Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)

2006.10a
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Pages.483-484
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2006
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2005-8446(pISSN)

Korean Society for Precision Engineering (한국정밀공학회)

권호 표지

Performance Evaluation of High Vacuum Compatible Dual Servo Stage

진공용 듀얼 서보 스테이지의 제어 및 성능 평가

Hong, W.P. (Korea Institute of Industrial Technology) ;
Kang, E.G. (Korea Institute of Industrial Technology) ;
Lee, S.W. (Korea Institute of Industrial Technology) ;
Choi, H.Z. (Korea Institute of Industrial Technology) ;
Lee, D.Y. (Korea Institute of Industrial Technology)

홍원표 (한국생산기술연구원) ;
강은구 (한국생산기술연구원) ;
이석우 (한국생산기술연구원) ;
최헌종 (한국생산기술연구원) ;
이동윤 (한국생산기술연구원)

Published : 2006.10.18

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