• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.1
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• pp.74-79
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• 2011

Alignment systems with multi-axis motions are applied to determine vertical arrangement of multilayer assembly such as LCD, PDP, and MLCC. This study reports the development of XY${\theta}$ alignment stage which is designed as thin-type structure and parallel actuations. The thin-type parallel XY${\theta}$ alignment stage is maintained below $1{\mu}m$ in repeatability error. The squareness and straightness also allow precise motion for the alignment by the developed stage. The measured error is ${\pm}6.25{\mu}m$ in the alignment experiment by the vision system on the parallel XY${\theta}$ alignment stage.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.483-484
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.200-200
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• 2003

• Proceedings of the IEEK Conference
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• 2006.06a
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• pp.585-586
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• 2006

본 논문에서는 MEMS 용량형 변위 센서의 제작과 함께, 미세 변위 측정을 위한 테스트 샘플을 제작하였다. 아래의 그림 1, 2는 각각 스테이지에 장착할 MEMS 용량형 변위 센서 및 미세 변위 측정을 위한 테스트 샘플의 개념도를 보여주고 있다. 테스트 샘플의 감지 부분은 스테이지에 장착할 센서와 정확히 일치를 시켰으며, 미세 변위를 주기 위해서 comb-drive actuator 형태의 운동부를 두었다. 운동부에서는 DC 및 AC 전압을 인가함으로써 미세 변위를 얻을 수 있었으며, 사용된 DC 전압은 20V였으며, 1.4kHz의 AC 전압을 크기를 변화시키며 인가하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.108-108
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• 2003

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.102-102
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• 2003

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.255-256
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.545-546
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• 2009

• Journal of the Korean Society for Precision Engineering
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• v.25 no.6
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• pp.20-25
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• 2008

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.7 no.1
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• pp.32-37
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• 2008

This paper presents a new precision stage by using the PZT actuator and stepping motor. The stage have the precision positioning mechanism that has been developed for generation displacements with nanometer accuracy and a millimeter dynamic range simulatneously. The stage is composed not of the mechanical elastic hinge but of the clamp, and only one PZT actuator. The displacement of stage is acquired by the control of the two clamp between the PZT actuator. The results of the FEM analysis in the contact part of the clamp and basic properties of the positioning system are also presented. Using the new stage proposed in this paper.