과 상승을 기대할 수 있다. 이 조절방법은 크게 두 가지로 나눌 수 있는데 하나는 제트주의 환형관에 이차유동을 가하여 와류를 직접 제어함으로써 자유전단류(free shear layer flow)의 안정성 원리를 이용하여 열 전달을 촉진하는 것이고 다른 하나는 음향여기(acoustic exitation)를 사용하여 제트주위의 와류형성을 조절하는 것인데, 자연적으로 형성되는 와류의 주파수(와류의 고유주파수)나 부조화 주파수(subharmonic)로 음향여기 시키는 경우 제트 주위 와류는 더욱 증폭되고 그렇지 않은 경우 제트주위 와류의 형성이 억제되어 더 긴 제트코어의 길이 및 제트코어 주위에서 작은 크기의 와류들이 형성된다.

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Thermal Performance of the Show-Case Cooler Using Ice Slurry Type Storage System (아이스슬러리형 축냉시스템을 이용한 쇼케이스 냉각장치의 열적성능에 관한 실험적 연구)

  • Lee, Dong-Won;Kim, Jeong-Bae
    • Journal of Energy Engineering
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    • v.20 no.1
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    • pp.26-29
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    • 2011
  • A promising alternative technology is the potential use of ice slurries as a secondary refrigerant in conventional cooling process. Ice slurries behave almost like a liquid and can be pumped through pipes although the energy capacity of ice slurries per unit volume is considerably higher than that for chilled water or brine due to the latent heat capacity of the ice particles. To give the basic data for the design of cooling systems using ice slurries, experimental study has been conducted to find out the performance of the cooling coil of show-case with ice slurries. Despite the fact that ice slurries entering the cooling coil had at least $5^{\circ}C$ higher temperature than that of R22, it was still capable of providing a similar cooling performance than that obtained with R22.

Numerical Investigation of Cooling Performance of Liquid-cooled Battery in Electric Vehicles (하이브리드/전기 자동차용 수냉식 배터리 셀의 냉각성능에 관한 수치 해석적 연구)

  • Kwon, Hwabhin;Park, Heesung
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.40 no.6
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    • pp.403-408
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    • 2016
  • Lithium-ion batteries are commonly employed in hybrid electric vehicles (HEVs), and achieving high energy density in the battery has been one of the most critical issues in the automotive industry. Because liquid cooling containing antifreeze is important in automotive batteries to enable cold starts, an effective geometric configuration for high-cooling performance should be carefully investigated. Battery cooling with antifreeze has also been considered to realize successful cold starts. In this article, we theoretically investigate a specific property of an antifreeze cooling battery system, and we perform numerical modeling to satisfy the required thermal specifications. Because a typical battery system in HEVs consists of multiple stacked battery cells, the cooling performance is determined mainly by the special properties of antifreeze in the coolant passage, which dissipates heat generated from the battery cells. We propose that the required cooling performance can be realized by performing numerical simulations of different geometric configurations for battery cooling. Furthermore, we perform a theoretical analysis as a design guideline to optimize the cooling performance with minimum power consumption by the cooling pump.

화력발전소 CWD(Cooling Water Discharge)를 활용한 해양소수력 개발의 기술적인 고찰(화력발전소 CWD와 조위특성과의 Harmony)

  • Eom, Bok-Jin
    • 열병합발전
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    • s.69
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    • pp.15-20
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    • 2009
  • 소수력 계획 시 개발지점에 대하여 수많은 자료와 정보 등을 필요로 하게 되는데 특히 해당지역내의 유량분포에 대한 유황자료는 개발의 판단여부를 결정케 하는 중요한 요소이다. 소수력발전소의 설비용량에 직접 관계되는 설계유량의 결정과 재해방지를 위한 유출의 예측을 가능케 하고 발전소운영 시 가동률 및 경제성에도 직접적인 영향을 미치는 중용한 요소이나 여기서 논하는 소수력개발은 하천이나 댐과 같은 유형이 아니라 일정한 유량을 확보하여 배출하기 때문에 문제는 없다. 그러나 계절별 부하에 따른 냉각수량의 변화 및 소수력 발전유량의 변동, 조위(해수면) 변화 등에 따라 달라진다. 그러므로 수위조절을 위한 수문은 이들의 변화에 따라 자동운전이 가능해야 하지만 운전시 발전정격수위를 맞출 수 있도록 수문을 조절한 다음 Turbine Governor에 의해 유량 및 수위를 제어할 수 있도록 설계하여 냉각수 순환수 계통에 영향이 미치지 않게 언제나 적정수위를 유지시킬 수 있는 운전모드로 구축하는 것이 안정이라 볼 수 있다. 소수력발전설비 및 수문의 오작동 및 고장이 발생할 때 수위가 상승하여 냉각계통에 손실수두 증가, 취수펌프의 양정고 증가와 Surge 발생 등으로 발전소의 정상 운전에 미치는 영향이 없어야 하므로 세밀한 검토가 필요하기 때문에 폐쇄시간과 수압상승 값 등 요인 분석후 설계하여야 한다. Figure A와 같이 국내 화력발전단지에서 냉각수로 사용되고 방류되는 해수는 발전소에 따라 ca.70~150 CMS로 ca.2,000~5000 kW 이상의 수력에너지(H=4m 형성 기준)를 보유하고 있으나, 현재 활용되지 못하고 그대로 해양으로 방류되고 있어 이 수력에너지의 개발 방안을 오래전부터 검토하여 왔다. 발전소 온배수의 원활한 배수를 위한 설계 낙차와 함께 남서해안의 조위변화에 따른 낙차를 이용하는 것으로 소수력 발전 방식과 조력발전 방식의 특징을 동시에 활용할 수 있다.

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The Mechanisms by Which Electrical Stimulation Affect Meat Tendrness (전기 자극의 연도증진 기작에 관한 연구동향)

  • 황인호;박범영
    • Food Science of Animal Resources
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    • v.22 no.3
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    • pp.234-239
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    • 2002
  • The use of electrical stimulation in the red meat processing has been inconsistent and the mechanism(s) associated with the improvement of meat quality in electrically stimulated carcass has been disputed. This may reflect an incomplete knowledge of how to optimise the technology and also mirrors the existence of unknown factors. Although it is well established that the stimulation treatment increases the rate of post-mortem glycolysis, other biochemical and biophysical effects have been implicated with the use of this technology. The classical view that stimulation prevents muscle from shortening excessively during rigor development has been expanded to include the possibility that it also results in physical disruption of muscle structure and early 'turn-on' of tenderizing process. However, the interaction of these effects with the acceleration of the rate of proteolysis through activation of the calpain pretense system has not been comprehensively unravelled. This mini-review attempts to examine the current theories about the effect of stimulation on post-mortem muscle.

Evaluation of Direct Vessel Injection Design With Pressurized Thermal Shock Analysis (가압 열충격해석에 의한 직접용기주입 설계의 평가)

  • Cha, Jong-Hee;Jun, Hyung-Gil
    • Nuclear Engineering and Technology
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    • v.24 no.1
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    • pp.86-97
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    • 1992
  • The purpose of this paper is to evaluate the direct vessel injection design from a pressurized thermal shock(PTS) viewpoint for the Combustion Engineering System 80+ A break of the main steam line from zero power and a 0.05 ft$^2$small break loss-of-coolant accident (LOCA) from full power were selected as the potential PTS events. In order to investigate the stratification effects in the reactor downcomer region, the fluid mixing analysis was performed using the COMMIX-IB code for steam line break and using the REMIX code for 0.05 ft$^2$small break LOCA. The stress distributions within the reactor vessel walls experiencing the pressure and the temperature transients were calculated using the OCA-P code for both events. The results of the analysis showed that a small break LOCA without decay heat presented the greatest challenge to the vessel, however, there is no crack initiation through end-of-life of the vessel with consideration of decay heat.

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An Experimental Study on Freezing Behavior of NaCl and Heavy Metal Aqueous Solution Using Freeze Concentration Method (동결농축법을 이용한 염수 및 중금속 수용액의 동결거동에 관한 실험 연구)

  • Kim, Jung-Sik;Lim, Seung-Taek;Oh, Cheol
    • Journal of Navigation and Port Research
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    • v.37 no.2
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    • pp.129-135
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    • 2013
  • Recently, waste water treatment system is developed in small and middle size to get more economic advantage. Freeze concentration system has high thermodynamic efficiency and low energy consumption, can re-use purified water and cold energy obtained from ice. This study was experimentally performed to investigate pollution containment in frozen layer by cooling wall temperature, air-bubble flow methods, initial ice-lining thickness of frozen layer in NaCl aqueous solution and the representative heavy metals, Pb and Cr aqueous solution. As the result, a decrease in the cooling wall temperature bring a higher growth rate of ice front and the more solute was involved in frozen layer. The method to inject directly air-bubble into ice-liquid interface through ring shape nozzle gave high purity of ice compared to indirect method. Ice lining in 5mm thickness resulted in frozen layer with higher purity than 1mm thickness.

Study for Effect of Changes in Thermal Properties on Cooling Process in Running Hot Steel Strip After Hot Rolling (열간압연 이후 주행하는 고온 강재의 냉각해석에서 소재의 물성변화 효과 연구)

  • Park, Il Seouk;Park, Jung Eun
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.37 no.5
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    • pp.459-465
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    • 2013
  • In the manufacturing process of steel plates, materials at high temperatures above $800^{\circ}C$ are rapidly cooled by using a circular impinging water jet to determine their strength and toughness. In this study, the basic heat and fluid flow is solved by using the existing numerical model for boiling heat transfer. Actually, steel undergoes a phase change from austenite to ferrite or bainite during the cooling process. The phase change induces changes in its thermal properties. Instead of directly solving the phase change and the material cooling together, we solve the heat transfer only by applying the thermal properties that vary with temperature, which is already known from other studies. The effects of the changes in the thermal properties on the cooling of steel and the necessity of calculating the phase change are discussed.

Dependence of Nanoparticle and Combustion Characteristics of Gasoline Direct Injection Engines on Coolant Temperature (GDI 엔진의 냉각수온에 따른 연소성능 및 입자상 물질 배출 특성)

  • Lee, Hyo-Keun;Choi, Kwan-Hee;Myung, Cha-Lee;Park, Sim-Soo;Park, Jong-Il;Han, Seung-Kook
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.36 no.2
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    • pp.131-136
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    • 2012
  • This paper investigated the combustion and exhaust gas characteristics of gasoline direct injection engines for various cooling water temperature. The engine-out nanoparticle emission number and size distribution were measured by a DMS-500 equipped upstream of the catalyst. A CLD-400 and an HFR-400 were equipped at the exhaust port to analyze the cyclic NOx and total hydrocarbon emission characteristics. The results showed that the nanoparticle emission number greatly increased at low coolant temperatures and that the exhaust mainly contained particulate matter of 5.10 nm. THC also increased under low temperature conditions because of fuel film on the combustion chamber. NOx emissions decreased under high temperature conditions because of the increase in internal exhaust gas recirculation. In conclusion, an engine management system control strategy for driving coolant temperature up rapidly is needed to reduce not only THC and NOx but also nanoparticle emissions.