• Journal of Sensor Science and Technology
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• v.14 no.4
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• pp.265-271
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• 2005

In this study, a variable capacitive pressure sensor is fabricated for TPMS (Tire Pressure Monitoring System). This study is for developing sensors which consecutively measure the tire pressure given as 30 psi from the industrial standard. For improving non-linearity of the prior capacitive pressure sensors, it is suggested that touch mode capacitive pressure sensor be applied. In addition, initial capacitance is designed as small as possible for the conformity to the wireless sensor. ANSYS, commercial FEA package, is used for designing and simulating the sensor. The device is progressed by MEMS (Micro Electro Mechanical Systems) fabrication and packaged with PDMS. The result is obtained sensitivity, 1 pF/psi, through a pressure test. The simulation result is discrepant from experiment one. Wafer's uniformity is presumed as the main reason of discrepancy.

• Polymer(Korea)
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• v.30 no.3
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• pp.207-209
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• 2006

We fabricated a capacitive-type humidity sensor using poly (p-phenylene ether sulfone: PES) as a humidity sensitive layer. The PES was dissolved in m-cresol $(CH_3C_6H_4OH)$ and spin-coated on ITO-coated glass substrate. Gold was deposited by sputtering as a water-permeable upper electrode. The capacitance of the sensor was inversely proportional to sensing film thicknesses and showed an excellent linearity of less than 1% in the humidity range of 20 to 90%. The sensor haying a $1.4{\mu}m$ sensing layer showed a hysteresis of 1.3% and a good sensitivity of 1.14 at 20 kHz.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1997-1999
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• 2002

고분자 주쇄(Main chain)의 소수성을 가지는 플루오르 그룹을 배제시킨 습도 민감성 폴리이미드를 합성 및 이미드화 하였고, 이를 이용한 초고참도 습도 센서를 제작 및 측정하였다. 사용된 폴리이미드는 다이아민계로 Oxydianyline(ODA)와 다이안하이드라이드계로 Pyromellitic dianhydried(PMDA)를 유기용매 Dimethyla cetamide(DMAc) 하에서 폴리이미드 전구체 (Polyamic acid)를 합성하였으며, 진공 및 승온 조건에서 유기용매를 제거하여 이미드화(Imidization) 반응을 진행시켜 제조하였다. 본 습도 센서는 정전용량형 고감도 습도 센서로 디자인되었으며 실리콘 웨이퍼상에서 일반적인 반도체 공정을 이용하여 구현하였다. 본 습도 센서는 센서 크기와 유효면적, 감습층의 두께를 주요 변수로 설정하였으며 이에 따른 습도 민감성 효과를 평가 및 분석하였다. 측정 결과 유효면적 70%, 감습층 두께 $1.1{\mu}m$ 로 제작된 습도 센서는 상대숨도$20%{\sim}90%$ 영역에서 캐패시턴스와 선형적 상관관계를 보여주고 있으며, 습도 민감도는 3.9 pF/%RH 클 얻을 수 있었다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.325-325
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• 2004

최근 UC 공작기계의 활용성 및 산업전반에 차지하는 중요성이 날로 증가하고, If기술을 접목한 네트워크 솔루션의 비약적인 발달에 힘입어 대부분의 공정들이 자동화됨에 따라 최종 부품의 가공정밀도는 전적으로 CNC 공작기계에 의존한다고 할 수 있다. 그러나 공작기계 각 구성 부품들의 가공오차와 조립 시 발생하는 기하학적 오차, 장시간 사용으로 인한 마모, 구조물의 온도 상승에 따른 열팽창 등으로 인하여 공구와 공작물간에 상대적인 공칭거리와 실제로 운동하는 거리와의 차이가 발생한다.(중략)

• 한국신재생에너지학회:학술대회논문집
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• 2005.06a
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• pp.335-338
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• 2005

Starting with the development of environmentally friendly electric controlled engine, sensors have played an increasing role in automotive technology. Electric power steering (EPS) systems are more and more replacing hydraulic systems. To improve fuel economy, the power assistance is provided by an electric drive. In this paper, development of a unique torque sensor for EPS is introduced. A capacitive type torque sensor is concluded to be suitable for EPS because its output is accurate, linear and robust against the variance of temperature, and patents have not applied so much.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.5
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• pp.55-61
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• 2004

Chatter monitoring is also important for realizing an unmanned machining system. while many researches were done on this area, it is still a difficult job to detect very small amplitude amount of chattering. A monitoring system using a capacitive spindle displacement sensor was developed to monitor cutting vibration in turning in this research. The variance of the measured spindle displacement signals using the developed sensor was calculated and utilized to quantify the small vibration in machining. The results were compared with variance obtained using a tool dynamometer. The result showed that the developed system could be utilized in monitoring the subtle changes of cutting vibrations with high sensitivity confidence.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.304-307
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.213-218
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.140-145
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• 2007

To improve productivity of a metal cutting process, it is required to monitor machining stability in real time. Since cutting environment is harsh against sensing conditions due to vibration, chip, and cutting fluid, etc., it is necessary to develop a robust and reliable sensing system for the practical application. In this work, a chatter monitoring system was developed and its effectiveness was proved. Spindle displacement caused by cutting was selected as a main monitoring parameter. A cylindrical capacitive displacement sensor was adopted. Chatter frequencies were identified through modal analysis. To quantify chatter vibrations, chatter correlation coefficient was introduced. The identification of the monitoring system showed a good agreement with the result of experiment.

• Proceedings of the KIEE Conference
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• 2007.04c
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• pp.29-33
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• 2007

In this paper, time-varying parameter of passive telemetry RF sensor system is estimated using RLS(Rescursive $\leq$* Square) algorithm. In order to overcome the problems such as power limits and complication that general RF sensor system including IC chip has, the principle of inductive coupling is applied to model sensor system The model parameter is rearranged for applying RLS algorithm based on mathematical model to the derived model using inductive coupling principle. Time variant parameter of rearranged model is estimated using forgetting factor, and in case measured data is contaminated by noise and modelling error, the performance of RLS algorithm characterized by the convergence of squared error sum is verified by simulation.