Effects of AIN Content on Microstructure and Hardness of $(Ti_{1-x}Al_x)N$ Thin Films Deposited by Reactive Sputtering
(박막내 AIN 함량이 $(Ti_{1-x}Al_x)N$ 박막의 미세구조와 미세경도에 미치는 영향)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1996.11a
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- pp.144-145
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- 1996