• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.179-179
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• 2010

다양한 분야에서 확산 방지막은 소자의 신뢰성 향상에 중요한 역할을 하고 있다. 최근 반도체에 적용되기 시작한 구리 배선 형성 공정에서도 실리콘이나 실리콘 산화막으로 구리가 확산하는 것을 방지하는 기술이 중요한 부분을 차지하고 있다. 기존 physical vapor deposition (PVD)법을 이용한 $TaN_x$ 확산 방지막 형성 기술이 성공적으로 적용되고 있으나 반도체의 최소선폭이 지속적으로 감소함에 따라 한계에 다다르고 있다. 20 nm 급과 그 이하의 구리 배선을 위해서는 5 nm 이하의 매우 얇고 높은 피복 단차율을 가진 확산 방지막 형성 기술이 요구된다. 또한, 요구 두께의 감소에 따라 더 우수한 확산 방지 특성이 요구된다. Atomic layer deposition (ALD)은 박막의 정교한 두께 조절이 가능하며 높은 종횡비를 가지는 구조에서도 균일한 박막 형성이 가능하다. 이번 연구에서는 다른 질소 함량을 가진 $TaN_x$ 박막을 Tertiarybutylimido tris (ethylamethlamino) tantalum (TBITEMAT) 전구체와 $H_2+N_2$ 반응성 플라즈마를 사용하여 plasma enhanced atomic layer deposition (PEALD) 법으로 형성하였다. 박막 내질소 함량에 따라 $TaN_x$의 상 (phase)과 미세구조 변화가 관찰되었고, 이러한 물성의 변화는 확산 방지 특성에 영향을 주었다. TEM (Transmission electron microscopy)과 SEM (scanning electron microscope), XPS (x-ray photoelectron spectroscopy)를 통해 $TaN_x$의 물성을 분석하였고, 300 도에서 700 도까지 열처리 후 XRD (x-ray deffraction)와 I-V test를 통해 확산 방지막의 열적 안정성이 평가되었다. PEALD를 통해 24 nm 크기의 trench 기판 위에 약 4 nm의 $TaN_x$ 확산 방지막이 매우 균일하게 형성할 수 있었으며 향후 구리 배선에 효과적으로 적용될 것으로 예상된다.

• Journal of Korean Society of Steel Construction
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• v.10 no.4 s.37
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• pp.691-700
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• 1998

Based on Von Karman-Donnell kinematic assumptions for laminated shells, the nonlinear vibration behaviour of antisymmetrically or asymmetrically laminated cross-ply circular cylindrical shells with clamped and simply-supported ends are studied by a multi-mode approach. A equation is formulated and satisfies the associated compatibility equation and all boundary conditions. The displacement function is assumed to take the form of the lowest linear vibration mode and to satisfy continuity of the circumferential displacement. The nonlinear vibration equation is derived by the Galerkin's method. And nonlinear frequency is obtained by using the harmonic balance method as a function of lamination parameters, material constants, aspect ratio and amplitude of vibration. The effect of initial imperfection is also included. Results of the non-linear vibration are presented for different amplitudes of initial imperfection and four sets of boundary conditions. Present results are compared well with existing analysis results.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.4
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• pp.619-625
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• 2019

It is difficult to design because of the plug-holing phenomenon in which the amount of smoke discharged from the vertical vent is smaller than the designed amount of smoke. In this study, the effect of cross-sectional area ratio of tunnel and natural ventilation and heat release rate of fire source on plug-holing phenomenon occurring in natural ventilation system was experimentally analyzed. In the experiment model reduced to 1/20 size, the aspect ratio of the tunnel and the vertical vent was fixed, and the influence on the plug-holing phenomenon was confirmed by varying the sectional area ratio of the tunnel and the vertical vent. Experimental results show that the plug-holing phenomenon is caused by the comparison of the smoke boundary layer temperature with the temperature in the vertical vents, and the flow and temperature distribution characteristics under the vertical vents are changed as the cross-sectional area ratio of the tunnel and vertical vents increases. The plug-holing phenomenon is affected by the cross-sectional area ratio between the tunnel and the vertical ventilation. The greater the cross-sectional area ratio, the greater the probability of plug-holing.

• Applied Chemistry for Engineering
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• v.10 no.5
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• pp.789-795
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• 1999

In this study, carbon fiber reinforced cement composites(CFRCs) reinforced with short noncircular type carbon fibers were fabricated and properties(drying shrinkage, resistance to freezing and thawing, and fracture toughness) were compared with those of the CFRCs reinforced with circular type carbon fibers. It was found that these properties greatly depended on the shape and length of carbon fibers. The drying shrinkage of CFRCs reinforced with C-type carbon fiber was superior to other CFRCs. This effect was increased with a high aspect ratio of fiber. The resistance to freezing and thawing was increased with the fiber length and fiber volume percent, but there was on remarkable effect to fiber shape. Fracture toughness and resistance to crack propagation of CFRCs reinforced with C-CFs were improved compared with other CFRCs. It was believed that the more absorption of fracture energy into the larger interface caused an increase in fracture toughness and resistance to crack propagation.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.4
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• pp.953-959
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• 1998

To investigate accuracy of intensity method for measurement of the fiber orientation distribution, fiber orientation function is calculated by drawing simulation figures for the fiber orientation as varying fiber aspect ratio, fiber area ratio, and fiber orientation state, respectively. The values of fiber orientation function measured by intensity method are compared with the calculated values of fiber orientation function. The results show that measurement accuracy of the fiber orientation angle distribution by intensity method is affected by the fiber aspect ratio when the total length of oriented fiber is same. The average gradient of fiber orientation function is 0.94 for 1000mm of the total fiber length and is 0.93 for 2000 mm when the fiber aspect ratio is over 50. Measurement accuracy by intensity method is about 94% and the reliable data can be obtained by intensity method.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.22 no.3
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• pp.115-121
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• 2012

Sapphire single crystals have been highlighted for epitaxial gallium nitride films in high-power laser and light emitting diode (LED) industries. Among the many crystal growth methods, the Kyropoulos process is an excellent commercial method for growing larger, high-optical-quality sapphire crystals with fewer defects. Because the properties and growth behavior of sapphire crystals are influenced largely by the temperature distribution and convection of molten sapphire during the manufacturing process, accurate predictions of the thermal fields and melt flow behavior are essential to design and optimize the Kyropoulos crystal growth process. In this study, computational fluid dynamic simulations were performed to examine the effects of the crucible geometry aspect ratio on melt convection during Kyropoulos sapphire crystal growth. The results through the evolution of various growth parameters on the temperature and velocity fields and convexity of the crystallization interface based on finite volume element simulations show that lower aspect ratio of the crucible geometry can be helpful for the quality of sapphire single crystal.

• Journal of the Korean Society of Marine Environment & Safety
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• v.10 no.2 s.21
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• pp.41-47
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• 2004

Plate has cutout inner bottom and girder and Door etc. in hull construction absence is used much, and this is strength in case must be situated, but establish in region that high stress interacts sometimes fatally in region that there is no big problem usually by purpose of weight reduction, a person and freight movement, piping etc.. Because cutout‘s existence is positioning in this place, and, elastic bucking strength by load causes large effect in ultimate strength. Therefore, perforated plate elastic bucking strength and ultimate strength is one of important design criteria to decide structural elements size at early structure design step of a ship. Therefore, we need reasonable & reliable design formula for elastic bucking strength of the perforated plate. The author computed numerically ultimate strength change about several aspect ratios, cutout dimension, and plate thickness by using ANSYS Finite element analysis code based on finite element method in this paper.

• Proceedings of KOSOMES biannual meeting
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• 2004.11a
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• pp.129-135
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• 2004

Plate has cutout inner bottom and girder and floor etc in hull construction absence is used much, and this is strength in case must be situated, but establish in region that high stress interacts sometimes fatally in region that there is no big problem usually by purpose of weight reduction, a person and change of freight, piping etc. Because cutout's existence gnaws in this place, and, elastic budding strength by load rouses large effect in ultimate strength. Therefore, perforated plate elastic budding strength and ultimate strength is one of important design criteria which must examine when decide structural elements size at early structure design step if ship. Therefore, and, reasonable elastic budding strength about perforated plate need design ultimate strength. Calculated ultimate strength change several aspect ratioes and cutout's dimension, and thickness in this investigation. Used program applied ANSYS F.E.M code based on finite element method

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.8 s.227
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• pp.921-928
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• 2004

Measurements of local heat/mass transfer coefficients in rotating two-pass ducts are presented. Ducts of three different aspect ratios (W/H), 0.5, 1.0 and 2.0, are employed with a fixed hydraulic diameter ($D_h$) of 26.7 nm. $90^{\circ}$-rib turbulators are attached on the leading and trailing walls symmetrically. The rib height-to-hydraulic diameter ratio ($e/D_h$) is 0.056, and the rib pitch-to-rib height ratio (p/e) is 10. The experimental conditions are the same as those of the previous part of the study. As the rib height-to-duct height ratio (e/H) increases, the core flow is more disturbed and accelerated in the midsections of ribs. Therefore, the obtained data show higher heat/mass transfer in the higher aspect ratio duct. Dean vortices also augment heat/mass transfer in the turn and in the upstream region of the second pass. However, the effect becomes less significant for the higher aspect ratio because the surface area increases in the present geometric condition. The effect of rotation produces heat/mass transfer discrepancy.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.4
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• pp.209-216
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• 2014

The screen printed technique is one of the electrode forming technologies for crystalline silicon solar cell. It has the advantage that can raise the production efficiency due to simple process. The electrode technology is the core process because the electrode feature is given a substantial factor (for solar cell efficiency). In this paper, we tried to change conditions such as squeegee angle $55{\sim}75^{\circ}$, snap off 0.5~1.75 mm, printing pressure 0.6~0.3 MPa and 1.6~2.0 mm finger spacing. As a result, the screen printing process showed an improved performance with an increased height higher finger height. Optimization of fabrication process has achieved 17.48% efficiency at screen mesh of 1.6 mm finger spacing.