• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.179-179
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• 2010

다양한 분야에서 확산 방지막은 소자의 신뢰성 향상에 중요한 역할을 하고 있다. 최근 반도체에 적용되기 시작한 구리 배선 형성 공정에서도 실리콘이나 실리콘 산화막으로 구리가 확산하는 것을 방지하는 기술이 중요한 부분을 차지하고 있다. 기존 physical vapor deposition (PVD)법을 이용한 $TaN_x$ 확산 방지막 형성 기술이 성공적으로 적용되고 있으나 반도체의 최소선폭이 지속적으로 감소함에 따라 한계에 다다르고 있다. 20 nm 급과 그 이하의 구리 배선을 위해서는 5 nm 이하의 매우 얇고 높은 피복 단차율을 가진 확산 방지막 형성 기술이 요구된다. 또한, 요구 두께의 감소에 따라 더 우수한 확산 방지 특성이 요구된다. Atomic layer deposition (ALD)은 박막의 정교한 두께 조절이 가능하며 높은 종횡비를 가지는 구조에서도 균일한 박막 형성이 가능하다. 이번 연구에서는 다른 질소 함량을 가진 $TaN_x$ 박막을 Tertiarybutylimido tris (ethylamethlamino) tantalum (TBITEMAT) 전구체와 $H_2+N_2$ 반응성 플라즈마를 사용하여 plasma enhanced atomic layer deposition (PEALD) 법으로 형성하였다. 박막 내질소 함량에 따라 $TaN_x$의 상 (phase)과 미세구조 변화가 관찰되었고, 이러한 물성의 변화는 확산 방지 특성에 영향을 주었다. TEM (Transmission electron microscopy)과 SEM (scanning electron microscope), XPS (x-ray photoelectron spectroscopy)를 통해 $TaN_x$의 물성을 분석하였고, 300 도에서 700 도까지 열처리 후 XRD (x-ray deffraction)와 I-V test를 통해 확산 방지막의 열적 안정성이 평가되었다. PEALD를 통해 24 nm 크기의 trench 기판 위에 약 4 nm의 $TaN_x$ 확산 방지막이 매우 균일하게 형성할 수 있었으며 향후 구리 배선에 효과적으로 적용될 것으로 예상된다.

• Journal of the Society of Naval Architects of Korea
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• v.40 no.6
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• pp.80-87
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• 2003

Tank structures in ships are in contact with various fluid. The vibration characteristics of those structures are strongly affected by the added mass due to containing fluid. It is important to predict vibration characteristics of tank structures, but it is difficult to do. That's because the interaction problem concerned with the free surface, the variation of water depth and stiffener is to be considered between the fluid and the structure. Many authors have studied vibration of rectangular tank structures containing water. Kito studied added mass effect of water in contact with thin elastic flat plates. Kim et al. studied flexural vibration of stiffened plates in contact with water. However, few researches on dynamic interaction tank walls with water are reported in the vibration of rectangular tanks recently. in the present report, the coupling effect of added mass of fluid and structural constraint between panels on each vibration mode changing breadth of elastic plate, and dynamic pressure distribution have investigated numerically and discussed.

• Journal of the Korean Magnetics Society
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• v.14 no.3
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• pp.105-108
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• 2004

Array of magnetic Ni nanostructures has been fabricated on Si substrate by using nanoporous alumina film as a mask during deposition. The nanostructures are truncated cone-shape and the lateral sizes are comparable to height. While the continuous film shows well-defined in-plane magnetization, the nanostructure shows perpendicular component of magnetization at remanence. The hysterectic behavior of nanostructures is dominated by the demagnetizing field instead of interaction among them.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.19 no.3
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• pp.275-283
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• 2007

An experimental study was conducted to investigate the effect of the morphology of CNT (Carbon Nanotube) on the thermal conductivity of suspensions. The effective thermal conductivities of the samples were measured using a steady-state cut bar apparatus method. Enhancements based on the thermal conductivity of the base fluid are presented as functions of both the volume fraction and the temperature. Although functionalized SWNT (Single-Walled Carbon Nanotube) produced more stable and homogeneous suspensions, the addition of small amounts of surfactant to suspensions of 'as produced' SWNT demonstrated a greater increase in effective thermal conductivity than functionalized SWNT alone. The effective thermal conductivity enhancement corresponding to 1.0% by volume approached 10%, which was observed to be lower than expected, but more than twice the values, 3.5%, obtained for similar tests conducted using aluminum oxide suspensions. However, for suspensions of MWNT (Multi-Walled Carbon Nanotube), the degree of enhancement was measured to be approximately 37%. It was postulated that the effect of clustering, resulting from the multiple heat-flow passages constituted by interconnecting neighboring CNT clusters, played an important role in significant enhancement of effective thermal conductivity.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.168-175
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• 2006

An experimental study was conducted to investigate the effect of the morphology of CNT on the thermal conductivity of suspensions. The effective thermal conductivities of the samples were measured using asteady-state cut bar apparatus method. Enhancements based on the thermal conductivity of the base fluid are presented as functions of both the volume fraction and the temperature, Although functionalized SWNT produiced a more stable and homogeneous suspension, the addition of small amounts of surfactant to suspensions of 'as produced' SWNT demonstrated a greater increase in effective thermal conductivity than functionalized SWNT alone. The effective thermal conductivity enhancement corresponding to 1.0 percent by volume approached 10%, which was observed to be lower than expected, but more than twice the values, 3.5%, obtained for similar tests conducted using aluminum oxide suspensions. However, for suspensions of MWNT, the degree of enhancement was measured to be approximately 37%. It was postulated that the effect of clustering, resulting from the multiple heat-flow passages constituted by interconnecting neighboring CNT clusters, played an important role in significant enhancement of effective thermal conductivity.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.19 no.2 s.72
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• pp.203-212
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• 2006

Although composite construction has many mechanical advantages over noncomposite construction, the design of noncomposite construction for skew bridges with large skew angels has been often checked because composite construction caused large stresses in the bridge deck. But there is somewhat difficulty to apply noncomposite construction in the field because of the structural problem such as the slip at the interface between the concrete deck and steel girders. In this study, the validity of the application of the composite construction to skew angles with large skew angles is investigated by analyzing effects of two interactions such as composite and noncomposite actions between the concrete deck and steel girders on the behavior of skew bridges. A series of parametric studies for the total 27 simply supported skew bridges was conducted with respect to parameters such as girder spacing, skew angle, and deck aspect ratio. The improvement of the behavior of composite skew bridges was examined by using the concept of the stiffness adjustment of bearings which I suggested in previous research. Results of analyses show that a more desirable behavior of skew bridges can be obtained from composite construction instead of noncomposite construction and the method of the stiffness adjustment of bearings results in a more rational and economical design of composite skew bridges and substructures.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.20 no.5
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• pp.593-604
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• 2007

Although composite construction has more mechanical advantages compared to noncomposite construction, the design of noncomposite construction for skew bridges with large skew angels has been often checked because composite construction may cause large stresses in the bridge deck. In this study, the analytical model considered dynamic behaviors for noncomposite skew bridges was proposed. Using the proposed analytical model, the validity of the application of noncomposite construction to skew bridges was checked. Also, the effects of interactions between the concrete deck and steel girders such as composite construction, partial composite construction, and noncomposite construction on the dynamic characteristics and dynamic behaviors of simply supported skew bridges were investigated. A series of parametric studies for the total 27 skew bridges was conducted with respect to parameters such as girder spacing, skew angle, and deck aspect ratio. Although the slip at the interfaces between the concrete deck and steel girders results in the reduction of seismic total base shear in the transverse direction due to period elongation, it causes an undesirable behavior of skew bridges by the modification in mode shapes and distributions of stiffness. Shear connectors placed by minimum requirements for partial composite action have an effect on reducing the girder stresses and deck stresses; except case of some skew bridges, the magnitude of the girder stresses and deck stresses obtained from partial composite skew bridges is similar to or slightly more than those acquired from composite skew bridges.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.2
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• pp.41-47
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• 1999

In this paper, we report 3D-simulations of a plasma etching process by employing cell-removal algorithm takes into account the mask shadow effect os well as spillover errors. The developed simulator haas an input interface to take not only an analytic form but a Monte Carlo distribution of the ions. The graphic user interface(GUI) was also built into the simulator for UNIX environment. To demonstrate the capability of 3D-SURFILER(SURface proFILER), we have simulated for a typical contact hole structure with 36,000($30{\times}40{\times}30$) cells, which takes about 20 minutes with 10 Mbytes memory on sun ultra sparc 1. as an exemplary case, we calculated the etch profile during the reactive ion etching(RIE) of a contact hole wherein the aspect ratio is 1.57. Furthermore, we also simulated the dependence of a damage parameter and the evolution of topography as a function of the chamber pressure and the incident ion flux.

• Korean Chemical Engineering Research
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• v.47 no.2
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• pp.208-212
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• 2009

The nano-clay is widely used in polymer-nanocomposites due to the high aspect ratio, heat resistance and nano-scale dimension. In recent researches, the thermal and mechanical properties of polyurethane foam were improved with introducing the nano-clay. In this study, we describe the influence of ultrasonic treatment and content of nano-clay on properties of polyurethane foam. The nano-clay/polyurethane foam were characterized using their recovery time, compressive deflection, cell morphology and tensile test. The ultrasonic treatment was very effective for dispersion of nano-clay. Moreover, we found that introducing over 3 wt% of nano-clay bring the decrease of properties due to the poor dispersion. Expecially, ultrasonically treated 20A/polyurethane foam(1 wt%) showed greatly improved properties, such as homogeneous cell size and good dimension stability. We expect that our results could be applied to insulating materials for construction.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.5
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• pp.477-485
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• 2012

Fluid flow and heat transfer in horizontal ducts are strongly coupled with large changes in thermodynamic and transport properties near the critical region as well as the gravity force. Numerical analysis has been carried out to investigate convective heat transfer in horizontal rectangular ducts for water near the thermodynamic critical point. Convective heat transfer characteristics, including velocity, temperature, and the properties as well as local heat transfer coefficients along the ducts are compared with the effect of proximity on the critical point. When there is flow acceleration because of a density decrease, convective heat transfer characteristics in the ducts show transition behavior between liquid-like and gas-like phases. There is a large variation in the local heat transfer coefficient distributions at the top, side, and bottom surfaces, and close to the pseudocritical temperature, a peak in the heat transfer coefficient distribution resulting from improved turbulent transport is observed. The Nusselt number distribution depends on pressure and duct aspect ratio, while the Nusselt number peak rapidly increases as the pressure approaches the critical pressure. The predicted Nusselt number is also compared with other heat transfer correlations.